A substrate cleaning device for coating

By introducing an automated linear module and vibrating plate design into the substrate cleaning equipment, the problem of frequent manual transfer of the substrate storage basket in the substrate immersion cleaning equipment is solved. This achieves automated switching of the substrate basket and automatic removal of the cleaning solution, reducing labor intensity and improving cleaning efficiency.

CN224423676UActive Publication Date: 2026-06-30SUZHOU PASKA MICRO-NANO TECHNOLOGY CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SUZHOU PASKA MICRO-NANO TECHNOLOGY CO LTD
Filing Date
2025-08-01
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

Existing substrate immersion and cleaning equipment requires frequent manual operation of the substrate basket transfer, which is labor-intensive.

Method used

The first and second linear modules drive the electric push rod to achieve automatic switching of the substrate basket between the soaking tank and the cleaning tank. Combined with the design of the vibrating plate and the return water pipe, the residual cleaning solution is automatically removed.

Benefits of technology

It enables automatic switching of the substrate basket between the soaking tank and the cleaning tank, reducing manual operation, lowering labor intensity, and improving cleaning efficiency.

✦ Generated by Eureka AI based on patent content.

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  • Figure CN224423676U_ABST
    Figure CN224423676U_ABST
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Abstract

This utility model provides a substrate cleaning device for coating, relating to the field of substrate cleaning technology. It includes a mounting frame, two cleaning tanks and two immersion tanks mounted on the mounting frame, and a substrate basket for placing the substrate. A first linear module spanning the two cleaning tanks and two immersion tanks is fixedly mounted on the upper surface of the mounting frame. The first linear module is inverted, and an inverted second linear module is fixedly mounted on its sliding base. By setting the first and second linear modules, the first linear module drives the second linear module to reach above either the cleaning tank or the immersion tank, enabling synchronous movement of an electric push rod. The second linear module drives the electric push rod to move, allowing it to reach any position above either the cleaning tank or the immersion tank. Furthermore, by using a plug that engages with a protrusion on a rotating frame, the substrate basket automatically switches positions between the immersion tank and the cleaning tank.
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Description

Technical Field

[0001] This utility model relates to the field of substrate cleaning technology, and in particular to a substrate cleaning device for coating. Background Technology

[0002] Cleaning the substrate before coating is a crucial step to ensure its surface is clean and free of impurities, thereby guaranteeing the quality and performance of the coating. A current technology, a substrate immersion and cleaning integrated machine (publication number CN220382053U), has two immersion tanks and two cleaning pools on its worktable. The immersion tanks are located in the middle, and the cleaning pools are arranged on either side. Each immersion tank has four compartments for placing substrate storage baskets, which are then inserted into the baskets. The storage baskets can be placed in both the immersion tanks and the cleaning pools.

[0003] However, the transfer of the substrate storage basket in the integrated substrate immersion and cleaning machine requires manual operation. This manual operation requires staff to frequently transfer the storage basket from the immersion tank to the cleaning tank and then from the cleaning tank back to the immersion tank, repeating the operation multiple times, which is labor-intensive. Utility Model Content

[0004] The purpose of this invention is to solve the problems existing in the prior art by proposing a substrate cleaning device for coating.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a substrate cleaning device for coating, comprising a mounting frame, two cleaning tanks and two soaking tanks disposed on the mounting frame, and a substrate basket for placing the substrate. A first linear module spanning the two cleaning tanks and two soaking tanks is fixedly mounted on the upper surface of the mounting frame. The first linear module is inverted, and an inverted second linear module is fixedly mounted on the sliding part of the first linear module. The second linear module is perpendicular to the first linear module, and an electric push rod is fixedly mounted on the sliding part of the second linear module. The telescopic end of the electric push rod faces downward and is fixedly mounted with an insert block. A rotating frame is provided at the opening of the substrate basket. The center of the upper surface of the rotating frame protrudes upward and is inserted into the inner wall of the insert block. Inserts for inserting into the protrusion of the rotating frame are inserted on both sides of the insert block.

