A wafer auxiliary ring management fixture

Abstract

This application relates to the field of semiconductor equipment technology and discloses a wafer auxiliary ring management fixture, including a support base, a stacking body, and a top cover plate. The stacking body is disposed on the upper end surface of the support base and includes arc-shaped portions arranged opposite each other on the support base, and intermediate portions connecting the two arc-shaped portions respectively. The intermediate portions are rectangular in structure. The top cover plate is disposed at the end of the stacking body opposite to the support base and connects the arc-shaped portions and the intermediate portions respectively. The arc-shaped portions and the intermediate portions together form a semi-closed stacking cavity between the support base and the top cover plate. The auxiliary rings are sequentially stacked in the stacking cavity and abut against the inner walls of the arc-shaped portions and the intermediate portions. This application effectively accommodates the auxiliary rings of the wafer, improving wafer fabrication efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically to an auxiliary ring management fixture for wafers. Background Technology

[0002] In semiconductor manufacturing processes, especially before the dicing, grinding, and packaging processes in wafer fabrication, auxiliary rings are generally used to fix the wafer. These rings maintain the tension and shape of the adhesive film during the pre-dicing process and ensure that the wafer does not warp or vibrate on the auxiliary ring. The auxiliary rings also define the standard size of the wafer, facilitating handling by automated equipment (dicing machines, pick-and-place machines, testing machines) using vacuum chucks or robotic arms. On wafer production lines in related technologies, auxiliary rings are usually collected manually after use and temporarily stacked in spare areas of the production line. However, as the stacking height increases, the overall stacking stability is poor due to the ring-shaped structure of the auxiliary rings, making them prone to loosening, slipping, and tipping. This not only hinders the standardized management of materials but may also create potential safety hazards in the production line environment. Utility Model Content

[0003] In view of this, this application provides an auxiliary ring management fixture for wafers to solve the aforementioned technical problems.

[0004] In a first aspect, embodiments of this application disclose a wafer auxiliary ring management fixture for storing auxiliary rings. The fixture comprises a support base, a stacking body, and a top cover. The stacking body is disposed on the upper surface of the support base and includes arc-shaped portions arranged opposite each other on the support base, and intermediate portions connecting two of the arc-shaped portions. The intermediate portions are rectangular in shape. The top cover is disposed at one end of the stacking body away from the support base and connects the arc-shaped portions and the intermediate portions. The arc-shaped portions and the intermediate portions together form a semi-closed stacking cavity between the support base and the top cover. The auxiliary rings are sequentially stacked within the stacking cavity and abut against the inner walls of the arc-shaped portions and the intermediate portions.

[0005] In one possible example, the support base and the top cover are integrally connected to the stacked body.

[0006] In one possible example, the support base is provided with a reinforcement that extends outward from the opening of the stacking cavity on the support base.

[0007] In one possible example, the vertical projections of the support base and the upper cover plate coincide.

[0008] In one possible example, the support base has anti-slip texture on the side facing away from the stack.

[0009] In one possible example, an extension is provided on the other side of the arc-shaped portion that connects to the middle portion. The two ends of the extension are respectively connected to the support base and the upper cover plate, and the end face of the extension away from the arc-shaped portion is rounded.

[0010] In one possible example, the end face of the extension portion opposite to the arcuate portion is provided with a scale, and the scale value of the scale is an integer multiple of the thickness of the auxiliary ring.

[0011] In one possible example, the inner walls of the arcuate portion and the middle portion are provided with a buffered thin adhesive layer.

[0012] In one possible example, the stacking cavity is provided with at least one first limiting post inserted into the support base by the upper cover plate, the first limiting post being located in the inner ring of the auxiliary ring and close to the inner wall of the auxiliary ring.

[0013] In one possible example, the reinforcement is threaded with at least one second limiting post, the second limiting post being parallel to the first limiting post and close to the inner or outer wall of the auxiliary ring.

[0014] In summary, compared with the prior art, this application discloses a wafer auxiliary ring management fixture for storing auxiliary rings. It includes a support base, a stacking body, and a top cover. The stacking body is located on the upper surface of the support base and includes arc-shaped portions arranged opposite each other on the support base, and a middle portion connecting the two arc-shaped portions. The middle portion has a rectangular structure. The top cover is located at the end of the stacking body away from the support base and connects the arc-shaped portions and the middle portion. The arc-shaped portions and the middle portion together form a semi-closed stacking cavity between the support base and the top cover. The auxiliary rings are sequentially stacked within the stacking cavity and abut against the inner walls of the arc-shaped portions and the middle portion. Thus, through the above arrangement, the auxiliary rings of the wafer can be stably and conveniently stored effectively, improving wafer fabrication efficiency. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a three-dimensional structural schematic diagram of the auxiliary ring management fixture for the wafer of this application;

[0017] Figure 2 This is a front view schematic diagram of an auxiliary ring management fixture for the wafer in this application;

[0018] Figure 3 This is a side view of an auxiliary ring management fixture for the wafer in this application.

