Single crystal furnace guide tube

Abstract

This utility model belongs to the field of graphite hot zone technology, specifically relating to a guide tube for a single crystal furnace, including an outer cylinder and an inner cylinder. The inner cylinder is concentrically disposed within the outer cylinder. An annular receiving base plate is provided at the lower end of the outer cylinder. One end of the inner cylinder abuts against the receiving base plate and forms an axially restricted connection with it through a limiting structure. The other end of the inner cylinder axially rests on the connecting outer edge at the upper end of the outer cylinder. The receiving base plate at the lower end of the outer cylinder provides the installation position for the inner cylinder, and the limiting structure on the receiving base plate allows the inner cylinder to maintain its coaxial position with the outer cylinder and restricts its axial movement relative to the outer cylinder after axial insertion and circumferential rotation. Simultaneously, the upper end resting on the connecting outer edge provides support and further positioning, greatly improving the stability of the inner cylinder.

Description

Technical Field

[0001] This utility model belongs to the field of graphite thermal field technology, specifically relating to a single crystal furnace guide tube. Background Technology

[0002] A graphite thermal field is a high-temperature heating device based on graphite. Its working principle mainly relies on the thermal conductivity of graphite. Graphite is an excellent thermally conductive material with a high thermal conductivity and good thermal stability. Heaters made of graphite can rapidly transfer heat to the processing area and achieve good heat distribution, thus meeting the requirements of various high-temperature processing processes.

[0003] Patent CN2147782266U discloses a graphite thermal field guide shroud for a single-crystal furnace. It solves the shortcomings of existing shrouds, such as difficulty in positioning. This graphite thermal field guide shroud for a single-crystal furnace includes an outer cone and an inner cone installed inside the outer cone. The outer and inner cones are coaxial. An inner inclined ring is connected to the lower end of the outer cone. A lower positioning shoulder is provided on the upper inner side of the inner inclined ring. A right-angle notch matching the lower positioning shoulder is provided on the inner wall of the lower end of the inner cone. The lower positioning shoulder and the right-angle notch are matched together. The upper ends of the outer and inner cones are connected by a detachable connection structure. Advantages of this invention: The outer cone is used to fix the inner cone and also provides shape protection for the inner cone. The matching of the lower positioning shoulder and the right-angle notch constrains the axis of both, ensuring installation accuracy and proper placement, thus improving assembly efficiency.

[0004] In the above scheme, the inner and outer cones can be quickly positioned coaxially through the connecting structure. However, since the upper ends of the inner and outer cones are fixed to the heat preservation furnace respectively, their axial positions are easily changed during the fixing process, which causes the mating structure at the lower end to loosen and separate. Ultimately, this leads to a deviation in the concentric position of the inner and outer cones, resulting in a large error in temperature control. Utility Model Content

[0005] The purpose of this invention is to address the aforementioned problems by providing a single-crystal furnace guide tube that can solve the above-mentioned technical issues.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A single crystal furnace guide tube includes an outer cylinder and an inner cylinder. The inner cylinder is concentrically disposed within the outer cylinder. An annular receiving base plate is provided at the lower end of the outer cylinder. One end of the inner cylinder abuts against the receiving base plate and forms an axially restrictive connection with the receiving base plate through a limiting structure. The other end of the inner cylinder axially rests on the connecting eaves at the upper end of the outer cylinder.

[0008] In the single crystal furnace guide tube, the limiting structure includes a matching limiting groove and a limiting insert plate. The limiting groove is circumferentially disposed on the receiving base plate, and the limiting insert plate is disposed on the outer wall of the inner cylinder and rotates circumferentially with the limiting groove.

[0009] In the single crystal furnace guide tube, the limiting groove is composed of the receiving base plate and the limiting ring. The limiting ring is arranged parallel to the receiving base plate on the inner wall of the outer cylinder. The limiting ring has an insertion notch, and the limiting insertion plate enters the limiting groove axially through the insertion notch.

[0010] In the single crystal furnace guide tube, a stop baffle is provided between the receiving base plate and the limiting ring, and the stop baffle abuts against the limiting insert plate circumferentially.

