Camera temperature control device and system

Abstract

This utility model relates to the field of semiconductor technology and discloses a camera temperature regulation device and system. The device includes: a cooling plate, a heat sink, a cooling chip, and a temperature sensor. The cooling plate is connected to an industrial camera. One side of the cooling chip is attached to the cooling plate with thermally conductive adhesive, and the other side of the cooling chip is attached to the heat sink. One end of the temperature sensor is installed in the cooling plate. When the industrial camera is working, its temperature rises, and the temperature is conducted to the cooling plate. The temperature sensor transmits the temperature measurement signal to a host computer, so that the host computer powers on the cooling chip. The side of the cooling chip attached to the cooling plate generates a low temperature, absorbing the heat on the cooling plate, thereby reducing the temperature of the industrial camera, thus reducing the camera's operating temperature and improving detection performance.

Description

Technical Field

[0001] This utility model relates to the field of camera technology, and in particular to a camera temperature regulation device and system. Background Technology

[0002] In the wafer AOI appearance defect inspection section, high-resolution cameras are often used to photograph and inspect micron and submicron level defects on the wafer surface. To improve inspection efficiency, high-speed photography technology is often used, with the camera frame rate reaching 230 or higher, which places higher demands on the camera quality and performance.

[0003] In wafer AOI inspection, micron and submicron defects often place higher demands on the inspection camera. When the camera operates at high frame rates, its temperature rises, leading to temperature drift, which affects imaging accuracy and thus inspection results. Existing industrial cameras typically use cooling fans for cooling, but these fans generate significant vibrations during operation, which also negatively impact image quality. Another method is to cool the camera through natural airflow, but this is slow and ineffective. Therefore, how to efficiently dissipate heat and improve camera performance during high frame rate operation is a pressing technical problem that needs to be solved.

[0004] The above content is only used to help understand the technical solution of this utility model and does not represent an admission that the above content is prior art. Utility Model Content

[0005] The main purpose of this utility model is to provide a camera temperature regulation device, which aims to solve the technical problem that micron and submicron defects often place higher demands on the detection camera, and when the camera works at high frame rate and high speed, the camera temperature will rise, resulting in temperature drift and affecting the camera's imaging accuracy.

[0006] To achieve the above objectives, this utility model provides a camera temperature regulation device, the camera temperature regulation device comprising:

[0007] The camera temperature regulation device includes: a cooling plate, a heat sink, a cooling element, and a temperature sensor.

[0008] The cooling plate is connected to the industrial camera; one side of the cooling chip is attached to the cooling plate with thermally conductive adhesive, and the other side of the cooling chip is attached to the heat sink; one end of the temperature sensing probe is installed in the cooling plate;

[0009] When the industrial camera is working, the temperature rises, and the heat is conducted to the cooling plate.

[0010] The temperature sensing probe transmits the temperature measurement signal to the host computer, so that the host computer can power on the cooling chip.

[0011] The cooling element is attached to one side of the cooling plate, generating a low temperature and absorbing heat from the cooling plate to lower the temperature of the industrial camera.

[0012] Preferably, the other end of the temperature sensing probe is connected to a temperature measuring instrument to display the current temperature of the cooling plate.

[0013] When the temperature of the cooling plate exceeds the set value, the temperature sensor transmits the temperature measurement signal to the host computer, so that the host computer powers on the cooling chip.

[0014] The cooling element, attached to one side of the cooling plate, generates a low temperature and absorbs heat from the cooling plate, thereby reducing the temperature of the industrial camera below a set value.

[0015] Preferably, the camera temperature regulating device further includes: a pipe connector;

[0016] The pipe joints are installed on both sides of the heat sink.

[0017] The pipe joint is used for air or water passage, with one end inlet and the other end outlet, to continuously remove heat from the heat sink.

[0018] Preferably, the heat sink has a heat dissipation groove in the middle.

[0019] Preferably, the camera temperature regulation device further includes: heat insulation cotton and a sealing plate;

[0020] The cooling plate and the heat dissipation plate are separated by the heat insulation cotton;

[0021] The sealing plate is fixed to the heat sink plate to seal the heat sink plate.

[0022] Preferably, the cooling plate is locked to the industrial camera screws.

[0023] Preferably, the cooling element is a TEC cooling element.