[0006] Preferably, the inserts are horizontally arranged, and each of the two inserts is provided with an electric telescopic rod between the opposite side of the insert block and the outer side of the insert block.

[0007] Preferably, one end of the rotating frame is rotatably connected to the substrate basket opening, and the other end of the rotating frame is bolted to the substrate basket opening.

[0008] Preferably, several pairs of protrusions are fixedly installed on both sides of the opening of the cleaning pool and the soaking pool, and insert frames that are inserted into the protrusions are fixedly installed on both sides of the opening of the substrate basket.

[0009] Preferably, the insert is U-shaped, and a pressure strip flush with the opening of the substrate basket is fixedly installed on the rotating frame.

[0010] Preferably, a track is fixedly installed on the top edge of the outer side of the first linear module, and a reinforcing rib is inserted into the track. The two ends of the reinforcing rib are respectively fixedly connected to the two ends of the second linear module.

[0011] Preferably, the mounting frame is fixedly installed with a receiving plate on one side of each of the two cleaning pools, and a vibrating plate is provided inside the receiving plate.

[0012] Preferably, the four sides of the vibrating plate are fitted with the inner wall of the receiving plate with a clearance, and a return water pipe communicating with the adjacent cleaning pool is fixedly installed through the bottom surface of the receiving plate.

[0013] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0014] 1. In this utility model, by setting a first linear module and a second linear module, the first linear module drives the second linear module to reach above any cleaning tank or soaking tank, thereby realizing the synchronous movement of the electric push rod. By using the second linear module to drive the electric push rod to move, the electric push rod can reach any position above the cleaning tank or soaking tank. Furthermore, by utilizing the condition of the insertion block and the protrusion on the rotating frame, the position of the substrate basket can be automatically switched between the soaking tank and the cleaning tank.

[0015] 2. In this utility model, by setting up a receiving plate and a vibrating plate, the substrate basket after cleaning is placed on the vibrating plate in the receiving plate. The vibration of the vibrating plate drives the substrate basket to vibrate, so that the residual cleaning liquid on the surface of the substrate basket and the internal substrate falls off and automatically flows into the cleaning tank through the return water pipe. Attached Figure Description

[0016] Figure 1 This utility model provides a three-dimensional structural diagram of a substrate cleaning device for coating.

[0017] Figure 2 This utility model proposes a substrate cleaning device for coating. Figure 1 A schematic diagram of the structure viewed from below;

[0018] Figure 3 This utility model provides a structural schematic diagram of a rotating frame for a substrate cleaning device for coating.

[0019] Figure 4 for Figure 3 A cross-sectional structural diagram.

[0020] Legend: 1. Mounting frame; 2. Cleaning tank; 3. Soaking tank; 4. Protrusion; 5. Receiving plate; 6. Vibrating plate; 7. First linear module; 8. Track; 9. Second linear module; 10. Reinforcing rib; 11. Substrate basket; 12. Return water pipe; 13. Rotating frame; 14. Electric push rod; 15. Insert block; 16. Insert frame; 17. Electric telescopic rod; 18. Insert strip; 19. Pressure strip. Detailed Implementation

[0021] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0022] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0023] like Figures 1-4 As shown, a substrate cleaning device for coating includes a mounting frame 1, two cleaning tanks 2 and two immersion tanks 3 mounted on the mounting frame 1, and a substrate basket 11 for placing the substrate. A first linear module 7 spanning the two cleaning tanks 2 and the two immersion tanks 3 is fixedly mounted on the upper surface of the mounting frame 1. The first linear module 7 is inverted, and an inverted second linear module 9 is fixedly mounted on the sliding part of the first linear module 7. The second linear module 9 is perpendicular to the first linear module 7, and an electric push rod 14 is fixedly mounted on the sliding part of the second linear module 9. In actual use, the first linear module 7 drives the second linear module 9 to reach above any cleaning tank 2 or immersion tank 3, thereby realizing the synchronous movement of the electric push rod 14. The second linear module 9 drives the electric push rod 14 to move, thereby realizing the electric push rod 14 to any position above the cleaning tank or immersion tank 3. The first linear module 7 and the second linear module 9 used in this solution are both common electric linear module products on the market.

