An automatic powdering device

Abstract

The utility model relates to a kind of automatic powdering device, it is related to the technical field of semiconductor material preparation, including frame body, clamp, quartz boat, powdering mechanism and XY driving device.Clay is fixed in the quartz boat for clamp installation to frame body inner bottom;Powdering mechanism is moved along predetermined route under the drive of XY driving device, and uniform powdering is realized.Powdering mechanism is composed of cloth powder bin, screw shaft, driving motor and connecting bracket, cloth powder bin is conical, bottom is communicated cloth powder pipe, top is equipped with powder adding port, screw shaft is driven by driving motor in bin, one end of connecting bracket is connected with cloth powder bin, the other end is installed on XY driving device, and bottom is equipped with vibrator.XY driving device contains movable connecting plate, guide shaft, Y-axis driving device, slider and X-axis driving device.The utility model makes clamp accurate positioning clamping to quartz boat, powdering mechanism moves along predetermined route, uniformly powdering, improves precision, and ensures product quality.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material preparation technology, and in particular to an automatic powder spreading device. Background Technology

[0002] In recent years, novel compound semiconductor materials, represented by antimony selenide (Sb₂Se₃), have attracted widespread attention in cutting-edge fields such as thin-film solar cells and photodetectors due to their excellent photoelectric properties, low toxicity, and abundant elemental reserves. The preparation of high-quality thin films is a prerequisite for realizing high-performance devices. Among these, vapor transport deposition (VTD) is a widely used key technology for preparing high-crystallinity antimony selenide thin films. The basic principle of this method is to use high-purity antimony selenide powder as an evaporation source, placing it in a high-temperature resistant carrier such as a quartz boat. Heating in a high-temperature vacuum environment causes the powder to sublimate and be transported to a low-temperature substrate for deposition. During this process, the physical morphology of the evaporation source in the initial stage, especially its spatial distribution uniformity within the quartz boat, directly determines the rate stability of the subsequent sublimation process and the final macroscopic thickness consistency of the thin film.

[0003] In current technological practice, especially in research laboratories and pilot-scale development stages, the most common and direct method for preparing the aforementioned evaporation source is the "manual sieve powder spreading method." The specific operating procedure is as follows: the operator places a certain amount of antimony selenide powder onto a handheld powder spreading sieve plate, then places the sieve plate above the quartz boat to be filled. Through controlled wrist shaking, the operator simultaneously moves their arm along a preset path (usually a "U" or "S" shape) to evenly spread the powder through the sieve until it covers the entire predetermined area of ​​the quartz boat. This method is widely used due to its simple equipment and low cost.

[0004] However, after in-depth analysis and extensive practice, it was found that this manual sieve powder application method, which relies on manual operation, has a series of inherent defects that seriously affect process stability and film quality:

[0005] The uniformity of powder application is difficult to guarantee, directly affecting the film quality. The manual operation inherently makes it impossible to achieve a constant movement speed and vibration frequency. When the operator moves the arm to turn and retrace the path, the speed will inevitably slow down or even pause at the microsecond level. This results in a significantly higher powder deposition at path corners; while in straight-line movement, the speed is relatively fast, resulting in a lower powder deposition. This macroscopically imperceptible "area density" unevenness will cause "hot spots" (sparse powder areas) to be depleted prematurely during subsequent high-temperature sublimation, while "cold spots" (powder accumulation areas) will have delayed sublimation. Ultimately, this directly leads to quality problems such as uneven thickness and inconsistent morphology of the antimony selenide film formed on the substrate, seriously affecting device performance and yield.

[0006] The operation relies heavily on "feel" and lacks standardization. The quality of powder application depends heavily on the operator's personal experience and so-called "feel," a skill that is difficult to quantify and pass on. Different operators, and even the same operator at different times, will exhibit subtle differences in parameters such as the force, height, and speed of powder application, resulting in extremely poor consistency of the prepared evaporation source and almost zero process repeatability. This is fatal for scientific experiments that require systematic variable studies, as it introduces huge human error, rendering the comparison and analysis of experimental results unreliable.

[0007] In view of the various drawbacks of the existing technologies, there is an urgent need for an automatic powder dispensing device that can accurately, evenly and efficiently distribute powder onto a quartz boat, while preventing powder from getting damp and contaminated, reducing waste, and improving the accuracy of powder dispensing. Utility Model Content

[0008] In order to overcome the shortcomings of the prior art, this utility model discloses an automatic powder spreading device.

[0009] To achieve the above-mentioned objectives, the present invention adopts the following technical solution:

[0010] An automatic powder-spreading device includes:

[0011] Frame;

[0012] The clamp is installed at the bottom of the frame body;

[0013] Quartz boat, fixed to the clamp;

[0014] The powder-spraying mechanism is located within the frame.