[0011] In the single crystal furnace guide tube, the inner ring of the limiting ring slides in cooperation with the outer wall of the inner cylinder, and the inner ring of the receiving base plate matches the inner wall of the inner cylinder.

[0012] In the single crystal furnace guide tube, the inner cylinder includes a lower conical part and an upper conical part with gradually increasing diameter from bottom to top. The port of the lower conical part mates with the receiving base plate, and the port of the upper conical part extends to the connecting outer edge.

[0013] In the single crystal furnace guide tube, a radially outwardly extending positioning eave is provided at the port of the inner cylinder. The positioning eave is concentrically mounted on the connecting eave, and the positioning eave cooperates with the connecting eave through a positioning structure.

[0014] In the single crystal furnace guide tube, a plurality of fixing holes are provided on the connecting outer eaves, and positioning holes are provided on the positioning outer eaves to be aligned and positioned with the fixing holes.

[0015] In the single crystal furnace guide tube, the positioning structure includes a positioning post and a positioning slide. The positioning slide is opened along the arc of the connecting outer edge with one of the fixing holes as the starting point. The positioning post is disposed on the positioning outer edge and moves in the positioning slide.

[0016] In the single crystal furnace guide tube, one of the positioning holes axially penetrates the positioning post.

[0017] The advantages of this utility model are:

[0018] The lower end of the outer cylinder has a base plate to provide the installation position for the inner cylinder, and a limiting structure is set on the base plate. After the inner cylinder is axially inserted and rotated circumferentially, the inner cylinder can not only maintain the coaxial position with the outer cylinder, but also restrict the axial movement of the inner cylinder relative to the outer cylinder. At the same time, the upper end rests on the connecting outer edge to share the support and further position, which can greatly improve the stability of the inner cylinder. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0020] Figure 2 This is a cross-sectional structural diagram of the present invention.

[0021] Figure 3 This is a schematic diagram of the outer cylinder structure of this utility model.

[0022] Figure 4 This is a schematic diagram of the inner cylinder structure of this utility model.

[0023] In the diagram, the outer cylinder 1, the receiving base plate 11, the connecting outer eaves 12, the limiting slide groove 13, the limiting ring 14, the insertion notch 15, the stop baffle 16, the fixing hole 17, the positioning slide groove 18, the inner cylinder 2, the limiting insert plate 21, the lower cone part 22, the upper cone part 23, the positioning outer eaves 24, the positioning hole 25, and the positioning post 26 are all shown. Detailed Implementation

[0024] The following are specific embodiments of the utility model, which are described in conjunction with the accompanying drawings to further illustrate the technical solution of the utility model. However, the utility model is not limited to these embodiments.

[0025] like Figures 1-4 As shown, the single crystal furnace guide tube includes an outer cylinder 1 and an inner cylinder 2. The inner cylinder 2 is concentrically arranged inside the outer cylinder 1. The lower end of the outer cylinder 1 is provided with an annular receiving base plate 11. One end of the inner cylinder 2 abuts against the receiving base plate 11 and forms an axially restricted connection with the receiving base plate 11 through a limiting structure. The other end of the inner cylinder 2 axially rests on the connecting outer eaves 12 at the upper end of the outer cylinder 1.

[0026] That is, the lower end of the outer cylinder has a base plate to provide the installation position of the inner cylinder, and a limiting structure is set on the base plate. After the inner cylinder is axially inserted and rotated circumferentially, the inner cylinder can not only maintain the coaxial position with the outer cylinder, but also restrict the axial movement of the inner cylinder relative to the outer cylinder. At the same time, the upper end rests on the connecting outer eaves to share the support and further position, which can greatly improve the stability of the inner cylinder.

[0027] In this embodiment, the limiting structure includes a limiting groove 13 and a limiting insert 21 that cooperate with each other. The limiting groove 13 is arranged in a ring on the receiving base plate 11, and the limiting insert 21 is arranged on the outer wall of the inner cylinder 2 and rotates in a circumferential manner with the limiting groove 13.

