X-ray source jima card adjusting device

Abstract

A JIMA card adjustment device for an X-ray source includes a frame for holding X-ray tubes of different sizes, an adjustment mechanism for adjusting the movement of the JIMA card along the X / Y / Z axes, a support mechanism for smooth movement of the JIMA card, and a clamping part for holding JIMA cards of different sizes. The adjustment mechanism and support mechanism are both fixed on the frame and located on opposite sides of the X-ray tube. The clamping part is located above the X-ray tube, with one end connected to the adjustment mechanism and the other end connected to the support mechanism. The adjustment mechanism drives the clamping part to move while holding the JIMA card, and the support mechanism moves synchronously with the clamping part, aligning the imaging area of ​​the JIMA card with the focal spot of the X-ray source. This invention has a compact structure, is simple to operate, and can effectively improve the accuracy and efficiency of JIMA card position adjustment, as well as the accuracy of focal spot size assessment.

Description

Technical Field

[0001] This utility model relates to the field of X-ray technology, and in particular to an X-ray source JIMA card adjustment device. Background Technology

[0002] As the core device for X-ray output, the X-ray tube emits electrons from the cathode, which are then accelerated by a high-voltage electric field between the anode and cathode and bombard the anode target surface to generate X-rays based on the bremsstrahlung mechanism. It has been widely used in medical diagnostics, security imaging, and industrial non-destructive testing. Its external structure is vacuum-sealed to maintain a high-vacuum environment to ensure stable electron beam transmission, while a high-voltage power supply provides a stable electric field, thus achieving continuous and reliable X-ray output.

[0003] Currently, open-type microfocus X-ray sources have become a key technology for observing submicron-level structures due to their high image resolution, small field of detection, and high magnification. Among these, the focal spot size, as a core indicator, directly affects the system's imaging resolution. Especially in high-magnification scenarios, precise control of the submicron-level focal spot is crucial for resolving microstructures. However, since the focal spot size is difficult to measure directly, existing techniques typically estimate it indirectly by evaluating the system's image resolution. This process relies on a high-precision calibration tool, namely the JIMA card. As a measurement tool with resolution down to the nanometer level, the JIMA card has an extremely small imaging area, requiring the X-ray source's focal spot to be precisely aligned with the JIMA card's imaging area during measurement in order to accurately assess the focal spot size through image analysis.

[0004] However, in existing technologies, due to the large size and weight of X-ray sources, the alignment of the focal spot with the JIMA card usually relies on manual adjustment of the JIMA card's position, making it difficult to achieve precise alignment at the sub-micron or even nanometer level. This technological bottleneck leads to low measurement efficiency and limited accuracy, restricting the application of open-type microfocus X-ray sources in high-resolution detection scenarios. Utility Model Content

[0005] In view of the shortcomings of the prior art described above, the technical problem to be solved by this utility model is to provide an X-ray source JIMA card adjustment device to achieve high-precision alignment between the focal spot of the X-ray source and the JIMA card, so as to improve the reliability and efficiency of focal spot measurement.

[0006] This invention proposes an X-ray source JIMA card adjustment device, comprising a frame for clamping X-ray tubes of different specifications, an adjustment mechanism for adjusting the movement of the JIMA card along the X / Y / Z axes, a support mechanism for smooth movement of the JIMA card, and a clamping part for clamping JIMA cards of different specifications. The adjustment mechanism and the support mechanism are both fixed on the frame and located on opposite sides of the X-ray tube. The clamping part is located above the X-ray tube. One end of the clamping part is connected to the adjustment mechanism, and the other end is connected to the support mechanism. The adjustment mechanism drives the clamping part to move while clamping the JIMA card, and the support mechanism moves synchronously with the clamping part, so that the imaging area of ​​the JIMA card is aligned with the focal spot of the X-ray source.

[0007] Preferably, the adjustment mechanism includes a first linear module, a second linear module, and a third linear module. The first linear module is disposed on the frame along the Y-axis direction. The second linear module is connected to the slider of the first linear module along the Z-axis direction. The third linear module is connected to the slider of the second linear module along the X-axis direction. The clamping part is connected to the slider of the third linear module along the Y-axis direction.

[0008] Preferably, the clamping part includes a first clamping member and a second clamping member, the first clamping member and the second clamping member are disposed opposite to each other, and the first clamping member and the second clamping member are connected to form a receiving space for clamping the JIMA card; the first clamping member is connected to the adjustment mechanism, and the second clamping member is connected to the support mechanism; or, the first clamping member is connected to the support mechanism, and the second clamping member is connected to the adjustment mechanism.