[0015] The XY drive unit is installed at the top of the frame and is used to drive the powder-spreading mechanism to move along a predetermined route, so that the powder-spreading mechanism spreads powder evenly into the quartz boat.

[0016] Preferably, the powder-spreading mechanism includes:

[0017] The powder distribution hopper has a conical structure. The bottom of the powder distribution hopper is connected to a powder distribution pipe, and the top of the powder distribution hopper has a powder filling port.

[0018] The spiral shaft is located inside the powder distribution chamber. The spiral part of the spiral shaft is located inside the powder distribution tube, and the connecting part of the spiral shaft is rotatably connected to the top of the powder distribution chamber.

[0019] The drive motor is installed on top of the powder distribution hopper, and the output shaft of the drive motor is connected to the connecting part of the spiral shaft for transmission.

[0020] The connecting bracket has a right-angle bend structure. One end of the connecting bracket is firmly connected to the powder distribution chamber, and the other end is installed on the XY drive device.

[0021] Preferably, a vibrator is installed at the bottom of the connecting bracket.

[0022] Preferably, the XY drive device includes:

[0023] Active connection plate;

[0024] There are two guide shafts spaced apart, and both ends of the guide shafts are fixedly connected to the frame; the two ends of the movable connecting plate are slidably engaged with the two guide shafts respectively.

[0025] The Y-axis drive unit is installed on the top of the movable connecting plate and is used to drive the movable connecting plate to move along the guide axis.

[0026] The slider slides in conjunction with the bottom of the movable connecting plate; the powder-spraying mechanism is installed at the bottom of the slider.

[0027] The X-axis drive unit is installed at the bottom of the movable connecting plate and is used to drive the slider to move along the length of the movable connecting plate.

[0028] Preferably, the Y-axis drive device and the X-axis drive device can be a telescopic cylinder or a lead screw and nut mechanism driven by a motor.

[0029] Preferably, the clamp includes:

[0030] The first fixed frame is securely connected to the frame body;

[0031] The second fixed frame is adjustablely connected to the frame body;

[0032] The top of both the first and second fixing frames is provided with positioning grooves that correspond to and are adapted to the quartz boat.

[0033] By adopting the technical solution described above, this utility model has the following beneficial effects:

[0034] (1) The clamp at the bottom of the frame of this utility model can accurately position and clamp the quartz boat, providing a stable working foundation for subsequent powder spreading; while the powder spreading mechanism can move along a predetermined route (such as a "U" shape or an S shape) under the drive of the XY drive device, so as to achieve uniform powder spreading inside the quartz boat, meet the precision requirements of powder spreading inside the quartz boat, effectively improve the accuracy of powder spreading operation, reduce powder waste, ensure the consistency of powder spreading effect, and improve product quality.

[0035] (2) The structure of the powder-spreading mechanism of this utility model is scientific, reasonable and practical. The powder-spreading bin adopts a conical structure, with the bottom connected to the powder-spreading pipe and the top having a powder-adding port with a cap, which facilitates the addition of powder source and prevents the powder from absorbing moisture and contaminating, thus ensuring powder quality. The powder-spreading bin is made of anti-static material or stainless steel, which has good durability and reliability. At the same time, a transparent window is set to facilitate observation of the remaining powder, which is convenient for timely replenishment and improves work efficiency. The internal spiral shaft can rotate under the drive of the drive motor, realizing precise powder-spreading operation with positioning and quantity, further enhancing the accuracy and controllability of powder spreading. The setting of the connecting bracket and vibrator makes the powder-spreading bin vibrate during powder spreading, causing the powder to gather at the bottom, improving the accuracy of powder quantity, ensuring the accuracy of powder spreading each time, and improving product quality stability.

[0036] (3) The XY drive device of this utility model is flexible and diverse in construction and has high transmission accuracy. The sliding fit between the movable connecting plate and the guide shaft, together with the drive of the Y-axis drive device and the X-axis drive device, can realize the stable and accurate movement of the powder spreading mechanism in the X and Y axis directions, and meet the requirements of different powder spreading paths and positions; the Y-axis drive device and the X-axis drive device can be selected from telescopic cylinders or motor-driven screw and nut mechanisms, etc. Attached Figure Description

[0037] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0038] Figure 2 This is a schematic diagram of the structure of this utility model;

[0039] Figure 3 This is a side view of the present invention;

[0040] Figure 4 Top view of this utility model;

[0041] Figure 5 This is a schematic diagram of the powder-spreading mechanism.