[0024] Furthermore, this utility model also proposes a camera temperature regulation system, the system comprising the camera temperature regulation device as described above, an industrial camera, and a host computer; the camera temperature regulation device comprises a cooling plate, a heat sink, a cooling element, and a temperature sensor.

[0025] The cooling plate is connected to the industrial camera, and the temperature sensor is connected to the host computer; one side of the cooling chip is attached to the cooling plate with thermally conductive adhesive, and the other side of the cooling chip is attached to the heat sink; one end of the temperature sensor is installed in the cooling plate.

[0026] The industrial camera is used to conduct heat to the cooling plate when the temperature rises during operation.

[0027] The temperature sensing probe is used to transmit the temperature measurement signal to the host computer so that the host computer can power on the cooling chip;

[0028] The cooling element is attached to one side of the cooling plate, generating a low temperature and absorbing heat from the cooling plate to lower the temperature of the industrial camera.

[0029] Preferably, the system further includes: a temperature measuring instrument;

[0030] The other end of the temperature sensing probe is connected to the temperature measuring instrument so that the current temperature of the cooling plate can be displayed by the temperature measuring instrument;

[0031] The temperature sensor is used to transmit a temperature measurement signal to the host computer when the temperature of the cooling plate exceeds a set value, so that the host computer can power on the cooling chip.

[0032] The cooling element, attached to one side of the cooling plate, generates a low temperature and absorbs heat from the cooling plate, thereby reducing the temperature of the industrial camera below a set value.

[0033] In this embodiment, when the industrial camera is working, its temperature rises and is conducted to the cooling plate. The temperature sensing probe transmits the temperature measurement signal to the host computer, so that the host computer powers on the cooling chip. The side of the cooling chip attached to the cooling plate generates a low temperature and absorbs the heat on the cooling plate, thereby reducing the temperature of the industrial camera, thus reducing the camera's operating temperature and improving detection performance. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the first structure of a camera temperature regulation device in one embodiment of the present invention;

[0036] Figure 2 This is a schematic diagram of the second structure of a camera temperature regulation device in one embodiment of the present invention;

[0037] Figure 3This is a schematic diagram of the third structure of a camera temperature regulation device in one embodiment of the present invention.

[0038] Explanation of icon numbers:

[0039] label name label name 1 Cooling plate 2 heat sink 3 Cooling Element 4 Temperature probe 5 Industrial cameras 6 pipe fittings 7 Insulation cotton 8 sealing plate

[0040] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0041] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0042] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0043] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0044] Reference Figure 1 The first embodiment of the camera temperature adjustment device of this utility model is proposed. Figure 1 This is a schematic diagram of the first structure of the camera temperature regulation device.

[0045] like Figure 1 As shown, the camera temperature regulation device includes: a cooling plate 1, a heat sink 2, a cooling chip 3, and a temperature sensor 4;

[0046] The cooling plate 1 is connected to the industrial camera 5; one side of the cooling chip 3 is attached to the cooling plate 1 with thermally conductive adhesive, and the other side of the cooling chip 3 is attached to the heat sink 2; one end of the temperature sensor 4 is installed in the cooling plate 1;

[0047] When the industrial camera 5 is working, the temperature rises and the temperature is conducted to the cooling plate 1.

[0048] The temperature sensing probe 4 transmits the temperature measurement signal to the host computer, so that the host computer can power on the cooling chip 3.

[0049] The cooling element 3 is attached to one side of the cooling plate 1 to generate a low temperature and absorb the heat on the cooling plate 1, thereby reducing the temperature of the industrial camera 5.

[0050] In a specific implementation, the cooling plate 1 is screwed onto the industrial camera 5.

[0051] Furthermore, in this embodiment, the other end of the temperature sensing probe 4 is connected to a temperature measuring instrument to display the current temperature of the cooling plate 1.

[0052] When the temperature of the cooling plate 1 exceeds the set value, the temperature sensor 4 transmits the temperature measurement signal to the host computer so that the host computer powers on the cooling chip 3.

[0053] The cooling element 3 is attached to one side of the cooling plate 1 to generate a low temperature and absorb the heat on the cooling plate 1, so that the temperature of the industrial camera 5 drops below the set value.

