Structure of an evaporation apparatus for manufacturing OLED devices

Abstract

This utility model relates to the field of OLED technology, specifically to a vapor deposition apparatus structure for OLED device manufacturing. It includes a crucible and a pipe threaded to the top of the crucible. A nozzle is connected to the top of the pipe, and the nozzle consists of a bottom conical tube, a top conical tube, and a middle conical tube. The top of the middle conical tube has an arc-shaped section. This vapor deposition apparatus structure for OLED device manufacturing features a nozzle composed of a bottom conical tube (top opening smaller than bottom), a middle conical tube (top opening smaller than bottom), and a top conical tube (both ends opening smaller than the middle), forming a three-section tapered structure. This design effectively controls the steam flow rate and direction by repeatedly compressing the steam space, reducing turbulence and backflow of steam within the nozzle, and improving vapor deposition uniformity. If impurities flow back, they will be retained in the cavity due to inertia or gravity, thus intercepting impurities and preventing them from entering the crucible and affecting the purity and quality of the vapor deposition layer.

Description

Technical Field

[0001] This utility model relates to the field of OLED technology, specifically to a vapor deposition apparatus structure for manufacturing OLED devices. Background Technology

[0002] OLED devices are composed of multiple organic thin films, including hole injection layer, hole transport layer, light emission layer, electron transport layer and electron injection layer. Using vapor deposition technology, organic materials can be precisely deposited onto the substrate in a high vacuum environment to form a uniform and dense thin film, ensuring the normal functioning of each layer.

[0003] A search revealed a Chinese patent (CN222250939U) disclosing an OLED vertical evaporation device. This device comprises several crucible nozzles, upper crucible pipes, and crucible bottoms connected sequentially. Each upper crucible pipe has an upper partition between it. The crucible nozzles are positioned at an acute angle to the horizontal direction. Organic material vapor ejected from the nozzles is sprayed onto a vertically positioned glass substrate and a fine metal mask. Upper heating wires are located on the outer wall of the upper crucible pipes, and bottom heating wires are located on the outer wall of the crucible bottom. A bottom partition is located in the crucible bottom, where the organic material is placed and separated.

[0004] The aforementioned patent mainly mitigates the sagging of the central area of ​​the fine metal mask (FMM) due to weight by adopting an inclined nozzle design. However, in actual use, it has been found that if there is a temperature gradient and condensation in the nozzle cavity, impurities are easily deposited in the nozzle and flow back, affecting the purity and quality of the vapor-deposited film. Therefore, we propose a vapor deposition apparatus structure for OLED device manufacturing. Utility Model Content

[0005] The technical problem to be solved by this application is that the above-mentioned patent mainly reduces the phenomenon of sagging in the central area of ​​fine metal mask (FMM) due to weight by adopting an inclined nozzle design. However, in actual use, it has been found that if there is a temperature gradient and condensation in the nozzle cavity, impurities are easily deposited in the nozzle and flow back, affecting the purity and quality of the vapor-deposited film.

[0006] To address the aforementioned technical problems, this application provides a vapor deposition apparatus structure for OLED device manufacturing, comprising a crucible and a pipe threaded to the top of the crucible. A nozzle is connected to the top of the pipe, and the nozzle consists of a bottom conical tube, a top conical tube, and a middle conical tube. The bottom conical tube is a cone with a top opening smaller than its bottom opening, and the top conical tube is a cone with a bottom and bottom opening smaller than its middle portion. The middle conical tube is installed at the bottom inside the top conical tube, and the middle conical tube is a cone with a top opening smaller than its bottom opening. An arc-shaped portion is provided at the top inside the middle conical tube, and a cavity is provided between the middle conical tube and the top conical tube.

[0007] In some embodiments, flanges that fit together are installed on the outer sides of both the bottom tapered tube and the top tapered tube, and the flanges are fixed together by fasteners.

[0008] In some embodiments, an annular flow divider is provided at the bottom of the bottom conical tube, and the top of the flow divider is provided with a plurality of arc-shaped flow divider holes.

[0009] In some embodiments, the upper end of the bottom tapered tube is arrayed with multiple arc-shaped flow guide ribs.

[0010] In some embodiments, a sealing ring is embedded on the side where the bottom tapered tube and the top tapered tube fit together.

[0011] In some embodiments, a fixing rod is installed at the lower end of the bottom tapered tube, and a threaded block that is threadedly connected to the inner side of the diverter plate is installed at the bottom of the fixing rod.

