An instant-heating pharmaceutical solution tank device and a wet processing table

Abstract

This application discloses an instant-heating chemical bath device and a wet processing stage, relating to the field of semiconductor processing technology. The instant-heating chemical bath device includes a chemical bath body, a heating chamber, and an instant-heating component. The chemical bath body has a chemical bath for placing semiconductor workpieces. The heating chamber contains a heat-conducting medium. The instant-heating component includes an instant heater, a delivery pump, a first delivery pipe, and a second delivery pipe. The output end of the instant heater is connected to the heating chamber through the first delivery pipe. The input end of the instant heater is connected to the heating chamber through the second delivery pipe. The delivery pump is configured on either the first or second delivery pipe. The chemical bath body can contact the heat-conducting medium in the heating chamber for heat exchange. The designed instant-heating chemical bath device provides a more compact structure and higher heating efficiency, thereby optimizing the semiconductor cleaning and etching process and improving overall manufacturing efficiency and product quality.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and in particular to an instant-heating liquid tank device and a wet processing table. Background Technology

[0002] In semiconductor manufacturing, cleaning and wet etching are two crucial steps that are essential for ensuring the cleanliness of the wafer surface and accurately removing material layers. To achieve these goals, the chemical bath design in semiconductor cleaning equipment must be able to efficiently control the temperature of the chemicals, as different chemicals have different reaction rates and cleaning effects at different temperatures.

[0003] Traditional methods for controlling the temperature of pharmaceutical solution tanks typically employ water bath heating technology, such as the system described in patent publication CN118053795A. This system includes a heating device installed within a heating chamber, which indirectly heats the pharmaceutical solution by heating a heat-conducting medium (such as water or heat-conducting oil). However, this heating method has the following drawbacks: 1. It requires a large heating (heat exchange) space to accommodate the heating device, resulting in the pharmaceutical solution tank occupying a significant amount of space and failing to meet miniaturization requirements; 2. The heating efficiency is relatively low.

[0004] Therefore, there is an urgent need for a new solution that can provide a more compact structure and higher heating efficiency, thereby optimizing the semiconductor cleaning and etching process and improving overall manufacturing efficiency and product quality. Utility Model Content

[0005] In view of this, the purpose of this application is to provide an instant-heating chemical bath device and a wet process stage, which can provide a more compact structure and higher heating efficiency, thereby optimizing the semiconductor cleaning and etching process and improving overall manufacturing efficiency and product quality.

[0006] To achieve the above-mentioned technical objectives, this application provides an instant-heating medicine tank device, including a medicine tank body, a heating chamber, and an instant-heating component;

[0007] The liquid tank is provided with a liquid cavity for inserting semiconductor workpieces;

[0008] The heating chamber is equipped with a heat-conducting medium;

[0009] The instant heating component includes an instant heater, a delivery pump, a first delivery pipe, and a second delivery pipe;

[0010] The output end of the instant heater is connected to the heating chamber through a first delivery pipe;

[0011] The input end of the instant heater is connected to the heating chamber via a second delivery pipe;

[0012] The delivery pump is configured in the first delivery pipe or the second delivery pipe;

[0013] The liquid tank can come into contact with the heat-conducting medium in the heating chamber for heat exchange.

[0014] Furthermore, it also includes a heating tank;

[0015] The heating tank is provided with the heating cavity;

[0016] The liquid medicine tank is located in the heating tank.

[0017] Furthermore, the top of the heating tank is provided with an opening;

[0018] The opening is equipped with an openable and closable slot cover mechanism.

[0019] Furthermore, it also includes a heating mantle;

[0020] The heating sleeve is fitted onto the outer peripheral surface and / or the outer bottom surface of the medicine tank, and forms the heating cavity between the heating sleeve and the outer peripheral surface and / or the outer bottom surface of the medicine tank.

[0021] Furthermore, a flow valve is provided on the first delivery pipe and / or the second delivery pipe.