[0054] It should be noted that the initial standard operating temperature (set value) will cause the temperature of the industrial camera 5 to rise when it is working. The temperature will be conducted to the cooling plate 1. When the temperature of the cooling plate 1 exceeds the set value, the temperature sensor 4 will transmit the temperature measurement signal to the host computer. The host computer will power on the TEC cooling chip 3, and the TEC cooling chip 3 will start working. The side of the cooling plate 1 will generate a low temperature and absorb the heat on the cooling plate 1, thereby reducing the temperature of the terminal industrial camera 5 to below the set value.

[0055] In this embodiment, when the industrial camera 5 operates, its temperature rises, and the heat is conducted to the cooling plate 1. The temperature sensing probe 4 transmits the temperature measurement signal to the host computer, causing the host computer to power on the cooling chip 3. The cooling chip 3, attached to the cooling plate 1, generates a low temperature, absorbing the heat from the cooling plate 1, thereby lowering the temperature of the industrial camera 5. This reduces the camera's operating temperature and improves its detection performance. This camera temperature regulation device provides stable and convenient temperature adjustment, enhancing the camera's detection effectiveness.

[0056] Reference Figure 2Based on the first embodiment of the device described above, a second embodiment of the camera temperature adjustment device of this utility model is proposed. Figure 2 This is a schematic diagram of the second structure of the camera temperature regulation device.

[0057] In this embodiment, the camera temperature regulation device further includes: a pipe connector 6;

[0058] The heat sink 2 is equipped with the pipe joints 6 on both sides;

[0059] The pipe connector 6 is used for air or water passage, with one end in and the other end out, to continuously remove heat from the heat sink 2.

[0060] Furthermore, in this embodiment, the heat sink 2 has a heat dissipation groove in the middle.

[0061] Furthermore, in this embodiment, the camera temperature regulation device further includes: insulation cotton 7 and sealing plate 8;

[0062] The cooling plate 1 and the heat dissipation plate 2 are separated by the heat insulation cotton 7;

[0063] The sealing plate 8 is fixed on the heat sink 2 to seal the heat sink 2.

[0064] It should be noted that the cooling plate 1 and the heat dissipation plate 2 are separated by thermal insulation cotton 7. The heat dissipation plate 2 has some heat dissipation grooves in the middle. The sealing plate 8 is fixed on the heat dissipation plate 2 to seal it. The heat dissipation plate 2 has pipe joints 6 installed on both sides to allow air or water to pass through, with one end inlet and the other end outlet.

[0065] like Figure 3 As shown, Figure 3 This is a schematic diagram of the third structure of the camera temperature regulation device. Further, in this embodiment, the cooling element 3 is a TEC cooling element.

[0066] Understandably, one end of the TEC cooler 3 is connected to the power supply, and the operation of the TEC cooler 3 can be controlled by the power supply. Heat is also generated on the other side of the TEC cooler 3, and the heat is conducted to the heat sink 2. Air or water is continuously introduced through the pipe joint 6, which will continuously carry away the heat on the heat sink 2, thus achieving a cooling effect. The heat sink 2 and the sealing plate 8 form a sealed cavity, and there will be no leakage of hot air or water throughout the entire process.

[0067] In this embodiment, the pipe joints are installed on both sides of the heat sink; the pipe joints are used for air or water passage, with one end in and the other end out, so as to continuously remove the heat on the heat sink and can be compatible with water cooling or air cooling to quickly cool industrial cameras.

[0068] Furthermore, based on the first or second embodiment of the camera temperature regulation device described above, this utility model also proposes a camera temperature regulation system, the system including the camera temperature regulation device, industrial camera, and host computer as described above; the camera temperature regulation device includes a cooling plate, a heat sink, a cooling chip, and a temperature sensor.

[0069] The cooling plate is connected to the industrial camera, and the temperature sensor is connected to the host computer; one side of the cooling chip is attached to the cooling plate with thermally conductive adhesive, and the other side of the cooling chip is attached to the heat sink; one end of the temperature sensor is installed in the cooling plate.

[0070] The industrial camera is used to conduct heat to the cooling plate when the temperature rises during operation.

[0071] The temperature sensing probe is used to transmit the temperature measurement signal to the host computer so that the host computer can power on the cooling chip;

[0072] The cooling element is attached to one side of the cooling plate, generating a low temperature and absorbing heat from the cooling plate to lower the temperature of the industrial camera.