[0012] This utility model has at least the following beneficial effects:

[0013] 1. A nozzle consisting of a bottom conical tube (top opening smaller than bottom), a middle conical tube (top opening smaller than bottom), and a top conical tube (both ends opening smaller than middle) is set up to form a three-section tapered structure. This design effectively controls the steam flow rate and direction by compressing the steam space multiple times, reducing turbulence and backflow of steam in the nozzle, and improving the uniformity of vapor deposition.

[0014] 2. A cavity is set between the middle conical tube and the top conical tube. If impurities flow back, they will be retained in the cavity due to inertia or gravity, which will intercept the impurities and prevent them from entering the crucible and affecting the purity and quality of the steamed bun coating. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a single crucible of this utility model;

[0016] Figure 2 This is a cross-sectional view of the internal structure of the nozzle of this utility model;

[0017] Figure 3 This is an enlarged view of the connection structure between the top tapered tube and the middle tapered tube of this utility model;

[0018] Figure 4 This is a top view of the diverter structure of this utility model;

[0019] Figure 5 This is a cross-sectional view of the connection structure between the bottom tapered tube and the diverter plate of this utility model;

[0020] Figure 6 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 7 This is a cross-sectional view of the internal structure of the cooling box of this utility model.

[0022] In the diagram: 1. Crucible; 2. Pipe; 3. Nozzle; 301. Bottom conical tube; 302. Top conical tube; 303. Middle conical tube; 3031. Arc-shaped section; 304. Cavity; 4. Flange; 5. Fixing component; 6. Diverter plate; 601. Diverter hole; 7. Guide rib; 8. Sealing ring; 9. Fixing rod; 10. Threaded block; 11. Cooling box; 12. Fine metal mask plate; 13. Glass substrate; 14. Support plate; 15. Bottom heating wire; 16. Upper heating wire; 17. Connecting pipe; 18. Divider plate. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Example 1: Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 6 and Figure 7This utility model provides a technical solution: a vapor deposition apparatus structure for OLED device manufacturing, including a crucible 1 and a pipe 2 threadedly connected to the top of the crucible 1. A nozzle 3 is connected to the top of the pipe 2. The nozzle 3 is composed of a bottom conical tube 301, a top conical tube 302, and a middle conical tube 303. The bottom conical tube 301 is a cone with a top opening smaller than the bottom opening. The top conical tube 302 is a cone with a bottom and bottom opening smaller than the middle size. The middle conical tube 303 is installed at the bottom inside the top conical tube 302. The middle conical tube 303 is a cone with a top opening smaller than the bottom opening. An arc-shaped part 3031 is provided at the top inside the middle conical tube 303. A cavity 304 is provided between the middle conical tube 303 and the top conical tube 302.

[0025] The ordinary nozzle is replaced with a nozzle 3 consisting of a bottom conical tube 301 (top opening smaller than bottom), a middle conical tube 303 (top opening smaller than bottom), and a top conical tube 302 (both ends opening smaller than middle), forming a three-section tapered structure. By compressing the steam space multiple times, the steam flow rate and direction are effectively controlled, reducing turbulence and backflow, and improving the uniformity of vapor deposition. The design of the arc-shaped part 3031 at the top inside the middle conical tube 303 buffers the steam pressure and stabilizes the flow rate, avoiding backflow or blockage caused by sudden pressure changes, and ensuring the stability of the vapor deposition process. The cavity 304, as a transition zone through which the steam flows, can buffer sudden changes in steam pressure, reducing steam backflow or turbulence caused by pressure fluctuations, thereby reducing the probability of impurities depositing inside the nozzle 3. If impurities are present in the steam, the geometry of the cavity 304 (such as the contraction at the conical tube joint) may cause some impurities to remain in the cavity 304 due to inertia or gravity, rather than directly entering the top conical tube 302, thereby indirectly reducing the impact of impurities on the vapor-deposited film layer.

[0026] It also includes a cooling box 11, a fine metal mask 12, a glass substrate 13, and a support plate 14. The glass substrate 13 is placed on top of the fine metal mask 12, and the fine metal mask 12 is placed on two support plates 14 and located above the nozzle 3. The cooling box 11 is located outside the multiple crucibles 1. The two ends of the cooling box 11 are provided with connecting pipes 17 that are connected to external circulating cooling water. The crucibles 1 are provided with partition plates 18 inside to separate the organic materials inside the crucibles 1.

[0027] Example 2: Based on Example 1, as follows Figure 2As shown, flanges 4 are fitted together on the outer sides of both the bottom tapered tube 301 and the top tapered tube 302. The flanges 4 are fixed together by fasteners 5. As connecting parts, the flanges 4 provide a stable support for the bottom tapered tube 301 and the top tapered tube 302. This rigid support structure can withstand various stresses generated by high temperature, high pressure and steam flow during the vapor deposition process, and prevent the nozzle 3 from deforming or loosening due to mechanical vibration or thermal expansion. The flanges 4 and the fasteners 5 (threaded rods) make it easy to disassemble and replace the bottom tapered tube 301 and the top tapered tube 302. This is crucial for the regular maintenance, cleaning and component replacement of the vapor deposition machine, which can reduce maintenance difficulty and cost and improve the overall service life of the equipment.