[0022] Furthermore, it also includes a temperature sensor;

[0023] The temperature sensor is used to detect the temperature of the heat-conducting medium in the heating chamber and / or the temperature of the medicine in the medicine tank.

[0024] Furthermore, the first conveying pipe and the second conveying pipe are wrapped with a layer of heat-insulating material.

[0025] Furthermore, it also includes flow equalization components;

[0026] The flow equalization component has an inner cavity, and the surface of the flow equalization component has a flow equalization inlet and multiple flow equalization outlets;

[0027] The flow equalization element is disposed in the heating chamber, and the flow equalization inlet is connected to the end of the first delivery pipe that is connected to the heating chamber.

[0028] Furthermore, the flow equalization element is a flow equalization pipe, which is arranged around the inner circumferential surface of the heating cavity.

[0029] Furthermore, it also includes buffer containers;

[0030] The input end of the buffer tank is connected to the output end of the delivery pump via a first three-way valve;

[0031] The output of the buffer tank is connected to the input of the instant heater via a second three-way valve.

[0032] Furthermore, the outer surface of the buffer container is covered with an insulation layer.

[0033] This application also discloses a wet processing table, including the wet processing table body and the aforementioned instantaneous heated chemical solution tank device.

[0034] As can be seen from the above technical solutions, the instantaneous heating liquid tank device designed in this application has the following beneficial effects:

[0035] 1. An instant heating heater is used to heat the heat transfer medium in real time and then circulate it back to the heating chamber through a delivery pump. The instant heating component is designed independently outside the heating chamber, eliminating the need for heating components in the heating chamber. This reduces the volume of the heating chamber and enables the miniaturization of the liquid tank module, making it better suited for processing semiconductor workpieces such as fragments (small-sized wafers) and saving liquid consumption.

[0036] 2. Compared with the traditional water bath heating method, the heater heating method is faster in both heating and cooling speed, and has higher temperature accuracy and uniformity. It also has relatively lower energy consumption, which can optimize the semiconductor cleaning and etching process and improve the overall manufacturing efficiency and product quality. Attached Figure Description

[0037] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 This is a schematic diagram of an instantaneous hot medicine tank device provided in this application;

[0039] In the diagram: 1. Heating tank; 11. Heating chamber; 21. Instant heater; 22. First delivery pipe; 23. Second delivery pipe; 24. Delivery pump; 3. Medicine tank; 4. Temperature sensor. Detailed Implementation

[0040] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the embodiments of this application.

[0041] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0042] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0043] This application discloses an instantaneous hot liquid tank device.

[0044] Please see Figure 1 One embodiment of the instantaneous heating medicine tank device provided in this application includes:

[0045] The liquid tank 3, the heating chamber 11, and the instant heating component.

[0046] The chemical solution tank 3 is provided with a chemical solution cavity for placing semiconductor workpieces. The chemical solution tank 3 is an existing tank structure for etching / cleaning semiconductor workpieces. The semiconductor workpieces are wafers, crystals, etc., and there are no restrictions.

[0047] The heating chamber 11 is provided with a heat-conducting medium, which can be water, heat-conducting oil or other flowable substances with high thermal conductivity.

[0048] The instant heating component includes an instant heater 21, a delivery pump 24, a first delivery pipe 22, and a second delivery pipe 23; the output end of the instant heater 21 is connected to the heating chamber 11 through the first delivery pipe 22; the input end of the instant heater 21 is connected to the heating chamber 11 through the second delivery pipe 23; the delivery pump 24 is disposed on the first delivery pipe 22 or the second delivery pipe 23; the medicine tank 3 can contact the heat-conducting medium in the heating chamber 11 for heat exchange.

[0049] The instant heater 21 can be an existing instant heater (such as an instant faucet). Specifically, it includes core components such as heating pipes and heating elements with heating wires wound around the heating pipes. The heating elements are heated instantly by the heat-conducting medium flowing through the heating pipes. Those skilled in the art can use existing instant heaters or make appropriate changes based on their principles. Specific details will not be elaborated here.

