Wire saw and coplanar detection device thereof

Abstract

The utility model relates to wire cutting technical field, concretely provides a kind of wire cutting machine and its coplanar detection device, the wire cutting machine includes guide wheel group, the guide wheel group includes at least one guide wheel, the coplanar detection device can be set in the position of wire cutting machine close to the guide wheel, wherein, the coplanar detection device includes: at least two detection components, the detection component is set in the position of wire cutting machine close to the cutting line of guide wheel;And driving part, it can drive at least two in the detection component close to or contact the cutting line close to the guide wheel to be in working condition, to: the relative position of cutting line and the wire slot of guide wheel is detected by the detection component. By such composition, the coplanar level of cutting line close to guide wheel and guide wheel between can be detected by coplanar detection device. As in the case of coplanar level not up to standard, coplanar can be found by the way of fine adjustment guide wheel.

Description

Technical Field

[0001] This utility model relates to the field of wire cutting technology, specifically providing a wire cutting machine and its coplanar detection device. Background Technology

[0002] A slicing machine is a multi-wire dicing device that produces silicon wafers by slicing hard and brittle materials such as silicon rods using cutting wires (such as diamond wire, which is typically steel wire with tiny diamond particles embedded in its surface) wound around a cutting mechanism. Typically, a slicing machine includes a cutting mechanism (usually comprising at least two main cutting rollers) and two take-up and unwinding mechanisms (usually comprising take-up and unwinding rollers). A guide roller assembly is located between the cutting mechanism and each take-up and unwinding mechanism. The main cutting rollers have dense annular grooves (also called main roller grooves). By winding diamond wire into these grooves, a wire mesh capable of continuously cutting the silicon rod is formed. Based on this, the reciprocating motion of the diamond wire between the cutting mechanism and the take-up and unwinding mechanisms enables multi-wire dicing of the silicon rod close to the cutting mechanism.

[0003] Ensuring the coplanarity of the diamond wires near the guide rollers (such as the diamond wires between guide rollers, the diamond wires between the guide roller and the main cutting roller, etc.) with the nearest guide roller is a crucial step in ensuring the cutting stability and quality of the slicing machine. Currently, in existing slicing machines, during or after the diamond wire mesh laying process, the coplanarity between the diamond wires and guide rollers (such as reversing rollers) needs to be adjusted manually or by adjusting the coiled diamond wires using auxiliary measurements. This method suffers from inaccurate coplanarity adjustments, leading to inaccurate mesh laying and consequently, skewed or uneven diamond wires near the guide rollers. This results in wear between the diamond wires and the guide rollers / guide roller grooves, increasing the risk of wire breakage. Furthermore, manual adjustment is time-consuming and inevitably subject to individual differences in operation. While automatic / semi-automatic methods for achieving coplanarity between the diamond wires and guide rollers typically require the use of detection components, if these components are relatively fixed, they may interfere with the slicing process. Summary of the Invention

[0004] This utility model aims to solve at least part of the above-mentioned technical problems and / or solve at least part of the above-mentioned technical problems. Specifically, it proposes a coplanar detection device that can switch between working and non-working states, which can detect the coplanar level between the cutting line and the guide wheel near the guide wheel as accurately and / or in a timely manner as possible, so as to adjust the position / or attitude of the guide wheel based on the detection results to find the coplanar state, thereby ensuring the operational reliability and / or cutting quality of the slicer.

[0005] In view of this, in a first aspect, the present invention provides a coplanar detection device for a wire cutting machine, the wire cutting machine including a guide wheel assembly, the guide wheel assembly including at least one guide wheel, the coplanar detection device being disposed on the wire cutting machine near the guide wheel, wherein the coplanar detection device includes: at least two detection components, the detection components being disposed on the wire cutting machine near the cutting line of the guide wheel; and a driving component, which is capable of driving at least two of the detection components near or in contact with the cutting line near the guide wheel to be in a working state, so as to: detect the relative position of the cutting line and the groove of the guide wheel by the detection components.

[0006] With this configuration, when the coplanarity detection device is installed on the wire EDM machine, it is possible to detect the relative position between the cutting line near the guide wheel and the groove of the guide wheel when at least two detection components are in operation. Based on the detected relative position, it can be determined whether the coplanarity between the cutting line and the groove of the guide wheel meets the standard.