[0028] Example 3: Based on Example 2, such as Figure 2 and Figure 4 As shown, an annular flow divider 6 is provided at the bottom of the bottom conical tube 301. The top of the flow divider 6 is arrayed with multiple arc-shaped flow divider holes 601. The flow divider 6 divides the steam or organic material entering the bottom conical tube 301, ensuring that the steam or material can be evenly distributed to all parts of the nozzle 3. This helps to reduce turbulence and backflow of steam or material inside the nozzle 3, and improves the uniformity and efficiency of vapor deposition.

[0029] Example 4: Based on Example 3, such as Figure 3 and Figure 5 As shown, multiple arc-shaped guide ribs 7 are arrayed at the upper end of the bottom conical tube 301. The diverter plate 6 diverts the steam or organic material entering the bottom conical tube 301, ensuring that the steam or material can be evenly distributed to various parts of the nozzle 3. This helps to reduce turbulence and backflow of steam or material inside the nozzle 3, and improves the uniformity and efficiency of vapor deposition.

[0030] Example 5: Based on Example 4, such as Figure 2 As shown, a sealing ring 8 is embedded on the side where the bottom tapered tube 301 and the top tapered tube 302 are in contact. The sealing ring 8 serves as an elastic sealing material, which seals the gap between the bottom tapered tube 301 and the top tapered tube 302, preventing the leakage of organic material vapor through the gap in the tubes during the vapor deposition process, and ensuring the stability of the process chamber pressure.

[0031] Example 6: Based on Example 5, such as Figure 5 As shown, a fixing rod 9 is installed at the lower end of the bottom tapered tube 301, and a threaded block 10 is installed at the bottom of the fixing rod 9, which is threaded to the inner side of the splitter plate 6. The design of installing the splitter plate 6 through the threaded block 10 makes it convenient to replace the splitter plate 6 separately and reduces the replacement cost.

[0032] Based on the above embodiments, the following is the complete working principle of the above embodiments: the bottom heating wire 15 and the upper heating wire 16 are activated to heat the crucible 1 and the pipe 2, so that the organic material inside the crucible 1 changes from solid to gaseous vapor and rises, passing through the nozzle 3 and the fine metal mask 12 and then stays at the bottom of the glass substrate 13 to be deposited into a thin film.

[0033] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention.

Claims

1. A structure of an evaporation apparatus for OLED device manufacturing, comprising a crucible (1) and a pipe (2) threaded on the top of the crucible (1), characterized in that: The top of the pipe (2) is connected to a nozzle (3), which is composed of a bottom conical tube (301), a top conical tube (302) and a middle conical tube (303). The bottom conical tube (301) is a cone with a top opening smaller than the bottom opening. The top conical tube (302) is a cone with a bottom and bottom opening smaller than the middle size. The middle conical tube (303) is installed at the bottom inside the top conical tube (302). The middle conical tube (303) is a cone with a top opening smaller than the bottom opening. The top inside the middle conical tube (303) is provided with an arc-shaped part (3031). A cavity (304) is provided between the middle conical tube (303) and the top conical tube (302). 2.The evaporation apparatus structure for OLED device manufacturing of claim 1, wherein: The bottom tapered tube (301) and the top tapered tube (302) are each fitted with a flange (4), which is fixed to each other by a fastener (5). 3.The evaporation apparatus structure for OLED device manufacturing according to claim 1, wherein: The bottom of the bottom tapered tube (301) is provided with an annular flow divider plate (6), and the top of the flow divider plate (6) is provided with a plurality of arc-shaped flow divider holes (601). 4.The evaporation apparatus structure for OLED device manufacturing according to claim 3, characterized in that: The upper end of the bottom tapered tube (301) is equipped with multiple arc-shaped flow guide ribs (7). 5.The evaporation apparatus structure for OLED device manufacturing of claim 1, wherein: A sealing ring (8) is embedded on the side where the bottom tapered tube (301) and the top tapered tube (302) fit together. 6.The evaporation apparatus structure for OLED device manufacturing of claim 3, wherein: A fixing rod (9) is installed at the lower end of the bottom tapered tube (301), and a threaded block (10) that is threaded to the inside of the diverter plate (6) is installed at the bottom of the fixing rod (9).

Images