A synchronous rotating cover for a film calender

Abstract

This invention provides a synchronous rotating cover for a spin coater, comprising a spin coater body, a lifting module, and a spin coater cover. The lifting module controls the raising and lowering of the spin coater cover. The spin coater cover is movably connected to the lifting end of the lifting module and includes a cover cup and a cover edge surrounding the outer edge of the cover cup. After the cover cup contacts the support plate, it forms a sealed spin coater cavity. An upper magnetic suction element is provided on the cover edge, and a lower magnetic suction element is provided on the support plate to magnetically attract the upper magnetic suction element. An unlocking mechanism is provided between the spin coater cover and the lifting module, allowing the spin coater cover to switch between an active state and a locked state. This invention features a synchronously rotating spin coater cover, which can be unlocked as needed for spin coater application. The magnetic suction elements on the spin coater cover and the support plate ensure that the spin coater cover rotates synchronously with the support plate, guaranteeing a sealed cavity, slowing solvent evaporation, reducing external airflow interference, and improving spin coater quality. Furthermore, the lifting module controls the raising and lowering of the spin coater cover, facilitating the loading and unloading of wafers and significantly improving production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a synchronous rotating cover for a spin coater. Background Technology

[0002] With the rapid development of industries such as semiconductors and display panels, photoresist coating is a key step in microelectronics manufacturing, and its equipment performance and process efficiency directly affect product quality and production efficiency. A photoresist coating machine is a specialized piece of equipment that uniformly coats photoresist onto the surface of wafers, glass substrates, and other coated components. Through high-speed rotation, the photoresist is evenly distributed on the substrate surface, forming a photoresist film layer of uniform thickness.

[0003] Currently, common spin coaters on the market typically include a spin coater body, a support plate, and a spin coater chamber. To address the problem of uneven or insufficient spin coater application on large-area wafers, Chinese patent CN213670231U discloses a spin coater accessory and production system. This system includes a stage and a spin coater chamber. The stage has a support surface for fixing the spin coater components. The spin coater chamber is arranged around the periphery of the stage and forms a spin coater chamber covering the spin coater components. The spin coater chamber rotates synchronously with the stage, reducing or eliminating the friction between the periphery of the spin coater components and the air, effectively solving the problem of uneven or insufficient spin coater application on large-area wafers.

[0004] However, although the spin coater in this patent solves the problem of uneven spin coat application, it still has the following technical problems:

[0005] (1) The uniform coating chamber is a one-piece molded structure, which makes it difficult to remove the uniform coating parts and makes it difficult to place or remove the sheets. The sheet can only be removed along the Z-axis from the position of the loading stage to the opening of the uniform coating chamber. The sheet removal process is not easy to operate and is prone to accidental contact with the sheet, which affects production efficiency and product yield.

[0006] (2) After the coating is homogenized, the homogenizing tank needs to be cleaned to ensure the quality of the homogenization. However, the structure of the homogenizing tank is not easy to clean. After the homogenization is completed, the homogenizing tank often needs to be cleaned together with the stage, which increases the workload of disassembly, installation and debugging, resulting in low efficiency.

[0007] (3) The coating machine requires manual opening and closing of the cover during the coating process, which is inconvenient to operate and requires human intervention, thus reducing production efficiency.

[0008] Therefore, there is an urgent need for a synchronous rotating cover for a spin coater with optimized structure to solve the above-mentioned technical problems and improve the ease of operation, cleaning efficiency and applicability of the spin coater. Utility Model Content

[0009] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a synchronous rotating cover for a spin coater, which solves the problem that the spin coater compartment is not easy to remove, clean, or disassemble in the prior art due to the integral molding of the spin coater compartment.

[0010] To achieve the above and other related objectives, this utility model provides a synchronous rotating cover for a spin coater, comprising a spin coater body, a lifting module, and a spin coater cover. The spin coater body is provided with a rotatable support plate, and the support plate is provided with a suction cup for fixing the spin coater components. The lifting module is disposed on the spin coater body and is used to control the lifting and lowering of the spin coater cover. The spin coater cover is movably connected to the lifting end of the lifting module. The spin coater cover includes a cover cup and a cover edge surrounding the outer edge of the cover cup. After the cover cup contacts the support plate, it can form a sealed spin coater cavity. An upper magnetic suction element is provided on the cover edge, and a lower magnetic suction element is provided on the support plate to magnetically suction the upper magnetic suction element.