[0019] Figure 4 This is a top view schematic diagram of an auxiliary ring management fixture for the wafer in this application. Detailed Implementation

[0020] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the claims.

[0021] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, components, features, and elements with the same names in different embodiments of this application may have the same meaning or different meanings, the specific meaning of which must be determined by its interpretation in that specific embodiment or further in conjunction with the context of that specific embodiment.

[0022] It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit this application.

[0023] In the following description, the use of suffixes such as "module," "part," or "unit" to denote elements is solely for the purpose of illustrative purposes and has no specific meaning in itself. Therefore, "module," "part," or "unit" may be used interchangeably.

[0024] In the description of this application, it should be noted that the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] The technical solutions shown in this application will be described in detail below through specific embodiments. It should be noted that the order of description of the following embodiments is not intended to limit the priority of the embodiments.

[0026] Please refer to Figures 1 to 4 The wafer auxiliary ring management fixture of this application embodiment is used to store the auxiliary ring 4, and includes a support base 1, a stacking body 2 and an upper cover plate 3.

[0027] In the specific implementation process, the support base 1 is used as the bearing base of the fixture and can be stably placed on the production line workbench or the ground. That is, the support base 1 can be a thin plate with smooth and flat surfaces on both sides. The stacking body 2 is located on the upper surface of the support base 1 and includes arc-shaped parts 21 arranged opposite to each other on the support base 1, and a middle part 22 connecting the two arc-shaped parts 21 respectively. The middle part 22 is set in a rectangular structure, which can form a stable longitudinal support wall and prevent the auxiliary rings 4 from tilting back and forth. The upper cover plate 3 is located at the end of the stacking body 2 away from the support base 1 and is connected to the arc-shaped parts 21 and the middle part 22 respectively. Thus, the arc-shaped parts 21 and the middle part 22 enclose a semi-closed stacking cavity 5 between the support base 1 and the upper cover plate 3. Several auxiliary rings 4 are stacked in the stacking cavity 5 in sequence and abut against the inner walls of the arc-shaped parts 21 and the middle part 22. Thus, the problem of scattering and tipping when manually stacking the auxiliary rings 4 can be avoided, and safe and orderly storage management can be achieved.

[0028] In one possible implementation, the support base 1 and the upper cover plate 3 are integrally connected to the stacked body 2, preferably integrally formed, thereby improving the structural strength and overall stability and reducing the risk of damage under high-frequency use.

[0029] Furthermore, the support base 1 is provided with a reinforcement part 11, which extends outward from the opening of the stacking cavity 5 on the support base 1 to form a wide supporting edge. That is, the reinforcement part 11 not only improves the bottom stability of the fixture, but also makes it easier for operators to hold the fixture by hand through the reinforcement part 11 when handling it, thus improving the ease of operation. At the same time, the reinforcement part 11 expands the working area of ​​the support base 1, making it easier for it to fully support the auxiliary ring 4.

[0030] Preferably, the support base 1 and the upper cover plate 3 coincide in the vertical projection direction, so that the shape of the entire fixture is symmetrical from top to bottom, which makes it easy to neatly stack the auxiliary rings 4.

[0031] The support base 1 has anti-slip textures on the side away from the stacked body 2, such as stripes, dotted protrusions, or rubber inlays. When the fixture is placed on a metal table or a smooth ground, the anti-slip textures can significantly increase friction, prevent slippage during the stacking process, and improve the reliability of the fixture.

[0032] In one possible implementation, an extension portion 23 is provided on the other side of the arc-shaped portion 21 connected to the middle portion 22. The two ends of the extension portion 23 are respectively connected to the support base 1 and the upper cover plate 3, thereby ensuring that the fixture as a whole forms a semi-closed frame structure, further enhancing the deformation resistance of the stacking cavity 5. The end face of the extension portion 23 facing away from the arc-shaped portion 21 is rounded to avoid scratching or damaging the auxiliary ring 4 during the loading and unloading process.

[0033] Furthermore, a scale 231 is provided on the side end face of the extension portion 23 facing away from the arc-shaped portion 21. The scale value of the scale 231 is an integer multiple of the thickness of the auxiliary ring 4. Thus, by observing the stacking height of the auxiliary ring 4 in the stacking cavity 5, the operator can intuitively know the number of auxiliary rings 4 stacked, avoid omissions or duplicate statistics, and improve the efficiency of material management.

