A clamp
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 基本半导体(无锡)有限公司
- Filing Date
- 2025-07-14
- Publication Date
- 2026-07-03
AI Technical Summary
The current DTS packaging process has a limited adsorption range, which leads to DTS sheet waste and low packaging production efficiency.
Design a fixture including a platform and a limiting structure. The platform has an opening at the center, and the limiting structure consists of a limiting post and a limiting block to fix the power module board, ensuring uniform distribution and stability of the suction force and preventing displacement.
By expanding the absorption range, the utilization rate of DTS chips and packaging production efficiency can be improved, material waste can be reduced, and overall production efficiency and economy can be enhanced.
Smart Images

Figure CN224460540U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of semiconductor silicon carbide power module packaging technology, and specifically relates to a clamp. Background Technology
[0002] Silicon carbide (SiC) power devices are widely used in new energy vehicles, power electronics, and industrial control due to their excellent high-temperature, high-voltage, and high-frequency performance. Traditional power modules using aluminum wire bonding and solder packaging are increasingly unable to meet the requirements of high-performance SiC devices in terms of lifespan, junction temperature management, and high reliability. The Die-Top System (DTS) packaging method is widely used in automotive-grade SiC power module packaging. This packaging structure applies pre-sintered silver paste or adhesive dots to the top of the chip, forming a multi-functional structural layer with thermal conductivity, electrical conductivity, and support, thereby protecting the chip structure, improving copper wire bonding yield, and simplifying the overall packaging process. However, in actual packaging production, the pick-up process of the DTS structure suffers from certain utilization rate losses. Taking a typical DTS (Distributed Tissue Switch) structure as an example, the radius of the absorbable area on the wafer is approximately 112.5 mm. However, the radius of the wafer table used to support the wafer is 111.5 mm, and this wafer table is offset downwards from the wafer by a certain distance, resulting in structural interference. Furthermore, the space limitation of the central ejector pin (ejector pin radius is 10 mm) ultimately leads to an effective radius of only 101.5 mm for the equipment to absorb DTS. Due to this limited adsorption range, each DTS has an area in its peripheral corners that cannot be effectively adsorbed, resulting in a decrease in the effective utilization rate of the DTS sheet by approximately 10%. This not only leads to material waste but also affects packaging production efficiency. Utility Model Content
[0003] The technical problem solved by this utility model is to provide a fixture that solves the problem of DTS sheet waste caused by the limited adsorption range in the existing DTS packaging process.
[0004] The technical solution of this utility model is: This utility model provides a clamp for fixing a power module board, including: a platform, the platform overlapping with the power module board, the platform having an opening at its center, the diameter of the opening being larger than the diameter of the power chip in the power module board;
[0005] A limiting structure is provided on the platform near the edge of the opening. The limiting structure includes a limiting post and a limiting block. The limiting post and the limiting block are respectively provided on two opposite sides of the opening. Both the limiting post and the limiting block are detachably connected to the platform.
[0006] Furthermore, the limiting post includes a first limiting post and a second limiting post, and the limiting block is located on the center line of the line connecting the first limiting post and the second limiting post. The first limiting post, the second limiting post and the limiting block are all detachably connected to the platform by bolts.
[0007] Furthermore, the height of the limiting post is the same as the height of the limiting block, and the height is 5-8mm.
[0008] Furthermore, the platform includes a first side, a second side, a third side, and a fourth side, wherein the first side is perpendicular to the second side and the third side, and the first side is parallel to the fourth side;
[0009] The first side and the second side are connected at one end, the second side is connected at one end to the third side, the third side is connected at one end to the fourth side, and the fourth side is connected to the first side at one end, all of which have rounded chamfers.
[0010] Furthermore, the first side is provided with two sets of positioning grooves and clearance grooves, the two sets of positioning grooves are arranged opposite to each other at both ends of the first side, and the clearance grooves are located between the two sets of positioning grooves.
[0011] Furthermore, the positioning groove includes a first positioning groove and a second positioning groove, wherein the included angle between the two sides of the first positioning groove is greater than 90°, and the included angle between the two sides of the second positioning groove is less than 90°.
[0012] Furthermore, the clearance groove is located on the side close to the second positioning groove, and the clearance groove is a rectangular groove.
[0013] Furthermore, the opening is a circular opening, and the diameter of the opening is smaller than the diameter of the power module board but larger than the diameter of the power chip in the power module board.
[0014] Furthermore, both the platform and the limiting structure are made of titanium alloy.
[0015] Furthermore, the limiting structure is integrally formed with the platform.
