An integrated gantry structure for a dicing machine

Abstract

This utility model relates to the field of dicing machine technology and discloses an integrated gantry frame structure for a dicing machine. The structure includes an integrated gantry frame, with multiple upper guide rails fixedly connected to one side and multiple lower guide rails fixedly connected to the bottom of the inner wall of the integrated gantry frame. Multiple upper sliders are slidably connected to the outer wall of each upper guide rail, and a slide saddle is fixedly connected to one side of each upper slider. Multiple lower sliders are slidably connected to the outer wall of each lower guide rail, and a worktable is fixedly connected to the top of each lower slider. Multiple slide rails are fixedly connected to one side of each slide saddle, and multiple drive sliders are slidably connected to the outer wall of each slide rail. In this utility model, the base, columns, and beams of the integrated gantry frame are integrally formed using a casting or additive manufacturing process, and the bottom of the integrated gantry frame adopts a three-point foot support structure, thereby achieving a stable integrated gantry frame.

Description

Technical Field

[0001] This utility model relates to the field of dicing machines, and in particular to an integrated gantry structure for dicing machines. Background Technology

[0002] In fields such as semiconductor manufacturing and precision optical component processing, dicing machines are core equipment for achieving high-precision cutting of hard and brittle materials such as wafers and glass substrates. The performance of their gantry structure directly affects processing quality and production efficiency. As a key load-bearing component of the dicing machine, the gantry not only needs to provide a stable mounting platform for the cutting spindle and transmission system, but also needs to ensure the accuracy of the cutting trajectory and the stability of moving parts under high-speed motion and dynamic load conditions. Therefore, the rationality and reliability of its structural design are of paramount importance.

[0003] Currently, most gantry frames for dicing machines on the market adopt a modular structure. This structure typically consists of independently machined bases, left and right columns, and crossbeams, with each component assembled using high-strength bolts or flanges. Its technical principle is based on a modular design concept, breaking down the complex, large structure into multiple easily manufactured modular units, achieving overall functionality through mechanical connections. During manufacturing, each modular component can be completed using traditional processes such as casting and machining, and then assembled using assembly processes to meet the basic functional requirements of the equipment.

[0004] However, this modular structure has significant drawbacks. Because the interfaces between the individual components are difficult to make absolutely rigid, the minute gaps and stress concentrations at the joints under the dynamic loads generated by high-speed cutting lead to insufficient overall structural rigidity. When the dicing machine performs high-frequency reciprocating motion or high-speed cutting, the modular structure is prone to deformation and vibration, which not only reduces its vibration resistance during cutting but also causes deviations in the straightness and flatness of the guide rails, ultimately affecting cutting accuracy. This makes it unable to meet the stringent requirements of semiconductor manufacturing and other fields for micron-level or even nanometer-level machining precision. Therefore, an integrated gantry structure for the dicing machine is proposed to address these issues. Utility Model Content

[0005] To overcome the above shortcomings, this utility model provides an integrated gantry structure for a dicing machine, which aims to improve the problems of poor structural rigidity, dynamic stability, assembly and maintenance, and poor space utilization of traditional equipment.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An integrated gantry structure for a dicing machine includes an integrated gantry frame. Multiple upper guide rails are fixedly connected to one side of the integrated gantry frame, and multiple lower guide rails are fixedly connected to the bottom of the inner wall of the integrated gantry frame. Multiple upper sliders are slidably connected to the outer wall of each upper guide rail. A slide saddle is fixedly connected to one side of each upper slider. Multiple lower sliders are slidably connected to the outer wall of each lower guide rail. A worktable is fixedly connected to the top of each lower slider. Multiple slide rails are fixedly connected to one side of each slide rail. Multiple drive sliders are slidably connected to the outer wall of each drive slider. A slide block is fixedly connected to one side of each drive slider. A buffer assembly is provided on the outer wall of each lower slider, upper slider, and drive slider.

[0008] As a further description of the above technical solution:

[0009] Each of the buffer components includes multiple rubber pads, which are respectively fixedly connected to both sides of the lower slider, the upper slider, and the drive slider.

[0010] As a further description of the above technical solution:

[0011] A transmission plate is fixedly connected to one side of each of the rubber pads, and a sliding plate is fixedly connected to one side of each of the transmission plates.

[0012] As a further description of the above technical solution:

[0013] Each of the slide plates has a connecting shell slidably connected to its outer wall, and multiple connecting shells are slidably connected to the outer walls of the lower slide, upper slide, and drive slide, respectively.

[0014] As a further description of the above technical solution:

[0015] Each of the connecting shells is equipped with multiple springs inside, with one end of the spring fixedly connected to one side of the inner wall of the connecting shell and the other end of the spring fixedly connected to the outer wall of the slide plate.