[0073] Furthermore, the system also includes: a temperature measuring instrument;

[0074] The other end of the temperature sensing probe is connected to the temperature measuring instrument so that the current temperature of the cooling plate can be displayed by the temperature measuring instrument;

[0075] The temperature sensor is used to transmit a temperature measurement signal to the host computer when the temperature of the cooling plate exceeds a set value, so that the host computer can power on the cooling chip.

[0076] The cooling element, attached to one side of the cooling plate, generates a low temperature and absorbs heat from the cooling plate, thereby reducing the temperature of the industrial camera below a set value.

[0077] In this embodiment, the camera temperature adjustment system can be monitored and controlled by a host computer.

[0078] Other embodiments or specific implementations of the camera temperature regulation system of this utility model can be found in the above-described device embodiments, and will not be repeated here.

[0079] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A camera temperature regulation apparatus, characterized by, The camera temperature regulation device includes: a cooling plate, a heat sink, a cooling element, and a temperature sensor. The cooling plate is connected to the industrial camera; one side of the cooling chip is attached to the cooling plate with thermally conductive adhesive, and the other side of the cooling chip is attached to the heat sink; one end of the temperature sensing probe is installed in the cooling plate; When the industrial camera is working, the temperature rises, and the heat is conducted to the cooling plate. The temperature sensing probe transmits the temperature measurement signal to the host computer, so that the host computer can power on the cooling chip. The cooling element is attached to one side of the cooling plate, generating a low temperature and absorbing heat from the cooling plate to lower the temperature of the industrial camera.

2. The camera temperature regulation apparatus of claim 1, wherein, The other end of the temperature sensing probe is connected to a temperature measuring instrument to display the current temperature of the cooling plate. When the temperature of the cooling plate exceeds the set value, the temperature sensor transmits the temperature measurement signal to the host computer, so that the host computer powers on the cooling chip. The cooling element, attached to one side of the cooling plate, generates a low temperature and absorbs heat from the cooling plate, thereby reducing the temperature of the industrial camera below a set value.

3. The camera temperature regulation apparatus of claim 1, wherein, The camera temperature regulation device also includes: a pipe connector; The pipe joints are installed on both sides of the heat sink. The pipe joint is used for air or water passage, with one end inlet and the other end outlet, to continuously remove heat from the heat sink.

4. The camera temperature regulation apparatus of claim 1, wherein, The heat sink has a heat dissipation groove in the middle.

5. The camera temperature regulation apparatus of claim 1, wherein, The camera temperature regulation device also includes: insulation cotton and a sealing plate; The cooling plate and the heat dissipation plate are separated by the heat insulation cotton; The sealing plate is fixed to the heat sink plate to seal the heat sink plate.

6. The camera temperature regulation apparatus of claim 1, wherein, The cooling plate is screwed onto the industrial camera.

7. The camera temperature regulation apparatus of any of claims 1-6, wherein, The cooling element is a TEC cooling element.

8. A camera temperature regulation system, comprising: The system includes a camera temperature control device as described in any one of claims 1-7, an industrial camera, and a host computer; the camera temperature control device includes a cooling plate, a heat sink, a cooling element, and a temperature sensor. The cooling plate is connected to the industrial camera, and the temperature sensor is connected to the host computer; one side of the cooling chip is attached to the cooling plate with thermally conductive adhesive, and the other side of the cooling chip is attached to the heat sink; one end of the temperature sensor is installed in the cooling plate. The industrial camera is used to conduct heat to the cooling plate when the temperature rises during operation. The temperature sensing probe is used to transmit the temperature measurement signal to the host computer so that the host computer can power on the cooling chip; The cooling element is attached to one side of the cooling plate, generating a low temperature and absorbing heat from the cooling plate to lower the temperature of the industrial camera.

9. The camera temperature regulation system of claim 8, wherein, The system also includes: a temperature measuring instrument; The other end of the temperature sensing probe is connected to the temperature measuring instrument so that the current temperature of the cooling plate can be displayed by the temperature measuring instrument; The temperature sensor is used to transmit a temperature measurement signal to the host computer when the temperature of the cooling plate exceeds a set value, so that the host computer can power on the cooling chip. The cooling element, attached to one side of the cooling plate, generates a low temperature and absorbs heat from the cooling plate, thereby reducing the temperature of the industrial camera below a set value.

Images