[0011] In one embodiment of this utility model, an unlocking mechanism is provided between the glue-spreading cover and the lifting module, and the glue-spreading cover switches between an active state and a locked state through the unlocking mechanism.

[0012] In one embodiment of this utility model, the unlocking mechanism includes a cover, an inner shaft, a retaining ring, and a pin. The top of the cover is connected to the lifting end of the lifting module. A movable cavity is formed inside the cover, and a through hole for the inner shaft to enter is formed at the bottom of the cover. The inner shaft is rotatably and vertically disposed in the movable cavity. A retaining ring is fixed to one end of the inner shaft located in the movable cavity. A downward-facing pin is provided at the bottom of the retaining ring. A positioning groove that mates with the pin is formed at the bottom of the cover. The adhesive coating is connected to the lower end of the inner shaft.

[0013] In one embodiment of the present invention, the unlocking mechanism further includes a bearing housing, which is connected to the lower part of the cover. The bearing housing contains a bearing, which is arranged around the inner shaft.

[0014] In one embodiment of this utility model, an outer bushing is further provided between the inner shaft and the bearing.

[0015] In one embodiment of this utility model, the adhesive coating cover is detachably connected to the unlocking mechanism via a quick-release mechanism.

[0016] In one embodiment of the present invention, the quick-release mechanism includes a connecting flange, an unlocking positioning bead, and a connecting box. The connecting flange is fixed to the lower end of the inner shaft, the unlocking positioning bead is disposed on the bottom surface of the connecting flange, and the connecting box is disposed on the top of the adhesive coating cover. The connecting box has a slot for the connecting flange to mate with it.

[0017] In one embodiment of the present invention, the connecting box is detachably mounted at the top center of the adhesive coating via positioning screws.

[0018] In one embodiment of the present invention, the lifting module includes a lifting motor and a connecting arm, one end of the connecting arm is connected to the output end of the lifting motor, and the other end of the connecting arm is connected to the uniform adhesive cover.

[0019] In one embodiment of this utility model, the spin coater body is provided with a rotary motor, the output end of which is connected to the carrier plate for controlling the rotation of the carrier plate.

[0020] As described above, the synchronous rotating cover for the spin coater of this invention has the following beneficial effects:

[0021] 1. This utility model is equipped with a synchronously rotating spin coater. The spin coater can be unlocked as needed for spin coating. The magnetic attraction between the spin coater and the carrier plate allows the spin coater to rotate synchronously with the carrier plate, ensuring a sealed cavity, slowing down solvent evaporation, reducing external airflow interference, and improving spin coating quality. Furthermore, the lifting module controls the raising and lowering of the spin coater, facilitating the placement or removal of wafers and greatly improving production efficiency.

[0022] 2. The coating cover switches between active and locked states through the cooperation of the lifting module and the unlocking mechanism. This allows the coating cover to rotate synchronously after being magnetically attached to the carrier plate. At the same time, the coating cover can be fixed in place after it is moved up and opened, which is convenient for operation. In addition, the fully automated control reduces human intervention, ensures production efficiency, and is conducive to large-scale production.

[0023] 3. The coating cover adopts a quick-release design, which is convenient and quick to install and remove, easy to clean, ensures coating quality, reduces the workload of disassembly, installation and debugging, and improves work efficiency;

[0024] 4. The coating machine of this utility model is suitable for multi-size films. The process parameters can be adjusted according to different sizes of films to achieve similar coating effects. In particular, the coating quality of the edges of large-size films can be guaranteed, which greatly improves the applicability of the equipment and the coating quality. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the synchronous rotating cover for the spin coater disclosed in this embodiment of the present invention in its working state.

[0026] Figure 2 This is a schematic diagram of the synchronous rotating cover for the spin coater disclosed in this embodiment of the present invention in the open state.

[0027] Figure 3 This is a schematic diagram of the uniform coating cover and lifting module disclosed in the embodiments of this utility model.

[0028] Figure 4 This is a schematic diagram of the uniform coating cover disclosed in the embodiments of this utility model.

[0029] Figure 5 This is a cross-sectional schematic diagram of the unlocking mechanism of the adhesive coating cover disclosed in the embodiments of this utility model in the active state.