[0042] In the diagram: 1. Frame; 2. Clamp; 2-1. First fixed frame; 2-2. Second fixed frame; 3. Quartz boat; 4. Powder spreading mechanism; 4-1. Powder dispensing bin; 4-2. Spiral shaft; 4-3. Drive motor; 4-4. Connecting bracket; 5. XY drive device; 5-1. Movable connecting plate; 5-2. Guide shaft; 5-3. Y-axis drive device; 5-4. Slider; 5-5. X-axis drive device; 6. Vibrator. Detailed Implementation

[0043] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0044] In the description of this utility model, it should be noted that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use. They are only used to facilitate the description of this utility model and to simplify the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0045] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0046] Example 1:

[0047] Combined with appendix Figures 1-5 An automatic powder-spreading device includes a frame 1, a clamp 2, a powder-spreading mechanism 4, and an XY drive device 5. The frame 1 serves as the mounting base for the entire device, and the clamp 2 is installed at its bottom. The clamp 2 positions and clamps the quartz boat 3, thereby achieving precise powder dispensing inside the quartz boat 3.

[0048] An XY drive unit 5 is installed at the top inner part of the frame 1, while the powder-spreading mechanism 4 is installed at the bottom of the XY drive unit 5. Driven by the XY drive unit 5, the powder-spreading mechanism 4 can move along a predetermined route, such as following a "U" or S-shaped route, thereby achieving the effect of evenly spreading powder into the quartz boat 3.

[0049] Specifically, the structure of the powder-spreading mechanism 4 is shown in the attached figure. Figure 5 As shown, it includes a powder distribution chamber 4-1, a spiral shaft 4-2, and a drive motor 4-3. The powder distribution chamber 4-1 is designed with a conical structure, with a powder distribution pipe connected to its bottom and a powder filling port at the top for adding powder sources, such as antimony selenide powder, into the chamber. To prevent the powder from absorbing moisture or becoming contaminated, a cap is provided at the filling port for sealing after powder is added. The powder distribution chamber 4-1 is made of antistatic material or stainless steel. Furthermore, a transparent window can be installed on one side of the powder distribution chamber 4-1 to allow operators to observe the remaining powder level and replenish it as needed.

[0050] Inside the powder distribution chamber 4-1, there is a spiral shaft 4-2, the spiral part of which is located inside the powder distribution tube, and the connecting part is rotatably connected to the top of the powder distribution chamber 4-1. A drive motor 4-3 is installed on the top of the powder distribution chamber 4-1, and the output shaft of the drive motor 4-3 is connected to the connecting part of the spiral shaft 4-2 for transmission. By controlling the start and stop of the drive motor 4-3, the spiral shaft 4-2 can be driven to rotate or stop, thereby achieving precise powder distribution operations with positioning and quantity.

[0051] The powder distribution bin 4-1 is mounted on the XY drive device 5 via a connecting bracket 4-4. The connecting bracket 4-4 has a right-angle bend structure, with one end firmly connected to the powder distribution bin 4-1 and the other end firmly connected to the XY drive device 5. Furthermore, a vibrator 6 is installed at the bottom of the connecting bracket 4-4. When the powder distribution operation is performed, activating the vibrator 6 causes the powder distribution bin 4-1 to vibrate, causing the powder inside the bin to gather towards the bottom, further improving the accuracy of the powder distribution.

[0052] Example 2:

[0053] Combined with appendix Figures 1-4 An automatic powder-spreading device, compared with Embodiment 1, differs in the construction of the XY drive device 5. The XY drive device 5 in this embodiment includes a movable connecting plate 5-1, guide shafts 5-2, a Y-axis drive device 5-3, and an X-axis drive device 5-5. Two guide shafts 5-2 are spaced apart, and their two ends are securely connected to the frame 1. The two ends of the movable connecting plate 5-1 are slidably engaged with the two guide shafts 5-2, meaning the movable connecting plate 5-1 can move along the Y-axis direction.

[0054] A Y-axis drive device 5-3 is installed on the top of the movable connecting plate 5-1. The function of the Y-axis drive device 5-3 is to drive the movable connecting plate 5-1 to move along the guide shaft 5-2. A slider 5-4 is slidably connected to the bottom of the movable connecting plate 5-1, and the powder-spreading mechanism 4 is installed at the bottom of the slider 5-4. In addition, an X-axis drive device 5-5 is also installed at the bottom of the movable connecting plate 5-1. The X-axis drive device 5-5 is used to drive the slider 5-4 to move along the length direction of the movable connecting plate 5-1, thereby realizing the function of driving the powder-spreading mechanism 4 to move along the X-axis direction.