[0016] As a further description of the above technical solution:

[0017] Each of the skateboards has multiple limiting plates fixedly connected to its outer wall, and these limiting plates are slidably connected to the inner wall of the connecting shell.

[0018] As a further description of the above technical solution:

[0019] The integrated gantry frame has an area on one side that is larger than the area on the other side, and the integrated gantry frame is provided with cross diagonal bracing.

[0020] This utility model has the following beneficial effects:

[0021] 1. In this utility model, the base, columns and beams of the outer wall of the integrated gantry frame are integrally formed by integral casting or additive manufacturing process, and the bottom of the integrated gantry frame adopts a three-point foot support structure, thereby achieving the effect of stability of the integrated gantry frame. Compared with traditional equipment, it has been greatly enhanced in terms of structural rigidity, dynamic stability, assembly and maintenance and space utilization.

[0022] 2. In this utility model, the softness of the rubber pad and the elasticity of the spring are used to reduce the inertial impact force when the lower slider, upper slider and drive slider stop. This solves the problem that the sliding parts will continue to move a certain distance due to inertia when they stop, which affects the positioning accuracy and enhances the accuracy of the movement of the equipment parts. Attached Figure Description

[0023] Figure 1 This is a three-dimensional schematic diagram of an integrated gantry structure for a dicing machine proposed in this utility model;

[0024] Figure 2 This is a schematic diagram of the workbench structure of an integrated gantry frame structure for a dicing machine proposed in this utility model;

[0025] Figure 3 This is a schematic diagram of the sliding ram structure of an integrated gantry frame structure for a dicing machine proposed in this utility model;

[0026] Figure 4 This is a schematic diagram of the upper slider structure of an integrated gantry structure for a dicing machine proposed in this utility model;

[0027] Figure 5 This is a schematic diagram of the lower slider structure of an integrated gantry structure for a dicing machine proposed in this utility model;

[0028] Figure 6 This is a schematic diagram of the spring structure of an integrated gantry frame structure for a dicing machine proposed in this utility model.

[0029] Legend:

[0030] 1. Integrated gantry frame; 2. Lower guide rail; 3. Upper guide rail; 4. Lower slider; 5. Worktable; 6. Upper slider; 7. Saddle; 8. Slide rail; 9. Drive slider; 10. Slide block; 11. Connecting shell; 12. Rubber pad; 13. Transmission plate; 14. Slide plate; 15. Spring; 16. Limit plate. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] Reference Figures 1-5 This utility model provides an embodiment of an integrated gantry structure for a dicing machine, comprising an integrated gantry frame 1. Multiple upper guide rails 3 are fixedly connected to one side of the integrated gantry frame 1, providing sliding tracks for the upper sliders 6 to ensure smooth movement. Multiple lower guide rails 2 are fixedly connected to the bottom of the inner wall of the integrated gantry frame 1, guiding the linear movement of the lower sliders 4 to ensure the moving accuracy of the worktable 5. Multiple upper sliders 6 are slidably connected to the outer wall of each upper guide rail 3, connecting to a saddle 7 and transmitting driving force for stable support. A saddle 7 is fixedly connected to one side of each upper slider 6, mounting a slide rail 8 and providing structural rigidity. Multiple lower guide rails 2 are slidably connected to the outer wall of each lower guide rail 2. The sliding connection has multiple lower sliders 4, which support the worktable 5 and bear the working load. The worktable 5 is fixedly connected to the top of the multiple lower sliders 4. The worktable 5 is used to carry the workpiece and achieve precise positioning. Multiple slide rails 8 are fixedly connected to one side of the slide saddle 7. The slide rails 8 are used to guide the linear movement of the drive slider 9. Multiple drive sliders 9 are slidably connected to the outer wall of each slide rail 8. The drive sliders 9 are used to connect to the slide block 10 and transmit motion. The slide block 10 is fixedly connected to one side of the multiple drive sliders 9. The slide block 10 is used to install the machining tool and complete the final positioning. Each lower slider 4, upper slider 6 and drive slider 9 has a buffer assembly on its outer wall. The buffer assembly is used to absorb the impact energy when the movement stops.

