A photomask transport box and a photomask transport system

Abstract

This utility model discloses a photomask transport box and a photomask transport system. The photomask transport box includes: an outer box with shock absorption function, which is detachable and has a recycling station and a transport station; and an inner box for transporting the photomask. The photomask transport system includes the photomask transport box. By improving the structure of the outer box, the photomask transport box becomes detachable. After the photomask is transported, the outer box can be disassembled and moved to a smaller recycling station. The smaller space occupied by the outer box helps to reduce recycling costs and minimizes the economic burden of photomask transportation while ensuring successful transport.

Description

Technical Field

[0001] This utility model relates to the field of transport box technology, specifically to a mask plate transport box and a mask plate transport system. Background Technology

[0002] A photomask consists of a substrate, a light-shielding layer, a protective film, and other auxiliary structures. These components work together to ensure the photomask accurately transfers pattern information onto the silicon wafer or FPD (Flat Panel Display) panel during photolithography, meeting the high-precision requirements of microelectronics manufacturing. The photomask substrate uses 3-17mm thick quartz glass. The light-shielding layer is a chromium film plated on the surface of the quartz glass. The finished photomask requires exposure, development, etching, and cleaning processes on the chromium film to create micron-level patterns. Before being shipped to downstream customers, a high-transmittance dustproof film with a thickness of only 1µm is applied. This completes the photomask that downstream customers can use directly.

[0003] Because they are ultra-precise molds, and made of glass with an ultra-thin optical film, safely transporting finished photomasks to customers is a major challenge in the photomask industry. This is especially true for the largest photomasks currently in the industry, the G10 generation, which measures 1620x1780mm. Its raw material and processing costs alone are in the millions of RMB, but its quartz glass substrate and protective film are also more fragile. Therefore, safely transporting the G10 photomask to customers presents a significant challenge.

[0004] Currently, the common transportation method is to use a masked inner box + outer box + wooden frame + dedicated vehicle. Specifically:

[0005] The inner box serves to protect against dust and to secure the mask, preventing it from being contaminated or coming into contact with the graphic during transport.

[0006] The outer box serves to protect the inner box and reduce damage to the inner box caused by friction, impact, and other forces during transportation.

[0007] The purpose of the wooden frame is to protect the outer box and prevent damage to the outer box from forklifts and other equipment during loading and unloading.

[0008] The purpose of dedicated vehicles is to provide shock absorption and temperature-controlled transportation, further reducing the vibration generated during the transportation of photomasks and controlling the temperature and humidity around the photomasks. This prevents condensation from forming on the surface of the photomasks due to changes in external temperature and humidity (condensation occurs when water vapor condenses on the surface of the photomasks and the dustproof film when the temperature changes, affecting the light transmittance of the photomasks and causing the customer's products to be scrapped).

[0009] The advantages of this transportation method are: following the above transportation method, the photomask will hardly be damaged and can be safely transported to the client.

[0010] The disadvantage of this transportation method is the huge transportation cost. According to the G10 transportation cost, it is estimated that it will cost close to 50,000 to 90,000 RMB to safely deliver the mask to the client. Utility Model Content

[0011] The technical problem to be solved by this utility model is the huge transportation cost of existing photomasks. The purpose is to provide a photomask transport box and a photomask transport system to solve the above-mentioned problems.

[0012] This utility model is achieved through the following technical solution:

[0013] In a first aspect, this utility model provides a mask-type transport box, comprising:

[0014] The outer casing has shock absorption function and is designed to be detachable, with recycling and transportation stations.

[0015] And, the inner box used for transporting the photomask.

[0016] In one possible design, the outer casing includes a casing and an airbag. The casing has an inflation gap, and the airbag is located on the inner wall of the casing and inflated through the inflation gap so that the inflated airbag presses against the inner casing placed in the casing.

[0017] In one possible design, the enclosure includes an inner shell and an outer shell;

[0018] The inner shell is a closed shell, and the inner periphery of the inner shell is a transport area. The inner shell is covered by an outer shell, and an air gap is left between the inner shell and the outer shell.

[0019] The outer casing is equipped with an air inlet and exhaust switch for inflation and deflation during the inflation gap;

[0020] The airbag is positioned on the inner shell and inflated through the inflation gap to inflate and extend into the transport area to abut against the inner box placed in the transport area.

[0021] In one possible design, the inner shell includes several first sub-plates that are detachably connected at their ends. When the several first sub-plates are connected end to end in sequence, the several first sub-plates form a closed transport area, and the inner box can be placed in the transport area accordingly.

[0022] In one possible design, the outer shell includes several second sub-plates that are detachably connected at their ends. When the several second sub-plates are connected end to end in sequence, the several second sub-plates form a closed groove, and the inner shell can be placed in the closed groove accordingly.