[0009] Preferably, the first clamping member is connected to the adjustment mechanism via a first connecting member, and the second clamping member is connected to the support mechanism via a second connecting member; or, the first clamping member is connected to the support mechanism via a first connecting member, and the second clamping member is connected to the adjustment mechanism via a second connecting member; the first connecting member and the second connecting member are coaxial.

[0010] Preferably, the support mechanism includes a first guide portion, a second guide portion, and a third guide portion. The first guide portion is fixed to the frame along the Z-axis direction. The second guide portion is connected to the slider of the first guide portion along the Y-axis direction. The third guide portion is connected to the slider of the second guide portion along the X-axis direction. The third guide portion is connected to the second clamping member along the Y-axis direction.

[0011] Preferably, the first clamping member and the second clamping member are detachably connected.

[0012] Preferably, the connection between the first clamping member and the second clamping member is provided with a slot for adjusting the distance between the first clamping member and the second clamping member, and there is a gap between the first clamping member and the second clamping member at the slot to accommodate JIMA cards of different specifications.

[0013] Preferably, the first clamping member and the second clamping member are made of a non-metallic elastic material.

[0014] Preferably, the frame includes a first clamping plate and a second clamping plate, which are respectively disposed on both sides of the X-ray tube, and the first clamping plate and the second clamping plate are detachably connected.

[0015] Preferably, the first clamping plate and the second clamping plate are made of an insulating rigid material.

[0016] As described above, the X-ray source JIMA card adjustment device of this utility model has the following beneficial effects:

[0017] This invention uses an adjustment mechanism to move the clamping part holding the JIMA card along the X / Y / Z axes. Simultaneously, the clamping part drives the support part to move synchronously along the moving direction of the JIMA card, thereby aligning the imaging area of ​​the JIMA card with the focal spot of the X-ray source. This invention has a compact structure, is simple to operate, and effectively improves the accuracy and efficiency of JIMA card position adjustment, ensuring alignment between the imaging area of ​​the JIMA card and the focal spot of the X-ray source, thus improving the accuracy of focal spot size assessment. Attached Figure Description

[0018] Figure 1 A three-dimensional schematic diagram of an X-ray source JIMA card adjustment device provided in an embodiment of this utility model;

[0019] Figure 2 for Figure 1 A magnified view of a portion of the image.

[0020] Figure 3 This is a front view of an X-ray source JIMA card adjustment device provided in an embodiment of the present invention;

[0021] Figure 4 Left view of an X-ray source JIMA card adjustment device provided in an embodiment of this utility model;

[0022] Figure 5 Right view of an X-ray source JIMA card adjustment device provided in an embodiment of this utility model;

[0023] Figure 6 This is a top view of an X-ray source JIMA card adjustment device provided in an embodiment of the present invention;

[0024] Figure 7 This is a cross-sectional view of an X-ray source JIMA card adjustment device provided in an embodiment of the present invention;

[0025] Figure 8 for Figure 7 A magnified view of a portion of the image.

[0026] Explanation of reference numerals in the attached figures:

[0027] 100, X-ray tube; 200, frame; 210, first clamping plate; 220, second clamping plate; 300, JIMA card; 310, JIMA card imaging area; 400, adjustment mechanism; 410, first linear module; 420, second linear module; 430, third linear module; 440, first connector; 450, second connector; 500, support mechanism; 510, first guide part; 520, second guide part; 530, third guide part; 600, clamping part; 610, first clamping member; 611, slot; 620, second clamping member; 630, locking part; 700, detector; 800, electron beam trajectory; 810, focal spot; 900, target; 910, target surface. Detailed Implementation

[0028] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification.

[0029] It should be understood that the structures, proportions, sizes, etc., illustrated in the accompanying drawings of this specification are merely for illustrative purposes to aid those skilled in the art and are not intended to limit the implementation of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of this utility model, should still fall within the scope of the technical content disclosed in this utility model. Furthermore, the terms such as "upper," "lower," "left," "right," and "middle" used in this specification are merely for clarity of description and are not intended to limit the scope of implementation of this utility model. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of implementation of this utility model.