[0024] The electric push rod 14 has its telescopic end facing downwards and is fixedly mounted with an insert block 15. The insert block 15 is U-shaped. A rotating frame 13 is provided at the opening of the substrate basket 11. One end of the rotating frame 13 is rotatably connected to the opening of the substrate basket 11, and the other end of the rotating frame 13 is bolted to the opening of the substrate basket 11, allowing personnel to easily remove the bolts and rotate the rotating frame 13 to open the opening of the substrate basket 11, facilitating the placement or removal of the substrate. The center of the upper surface of the rotating frame 13 protrudes upwards and is inserted into the inner wall of the insert block 15. A pressure strip 19, flush with the opening of the substrate basket 11, is fixedly mounted on the rotating frame 13. Inserts on both sides of the insert block 15 are for insertion into the protrusion of the rotating frame 13. Insert 18 is horizontally arranged, and each of the two insert 18 has an electric telescopic rod 17 between its facing side and the outer side of the insert block 15. When the insert block 15 is inserted into the protrusion on the rotating frame 13, the electric telescopic rod 17 extends and retracts to allow the insert 18 to enter and exit the protrusion on the rotating frame 13. Since the insert 18 is rectangular, when the insert 18 is inserted into the protrusion on the rotating frame 13, the substrate basket 11 can move with the movement of the electric push rod 14 and rise and fall with the extension and retraction of the electric push rod 14. When the insert 18 is separated from the protrusion on the rotating frame 13, the electric push rod 14 can drive the insert block 15 to move independently, which facilitates the handling and transfer of other substrate baskets 11.

[0025] Several pairs of protrusions 4 are fixedly installed on both sides of the opening of the cleaning tank 2 and the soaking tank 3. The substrate basket 11 has a frame 16 that is inserted into the protrusions 4 fixedly installed on both sides of the opening. When the substrate basket 11 is located in the cleaning tank 2 or the soaking tank 3, the relative position of the substrate basket 11 and the cleaning tank 2 or the soaking tank 3 can be fixed by inserting the frame 16 into the protrusions 4.

[0026] A track 8 is fixedly installed on the top edge of the outer side of the first linear module 7. A reinforcing rib 10 is inserted into the track 8. The two ends of the reinforcing rib 10 are fixedly connected to the two ends of the second linear module 9, respectively. The position of the reinforcing rib 10 is fixed by the track 8, and the position of the two ends of the second linear module 9 is fixed by the reinforcing rib 10.

[0027] The mounting bracket 1 has a receiving plate 5 fixedly installed on one side of each of the two cleaning tanks 2. A vibrating plate 6 is installed inside the receiving plate 5, with its sides fitting snugly against the inner wall of the receiving plate 5. A return water pipe 12, connecting to the adjacent cleaning tank 2, is fixedly installed through the bottom surface of the receiving plate 5. The receiving plate 5 is used to hold an empty substrate basket 11 or to place a cleaned substrate basket 11 onto the vibrating plate 6 inside the receiving plate 5. The bottom surface of the vibrating plate 6 vibrates using a spring and a vibration motor. When the substrate basket 11 is placed on the vibrating plate 6, the vibration causes residual cleaning fluid on the surface and internal substrate of the substrate basket 11 to fall off and automatically flow into the cleaning tank 2 through the return water pipe 12. Figure 1 As shown, one end of the second linear module 9 extends above the receiving plate 5.