[0028] The inner cylinder is positioned axially and circumferentially by means of an annular groove and a slide plate, preventing the inner cylinder from shifting due to rotation or vibration.

[0029] In this embodiment, the limiting groove 13 is composed of a receiving base plate 11 and a limiting ring 14. The limiting ring 14 is arranged parallel to the receiving base plate 11 on the inner wall of the outer cylinder 1. The limiting ring 14 has an insertion notch 15, and the limiting insert plate 21 enters the limiting groove 13 axially through the insertion notch 15.

[0030] The base plate 11 and the limiting ring 14 are arranged parallel to each other at intervals, and the interval between them is the limiting groove 13. The limiting insert 21 is inserted between the two, which can ensure that the inner cylinder can rotate while limiting the axial displacement of the inner cylinder. After the limiting insert 21 has an insertion notch 15, the limiting insert 21 can enter the limiting groove 13 through the insertion notch 15, and the axial movement can be locked after rotating a certain angle.

[0031] In this embodiment, a stop baffle 16 is provided between the receiving base plate 11 and the limiting ring 14, and the stop baffle 16 abuts against the limiting insert plate 21 in a circumferential manner.

[0032] After the limiting insert plate 21 enters the limiting slide groove 13, it may rotate to the position of the adjacent insertion notch 15 again due to excessive rotation angle. Therefore, a stop baffle 16 is set between the adjacent insertion notches 15 in the limiting slide groove 13 to prevent the inner cylinder 2 from rotating excessively and separating from the outer cylinder.

[0033] In this embodiment, the inner ring of the limiting ring 14 slides in cooperation with the outer wall of the inner cylinder 2, and the inner ring of the receiving base plate 11 matches the inner wall of the inner cylinder 2.

[0034] The inner ring of the limiting ring 14 matches the outer diameter of the inner cylinder 2. After the limiting plate 21 is inserted into place, the inner ring of the limiting ring 14 can restrict the horizontal displacement of the inner cylinder, so that the inner cylinder is kept in the position of the coaxial center line with the outer cylinder.

[0035] In this embodiment, the inner cylinder 2 includes a lower conical part 22 and an upper conical part 23 with gradually increasing diameter from bottom to top. The port of the lower conical part 22 is engaged with the receiving base plate 11, and the port of the upper conical part 23 extends to the connecting outer eaves 12.

[0036] The lower conical section 22 is closer to the crucible, requiring a smaller tube diameter to collect the rising heat flow and maintain the temperature. Furthermore, a temperature gradient is formed as the diameter of the lower conical section 22 increases. The upper conical section 23 has a larger sidewall inclination angle than the lower conical section 22, resulting in a higher rate of diameter change. This provides a larger conical space at the top to distribute the heat flow collected above, thereby controlling the rate of temperature change within the channel.

[0037] In this embodiment, a positioning eave 24 extending radially outward is provided at the port of the inner cylinder 2. The positioning eave 24 is concentrically mounted on the connecting eave 12, and the positioning eave 24 abuts against the connecting eave 12 through a positioning structure.

[0038] The positioning eaves, through their concentric cooperation with the connecting eaves, provide precise positioning between the inner and outer cylinders, avoiding eccentric displacement caused by operation. Furthermore, the positioning eaves can share the weight of the inner cylinder, dividing the support of the outer cylinder to the inner cylinder into upper and lower parts, further increasing the stability of the inner cylinder.

[0039] In this embodiment, a plurality of fixing holes 17 are provided on the connecting outer eaves 12, and positioning holes 25 are provided on the positioning outer eaves 24 to be aligned and positioned with the fixing holes 17.

[0040] Long bolts are passed through the positioning hole 25 and the fixing hole 17 from the top, and the exposed threaded part on the lower side is connected and fixed to the insulation shell. During the process, the position of the inner cylinder is corrected again by aligning the holes.

[0041] In this embodiment, the positioning structure includes a positioning post 26 and a positioning slide 18. The positioning slide 18 is opened in an arc shape along the connecting outer edge 12 with one of the fixing holes 17 as the starting point. The positioning post 26 is disposed on the positioning outer edge 24 and moves in the positioning slide 18.

