A micro-motion detection device for material in-situ of a mask fixture

Abstract

This utility model relates to the field of mask clamping technology and discloses a mask clamping material in-situ micro-motion detection device, including a plate-shaped component, a photoelectric switch, and a rotating support. The plate-shaped component is rotatably mounted via the rotating support. A contact portion for receiving external pressure is provided at the first end of the plate-shaped component, and a sensing portion is provided at the second end. The sensing area of ​​the photoelectric switch corresponds to the movement trajectory of the sensing portion. Spring-fixed posts are fixedly mounted around the periphery of the plate-shaped component, and these posts are elastically connected to a connecting portion mounted on the plate-shaped component via a return spring. A stop is provided on one side of the sensing portion to limit its reset position. This utility model employs a touch-type mechanical micro-motion structure combined with a photoelectric sensor, making it unaffected by different product specifications and materials. Furthermore, the contact area between this material micro-motion detection device and the mask product is small, meeting the structural requirements of the clamp and ensuring the accuracy of workpiece in-situ detection, while also guaranteeing product safety.

Description

Technical Field

[0001] This utility model relates to the field of mask clamping technology, specifically a mask clamping material in-situ micro-motion detection device. Background Technology

[0002] A photomask, also known simply as a mask, is an essential tool used in the semiconductor industry to create intricate patterns. Using a mask enables the rapid replication of a target pattern, making the mass production of semiconductor and display devices possible. As the master pattern, the mask's fabrication process demands higher precision and quality. It involves processes such as chrome plating, resist coating, photolithography, development, etching, removal, inspection, and repair on a quartz or other material surface that meets transmittance and flatness requirements. The mask needs to be continuously transferred between each process.

[0003] The glass used to manufacture mask products is smooth, fragile, and comes in various sizes. Specialized fixtures are used for gripping and placing the masks during transport and storage. Existing fixtures for material in-situ detection present several problems: First, the contact surface for gripping the mask products is relatively small. While ensuring accurate gripping, the fixture and material in-situ sensor cannot have excessive contact with the product. Second, due to the varying reflectivity and transmittance of different materials, ordinary material detection sensors cannot accurately cover the material in-situ detection of all masks. Third, the equipment used for manufacturing mask products has a complex structure, and the space provided for the fixture to move in and out to grip and place the masks is limited. Standard sensor structures can easily cause interference between the fixture and the equipment. The diversity of mask products, their safety requirements, and the limited operating space of the fixtures place high demands on the shape and accuracy of the sensors used to identify the gripped mask material. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a micro-motion detection device for material in-situ of a mask fixture, which solves the problems of large space occupation, excessive contact surface with the mask, and difficulty in adapting to the detection of materials from various mask fixtures during the grasping and placement process.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A micro-motion detection device for material in-situ of a mask fixture includes a plate-shaped component, a photoelectric switch, and a rotating support column. The plate-shaped component is rotatably mounted via the rotating support column. A contact portion for receiving external pressure is provided at the first end of the plate-shaped component, and a sensing portion is provided at the second end. The sensing area of ​​the photoelectric switch corresponds to the movement trajectory of the sensing portion. A spring-fixed column is fixedly mounted around the periphery of the plate-shaped component, and the spring-fixed column is elastically connected to a connecting portion mounted on the plate-shaped component via a return spring. A stop is provided on one side of the sensing portion to limit its reset position. When the contact portion is subjected to external force, the plate-shaped component rotates around the rotating support column, causing the sensing portion to enter the sensing area of ​​the photoelectric switch to trigger a signal. When the external force disappears, the return spring causes the plate-shaped component to reset to the position where the sensing portion abuts against the stop.

[0007] Preferably, the contact portion is provided with a scratch-resistant outer shell, and the sensing portion is a sensing sheet adapted to a photoelectric switch.

[0008] Preferably, the plate-shaped member forms a force-saving lever with the rotating support as the fulcrum.

[0009] Preferably, the stop is made of an elastic cushioning material.

[0010] Preferably, the photoelectric switch is a slotted photoelectric switch, with the slot serving as the detection area.

[0011] This utility model has the following beneficial effects:

[0012] This mask fixture material presence micro-motion detection device uses a mechanical micro-motion structure formed by arranging contact and sensing parts on a plate-shaped component to trigger a photoelectric switch, thereby outputting a material presence signal. Its ingenious design and precise sensing signal not only meet the structural requirements of the fixture when operating in a confined space, but also reduce the contact area of ​​the mask product, enabling presence detection of different mask products and greatly improving the safety of mask product transfer and placement. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This is a schematic diagram of the layout structure of a certain embodiment of the present invention (the blue line in the figure represents the outer contour of the mask fixture).