[0016] The beneficial effects of this utility model are as follows: By using a platform with an open structure, the power module board to be absorbed is placed on the platform, ensuring a uniform distribution of the suction force and achieving stable adsorption of the DTS chip; the limiting posts and limiting blocks are located on opposite sides of the platform opening, which can clamp and restrict the power module board, preventing displacement or shaking during processing and improving process stability; both the limiting posts and limiting blocks are detachable structures, allowing users to quickly replace and adjust the limiting positions according to different models or structures of power module boards, reducing equipment adaptation costs. Attached Figure Description
[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 This is a schematic diagram of the structure of a clamp provided in an embodiment of this application;
[0019] Figure 2 This is a top view of the power module block and fixture.
[0020] Figure 3 for Figure 1 A top view of the fixture structure;
[0021] Figure 4 A top view of a fixture provided in another embodiment of this application;
[0022] Figure 5 A schematic diagram of residual DTS in the power template block;
[0023] Figure 6 This is a schematic diagram showing the power template block without residual DTS.
[0024] Explanation of reference numerals in the attached figures:
[0025] 10-Stage, 11-Opening, 12-First side, 13-Second side, 14-Third side, 15-Fourth side, 16-First positioning groove, 17-Second positioning groove, 18-Allowing groove, 20-Limiting structure, 21-Limiting post, 211-First limiting post, 212-Second limiting post, 221-First limiting block, 222-Second limiting block, 223-Third limiting block, 30-Power template block, 31-Power chip. Detailed Implementation
[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0027] In this invention, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (the specific types and structures may be the same or different), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.
[0028] The implementation of this utility model will be described in detail below with reference to the specific accompanying drawings:
[0029] Figure 1 This is a schematic diagram of the structure of a clamp provided in an embodiment of this application. Figure 2 This is a top view of the power module board and fixture, combined with... Figure 1 and Figure 2 The fixture is used to fix the power module board and includes a stage 10 and a limiting structure 20. The stage 10 has an opening at its center and the plane of the stage 10 is parallel to the horizontal plane. The opening 11 at the center of the stage is circular and its diameter is smaller than the diameter of the power module board 30 but larger than the diameter of the chip 31 in the power module board. The edge of the DTS power module board 30 to be picked up is overlapped on the stage 10 without affecting the removal operation of the power chip 31 in the power module.
[0030] The stage 10 is symmetrically equipped with limiting structures 20 near the edge of the opening 11. Each limiting structure 20 includes a limiting post 21 and a limiting block 22, which are respectively located on two opposite sides of the opening 11. The limiting posts 21 and the limiting blocks 22 are detachably connected to the stage 10. The limiting posts 21 engage with slots on the power module board 30, and the limiting blocks 22 are located on the opposite side of the limiting posts 21, restricting the horizontal movement of the power module board 30 and improving process stability.
[0031] In one embodiment, such as Figure 3 As shown, the limiting post 21 includes a first limiting post 211 and a second limiting post 212, which are arranged opposite to each other to control the lateral movement of the power module board 30. A limiting block 22 is located on the midline of the line connecting the first limiting post 211 and the second limiting post 212, forming a stable triangle to prevent the power module board 30 from moving horizontally. The limiting posts 21 and the limiting block 22 have the same height, 5-8mm, which is greater than the thickness of the power module board 30 without affecting the suction operation. The first limiting post 2111, the second limiting post 212, and the limiting block 22 are all bolted to the platform 10. The limiting posts 21 and the limiting block 22 are not limited to this detachable connection method; they can also be connected by slots to ensure that the limiting posts 21 and the limiting block 22 do not wobble in the horizontal direction.
[0032] The outer contour of the stage 10 includes a first side 12, a second side 13, a third side 14, and a fourth side 15. The first side 12 is perpendicular to the second side 13 and the third side 14, and the first side 12 is parallel to the fourth side 15. The outer contour of the stage 10 is a square with rounded corners. The two ends of the first side 12 are respectively provided with a first positioning groove 16 and a second positioning groove 17. The first positioning groove 15 is a triangular slot. The included angle between the two sides of the first positioning groove 16 is greater than 90°, and the included angle between the two sides of the second positioning groove is less than 90°. The first positioning groove 16 and the second positioning groove 17 have the same shape as the slots on the power module board 30 and are used for the wafer stage to clamp and fix the stage 10. An avoidance groove 18 is provided between the first positioning groove 16 and the second positioning groove 17. The avoidance groove 18 is a rectangular structure and is used to avoid components on the wafer stage to avoid affecting the clamping operation.