[0007] If, during or after wiring on a wire saw unit, a non-compliant coplanarity is detected, the current coplanarity can be improved by manually or automatically adjusting the position of the guide wheels. For example, the position / attitude of the guide wheels can be fine-tuned manually or through a power adjustment system such as a servo control system configured on the guide wheels (e.g., tension wheels) to find the coplanar position. Based on this adjustment, the coplanarity between the cutting line near the guide wheels and the guide wheels is achieved, thus ensuring the accuracy of the wiring and achieving coplanar adjustment of the cutting line.

[0008] It is understood that those skilled in the art can determine the structural form of the coplanar detection device and its detection components, the number / detection principle of the detection components, the way the detection components constitute the coplanar detection device, and the configuration / position of the coplanar detection device on the wire cutting machine, as well as the position / relative position of each detection point, etc., according to actual needs.

[0009] It should be noted that theoretical coplanarity should be understood as (taking the grooves on the guide rollers and the grooves on the rollers (including the cutting main roller, take-up and unwind rollers, etc.) as roughly V-shaped grooves, and taking the coplanarity between two adjacent guide rollers (denoted as the first guide roller and the second guide roller respectively) as an example), theoretically speaking:

[0010] When the first guide wheel and the second guide wheel are arranged in parallel, the bottom of the V-groove of the first guide wheel forms a first plane, and the bottom of the V-groove of the second guide wheel forms a second plane. The first plane and the second plane are located in the same plane and are therefore considered to be coplanar.

[0011] When the first guide wheel or the second guide wheel is arranged at an angle, the V-groove of the first guide wheel forms a first plane. When the cutting line is routed from the second guide wheel to the second guide wheel, if the cutting line corresponding to the position of the first guide wheel is continuously in the first plane, it is considered to be coplanar.

[0012] However, in actual engineering, if the angle between the cutting line and the first plane is not greater than a certain threshold, the coplanar level can be considered to meet the standard.

[0013] In one possible implementation of the above-mentioned coplanar detection device, the detection components include a first detection component and a second detection component, and the driving component has a first power output end and a second power output end. The driving component drives the first power output end and the second power output end to drive the first detection component and the second detection component to synchronously approach or contact the cutting line of the guide wheel.

[0014] With this configuration, it is possible to determine whether the coplanarity between the cutting line and the groove of the guide wheel meets the standard through a two-point detection method.

[0015] It is understood that those skilled in the art can determine how the power output terminal brings the detection component closer to the cutting line based on actual needs, such as by directly outputting linear motion closer to the cutting line or by converting it into linear motion closer to the cutting line through power transmission. Furthermore, the drive unit may include two units, each configured with one power output terminal, or the same drive unit may be configured with two power output terminals.

[0016] In one possible implementation of the above-mentioned coplanar detection device, the driving component is a pneumatic assembly.

[0017] This configuration illustrates the possible structural forms of the drive components and the corresponding power output methods. Since the wire EDM machine also has other structures requiring pneumatic drive, the drive components are equipped with pneumatic connectors, allowing multiple pneumatic drive components to be driven by the same air source.

[0018] In one possible implementation of the above-mentioned coplanar detection device, an eccentric structure is provided on the first power output end and the second power output end, and the driving component drives the eccentric structure to rotate by driving the first power output end and the second power output end to rotate.

[0019] This configuration provides a possible drive transmission method. Specifically, when the eccentric structure rotates to a position close to the detection component when its radial dimension is larger, the detection component can be pushed closer to the cutting line.

[0020] In one possible implementation of the above-mentioned coplanar detection device, the eccentric structure is a cam.

[0021] This configuration presents one possible structural form for the eccentric structure.

[0022] In one possible implementation of the coplanar detection device described above, the eccentric structure has a mounting position, and different detection components can be removably adapted to the mounting position.

[0023] This configuration allows for flexible selection of the detection method to determine whether the coplanar level meets the standard by changing the detection components. For example, contact detection can be replaced with non-contact detection depending on the actual situation.