[0028] The method of using this utility model is as follows: Pull out the bolts and rotate the rotating frame 13 to open the substrate basket 11, making it convenient for personnel to put the substrate into the substrate basket 11. Then, reset the rotating frame 13 and fix it with bolts. Place the substrate basket 11 on the vibrating plate 6 of the receiving plate 5. Use the first linear module 7 to drive the second linear module 9 to move above the substrate basket 11. Then, use the second linear module 9 to drive the electric push rod 14 to move directly above the substrate basket 11. Use the electric push rod 14 to extend so that the insert 15 can be inserted into the protrusion on the rotating frame 13. Use the electric telescopic rod 17 to drive the insert strip 18 to be inserted into the protrusion on the rotating frame 13. The substrate basket 11 can be raised as the electric push rod 14 retracts. Then, with the cooperation of the second linear module 9 and the first linear module 7, the position of the substrate basket 11 is adjusted to achieve automatic position switching between the soaking tank 3 and the cleaning tank 2.

[0029] The wiring diagrams of the first linear module 7, the second linear module 9, the electric push rod 14, and the electric telescopic rod 17 in this utility model are common knowledge in the field, and their working principles are known technologies. The appropriate model is selected according to actual use. Therefore, the control methods and wiring arrangements of the first linear module 7, the second linear module 9, the electric push rod 14, and the electric telescopic rod 17 will not be explained in detail.

[0030] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A substrate cleaning apparatus for coating, comprising a mounting frame (1), two cleaning tanks (2) and two immersion tanks (3) disposed on the mounting frame (1), and a substrate basket (11) for placing the substrate, characterized in that: The mounting frame (1) is fixedly mounted with a first linear module (7) spanning two cleaning pools (2) and two soaking pools (3). The first linear module (7) is upside down and the slide portion of the first linear module (7) is fixedly mounted with an upside-down second linear module (9). The second linear module (9) is set perpendicular to the first linear module (7) and the slide portion of the second linear module (9) is fixedly mounted with an electric push rod (14). The telescopic end of the electric push rod (14) faces downward and is fixedly mounted with an insert (15). The substrate basket (11) is provided with a rotating frame (13) at its basket opening. The center of the upper surface of the rotating frame (13) protrudes upward and is inserted into the inner wall of the insert (15). Insert strips (18) for inserting into the protrusion of the rotating frame (13) are inserted on both sides of the insert (15).

2. The substrate cleaning apparatus for plating according to claim 1, wherein: The insert (18) is set horizontally, and an electric telescopic rod (17) is provided between the two inserts (18) facing each other and the outside of the insert block (15).

3. The substrate cleaning apparatus for plating according to claim 1, wherein: One end of the rotating frame (13) is rotatably connected to the opening of the substrate basket (11), and the other end of the rotating frame (13) is connected to the opening of the substrate basket (11) by bolts.

4. The substrate cleaning apparatus for plating according to claim 1, wherein: Several pairs of protrusions (4) are fixedly installed on both sides of the opening of the cleaning pool (2) and the soaking pool (3), and the substrate basket (11) is fixedly installed on both sides of the opening of the basket with insert frames (16) that are inserted into the protrusions (4).

5. The substrate cleaning apparatus for plating according to claim 1, wherein: The insert (15) is U-shaped, and a pressure strip (19) flush with the opening of the substrate basket (11) is fixedly installed on the rotating frame (13).

6. The substrate cleaning apparatus for plating according to claim 1, wherein: A track (8) is fixedly installed on the top edge of the outer side of the first linear module (7), and a reinforcing rib (10) is inserted on the track (8). The two ends of the reinforcing rib (10) are fixedly connected to the two ends of the second linear module (9).

7. The substrate cleaning equipment for coating according to claim 1, characterized in that: The mounting bracket (1) is fixedly installed with a receiving plate (5) on one side of each of the two cleaning pools (2), and a vibrating plate (6) is provided inside the receiving plate (5).

8. The substrate cleaning apparatus for plating according to claim 7, wherein: The vibrating plate (6) has a clearance fit with the inner wall of the receiving plate (5), and the bottom surface of the receiving plate (5) is fixedly installed with a return water pipe (12) that communicates with the adjacent cleaning pool (2).