[0050] The instantaneous heating liquid tank device designed in this application has the following beneficial effects:

[0051] 1. An instant heating heater is used to heat the heat transfer medium in real time and then circulate it back to the heating chamber 11 through a delivery pump 24. The instant heating component is designed independently of the heating chamber 11, eliminating the need to install heating components in the heating chamber 11. This reduces the volume of the heating chamber 11 and enables the miniaturization of the liquid tank module, making it better suited for processing semiconductor workpieces such as fragments (small-sized wafers) and saving liquid consumption.

[0052] 2. Compared with the traditional water bath heating method, the heater heating method is faster in both heating and cooling speed, and has higher temperature accuracy and uniformity. It also has relatively lower energy consumption, which can optimize the semiconductor cleaning and etching process and improve the overall manufacturing efficiency and product quality.

[0053] The above is Embodiment 1 of an instant-heating medicine tank device provided in this application. The following is Embodiment 2 of an instant-heating medicine tank device provided in this application. Please refer to the following for details. Figure 1 .

[0054] Based on the solution of Embodiment 1 above:

[0055] The design of the heating chamber 11 can be varied. The following are two examples listed in this application. Those skilled in the art can make appropriate design variations based on these examples:

[0056] The first type:

[0057] A heating tank 1 is designed, containing a heating chamber 11, within which the medicine liquid tank 3 is placed. The heating tank 1 provides a more stable heating environment for the medicine liquid tank 3, allowing the heat-conducting medium in the heating chamber 11 to transfer heat more evenly to the medicine liquid tank 3, further improving the accuracy and uniformity of temperature control. The design of the heating tank 1 also enhances the structural strength of the entire device, making the instantaneous medicine liquid tank device more stable and reliable during use.

[0058] The heating tank 1 has an opening at the top, and a closable tank cover mechanism (not shown in the figure) is installed on the opening. The tank cover mechanism is designed to facilitate the user to open or close the heating tank 1, making it convenient to operate and maintain the heating chamber 11 and the medicine tank 3. The tank cover mechanism can be made of a structure with good sealing performance to prevent the heat transfer medium in the heating chamber 11 from evaporating or leaking during the heating process, and also to prevent external impurities from entering the heating chamber 11, thus maintaining the cleanliness of the heating chamber 11.

[0059] The second type:

[0060] A heating sleeve (not shown in the figure) is designed and fitted onto the outer peripheral surface and / or the outer bottom surface of the medicine tank 3, forming a heating cavity 11 between the heating sleeve and the outer peripheral surface and / or the outer bottom surface of the medicine tank 3.

[0061] The design of the heating jacket allows the heating cavity 11 to be closer to the liquid medicine tank 3, thereby improving heat transfer efficiency. The heating jacket can be flexibly fitted onto different parts of the liquid medicine tank 3, such as the outer circumference or the outer bottom surface, and can be customized according to actual needs to meet the heating requirements of liquid medicine tanks 3 of different sizes and shapes. In addition, the heating cavity 11 formed between the heating jacket and the liquid medicine tank 3, due to its relatively enclosed space, can better maintain the temperature and uniformity of the heat transfer medium, further improving the accuracy of temperature control.

[0062] Furthermore, flow valves (not shown in the figure) are provided on the first delivery pipe 22 and / or the second delivery pipe 23.

[0063] The flow valve design allows users to adjust the circulation flow rate of the heat transfer medium in the heating chamber 11 as needed, thereby achieving precise control of the heating rate. For example, when rapid heating is required, the opening of the flow valve can be increased to increase the circulation speed of the heat transfer medium; while when a stable temperature is required, the opening of the flow valve can be decreased to reduce the circulation speed of the heat transfer medium. This design not only improves the flexibility of the heating process but also enables the instantaneous heating liquid tank device to better adapt to different heating needs.

[0064] Furthermore, it also includes a temperature sensor 4; the temperature sensor 4 is used to detect the temperature of the heat-conducting medium in the heating chamber 11 and / or detect the temperature of the medicine in the medicine tank 3.