[0030] Figure 6 This is a cross-sectional schematic diagram of the unlocking mechanism of the adhesive coating cover disclosed in the embodiments of this utility model in the locked state.

[0031] Figure 7 This is a schematic diagram of the quick-release mechanism of the adhesive coating cover disclosed in the embodiments of this utility model.

[0032] Figure 8 This is a cross-sectional schematic diagram of the synchronous rotating cover for the spin coater disclosed in the embodiments of this utility model.

[0033] Figure 9 This is a cross-sectional schematic diagram of the quick-release mechanism of the adhesive coating cover disclosed in the embodiments of this utility model.

[0034] Component designation explanation

[0035] 1. Spreading machine body; 11. Carrying plate; 12. Suction cup; 13. Lower magnetic suction component; 14. Rotary motor; 2. Spreading cover; 21. Cover cup; 22. Cover edge; 23. Upper magnetic suction component; 3. Lifting module; 31. Connecting arm; 4. Unlocking mechanism; 41. Cover body; 42. Movable cavity; 43. Inner shaft; 44. Snap ring; 45. Pin; 46. Positioning groove; 47. Bearing box; 48. Bearing; 49. Outer bushing; 5. Quick release mechanism; 51. Connecting flange; 52. Unlocking positioning bead; 53. Connecting box; 54. Snap groove; 55. Positioning screw. Detailed Implementation

[0036] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. It should be noted that, unless otherwise specified, the following embodiments and features can be combined with each other.

[0037] Please see Figures 1-2This utility model provides a synchronous rotating cover for a spin coater, comprising a spin coater body 1, a lifting module 3, and a spin coater cover 2. The spin coater body 1 is provided with a rotatable support plate 11, and the support plate 11 is provided with suction cups 12 for fixing the spin coater components. The lifting module 3 is mounted on the spin coater body 1 and is used to control the lifting and lowering of the spin coater cover 2. The spin coater cover 2 is movably connected to the lifting end of the lifting module 3. The spin coater cover 2 includes a cover cup 21 and a cover edge 22 surrounding the outer edge of the cover cup 21. After the cover cup 21 contacts the support plate 11, it can form a sealed spin coater cavity. Multiple upper magnetic suction elements 23 are provided on the cover edge 22, and a lower magnetic suction element 13 is provided on the support plate 11 to magnetically attract the upper magnetic suction elements 23. When the spin coater cover 2 descends to its final position, the cover cup 21 contacts the support plate 11 to form a sealed spin coater cavity, and simultaneously the upper magnetic suction elements 23 and the lower magnetic suction elements 13 attract each other, causing the spin coater cover 2 to fit tightly against the support plate 11. When the carrier disk 11 rotates, the glue coating cover 2 will also rotate synchronously due to the magnetic attraction, achieving the effect of synchronous rotation.

[0038] The spin coater body 1 has a recessed mounting groove on its top, and a support plate 11 is installed in the mounting groove. A suction cup 12 is fixedly connected to the center of the support plate 11 and is connected to the vacuum system inside the spin coater body 1. The suction cup 12 firmly fixes the substrate to be spin-coated onto the support plate 11 through vacuum suction force. The spin coater body 1 also has a rotary motor 14, the output of which is connected to the support plate 11 to control its rotation. The rotary motor 14 is a variable frequency motor, which enables precise speed control. The power of the rotary motor 14 is designed according to the spin coater process requirements to meet the needs of different spin coater processes.

[0039] The lifting module 3 is installed on the main body 1 of the spin coater and is used to control the lifting movement of the spin coater cover 2. The lifting module 3 includes a lifting motor and a connecting arm 31. One end of the connecting arm 31 is connected to the output end of the lifting motor, and the other end of the connecting arm 31 is connected to the spin coater cover 2.

