Split protective film structure

Abstract

The utility model discloses a kind of split type protective film structures, it is related to photomask technical field.The utility model specifically includes frame, upper cover and bottom layer film, the upper cover and bottom layer film are detachably connected by fastener, the bottom layer film is connected with frame, and the bottom layer film is between upper cover and frame.The utility model is applied in "Re-mount pellicle" process, can eliminate the defect, particle, palm print etc. on protective film by the way of replacing upper cover, since in the process of replacing upper cover, frame and bottom layer film will not separate, make photomask plate always be protected by frame and bottom layer film, will not be polluted by outside, so when replacing upper cover, it is not necessary to carry out cleaning etc. Operation, can improve replacement efficiency, avoid to delay delivery with low replacement efficiency.If worry about particle drop risk in replacement process, can add a detection particle step before delivery, ensure good product delivery.

Description

Technical Field

[0001] This utility model relates to the field of photomask technology, and specifically provides a split protective film structure. Background Technology

[0002] After the photomask is fabricated, a protective film is installed. This protective film is a transparent thin film that is adhered to the frame, which is then bonded to the edge of the photomask with adhesive. The protective film serves two main purposes: first, it prevents dust or particles adhering to the photomask from forming an image on the chip during exposure, thus improving chip production yield; second, it maintains the cleanliness of the photomask, reducing damage to the photomask pattern during use and contributing to improved semiconductor manufacturing efficiency.

[0003] When transporting photomasks to wafer fabs, if the protective film is damaged, contaminated with unremovable particles, or has fingerprints, it needs to be remounted. However, this remounting process involves removing the protective film from the frame, dissolving the adhesive holding it in place, cleaning residual chemical solvents from the frame, applying adhesive to the new protective film, reapplying adhesive to the frame, reattaching the protective film, allowing the adhesive to cure and be removed, cleaning, and finally, compliance inspection. The remounting process is cumbersome and time-consuming, significantly delaying delivery times. Utility Model Content

[0004] This utility model provides a split protective film structure to solve the problem that the reinstallation of photomask protective film is cumbersome and time-consuming, which delays delivery.

[0005] The technical solution of this utility model is as follows:

[0006] A split protective film structure includes a frame, an upper cover, and a bottom film. The upper cover and the bottom film are detachably connected by fasteners. The bottom film is connected to the frame and is located between the upper cover and the frame.

[0007] In this solution, any surface damage, contamination with indelible particles, or fingerprints will only appear on the top cover. In such cases, the fasteners can be removed, and a new top cover can be installed. Because the bottom film and frame remain connected, there is no need to remove the adhesive from the frame, and the photomask is always protected by the bottom film, preventing contamination throughout the process. Therefore, after replacing the top cover, no final inspection of the photomask and frame is required, significantly simplifying the replacement operation, improving the efficiency of protective film replacement, and resolving delivery delays.

[0008] Preferably, the fastener between the upper cover and the bottom film is a screw, the bottom film is provided with a threaded hole, the upper cover is provided with a through hole, the position of the through hole corresponds to the position of the threaded hole, and the screw passes through the through hole and connects with the threaded hole.

[0009] In this solution, screws, as fasteners, have the advantages of simple assembly and disassembly and stable fixing effect.

[0010] Preferably, the through hole is a stepped hole, and the end of the stepped hole with a larger diameter is located on the side away from the bottom membrane.

[0011] In this design, the stepped hole prevents the screw nut from protruding from the top cover, keeping the top cover flat.

[0012] Preferably, the bottom membrane is provided with at least two threaded holes, each threaded hole engaging with a screw, and the top cover is connected to the bottom membrane by at least two screws.

[0013] In this design, at least two threaded holes are provided, which increases the connection points between the top cover and the bottom membrane, thereby improving the stability of the connection between the top cover and the bottom membrane.

[0014] Preferably, the bottom film is provided with four threaded holes, the positions of which correspond to the four corners of the bottom film.

[0015] In this design, threaded holes are provided at the four corners of the bottom membrane, which makes the connection between the top cover and the bottom membrane more stable.

[0016] Preferably, the screw also includes a spring, which is sleeved on the screw, with one end of the spring abutting against the bottom film and the other end of the spring abutting against the nut of the screw.

[0017] In this design, a spring is included to facilitate the removal of the screw. Once the screw separates from the bottom film, it will immediately leave the threaded hole, making it easier for workers to determine whether the screw has separated from the threaded hole. This prevents damage to the threaded hole caused by removing the top cover before the screw has separated from the threaded hole.

[0018] Preferably, a positioning structure is provided between the upper cover and the bottom film.

[0019] In this solution, the positioning structure facilitates quick alignment of the top cover with the bottom film, thereby improving the assembly efficiency of the top cover.

[0020] Preferably, the positioning structure includes mutually compatible positioning bosses and positioning grooves, the positioning bosses and positioning grooves being respectively disposed on the bottom film and the top cover, and the position of the positioning bosses corresponding to the position of the positioning grooves.

[0021] In this design, the positioning boss and positioning groove are easy to manufacture and have the advantage of low manufacturing cost.