[0065] The design of temperature sensor 4 allows users to monitor the temperature of the heat-conducting medium in heating chamber 11 and / or the temperature of the medicinal liquid in the medicine tank 3 in real time, thereby ensuring the accuracy and safety of the heating process. Using the temperature data obtained from temperature sensor 4, users can adjust the instant heating components according to actual needs to achieve precise control of the heating temperature. For example, when the temperature of the heat-conducting medium in heating chamber 11 is detected to be too high, the power of the instant heater 21 can be automatically turned off or reduced to prevent the medicinal liquid from overheating. This design not only improves the controllability of the heating process but also enhances the safety performance of the instant-heating medicine tank device.

[0066] Furthermore, the first conveying pipe 22 and the second conveying pipe 23 are wrapped with a heat insulation material layer.

[0067] The insulation layer effectively reduces heat loss during transport, improving heating efficiency. Simultaneously, the insulation layer prevents operators from accidentally coming into contact with the high-temperature transport pipes, thus enhancing the safety performance of the instantaneous medicine tank device. This design considers all aspects of the heating process, improving both efficiency and safety.

[0068] The insulation layer can be made of high-temperature resistant materials with poor thermal conductivity, such as asbestos, fiberglass, or aerogel. These materials can effectively isolate heat transfer and reduce energy loss while ensuring the normal operation of the delivery pipe. In particular, aerogel, as a novel insulation material, shows great application potential in delivery pipe insulation due to its extremely low thermal conductivity and good mechanical properties. By using high-performance insulation materials such as aerogel, the heating efficiency and safety of instantaneous pharmaceutical tank devices can be further improved.

[0069] Furthermore, it also includes a flow equalization element (not shown in the figure); the flow equalization element has an inner cavity, and the surface of the flow equalization element has a flow equalization inlet and multiple flow equalization outlets; the flow equalization element is disposed in the heating chamber 11, and the flow equalization inlet is connected to one end of the first conveying pipe 22 connected to the heating chamber 11.

[0070] The design of the flow equalization element allows the heat transfer medium output from the instant heater 21 to be more evenly distributed into the heating chamber 11. The heat transfer medium enters the inner cavity of the flow equalization element through the flow equalization inlet and then flows out from multiple flow equalization outlets. This effectively avoids local accumulation or uneven flow of the heat transfer medium in the heating chamber 11, thereby improving the uniformity of temperature distribution in the heating chamber 11. The flow equalization element can adopt various shapes and structures, such as tubular, plate-like, or mesh-like, to adapt to different shapes and sizes of the heating chamber 11. In particular, when the flow equalization element is a flow equalization tube, it can be arranged around the inner circumference of the heating chamber 11, which can more comprehensively cover the heating chamber 11 and further improve the uniformity of temperature distribution. The use of the flow equalization element not only improves heating efficiency but also enhances the performance stability of the instantaneous medicine tank device.

[0071] Furthermore, it also includes a buffer tank (not shown in the figure); the input end of the buffer tank is connected to the output end of the delivery pump 24 via a first three-way valve; the output end of the buffer tank is connected to the input end of the instant heater 21 via a second three-way valve. When it is necessary to clean and maintain the inside of the heating chamber 11 or to disassemble and clean the liquid tank 3, the heat transfer medium can be temporarily stored in the buffer tank.

[0072] During cleaning or maintenance, the switching between the heat transfer medium and the buffer tank can be easily achieved by operating the first and second three-way valves, avoiding waste of the heat transfer medium and the reheating process, thus improving work efficiency. The design of the buffer tank also takes into account the continuity and stability of the heating system, enabling rapid restoration of heating function even during maintenance, minimizing the impact on the production process. The capacity of the buffer tank can be customized according to actual heating requirements and the scale of the chemical tank device to ensure sufficient heat transfer medium storage to meet the needs of long-term heating or high-load operation.