[0030] like Figures 1 to 8As shown, an embodiment of an X-ray source JIMA card adjustment device includes a frame 200 for clamping X-ray tubes 100 of different specifications, an adjustment mechanism 400 for adjusting the movement of JIMA cards 300 along the X / Y / Z axes, a support mechanism 500 for providing uniform and stable movement of the JIMA cards under force, and a clamping part for clamping JIMA cards of different specifications. The adjustment mechanism 400 and the support mechanism 500 are fixed on the frame and located on opposite sides of the X-ray tube 100. The clamping part 600 is located above the X-ray tube 100, and there is a gap between the clamping part 600 and the top of the X-ray tube. One end of the clamping part 600 is connected to the adjustment mechanism 400, and the other end is connected to the support mechanism 500, so that the adjustment mechanism 400 and the support mechanism 500 are arranged opposite to each other. The adjustment mechanism 400 includes, but is not limited to, manual adjustment. It can also be connected to the adjustment mechanism via a drive device. The drive device drives the adjustment mechanism to work together according to the specific working conditions, so that the JIMA card moves along the X / Y / Z axis to adjust the position of the JIMA card. The frame 200 and the X-ray tube are detachably connected.

[0031] In use, the frame 200 is clamped and fixed to the outer walls on both sides of the X-ray tube 100 to prevent it from falling off. The clamping part 600 is adjusted to clamp and lock the JIMA card, positioning it above the X-ray tube 100. Depending on the specific operating conditions, the adjustment mechanism 400 is finely adjusted to move the clamping part 600 holding the JIMA card along the XY plane for position adjustment. Simultaneously, the support mechanism 500 moves synchronously in the same direction with the clamping part 600 until the imaging area of ​​the JIMA card is aligned with the focal spot 810 formed by the X-ray source electron beam on the target surface. Then, as... Figure 7 and Figure 8 As shown, the adjustment mechanism 400 drives the clamping part 600 holding the JIMA card to move along the Z-axis until the distance between the JIMA card imaging area 310 and the target 900, i.e. the detection area (FOD) ≤ 300μm, thereby achieving the predetermined requirements and realizing the alignment accuracy between the focal spot and the JIMA card to the submicron or even nanometer level.

[0032] In one embodiment, such as Figures 1 to 5As shown, the frame 200 includes a first clamping plate 210 and a second clamping plate 220. The first clamping plate 210 and the second clamping plate 220 are respectively disposed on both sides of the X-ray tube, and the first clamping plate 210 and the second clamping plate 220 are detachably connected, including but not limited to threaded connections. Preferably, in this embodiment, the first clamping plate 210 and the second clamping plate 220 are connected by multiple connecting rods, and the two ends of the connecting rods are threaded to the first clamping plate 210 and the second clamping plate 220 respectively. Grooves are provided on the side walls of both the first clamping plate 210 and the second clamping plate 220 to facilitate tight contact between the first clamping plate 210 and the outer wall of the X-ray tube 100 during installation, thereby clamping the X-ray tube and preventing it from falling off.

[0033] Furthermore, the first clamping plate 210 and the second clamping plate 220 are made of insulating rigid material to ensure that while clamping the X-ray tube 100, the X-ray tube 100 is insulated from the target 900. The insulating rigid material includes, but is not limited to, phenolic resin, high-strength composite material boards, etc., as long as it satisfies the requirements of insulation and has strong rigidity; no specific limitation is made here.

[0034] In one embodiment, such as Figures 1 to 6 As shown, the adjustment mechanism 400 includes a first linear module 410, a second linear module 420, and a third linear module 430. The first linear module 410 is mounted on the frame 200 along the Y-axis. The second linear module 420 is connected to the slider of the first linear module along the Z-axis. The third linear module 430 is connected to the slider of the second linear module along the X-axis. The clamping part 600 is connected to the slider of the third linear module along the Y-axis. The first linear module 410 includes, but is not limited to, a slide rail, a slider, and a ball screw nut pair. The ball screw nut pair is mounted on the slide rail, and the slider is fixed to the ball screw nut pair and slidably mounted on the slide rail. The second linear module 420 and the third linear module 430 have the same structure as the first linear module 410. In this embodiment, the ball screw can be adjusted manually, but can also be driven by a drive unit, avoiding direct manual movement of the JIMA card and improving adjustment accuracy.