[0022] Preferably, the positioning boss is disposed on the upper cover, the bottom film is provided with a positioning groove, the upper cover is provided with a through hole, the through hole is located on the positioning boss, the bottom of the positioning groove is provided with a threaded hole, the through hole and the threaded hole are coaxial, and the screw is fitted with a spring.

[0023] In this design, a through hole is placed on the positioning boss, which extends the axial length of the through hole, making it easier to accommodate the spring inside the through hole.

[0024] Preferably, the bottom membrane and the frame are connected by adhesive bonding.

[0025] The beneficial effects of this utility model are:

[0026] This invention eliminates defects, particles, and fingerprints on the protective film by replacing the top cover. Since the frame and the bottom film do not separate during the replacement process, the photomask is always protected by the frame and the bottom film and is not subject to external contamination. Therefore, no cleaning or other operations are required when replacing the top cover, which can improve replacement efficiency and avoid delays in delivery due to low replacement efficiency. Attached Figure Description

[0027] To more clearly illustrate the technical solution of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a cross-sectional view of Embodiment 1;

[0029] Figure 2 This is a partially enlarged view of Example 1;

[0030] Figure 3 This is a bottom view of the top cover in Embodiment 1;

[0031] Figure 4 This is a partially enlarged view of Example 2;

[0032] Figure 5 This is a bottom view of the top cover in Example 2.

[0033] In the above figures, the corresponding reference numerals are as follows:

[0034] 1. Frame; 2. Bottom membrane; 3. Top cover; 4. Screws; 5. Springs; 6. Through holes; 7. Positioning bosses. Detailed Implementation

[0035] The technical solution of this utility model will be clearly and completely described in conjunction with the accompanying drawings and through specific embodiments.

[0036] Example 1:

[0037] like Figure 1 and Figure 2 As shown in the figure, this embodiment provides a split protective film structure, including a frame 1, a bottom film 2, and a top cover 3. The frame 1 is used to connect to the edge of a photomask, and the edge of the bottom film 2 is connected to the frame 1. The bottom film 2 is connected to the frame 1 by adhesive. The bottom film 2 is provided with threaded holes, and the top cover 3 is provided with through holes 6. The top cover 3 is attached to the upper side of the bottom film 2, and the position of the through hole 6 corresponds to the position of the threaded hole. The top cover 3 and the bottom film 2 are connected by screws 4. The screws 4 pass through the through hole 6 and connect to the threaded hole, thereby fixing the top cover 3 to the upper side of the bottom film 2.

[0038] Frame 1 is a rectangular frame 1, used to connect with the photomask.

[0039] The threaded hole only needs to be connected to the screw 4 by 1-2 threads to achieve the effect of fixing the top cover 3.

[0040] like Figure 3 As shown, when the upper cover 3 is attached to the upper side of the bottom film 2, a positioning boss 7 is provided at the bottom of the upper cover 3 to facilitate quick alignment with the bottom film 2. A positioning groove is provided on the side of the bottom film 2 near the upper cover 3. The shape and size of the positioning boss 7 are adapted to the shape and size of the positioning groove. When the positioning boss 7 is inserted into the positioning groove, the upper cover 3 is aligned with the bottom film 2, that is, the edges of the upper cover 3 and the bottom film 2 are flush, and the through hole 6 is coaxial with the threaded hole.

[0041] The positioning boss 7 can be a cylindrical boss, a long strip boss, etc. The shape of the positioning groove is adapted to the positioning boss 7. When the positioning boss 7 is cylindrical, the positioning groove is circular.

[0042] The positioning groove and threaded hole are located near the edge of the bottom membrane 2, that is, directly above the frame 1 or on the outside of the frame 1.

[0043] The number of positioning slots is the same as the number of positioning bosses 7, and the number of positioning slots can be two or more.

[0044] The positioning groove can be set on the bottom film 2, and the positioning boss 7 is set on the top cover 3; when the positioning groove is set on the top cover 3, the positioning boss 7 is set on the bottom film 2.

[0045] The number of threaded holes can be two or more, but preferably four, with the four threaded holes located at the four corners of the bottom film 2. The four threaded holes correspond to the four corners of the bottom film 2. When the top cover 3 and the bottom film 2 are fixedly connected by screws 4, it ensures that both ends of each side of the top cover 3 are fixed by the screws 4, preventing gaps between the top cover 3 and the bottom film 2 and ensuring a stable connection between them.

[0046] The through hole 6 in the upper cover 3 is used to mate with the screw 4. To prevent the screw 4 from protruding on the top surface of the upper cover 3, the through hole 6 is a stepped hole. The stepped hole has two parts with different diameters. The end with the larger diameter is located away from the bottom membrane 2 and is used to accommodate the nut of the screw 4. Therefore, the diameter of the end with the larger diameter is larger than the diameter of the nut of the screw 4, while the diameter of the end with the smaller diameter is larger than the diameter of the screw shank of the screw 4, but smaller than the diameter of the nut. The length of the section with the larger diameter is greater than the thickness of the nut, allowing the nut to be accommodated within the upper cover 3.