[0040] refer to Figures 3-6 An unlocking mechanism 4 is provided between the coating cover 2 and the connecting arm 31. The coating cover 2 switches between an active state and a locked state through the unlocking mechanism 4. See details. Figures 5-6The unlocking mechanism 4 includes a cover 41, an inner shaft 43, a retaining ring 44, and a pin 45. The top of the cover 41 is connected to the connecting arm 31. A movable cavity 42 is formed inside the cover 41, and a through hole is formed at the bottom of the cover 41 for the inner shaft 43 to enter the movable cavity 42. The diameter of the through hole is slightly larger than the outer diameter of the inner shaft 43, so that the inner shaft 43 can be raised, lowered, and rotated in the movable cavity 42. The upper end of the inner shaft 43 is located in the movable cavity 42, and the lower end extends out of the cover 41 through the through hole and is connected to the adhesive coating cover 2. A retaining ring 44 is fixed at one end of the inner shaft 43 located in the movable cavity 42. The outer diameter of the retaining ring 44 is larger than the diameter of the through hole, and a pin 45 is arranged downward at the bottom of the retaining ring 44. A positioning groove 46 that mates with the pin 45 is formed at the bottom of the cover 41. The top of the inner shaft 43 is provided with an end cap, which is made of flexible material to cushion the inner shaft when it moves up and down in the movable cavity 42, reducing the damage caused by the inner shaft 42 hitting the top of the cover 41.

[0041] When the glue-spreading cover 2 descends under the action of the connecting arm 31 to align with the carrier plate 11, refer to Figure 5 At this time, the cover 41 is in the depressed position, and the inner shaft 43 is in a higher position relative to the cover 41, causing the pin 45 to disengage from the positioning groove 46, and the inner shaft 43 can rotate freely. At this time, the glue-spreading cover 2 is in an active state. When the connecting arm 31 raises the glue-spreading cover 2 to the open state, refer to... Figure 6 At this time, the inner shaft 43 descends under the gravity of the glue-coating cover 2, which drives the pin 45 on the retaining ring 44 downward to the insertion positioning groove 46, so that the inner shaft 43 is restricted to a fixed position and cannot rotate, and is in a locked state.

[0042] The unlocking mechanism 4 also includes a bearing housing 47, which is connected to the lower part of the cover 41. The bearing housing 47 contains two bearings 48, which are arranged around the inner shaft 43. An outer bushing 49 is also provided between the inner shaft 43 and the bearings 48. The outer bushing 49 is made of copper alloy, which has good wear resistance and self-lubricating properties. The inner diameter of the outer bushing 49 matches the outer diameter of the inner shaft 43, and its outer diameter matches the inner diameter of the bearings 48.

[0043] refer to Figures 5-9 The adhesive coating cover 2 is detachably connected to the unlocking mechanism 4 via a quick-release mechanism 5. The quick-release mechanism 5 includes a connecting flange 51, unlocking positioning beads 52, and a connecting box 53. The connecting flange 51 is fixed to the lower end of the inner shaft 43, and a number of unlocking positioning beads 52 are provided on the bottom surface of the connecting flange 51. The unlocking positioning beads 52 are evenly distributed in a ring on the bottom surface of the connecting flange 51.

[0044] The connecting box 53 is located on top of the adhesive coating cover 2. The connecting box 53 is cylindrical in shape and has a slot 54 inside that mates with the connecting flange 51. The slot 54 is T-shaped, which enables quick insertion and locking of the connecting flange 51. The entrance height of the slot 54 is slightly larger than the diameter of the unlocking positioning bead 52, and the internal height of the slot 54 is slightly smaller than the diameter of the unlocking positioning bead 52, forming a snap-fit ​​structure.

[0045] The connecting box 53 is detachably mounted at the top center of the coating cover 2 using positioning screws 55. The number of positioning screws 55 is typically four to six, evenly distributed in a ring around the connecting box 53. The positioning screws 55 pass through screw holes on the connecting box 53 and connect to threaded holes on the top of the coating cover 2, thus achieving a fixed connection between the connecting box 53 and the coating cover 2.

[0046] In use, the substrate to be coated is first placed on the support plate 11 and fixed by the suction cup 12. Then, the lifting module 3 is activated to control the coating cover 2 to descend until the cover cup 21 contacts the support plate 11 to form a sealed coating cavity. The upper magnetic suction member 23 and the lower magnetic suction member 13 attract each other, making the coating cover 2 fit tightly against the support plate 11. At this time, the cover 41 of the unlocking mechanism 4 is in the lower position, causing the pin 45 to disengage from the positioning groove 46, and the coating cover 2 is in an active state. Next, the rotary motor 14 is activated to control the support plate 11 to rotate. Due to the magnetic attraction, the coating cover 2 will also rotate synchronously, achieving the effect of synchronous rotation. After coating is completed, the rotary motor 14 is stopped first, and then the lifting module 3 is activated to control the coating cover 2 to rise. At this time, the pin 45 of the unlocking mechanism 4 is inserted into the positioning groove 46 under the action of gravity, switching the coating cover 2 to the locked state.