[0015] In the diagram: 1. Plate-shaped component; 11. Contact part; 12. Sensing part; 13. Connecting part; 2. Rotating support; 3. Return spring; 4. Spring fixing post; 5. Stop block; 6. Photoelectric switch. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] A micro-motion detection device for material in-situ of a mask fixture includes a plate-shaped component 1, a photoelectric switch 6, and a rotating support column 2. The plate-shaped component 1 is rotatably mounted via the rotating support column 2. A contact portion 11 for receiving external pressure is provided at the first end of the plate-shaped component 1, and a sensing portion 12 is provided at the second end. The sensing area of ​​the photoelectric switch 6 corresponds to the movement trajectory of the sensing portion 12. Spring-fixed posts 4 are fixedly mounted around the periphery of the plate-shaped component 1, and the spring-fixed posts 4 are elastically connected to a connecting portion 13 mounted on the plate-shaped component 1 via a reset spring 3. A stop block 5 is provided on one side of the sensing portion 12 to limit its reset position. When the contact portion 11 is subjected to external force, the plate-shaped component 1 rotates around the rotating support column 2, causing the sensing portion 12 to enter the sensing area of ​​the photoelectric switch 6 to trigger a signal. When the external force disappears, the reset spring 3 causes the plate-shaped component 1 to reset to the position where the sensing portion 12 abuts against the stop block 5. Specifically, as shown... Figure 1 As shown.

[0018] The detection device consists of a mechanical action section and a photoelectric sensing section. It uses a designed micro-motion mechanical structure to trigger a photoelectric switch, which in turn outputs a material presence signal. The overall structure is ingeniously designed and provides precise sensing signals. It not only meets the structural requirements of the fixture operating in confined spaces but also reduces the contact area of ​​the mask product, enabling in-situ detection of different mask products and greatly improving the safety of mask product transport and placement.

[0019] like Figure 1 As shown, in this technical solution, the contact part 11 is covered with a scratch-resistant outer shell, and the sensing part 12 is a sensing sheet adapted to the photoelectric switch 6. The plate-shaped part 1 is integrally formed from an alloy metal sheet, wherein the contact part 11 has an alloy metal sheet inside, and a Teflon shell is fixed on the outside of the metal sheet to prevent scratches on the mask product. The sensing part 12 is a sensing sheet used to trigger the photoelectric switch 6.

[0020] Plate-shaped component 1 forms a force-saving lever with rotating support 2 as the fulcrum. For example... Figure 1 and 2As shown, in this technical solution, when the mask enters the mask clamping groove, the end face of the mask contacts the contact part 11, causing the plate-shaped member 1 to rotate. Since it is a force-saving lever, the range of motion of the sensing part 12 is amplified. When the mask is fully in place, the sensing part 12 enters the sensing area of ​​the photoelectric switch 6, and then outputs a signal that the mask is in place.

[0021] When the mask is separated from the mask fixture, the plate-shaped part 1 will quickly return to its original position under the action of the return spring 3, and the sensing part 12 will then quickly impact the stop block 5. By using the stop block 5 made of elastic buffer material, deformation of the sensing part 12 due to the impact can be effectively avoided, thereby preventing it from affecting the stability of subsequent sensing triggering.

[0022] In this technical solution, the photoelectric switch 6 is a slot-type photoelectric switch 6, with the slot serving as the detection area. By using the slot-type photoelectric switch 6, the number of installation accessories can be reduced, saving installation space.

[0023] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, the phrase "comprising an element defined as..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0024] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A mask clamps material in-place micro-motion detection device, characterized in that, The device includes a plate-shaped component, a photoelectric switch, and a rotating support. The plate-shaped component is rotatably mounted via the rotating support. A contact portion for receiving external pressure is located at the first end of the plate-shaped component, and a sensing portion is located at the second end. The sensing area of ​​the photoelectric switch corresponds to the movement trajectory of the sensing portion. A spring-fixed post is fixedly mounted around the periphery of the plate-shaped component, and the spring-fixed post is elastically connected to a connecting portion mounted on the plate-shaped component via a return spring. A stop is provided on one side of the sensing portion to limit its reset position. When the contact portion is subjected to external force, the plate-shaped component rotates around the rotating support, causing the sensing portion to enter the sensing area of ​​the photoelectric switch to trigger a signal. When the external force disappears, the return spring causes the plate-shaped component to reset to the position where the sensing portion abuts against the stop.

2. The mask holder in-place micro-motion detection device according to claim 1, wherein: The contact portion is covered with a scratch-resistant outer shell, and the sensing portion is a sensing sheet adapted to a photoelectric switch.

3. The mask clamps in-place micro-motion detection device according to claim 1 or 2, wherein: The plate-shaped component forms a force-saving lever with the rotating support as the fulcrum.

4. The mask fixture material in-situ micro-motion detection device according to claim 3, characterized in that: The stop is made of elastic cushioning material.

5. The mask fixture material in-situ micro-motion detection device according to claim 3, characterized in that: The photoelectric switch is a slotted photoelectric switch, with the slot serving as the detection area.

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