[0033] In another embodiment, such as Figure 4 As shown, the limiting block 22 also includes a first limiting block 221, a second limiting block 222, and a third limiting block 223. The second limiting block 222 and the third limiting block 223 are respectively located on both sides of the opening symmetrically. The limiting blocks 22 are all tangent to the opening 11. The first limiting block 221, the second limiting block 222, and the third limiting block 223 are respectively attached to the edge of the power module board 30 to fix the position of the power module board 30 and the platform 10 so that they do not move.
[0034] In another embodiment, the limiting structure 20 and the stage 10 are integrally formed. Both the limiting structure 20 and the stage 10 are made of titanium alloy. Titanium alloy has excellent mechanical strength and rigidity, which can maintain the stability of the fixture structure under high-speed handling, packaging operation or external force interference, effectively preventing the limiting post, limiting block or stage from deforming, thereby ensuring the accuracy and safety of DTS chip clamping.
[0035] like Figure 5 As shown, this illustrates the pick-up effect when the power module board 30 is placed directly on the wafer stage. The radius of the pick-up area on the wafer stage is approximately 112.5 mm, but the radius of the wafer stage used for support in the equipment is only 111.5 mm. Furthermore, this wafer stage is offset downwards from the chip by a certain distance, causing structural interference. This is further compounded by the space limitation of the central ejector pin (ejector pin radius is 10 mm), ultimately resulting in an effective pick-up radius of only 101.5 mm for the DTS. This leads to areas in the outer corners of each DTS that cannot be effectively picked up, resulting in a decrease in the effective utilization rate of the DTS wafers by approximately 10%, causing material waste and impacting packaging production efficiency.
[0036] like Figure 6As shown, the gripping effect after using the fixture of this application embodiment is as follows: the effective opening radius of the fixture (136mm), after subtracting the radius of the device ejector pin seat (10mm), can still completely cover the 112.5mm radius of the DTS chip, breaking through the limitation of the original wafer stage's actual gripping radius of only 101.5mm. This effectively avoids the problem of DTS corner areas not being able to be gripped, improving the gripping yield and chip utilization rate by more than 10%. Since the gripping range is extended to the entire effective area of the DTS, corner residues are avoided, increasing the number of packageable units per DTS, significantly improving the utilization efficiency of unit DTS material, reducing material waste, and thus improving the overall packaging production efficiency and economy.
[0037] Obviously, the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
[0038] Note that in the description of this specification, the references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
Claims
1. A fixture for securing a power module board, characterized by, include: A platform is attached to a power module board, and the platform has an opening at its center, the diameter of which is larger than the diameter of the power chip in the power module board. A limiting structure is provided on the platform near the edge of the opening. The limiting structure includes a limiting post and a limiting block. The limiting post and the limiting block are respectively provided on two opposite sides of the opening. Both the limiting post and the limiting block are detachably connected to the platform.
2. A fixture as claimed in claim 1, wherein The limiting post includes a first limiting post and a second limiting post. The limiting block is located on the center line of the line connecting the first limiting post and the second limiting post. The first limiting post, the second limiting post, and the limiting block are all detachably connected to the platform by bolts.
3. A clamp as claimed in claim 2, wherein The height of the limiting post is the same as the height of the limiting block, and the height is 5-8mm.
4. A clamp as claimed in claim 2, wherein The platform includes a first side, a second side, a third side, and a fourth side. The first side is perpendicular to the second side and the third side, respectively, and the first side is parallel to the fourth side. The first side and the second side are connected at one end, the second side is connected at one end to the third side, the third side is connected at one end to the fourth side, and the fourth side is connected to the first side at one end, all of which have rounded chamfers.
5. A clamp as claimed in claim 4, wherein The first side is provided with two sets of positioning grooves and clearance grooves. The two sets of positioning grooves are arranged opposite to each other at both ends of the first side, and the clearance grooves are located between the two sets of positioning grooves.
6. A clamp as claimed in claim 5, wherein The positioning groove includes a first positioning groove and a second positioning groove. The included angle between the two sides of the first positioning groove is greater than 90°, and the included angle between the two sides of the second positioning groove is less than 90°.
7. A clamp as claimed in claim 6, wherein The clearance groove is located on the side close to the second positioning groove, and the clearance groove is a rectangular groove.
8. A clamp as claimed in claim 5, wherein The opening is circular, and its diameter is smaller than that of the power module board but larger than that of the power chip in the power module board.
9. A fixture as claimed in claim 1, wherein, Both the platform and the limiting structure are made of titanium alloy.
10. A clamp as claimed in claim 1, wherein, The limiting structure is integrally formed with the platform.