[0047] In summary, this invention features a synchronously rotating spin coater that can be unlocked as needed. Magnetic attachments on the spin coater and the carrier plate ensure synchronized rotation, guaranteeing a sealed cavity, slowing solvent evaporation, minimizing external airflow interference, and improving spin coat quality. Furthermore, a lifting module controls the raising and lowering of the spin coater, facilitating wafer loading and unloading and significantly increasing production efficiency. Therefore, this invention effectively overcomes the shortcomings of existing technologies and possesses high industrial applicability.

[0048] The terms used in this specification, such as "upper", "lower", "left", "right", "front", "back", "middle" and "one", are merely for clarity of description and are not intended to limit the scope of implementation of this utility model. Any changes or adjustments to their relative relationships, without substantially altering the technical content, shall also be considered within the scope of implementation of this utility model.

[0049] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit this utility model. All equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A synchronous rotating cover for a spin coater, characterized in that, The device includes a spin coater body, a lifting module, and a spin coater cover. The spin coater body has a rotatable support plate, and the support plate has a suction cup for fixing the spin coater components. The lifting module is mounted on the spin coater body and is used to control the lifting and lowering of the spin coater cover. The spin coater cover is movably connected to the lifting end of the lifting module. The spin coater cover includes a cover cup and a cover edge surrounding the outer edge of the cover cup. After the cover cup contacts the support plate, it can form a sealed spin coater cavity. The cover edge has an upper magnetic suction component, and the support plate has a lower magnetic suction component that cooperates with the upper magnetic suction component for magnetic attraction.

2. The synchronous rotating cover for the spin coater according to claim 1, characterized in that, An unlocking mechanism is provided between the coating cover and the lifting module, and the coating cover can switch between an active state and a locked state through the unlocking mechanism.

3. The synchronous rotating cover for the spin coater according to claim 2, characterized in that, The unlocking mechanism includes a cover, an inner shaft, a retaining ring, and a pin. The top of the cover is connected to the lifting end of the lifting module. The cover has a movable cavity, and the bottom of the cover has a through hole for the inner shaft to enter. The inner shaft is rotatably and vertically mounted in the movable cavity. A retaining ring is fixed to one end of the inner shaft located in the movable cavity. A pin facing downwards is provided at the bottom of the retaining ring. A positioning groove that mates with the pin is provided at the bottom of the cover. The adhesive coating is connected to the lower end of the inner shaft.

4. The synchronous rotating cover for the spin coater according to claim 3, characterized in that, The unlocking mechanism also includes a bearing housing, which is connected to the bottom of the cover. The bearing housing contains a bearing, which is arranged around the inner shaft.

5. The synchronous rotating cover for the spin coater according to claim 4, characterized in that, An outer bushing is also provided between the inner shaft and the bearing.

6. The synchronous rotating cover for the spin coater according to any one of claims 2 to 5, characterized in that, The adhesive coating cover is detachably connected to the unlocking mechanism via a quick-release mechanism.

7. The synchronous rotating cover for the spin coater according to claim 6, characterized in that, The quick-release mechanism includes a connecting flange, an unlocking positioning bead, and a connecting box. The connecting flange is fixed to the lower end of the inner shaft. The unlocking positioning bead is disposed on the bottom surface of the connecting flange. The connecting box is disposed on the top of the adhesive coating cover. The connecting box has a slot for the connecting flange to mate with it.

8. The synchronous rotating cover for the spin coater according to claim 7, characterized in that, The connecting box is detachably mounted at the top center of the adhesive coating cover by positioning screws.

9. The synchronous rotating cover for a spin coater according to any one of claims 1 to 5, characterized in that, The lifting module includes a lifting motor and a connecting arm. One end of the connecting arm is connected to the output end of the lifting motor, and the other end of the connecting arm is connected to the uniform adhesive cover.

10. The synchronous rotating cover for the spin coater according to claim 1, characterized in that, The spin coater is equipped with a rotary motor inside its main body. The output end of the rotary motor is connected to the support plate and is used to control the rotation of the support plate.

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