[0073] Furthermore, the outer surface of the buffer tank is covered with an insulation layer. The design of this insulation layer effectively reduces heat loss from the heat transfer medium within the buffer tank, maintaining its temperature stability. This allows the heat transfer medium to quickly reach the required operating temperature when it is reintroduced from the buffer tank into the heating chamber, reducing heating time and energy consumption. The insulation layer can be made of a high-temperature resistant, low-thermal-conductivity material similar to the insulation layer, such as asbestos, fiberglass, or aerogel, ensuring excellent insulation performance.

[0074] This application also discloses a wet processing table, including a wet processing table body and an instantaneous heated chemical solution tank device, which is installed on the wet processing table body.

[0075] The above provides a detailed description of an instantaneous hot liquid tank device and a wet processing table provided in this application. For those skilled in the art, based on the ideas of the embodiments of this application, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. An instantaneous liquid tank device for a medicine, characterized by comprising: It includes a liquid tank (3), a heating chamber (11), and an instant heating component; The liquid tank (3) is provided with a liquid cavity for placing semiconductor workpieces; The heating chamber (11) is provided with a heat-conducting medium; The instant heating component includes an instant heater (21), a delivery pump (24), a first delivery pipe (22), and a second delivery pipe (23); The output end of the instant heater (21) is connected to the heating chamber (11) through the first delivery pipe (22); The input end of the instant heater (21) is connected to the heating chamber (11) through the second delivery pipe (23); The delivery pump (24) is disposed in the first delivery pipe (22) or the second delivery pipe (23); The liquid tank (3) can come into contact with the heat-conducting medium in the heating chamber (11) for heat exchange.

2. The instant heating type chemical bath device according to claim 1, characterized by It also includes a heating tank (1); The heating tank (1) is provided with the heating chamber (11); The liquid tank (3) is located in the heating tank (1).

3. The instant heating type chemical bath device according to claim 2, characterized by The top of the heating tank (1) is provided with an opening; The opening is equipped with an openable and closable slot cover mechanism.

4. The instant heating type chemical bath device according to claim 1, characterized by It also includes a heating mantle; The heating sleeve is fitted onto the outer peripheral surface and / or the outer bottom surface of the liquid tank (3), and forms the heating cavity (11) between the heating sleeve and the outer peripheral surface and / or the outer bottom surface of the liquid tank (3).

5. The instant heating type chemical bath device according to claim 1, wherein A flow valve is provided on the first delivery pipe (22) and / or the second delivery pipe (23).

6. The instant heating type chemical bath device according to claim 1, wherein It also includes a temperature sensor (4); The temperature sensor (4) is used to detect the temperature of the heat-conducting medium in the heating chamber (11) and / or the temperature of the medicine in the medicine tank (3).

7. The instantaneous liquid bath device according to claim 1, wherein The first conveying pipe (22) and the second conveying pipe (23) are wrapped with a heat insulation material layer.

8. The instantaneous liquid bath device according to claim 1, wherein It also includes flow equalization components; The flow equalization component has an inner cavity, and the surface of the flow equalization component has a flow equalization inlet and multiple flow equalization outlets; The flow equalization element is disposed in the heating chamber (11), and the flow equalization inlet is connected to the end of the first delivery pipe (22) that is connected to the heating chamber (11).

9. The instantaneous liquid bath device according to claim 8, wherein The flow equalization element is a flow equalization pipe, which is arranged around the inner circumferential surface of the heating cavity (11).

10. The instantaneous liquid bath device according to claim 1, characterized by It also includes a cache container; The input end of the buffer tank is connected to the output end of the delivery pump (24) via a first three-way valve; The output end of the buffer tank is connected to the input end of the instant heater (21) via a second three-way valve.

11. The instantaneous liquid bath device according to claim 10, wherein The outer surface of the buffer container is covered with an insulation layer.

12. Wet bench, characterized in that It includes a wet processing table body and an instantaneous heated pharmaceutical solution tank device as described in any one of claims 1 to 11.

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