[0042] When the positioning pin 26 moves to the fixing hole 17, which serves as the starting point, the remaining positioning holes 25 can be completely aligned with the fixing hole 17. This is also the position where the limiting insert plate 21 and the stop baffle 16 abut. When the positioning pin 26 moves to the other end of the stroke of the positioning slide 18, this is the position where the limiting insert plate 21 can pass axially through the insertion notch 15. The positioning slide 18 not only guides the upper side of the inner cylinder to rotate, but also limits the angle of locking and separating the inner cylinder.

[0043] In this embodiment, one of the positioning holes 25 axially penetrates the positioning post 26.

[0044] The positioning hole 25 is integrated into the positioning post 26 to prevent the fixing bolt from passing through the positioning groove 18, and the side of the positioning groove 18 cannot restrict the bolt like a round hole.

[0045] The specific embodiments described herein are merely illustrative examples illustrating the spirit of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to substitute them, without departing from the spirit of this utility model or exceeding the scope defined by the appended claims.

Claims

1. A single crystal furnace shroud comprising an outer cylinder (1) and an inner cylinder (2), characterized in that, The inner cylinder (2) is concentrically arranged inside the outer cylinder (1). The lower end of the outer cylinder (1) is provided with an annular receiving base plate (11). One end of the inner cylinder (2) abuts against the receiving base plate (11) and forms an axially restricted connection with the receiving base plate (11) through a limiting structure. The other end of the inner cylinder (2) axially rests on the connecting outer eaves (12) at the upper end of the outer cylinder (1).

2. The single crystal furnace shroud of claim 1, wherein The limiting structure includes a limiting groove (13) and a limiting insert (21) that cooperate with each other. The limiting groove (13) is arranged in a ring on the receiving base plate (11), and the limiting insert (21) is arranged on the outer wall of the inner cylinder (2) and rotates in a circumferential manner with the limiting groove (13).

3. The single crystal furnace shroud of claim 2, wherein, The limiting groove (13) is composed of the receiving base plate (11) and the limiting ring (14). The limiting ring (14) is arranged parallel to the receiving base plate (11) on the inner wall of the outer cylinder (1). The limiting ring (14) has an insertion notch (15). The limiting insert plate (21) enters the limiting groove (13) axially through the insertion notch (15).

4. The single crystal furnace shroud of claim 3, wherein A stop baffle (16) is provided between the receiving base plate (11) and the limiting ring (14), and the stop baffle (16) abuts against the limiting insert plate (21) circumferentially.

5. The single crystal furnace shroud of claim 3, wherein The inner ring of the limiting ring (14) slides in cooperation with the outer wall of the inner cylinder (2), and the inner ring of the receiving base plate (11) matches the inner wall of the inner cylinder (2).

6. The single crystal furnace shroud of claim 1, wherein The inner cylinder (2) includes a lower conical part (22) and an upper conical part (23) with gradually increasing diameter from bottom to top. The port of the lower conical part (22) is engaged with the receiving base plate (11), and the port of the upper conical part (23) extends to the connecting outer eaves (12).

7. The single crystal furnace shroud of claim 1, wherein The inner cylinder (2) has a radially outwardly extending positioning eave (24) at its port. The positioning eave (24) is concentrically mounted on the connecting eave (12). The positioning eave (24) is engaged with the connecting eave (12) through a positioning structure.

8. The single crystal furnace shroud of claim 7, wherein, The connecting outer edge (12) is provided with a plurality of fixing holes (17), and the positioning outer edge (24) is provided with positioning holes (25) aligned with the fixing holes (17) for positioning.

9. The single crystal furnace shroud of claim 8, wherein, The positioning structure includes a positioning post (26) and a positioning groove (18). The positioning groove (18) is opened in an arc along the connecting outer edge (12) with one of the fixing holes (17) as the starting point. The positioning post (26) is set on the positioning outer edge (24) and moves in the positioning groove (18).

10. The single crystal furnace shroud of claim 9, wherein, One of the positioning holes (25) axially penetrates the positioning post (26).

Images