[0023] In one possible design, both the first and second sub-plates are constructed as L-shaped plates, with recessed grooves and fixing holes at the ends of the L-shaped plates;

[0024] When two adjacent sub-plates are connected, their ends face each other, and one end is inserted into the inner groove of the other so that the two fixing holes are coaxial and connected. The fixing holes are detachably equipped with fixing rods, and the two sub-plates are connected by fixing rods.

[0025] When two adjacent sub-boards are separated, the fixing rods are removed, and the ends of the two are separated and staggered so that the two sub-boards are stacked.

[0026] In one possible design, the fixing hole is constructed as a screw hole, and the fixing rod is made of a suitable screw.

[0027] In one possible design, the inner shell has a thickness of 3-5 mm, and the outer shell has a thickness of 3-5 mm.

[0028] In one possible design, the outer casing contains a temperature and humidity sensor for recording changes in the temperature and humidity of the inner casing, and a vibration sensor for recording the vibration frequency.

[0029] Secondly, this utility model provides a mask transport system, including the aforementioned mask transport box.

[0030] Compared with the prior art, this utility model has the following advantages and beneficial effects:

[0031] The mask transport box has been improved in structure, making the outer box detachable. After the mask is transported, the outer box can be disassembled and moved to a smaller recycling station. The smaller space occupied by the outer box helps to reduce recycling costs and minimizes the economic burden of mask transportation while ensuring successful transportation. Attached Figure Description

[0032] The accompanying drawings, which are included to provide a further understanding of the embodiments of the present invention and form part of this application, do not constitute a limitation thereof. In the drawings:

[0033] Figure 1 This is a schematic diagram of the structure of a mask plate transport box.

[0034] Figure 2 for Figure 1 A schematic diagram of the structure after the inner box has been removed.

[0035] Figure 3 for Figure 2 A partially enlarged structural diagram.

[0036] Figure 4 This is a structural diagram of the outer casing located at the recycling station.

[0037] The attached diagram shows the markings and corresponding component names:

[0038] 100. Outer casing; 200. Inner casing; 1. Casing body; 2. Airbag; 3. Inflation gap; 4. Inner shell; 5. Outer shell; 6. Intake and exhaust switch; 7. First sub-board; 8. Second sub-board; 9. Fixing hole; 10. Fixing rod. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.

[0040] Example:

[0041] like Figures 1-4 As shown, in a first aspect, this utility model provides a mask-mounted transport box, comprising:

[0042] The outer casing 100 has shock absorption function and is detachable, with a recycling station and a transportation station;

[0043] And, the inner box 200 used for transporting the mask.

[0044] The mask transport box improves the structure of the outer box 100, making the outer box 100 detachable. After the mask is transported, the outer box 100 can be disassembled and switched to a smaller recycling station. The outer box 100 occupies less space, which helps to reduce recycling costs and minimizes the economic burden of mask transportation while ensuring successful transportation.

[0045] Meanwhile, the outer casing 100 has a shock absorption function, reducing external vibrations transmitted to the inner casing 200, better protecting the photomask and preventing damage to the photomask.

[0046] In addition, the inner box 200 can be any suitable existing model, with a wide range of choices to meet transportation needs.

[0047] During operation, workers assemble the outer box 100, placing it in a larger transport station. The inner box 200, containing a masked plate, is then placed inside the outer box 100. The outer box 100 is then placed into a transport system consisting of a wooden frame and a dedicated vehicle for transport. After transport, workers disassemble the outer box 100, placing it in a smaller recycling station. This allows for the transport of more outer boxes 100 using the same vehicle, resulting in lower recycling costs.

[0048] In one possible implementation, the outer box 100 includes a box body 1 and an airbag 2. The box body 1 is provided with an inflation gap 3. The airbag 2 is disposed on the inner wall of the box body 1 and inflated through the inflation gap 3 so that the inflated airbag 2 abuts against the inner box 200 placed in the box body 1.

[0049] Based on the above design, the airbag 2 can not only enable the outer box 100 to have a shock absorption function, but also control the expansion degree of the airbag 2 by controlling the inflation amount, so as to control the size of the internal space of the box 1. This allows the box 1 to be used for different models of inner boxes 200, and the outer box 100 to have more usage scenarios and fewer individually customized specifications, which helps to reduce economic costs.

[0050] It is worth noting that multiple airbags 2 are provided and arranged around the housing 1. When the multiple airbags 2 inflate, the airbags 2 can press against and fix the inner housing 200, so that the inner housing 200 is "suspended" in the outer housing 100, avoiding direct contact between the inner housing 200 and the outer housing 100, which helps to improve the shock absorption effect and minimize the vibration of the inner housing 200 and the mask plate.