[0034] To further protect the surface of the auxiliary ring 4, a buffer thin adhesive layer (not shown) is provided on the inner wall of the arc-shaped part 21 and the middle part 22. The buffer thin adhesive layer can be made of polyurethane film, silicone layer or EVA material, which can effectively absorb impact during storage and transportation, and prevent the auxiliary ring 4 from being scratched or bumped.

[0035] In one possible implementation, the stacking cavity 5 is provided with at least one first limiting post 6 inserted from the upper cover plate 3 into the support base 1. The first limiting post 6 is located in the inner ring of the auxiliary ring 4 and close to the inner wall of the auxiliary ring 4. Thus, the longitudinal limiting effect of the first limiting post 6 can maintain the concentricity of the auxiliary ring 4 in the stacking cavity 5 and avoid misalignment due to slight shaking.

[0036] The upper cover plate 3 may have a through hole for easy insertion of the first limiting post 6, and the support base 1 may have a threaded hole for threaded connection with the first limiting post 6.

[0037] Preferably, the reinforcing part 11 is threaded with at least one second limiting post 7, the second limiting post 7 is parallel to the first limiting post 6, and the second limiting post 7 is close to the inner wall and / or outer wall of the auxiliary ring 4, so as to further enhance the fixing effect of the auxiliary ring 4 relative to the fixture in the longitudinal and transverse directions, thereby making the fixture highly stable during transportation and handling.

[0038] It is understandable that not all of the auxiliary ring 4 can be matched in the stacking cavity 5. At least part of the auxiliary ring 4 is exposed outside the stacking cavity 5 and supported by the support base 1, preferably the reinforcement 11. This ensures that even after part of the auxiliary ring 4 extends beyond the stacking cavity 5, its overall structure remains stable and will not warp or tilt. This avoids excessive embedding, which would make it difficult to pick up and put down. As a result, the auxiliary ring 4 can be directly grasped by the operator at the outer edge after stacking, and the single or multiple pieces can be picked up and put down quickly without the need for additional tools.

[0039] The present application has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only for the purpose of helping to understand the core ideas of the present application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of the present application. Therefore, the content of this specification should not be construed as a limitation of the present application.

Claims

1. A wafer auxiliary ring management tool, when applied to receive an auxiliary ring, characterized in that, The device includes a support base, a stacking body, and a top cover plate. The stacking body is located on the upper surface of the support base and includes arc-shaped portions arranged opposite each other on the support base, and a middle portion connecting two of the arc-shaped portions. The middle portion has a rectangular structure. The top cover plate is located at one end of the stacking body away from the support base and connects the arc-shaped portions and the middle portion. The arc-shaped portions and the middle portion together form a semi-closed stacking cavity between the support base and the top cover plate. The auxiliary rings are stacked sequentially in the stacking cavity and abut against the inner walls of the arc-shaped portions and the middle portion.

2. The wafer's auxiliary ring management tool of claim 1, wherein, The support base and the upper cover plate are integrally connected to the stacked body.

3. The wafer's subring management jig of claim 1, wherein, The support base is provided with a reinforcement portion, which extends outward from the opening of the stacking cavity on the support base.

4. The wafer's auxiliary ring management tool of claim 1, wherein, The vertical projections of the support base and the upper cover plate coincide.

5. The wafer's subring management jig of claim 1, wherein, The support base has anti-slip texture on the side opposite to the stacked body.

6. The wafer's auxiliary ring management tool of claim 1, wherein, An extension portion is provided on the other side of the arc-shaped portion that connects to the middle portion. The two ends of the extension portion are respectively connected to the support base and the upper cover plate, and the end face of the extension portion away from the arc-shaped portion is rounded.

7. The wafer's auxiliary ring management tool of claim 6, wherein, The extended portion is provided with a scale on the side face away from the arc-shaped portion, and the scale value of the scale is an integer multiple of the thickness of the auxiliary ring.

8. The wafer's auxiliary ring management tool of claim 1, wherein, The inner walls of the arc-shaped portion and the middle portion are provided with a buffer thin adhesive layer.

9. The wafer's auxiliary ring management tool of claim 3, wherein, The stacking cavity is provided with at least one first limiting post inserted into the support base by the upper cover plate. The first limiting post is located in the inner ring of the auxiliary ring and close to the inner wall of the auxiliary ring.

10. The wafer's auxiliary ring management tool of claim 9, wherein, The reinforcing part is threaded with at least one second limiting post, the second limiting post being parallel to the first limiting post and close to the inner or outer wall of the auxiliary ring.

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