[0035] In one embodiment, such as Figure 6As shown, the clamping part 600 includes a first clamping member 610, a second clamping member 620, and a locking part 630. The first clamping member 610 and the second clamping member 620 are disposed opposite to each other, and the first clamping member 610 and the second clamping member 620 form a receiving space for clamping a JIMA card. The first clamping member 610 is connected to the adjustment mechanism 400, and the second clamping member 620 is connected to the support mechanism 500; or, the first clamping member 610 is connected to the support mechanism 500, and the second clamping member 620 is connected to the adjustment mechanism 400. The first clamping member 610 and the second clamping member 620 are connected by the locking part 630, and the connection method between the locking part 630 and the first clamping member 610 and the second clamping member 620 includes, but is not limited to, a threaded connection.

[0036] In use, the locking part 630 is unlocked, separating the first clamping member 610 and the second clamping member 620. The first clamping member 610 is moved away from the second clamping member 620 along the Y-axis by manually adjusting the adjusting mechanism 400. The distance the first clamping member 610 moves can be determined according to the specific JIMA card specifications, so that a space sufficient to accommodate the size of the JIMA card is formed between the first clamping member 610 and the second clamping member 620. The JIMA card is placed in this space, and the first clamping member 610 is driven to move along the Y-axis closer to the second clamping member 620 by the adjusting mechanism 400. With manual assistance, the first clamping member 610 and the second clamping member 620 clamp the JIMA card and lock it in place by the locking part 630. Finally, the adjustment mechanism 400 drives the first clamping member 610 and the second clamping member 620 to clamp the JIMA card and move it to the predetermined position. At the same time, the support mechanism 500 moves synchronously with the first clamping member 610 and the second clamping member 620, so that the JIMA card can move smoothly during the position adjustment process.

[0037] Furthermore, the first clamping member 610 is connected to the adjustment mechanism 400 via the first connecting member 440, and the second clamping member 620 is connected to the support mechanism 500 via the second connecting member 450; or, the first clamping member 610 is connected to the support mechanism 500 via the first connecting member 440, and the second clamping member 620 is connected to the adjustment mechanism 400 via the second connecting member 450; the first connecting member 440 and the second connecting member 450 are coaxial, so as to realize the synchronous operation of the adjustment mechanism 400 and the support mechanism 500, thereby improving the adjustment accuracy of the JIMA card.

[0038] Furthermore, such as Figures 1 to 6As shown, the support mechanism 500 includes a first guide portion 510, a second guide portion 520, and a third guide portion 530. The first guide portion 510 is fixed to the frame 200 along the Z-axis. The second guide portion 520 is connected to the slider of the first guide portion along the Y-axis. The third guide portion 530 is connected to the slider of the second guide portion along the X-axis and to the second clamping member 620 along the Y-axis. The first guide portion 510 includes a guide shaft, a slider, and a linear bearing. The linear bearing is disposed within the slider and sleeved on the guide shaft, allowing the slider to move along the guide shaft under external force. The second guide portion 520 and the third guide portion 530 have the same structure as the first guide portion 510, and will not be described again here.

[0039] In use, when the adjusting mechanism 400 moves the clamping part 600, the second clamping part 620 drives the first guide part 510, the second guide part 520 and the third guide part 530 to move in sync with the direction of movement of the adjusting mechanism 400. During this process, the first guide part 510, the second guide part 520 and the third guide part 530 provide support to prevent the JIMA card from contacting the target 900 and improve the stability of the JIMA card's movement.

[0040] In one embodiment, such as Figure 2 and Figure 6 As shown, a slot 611 for adjusting the distance between the first clamping member 610 and the second clamping member 620 is provided at the connection point, and a gap exists between the first clamping member and the second clamping member at the slot 611 to accommodate different sizes of JIMA cards. The first clamping member 610 and the second clamping member 620 are made of non-metallic elastic materials, including rubber and plastic, to prevent damage to the JIMA card during clamping.

[0041] Specifically, a slot 611 for adjusting the distance between the first clamping member 610 and the second clamping member 620 is provided along the Y-axis at the connection point of the first clamping member 610 and the second clamping member 620, and a gap is provided along the X-axis at the connection point of the first clamping member 610 and the second clamping member 620. Alternatively, a slot 611 for adjusting the distance between the first clamping member 610 and the second clamping member 620 is provided along the X-axis at the connection point of the first clamping member 610 and the second clamping member 620, and a gap is provided along the Y-axis at the connection point of the first clamping member 610 and the second clamping member 620, and a locking part 630 passes through the slot 611 to lock the first clamping member 610 and the second clamping member 620. In use, different sizes of JIMA cards exist for different specifications. By adjusting the distance between the first clamping member 610 and the second clamping member 620, various specifications of JIMA cards can be clamped.