[0051] Correspondingly, the housing 1 also serves to protect the airbag 2, preventing it from being punctured by foreign objects and ensuring its service life and shock absorption effect. In addition, the inflation gap 3 is used for both inflating and deflating the airbag 2 and also helps to reduce vibration.

[0052] Optionally, the housing 1 includes an inner shell 4 and an outer shell 5;

[0053] The inner shell 4 is a closed shell. Correspondingly, the inner periphery of the inner shell 4 is a transport area. The inner shell 4 is covered by an outer shell 5, and an inflation gap 3 is left between the inner shell 4 and the outer shell 5.

[0054] The outer casing 5 is equipped with an air inlet / outlet switch 6 for inflating and deflating the inflation gap 3;

[0055] The airbag 2 is disposed on the inner shell 4 and inflated through the inflation gap 3 so that the airbag 2 expands and extends into the transport area to abut against the inner box 200 placed in the transport area.

[0056] Based on the above design, the air inlet of the airbag 2 is connected to the inflation gap 3. When the inflation device inflates the inflation gap 3 through the air inlet / exhaust switch 6, the gas enters the airbag 2 through the air inlet, causing the airbag 2 to inflate and extend into the transport area. In other words, the airbag 2 is installed on the inner shell 4 so that the airbag 2 is connected to the inflation gap 3 and can be inflated and deflated.

[0057] However, considering that the outer casing 100 is detachable, at least one of the inner shell 4 and the outer shell 5 has a seam. If the inflation gap 3 is connected to the outside through the seam, the gas injected into the inflation gap 3 will leak through the seam, resulting in poor inflation of the airbag 2. To avoid the above situation, attention should be paid to the quality of the seam, or a detachable sealing structure should be installed at the seam, or the air intake and exhaust switch 6 should be connected to the airbag 2 through an air pipe to ignore the inflation gap 3.

[0058] It is worth noting that if the air intake and exhaust switch 6 is connected to the airbag 2 through an air pipe, the number of air pipes will be large when there are too many airbags 2, making the installation difficult. Therefore, it is preferable to use this method when there are fewer airbags 2.

[0059] In one possible implementation, the inner shell 4 includes several first sub-plates 7 whose ends are detachably connected. When the several first sub-plates 7 are connected end to end in sequence, the several first sub-plates 7 form a closed transport area, and the inner box 200 can be placed in the transport area accordingly.

[0060] In one possible implementation, the outer shell 5 includes several second sub-plates 8 whose ends are detachably connected. When the several second sub-plates 8 are connected end to end in sequence, the several second sub-plates 8 form a closed groove, and the inner shell 4 can be placed in the closed groove accordingly.

[0061] Based on the above design scheme, the inner shell 4 and the outer shell 5 have basically the same structure. Taking the inner shell 4 as an example, the detachability of the outer box 100 is explained. Two adjacent first sub-plates 7 are connected by any suitable detachable connection method. Multiple first sub-plates 7 can be connected to form the inner shell 4. Conversely, the connection between the first sub-plates 7 can be disassembled and released, so that the first sub-plates 7 can be stacked, piled up or placed in any other suitable way to reduce space occupation.

[0062] It is easy to understand that a detachable connection method is preferred, as it occupies less space, in order to optimize the shape of the outer casing 100 and save space. As for the inner shell 4 and the outer shell 5, they can be constructed into any suitable shape, but considering the optimization of transportation costs, the outer shell 5 is preferably constructed as a square box to improve the space utilization of the transport vehicle.

[0063] In addition, since the airbag 2 is located on the inner shell 4, that is, each first sub-plate 7 is provided with at least one airbag 2.

[0064] Optionally, such as Figure 2 and Figure 4 As shown, both the first sub-plate 7 and the second sub-plate 8 are constructed as L-shaped plates, and the ends of the L-shaped plates are provided with inner grooves and fixing holes 9.

[0065] When two adjacent sub-plates are connected, their ends face each other, and one end is inserted into the inner groove of the other so that the two fixing holes 9 are coaxial and connected. The fixing holes 9 are detachably provided with fixing rods 10, and the two sub-plates are connected by fixing rods 10.

[0066] When two adjacent sub-boards are separated, the fixing rod 10 is removed, and the ends of the two are separated and staggered so that the two sub-boards are stacked.

[0067] Based on the above design, when two adjacent sub-boards are connected, their ends face each other, which helps to increase the length and width of the outer box 100, ensuring that the volume of the outer box 100 is not less than that of the inner box 200, so as to accommodate the inner box 200. When the fixing rod 10 is connected to the sub-board, the fixing rod 10 is inserted into the fixing hole 9, realizing the hidden design of the fixing rod 10. The detachable connection scheme does not occupy additional space.