[0055] The Y-axis drive unit 5-3 and the X-axis drive unit 5-5 can be either telescopic cylinders or a screw-nut mechanism driven by a motor. (See attached...) Figures 2 to 4 As shown, in this embodiment, both the Y-axis drive device 5-3 and the X-axis drive device 5-5 adopt a lead screw and nut mechanism driven by a motor. Since the lead screw and nut mechanism is an existing and mature transmission mechanism, its specific structure and working principle will not be described in detail here.

[0056] Example 3:

[0057] Combined with appendix Figures 1-2 An automatic powder-spreading device, based on Embodiment 1 or 2, further refines the description of the clamp 2. In this embodiment, the clamp 2 includes a first fixing frame 2-1 and a second fixing frame 2-2. Specifically, the first fixing frame 2-1 is securely connected to the frame body 1; while the second fixing frame 2-2 is adjustablely connected to the frame body 1. (See attached...) Figure 1 As shown, a long hole is provided at the bottom of the second fixing frame 2-2. A bolt is installed at the long hole. When the bolt is tightened, the second fixing frame 2-2 can be positioned. When the bolt is loosened, the position of the second fixing frame 2-2 can be adjusted along the length of the long hole to accommodate quartz boats 3 of different lengths.

[0058] In addition, the tops of the first fixing frame 2-1 and the second fixing frame 2-2 are provided with positioning grooves that correspond to and are adapted to the quartz boat 3. This design ensures that the position of the quartz boat 3 is accurately positioned, thus providing a strong guarantee for subsequent automatic and precise powder application operations.

[0059] The parts of this utility model not described in detail are prior art. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that this utility model can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be regarded as exemplary and non-limiting in all respects, and are intended to include all changes that fall within the meaning and scope of equivalents within this utility model.

Claims

1. An automatic duster, characterized in that, include: Frame (1); The clamp (2) is installed at the bottom of the frame (1); Quartz boat (3) is fixed on clamp (2); The powder-spraying mechanism (4) is located inside the frame (1); The XY drive device (5) is installed on the top of the frame (1) and is used to drive the powder spreading mechanism (4) to move along a predetermined route so that the powder spreading mechanism (4) spreads powder evenly into the quartz boat (3).

2. The automatic duster device according to claim 1, wherein The powder-spraying mechanism (4) includes: The powder distribution hopper (4-1) has a conical structure. The bottom of the powder distribution hopper (4-1) is connected to a powder distribution pipe, and the top of the powder distribution hopper (4-1) has a powder filling port. The spiral shaft (4-2) is located inside the powder distribution chamber (4-1). The spiral part of the spiral shaft (4-2) is located inside the powder distribution tube. The connecting part of the spiral shaft (4-2) is rotatably connected to the top of the powder distribution chamber (4-1). The drive motor (4-3) is installed on top of the powder distribution hopper (4-1), and the output shaft of the drive motor (4-3) is connected to the connecting part of the spiral shaft (4-2) for transmission. The connecting bracket (4-4) has a right-angle bent structure. One end of the connecting bracket (4-4) is fastened to the powder container (4-1), and the other end is installed on the XY drive device (5).

3. The automatic powder-spreading device as described in claim 2, characterized in that: A vibrator (6) is installed at the bottom of the connecting bracket (4-4).

4. The automatic duster of claim 1, wherein The XY drive device (5) includes: Movable connecting plate (5-1); The guide shafts (5-2) are two spaced apart, and both ends of the guide shafts (5-2) are fastened to the frame (1); the two ends of the movable connecting plate (5-1) are respectively slidably engaged with the two guide shafts (5-2); The Y-axis drive unit (5-3) is installed on the top of the movable connecting plate (5-1) and is used to drive the movable connecting plate (5-1) to move along the guide shaft (5-2); The slider (5-4) slides in cooperation with the bottom of the movable connecting plate (5-1); the powder-sprinkling mechanism (4) is installed at the bottom of the slider (5-4); The X-axis drive unit (5-5) is installed at the bottom of the movable connecting plate (5-1) and is used to drive the slider (5-4) to move along the length of the movable connecting plate (5-1).

5. The automatic powder-spreading device as described in claim 4, characterized in that: The Y-axis drive device (5-3) and X-axis drive device (5-5) can be telescopic cylinders or lead screw and nut mechanisms driven by motors.

6. The automatic duster device of claim 1, wherein The clamp (2) includes: The first fixed frame (2-1) is securely connected to the frame body (1); The second fixed frame (2-2) is adjustablely connected to the frame body (1); The top of the first fixing frame (2-1) and the second fixing frame (2-2) are both provided with positioning grooves that correspond to and are adapted to the quartz boat (3).

Images