[0047] The nut can have a slotted groove, a Phillips head groove, etc., so that the screw can be tightened or loosened with the corresponding screwdriver.

[0048] A spring 5 is fitted onto the screw 4. One end of the spring 5 abuts against the nut, and the other end of the spring 5 abuts against the bottom membrane 2.

[0049] When fixing the top cover 3, if screw 4 is not tightened, screw 4 will be ejected by spring 5, allowing the operator to directly check whether screw 4 is tightened. When removing the top cover 3, if screw 4 is not completely disengaged from the threaded hole, screw 4 will not be ejected by spring 5. In this case, the operator can observe whether screw 4 is ejected to determine whether screw 4 is completely disengaged from the threaded hole, thus avoiding damage to the threaded hole caused by forcibly removing the top cover 3.

[0050] In use, the frame 1 is connected to the edge of the photomask using adhesive. Then, the bottom layer film 2 is attached to the frame 1 using adhesive, with the bottom layer film 2 located on the side of the photomask containing the circuit pattern. After the bottom layer film 2 is installed, the top cover 3 is attached to the bottom layer film 2 and then secured to the bottom layer film 2 using screws 4.

[0051] If the top cover 3 is damaged or contaminated with particles or fingerprints during the transportation of the photomask to the wafer fab, the screws 4 can be removed with a screwdriver after the photomask is returned, and then the top cover 3 can be replaced. After the top cover 3 is replaced, the photomask can be sent to the wafer fab. Compared with the traditional steps of removing the protective film, cleaning the frame 1, and checking whether the photomask has been contaminated after removing the protective film, the steps in this embodiment are simple and quick, and the replacement of the top cover 3 can be completed quickly, avoiding delivery delays. If there are still concerns that new particles may fall onto the top cover 3 when it is replaced, a compliance inspection can be performed after the replacement of the top cover 3 to avoid the newly replaced top cover 3 still having problems such as particles or fingerprints.

[0052] Example 2:

[0053] This second embodiment provides a split protective film structure. Unlike the first embodiment, in this second embodiment, the through hole 6 is provided on the positioning boss 7, and the threaded hole is provided on the bottom film 2.

[0054] like Figure 3 and Figure 4 As shown, the positioning boss 7 is set on the upper cover 3, and the through hole 6 is set on the positioning boss 7. This arrangement can extend the length of the through hole 6.

[0055] By extending the length of the through hole 6 by setting it on the positioning boss 7, the through hole 6 has a larger space to accommodate the spring 5. Similarly, the spring 5 can also be installed in the through hole 6 without setting the through hole 6 on the positioning boss 7. Setting the through hole 6 on the positioning boss 7 is only a more preferred embodiment of this application.

Claims

1. A split protective film structure, characterized by, It includes a frame (1), an upper cover (3) and a bottom membrane (2), the upper cover (3) and the bottom membrane (2) are detachably connected by fasteners, the bottom membrane (2) is connected to the frame (1), and the bottom membrane (2) is located between the upper cover (3) and the frame (1).

2. The split protective film structure of claim 1, wherein The fastener between the upper cover (3) and the bottom film (2) is a screw (4). The bottom film (2) is provided with a threaded hole, and the upper cover (3) is provided with a through hole (6). The position of the through hole (6) corresponds to the position of the threaded hole. The screw (4) passes through the through hole (6) and connects with the threaded hole.

3. The split protective film structure of claim 2, wherein, The through hole (6) is a stepped hole, with the larger diameter end of the stepped hole located on the side away from the bottom membrane (2).

4. The split protective film structure of claim 2, wherein, The bottom membrane (2) is provided with at least two threaded holes, each threaded hole being engaged with a screw (4), and the top cover (3) is connected to the bottom membrane (2) by at least two screws (4).

5. The split protective film structure of claim 4, wherein, The bottom membrane (2) is provided with four threaded holes, the positions of which correspond to the four corners of the bottom membrane (2).

6. The split protective film structure of claim 2, wherein It also includes a spring (5), which is sleeved on the screw (4), with one end of the spring (5) abutting against the bottom membrane (2) and the other end of the spring (5) abutting against the nut of the screw (4).

7. The split protective film structure of claim 2, wherein A positioning structure is provided between the upper cover (3) and the bottom film (2).

8. The split protective film structure of claim 7, wherein, The positioning structure includes a positioning boss (7) and a positioning groove that are adapted to each other. The positioning boss (7) and the positioning groove are respectively disposed on the bottom film (2) and the top cover (3). The position of the positioning boss (7) corresponds to the position of the positioning groove.

9. The split protective film structure of claim 8, wherein, The positioning boss (7) is provided on the upper cover (3), the bottom film (2) is provided with a positioning groove, the upper cover (3) is provided with a through hole (6), the through hole (6) is located on the positioning boss (7), the bottom of the positioning groove is provided with a threaded hole, the through hole (6) and the threaded hole are coaxial, and the screw (4) is fitted with a spring (5).

10. The split protective film structure of claim 1, wherein, The bottom membrane (2) is connected to the frame (1) by means of adhesive bonding.

Images