[0068] When two adjacent sub-boards are separated, the two sub-boards are stacked. See also... Figure 4 Multiple sub-plates are staggered and then joined together, with parts of each sub-plate inserted into adjacent sub-plates. These sub-plates form a box-shaped structure with the same shape as the outer box 100 but scaled down proportionally. Thus, when the outer box 100 is switched from the recycling station to the transportation station, the corresponding sub-plate can be pulled out, making the assembly and disassembly of the sub-plates more convenient and faster.

[0069] In one possible implementation, the fixing hole 9 is constructed as a threaded hole, and the fixing rod 10 is made of a suitable screw. Based on this, the sub-board is connected by a threaded connection. Threaded connections have advantages such as disassembly, good adaptability, dynamic load bearing capacity, convenient maintenance, and reusability. Furthermore, any suitable commercially available screw can be selected, or existing components such as screws or bolts can be used to replace them, so as to adapt to different usage requirements.

[0070] In one possible implementation, the inner shell 4 has a thickness of 3-5 mm, and the outer shell 5 has a thickness of 3-5 mm. Therefore, the specific thickness can be selected according to actual working requirements, and this invention does not impose any limitations on it.

[0071] In one possible implementation, the outer casing 100 is equipped with a temperature and humidity sensor for recording temperature and humidity changes in the inner casing 200, and a vibration sensor for recording vibration frequency. Based on this, during transportation, the sensors monitor the real-time condition of the mask, allowing staff to perform timely maintenance and ensuring successful transport.

[0072] Secondly, this utility model provides a mask transport system, including the aforementioned mask transport box. Based on this, the mask transport system can also include other suitable functional modules in addition to the mask transport box, resulting in richer functionality to meet different work requirements and improved practicality. Furthermore, it is readily understood that the functional modules can be selected from any suitable existing equipment, offering a wide range of choices.

[0073] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above description is only a specific embodiment of this utility model and is not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A mask-printed transport box, characterized in that, include: The outer casing (100) has shock absorption function and is based on a detachable design with a recycling station and a transportation station; And, an inner box (200) for transporting the mask.

2. The mask transport box according to claim 1, characterized in that, The outer box (100) includes a box body (1) and an airbag (2). The box body (1) is provided with an inflation gap (3). The airbag (2) is placed on the inner wall of the box body (1) and inflated through the inflation gap (3) so that the inflated airbag (2) abuts against the inner box (200) placed in the box body (1).

3. The mask plate transport box according to claim 2, characterized in that, The housing (1) includes an inner shell (4) and an outer shell (5); The inner shell (4) is a closed shell. Correspondingly, the inner periphery of the inner shell (4) is a transport area. The inner shell (4) is covered with an outer shell (5), and there is an air gap (3) between the inner shell (4) and the outer shell (5). The outer casing (5) is provided with an air inlet and outlet switch (6) for inflating and deflating the air gap (3); The airbag (2) is disposed on the inner shell (4) and inflated through the inflation gap (3) to inflate the airbag (2) and extend it to the transport area to abut against the inner box (200) placed in the transport area.

4. The mask transport box according to claim 3, characterized in that, The inner shell (4) includes several first sub-plates (7) that are detachably connected at their ends. When the several first sub-plates (7) are connected end to end in sequence, the several first sub-plates (7) form a closed transport area. Accordingly, the inner box (200) can be placed in the transport area.

5. The mask transport box according to claim 4, characterized in that, The outer shell (5) includes several second sub-plates (8) that are detachably connected at their ends. When the several second sub-plates (8) are connected end to end in sequence, the several second sub-plates (8) form a closed groove. Correspondingly, the inner shell (4) can be placed in the closed groove.

6. The mask transport box according to claim 5, characterized in that, Both the first sub-plate (7) and the second sub-plate (8) are constructed as L-shaped plates, with an inner groove and a fixing hole (9) at the end of the L-shaped plate. When two adjacent sub-plates are connected, their ends face each other, and one end is inserted into the inner groove of the other so that the two fixing holes (9) are coaxial and connected. The fixing holes (9) are detachably provided with fixing rods (10), and the two sub-plates are connected by fixing rods (10). When two adjacent sub-boards are separated, the fixing rod (10) is removed, and the ends of the two are separated and staggered so that the two sub-boards are stacked.

7. The mask transport box according to claim 6, characterized in that, The fixing hole (9) is constructed as a screw hole, and the fixing rod (10) is made of a suitable screw.

8. The mask transport box according to any one of claims 3-7, characterized in that, The thickness of the inner shell (4) is 3-5mm, and the thickness of the outer shell (5) is 3-5mm.

9. The mask transport box according to any one of claims 1-7, characterized in that, The outer casing (100) is equipped with a temperature and humidity sensor for recording the temperature and humidity changes of the inner casing (200) and a vibration sensor for recording the vibration frequency.

10. A photomask transport system, characterized in that, The masked transport box includes any one of claims 1-9.

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