[0033] Reference Figures 3-6Each buffer assembly includes multiple rubber pads 12, which are used to initially absorb the inertial impact of moving parts. The multiple rubber pads 12 are fixedly connected to both sides of the lower slider 4, upper slider 6, and drive slider 9, respectively. A transmission plate 13 is fixedly connected to one side of each rubber pad 12, which is used to transmit the impact force to the slide plate 14. A slide plate 14 is fixedly connected to one side of each transmission plate 13, which is used to compress the spring 15 for secondary buffering. A connecting shell 11 is slidably connected to the outer wall of each slide plate 14, which is used to accommodate the spring 15 and limit the range of motion of the slide plate 14. Multiple connecting shells 11 are slidably connected to each other. The connecting shell 11 is connected to the outer wall of the lower slider 4, the upper slider 6 and the driving slider 9. Each connecting shell 11 is equipped with multiple springs 15. The springs 15 are used to further absorb and dissipate impact energy. One end of the spring 15 is fixedly connected to one side of the inner wall of the connecting shell 11, and the other end of the spring 15 is fixedly connected to the outer wall of the slide plate 14. Each slide plate 14 is fixedly connected to multiple limiting plates 16. The limiting plates 16 are used to prevent the slide plate 14 from detaching from the connecting shell 11. The multiple limiting plates 16 are slidably connected to the inner wall of the connecting shell 11. The area of ​​one side of the integrated gantry frame 1 is larger than the area of ​​the other side. The integrated gantry frame 1 is equipped with cross diagonal bracing.

[0034] Working principle: During equipment use, the integrated gantry frame 1 serves as the overall support foundation. With its integrated molding through casting or additive manufacturing and the structural advantage of three-point foot support at the bottom, it ensures a stable and rigid environment for equipment operation. The lower guide rail 2 and the upper guide rail 3 provide sliding guides for the lower slider 4 and the upper slider 6, respectively. The lower slider 4 drives the worktable 5 to move along the lower guide rail 2, thereby adjusting the position of the workpiece bearing platform. The upper slider 6 drives the saddle 7 to slide along the upper guide rail 3, providing basic moving support for the movement of the slide block 10. The slide rail 8 on the saddle 7 guides the slider 9 to slide, thereby driving the slide block 10 to achieve displacement in the corresponding direction to meet the position requirements of the dicing operation.

[0035] When the lower slider 4, upper slider 6, or drive slider 9 stops moving, the rubber pad 12's softness initially buffers the inertial impact. Then, the transmission plate 13 transmits the force to the slide plate 14. The slide plate 14 slides within the connecting shell 11 and compresses the spring 15. The spring 15 further absorbs the inertial force due to its elasticity. At the same time, the limiting plate 16 restricts the sliding stroke of the slide plate 14 to prevent it from detaching from the connecting shell 11. Through the cooperation of the rubber pad 12 and the spring 15, the inertial impact when the slider stops is effectively reduced, ensuring accurate component positioning and guaranteeing the precision of the dicing operation.

[0036] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A gantry structure for a dicing machine, comprising an integrated gantry frame (1), characterized in that: The integrated gantry frame (1) is fixedly connected to one side with multiple upper guide rails (3), and the bottom of the inner wall of the integrated gantry frame (1) is fixedly connected to multiple lower guide rails (2). Each upper guide rail (3) is slidably connected to the outer wall with multiple upper sliders (6). Each upper slider (6) is fixedly connected to one side with a slide saddle (7). Each lower guide rail (2) is slidably connected to the outer wall with multiple lower sliders (4). Each lower slider (4) is fixedly connected to the top with a worktable (5). Each slide saddle (7) is fixedly connected to one side with multiple slide rails (8). Each slide rail (8) is slidably connected to the outer wall with multiple drive sliders (9). Each drive slider (9) is fixedly connected to one side with a slide block (10). Each lower slider (4), upper slider (6), and drive slider (9) is provided with a buffer assembly on its outer wall.

2. The integrated gantry structure of a dicing machine according to claim 1, characterized in that: Each of the buffer components includes multiple rubber pads (12), which are fixedly connected to both sides of the lower slider (4), upper slider (6) and drive slider (9).

3. The integrated gantry structure for a dicing machine according to claim 2, characterized in that: A transmission plate (13) is fixedly connected to one side of each of the rubber pads (12), and a sliding plate (14) is fixedly connected to one side of each of the transmission plates (13).

4. The integrated gantry structure for a dicing machine according to claim 3, characterized in that: Each of the slide plates (14) has a connecting shell (11) slidably connected to its outer wall, and the multiple connecting shells (11) are slidably connected to the outer walls of the lower slide plate (4), the upper slide plate (6) and the drive slide plate (9).

5. The integrated gantry structure of a dicing machine according to claim 4, characterized in that: Each of the connecting shells (11) is provided with a plurality of springs (15), one end of which is fixedly connected to one side of the inner wall of the connecting shell (11), and the other end of which is fixedly connected to the outer wall of the slide plate (14).

6. The integrated gantry structure of a dicing machine according to claim 5, characterized in that: Each of the slide plates (14) has multiple limiting plates (16) fixedly connected to its outer wall, and the multiple limiting plates (16) are slidably connected to the inner wall of the connecting shell (11).

7. The integrated gantry structure for a dicing machine according to claim 1, characterized in that: The integrated gantry frame (1) has an area on one side that is larger than the area on the other side, and the integrated gantry frame (1) is provided with cross diagonal bracing.

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