[0042] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A JIMA card adjustment device for an X-ray source, characterized in that, The device includes a frame (200) for holding X-ray tubes (100) of different sizes, an adjustment mechanism (400) for adjusting the movement of a JIMA card (300) along the X / Y / Z axes, a support mechanism (500) for smooth movement of the JIMA card, and a clamping part (600) for holding JIMA cards of different sizes. The adjustment mechanism (400) and the support mechanism (500) are both fixed to the frame (200) and located on opposite sides of the X-ray tube (100). The clamping part (600) is located above the X-ray tube (100). One end of the clamping part (600) is connected to the adjustment mechanism (400), and the other end of the clamping part (600) is connected to the support mechanism (500). The adjustment mechanism (400) drives the clamping part (600) to clamp the JIMA card (300) and move it. The support mechanism (500) moves synchronously with the clamping part (600) so that the imaging area of ​​the JIMA card is aligned with the focal spot (810) of the X-ray source.

2. The X-ray source JIMA card adjustment device according to claim 1, characterized in that, The adjustment mechanism (400) includes a first linear module (410), a second linear module (420), and a third linear module (430). The first linear module (410) is disposed on the frame (200) along the Y-axis direction. The second linear module (420) is connected to the slider of the first linear module along the Z-axis direction. The third linear module (430) is connected to the slider of the second linear module along the X-axis direction. The clamping part (600) is connected to the slider of the third linear module along the Y-axis direction.

3. The X-ray source JIMA card adjustment device according to claim 1, characterized in that, The clamping part (600) includes a first clamping member (610) and a second clamping member (620). The first clamping member (610) and the second clamping member (620) are arranged opposite to each other, and the first clamping member (610) and the second clamping member (620) form a receiving space for clamping a JIMA card. The first clamping member (610) is connected to the adjustment mechanism (400), and the second clamping member (620) is connected to the support mechanism (500). Alternatively, the first clamping member (610) is connected to the support mechanism (500), and the second clamping member (620) is connected to the adjustment mechanism (400).

4. The X-ray source JIMA card adjustment device according to claim 3, characterized in that, The first clamping member (610) is connected to the adjusting mechanism (400) via a first connecting member (440), and the second clamping member (620) is connected to the supporting mechanism (500) via a second connecting member (450); or, the first clamping member (610) is connected to the supporting mechanism (500) via a first connecting member (440), and the second clamping member (620) is connected to the adjusting mechanism (400) via a second connecting member (450); the first connecting member (440) and the second connecting member (450) are coaxial.

5. The X-ray source JIMA card adjustment device according to claim 3, characterized in that, The support mechanism (500) includes a first guide part (510), a second guide part (520) and a third guide part (530). The first guide part (510) is fixed on the frame (200) along the Z-axis direction. The second guide part (520) is connected to the slider of the first guide part along the Y-axis direction. The third guide part (530) is connected to the slider of the second guide part along the X-axis direction. The third guide part (530) is connected to the second clamping member (620) along the Y-axis direction.

6. The X-ray source JIMA card adjustment device according to claim 3, characterized in that, The first clamping member (610) and the second clamping member (620) are detachably connected.

7. The X-ray source JIMA card adjustment device according to claim 3, characterized in that, The connection between the first clamping member (610) and the second clamping member (620) is provided with a slot (611) for adjusting the distance between the first clamping member and the second clamping member, and there is a gap between the first clamping member and the second clamping member at the slot (611) to accommodate JIMA cards of different specifications.

8. The X-ray source JIMA card adjustment device according to any one of claims 3-6, characterized in that, The first clamping member (610) and the second clamping member (620) are made of non-metallic elastic material.

9. The X-ray source JIMA card adjustment device according to any one of claims 1 to 7, characterized in that, The frame (200) includes a first clamping plate (210) and a second clamping plate (220), which are respectively disposed on both sides of the X-ray tube, and the first clamping plate (210) and the second clamping plate (220) are detachably connected.

10. The X-ray source JIMA card adjustment device according to claim 9, characterized in that, The first clamping plate (210) and the second clamping plate (220) are made of insulating rigid material.

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