[0024] It is understood that those skilled in the art can determine the structural form of the mounting position and its placement on the eccentric structure according to actual needs. For example, the mounting position corresponding to the same eccentric structure has two locking positions: one adapted to a contact detection component, and the other adapted to a non-contact detection component. Multiple detection components can be configured in the mounting position, and the specifications and principles of these components can be the same or different. Based on this, the device can be modularly designed, allowing for different detection schemes to be adopted for different scenarios (such as different wire cutting machines or different guide wheels on the same wire cutting machine) according to actual needs, thus enabling more flexible adjustment of the coplanar search scheme. For example, the adaptation method to the mounting position is such that the end near the mounting position can be freely accommodated within the mounting position and abut against the bottom of the mounting position.

[0025] In one possible implementation of the above-mentioned coplanar detection device, when both the first detection component and the second detection component are in contact with the cutting line, the first detection component, the cutting line, the second detection component, and the driving component form a loop.

[0026] With this configuration, it is possible to achieve coplanar detection through contact.

[0027] In one possible implementation of the coplanar detection device described above, the first detection component and / or the second detection component can directly detect the distance data between themselves and the cutting line.

[0028] With this configuration, it is possible to achieve coplanar detection in a non-contact manner, such as the first / second detection components including a ranging sensor.

[0029] In one possible implementation of the coplanar detection device, the wire cutting machine has a reserved space, or the coplanar detection device includes a carrier that can be fixed to the wire cutting machine, the carrier having a reserved space, and at least a portion of the first detection component or the second detection component is accommodated within the corresponding reserved space.

[0030] This configuration provides an assembly method for the coplanar detection device on an online cutting machine. If the space is reserved in the carrier, it is expected to achieve modularization of the coplanar detection device.

[0031] In one possible implementation of the coplanar detection device described above, the coplanar detection device includes a reset component, which is connected to the wire cutting machine or the carrier on one hand, and to the first detection component or the second detection component on the other hand.

[0032] With this configuration, it is possible to return the device to its original position via a reset component when the driving force of the driving component is removed. The reserved space can be a hole, slot, etc. The reset component can be a spring, disc spring, etc. For example, the reset component includes a plurality of springs circumferentially distributed around the first / second detection assembly.

[0033] In one possible implementation of the coplanar detection device described above, the first detection component or the second detection component includes: a mounting portion, at least a portion of which is movably disposed in the reserved space; and a detection portion disposed in the mounting portion.

[0034] This configuration illustrates possible structural forms for the first / second detection components. For example, the mounting portion could be a rod, a cylinder, or a block.

[0035] In one possible implementation of the above-mentioned coplanar detection device, the mounting portion includes: a first mounting portion; and a second mounting portion disposed on the side of the first mounting portion away from the driving component; wherein the second mounting portion can be freely accommodated in the reserved space.

[0036] This configuration illustrates possible structural forms for the mounting portions of the first / second detection components. For example, the first mounting portion could be a block structure, a column structure, etc., and the second mounting portion could be a column structure, a cylindrical structure, etc.

[0037] In one possible implementation of the above-mentioned coplanar detection device, a sealing component is provided between the mounting portion and the reserved space.

[0038] This configuration ensures the cleanliness of the device, thereby guaranteeing its transmission accuracy.

[0039] In a second aspect, the present invention provides a wire cutting machine, which includes the coplanar detection device of the wire cutting machine described in any of the preceding claims.

[0040] For the above-mentioned wire cutting machine, the wire cutting machine includes a wire take-up and undo mechanism and a cutting mechanism. The guide wheel group is disposed between the wire take-up and undo mechanism and the cutting mechanism. The guide wheel group includes one, two, or three guide wheels located between the cutting mechanism and one of the wire take-up and undo mechanisms. The guide wheels to be determined to be coplanar and horizontal can be any one or more of the guide wheels.

[0041] This configuration provides a possible form for finding coplanar guide wheels. For example, in a traditional six-guide-wheel wire EDM machine, the guide wheel assembly includes a wire feeding wheel, a tension wheel, and a reversing wheel. For some wire EDM machines with fewer guide wheels, the guide wheels can be an improved structure that integrates or partially integrates the functions of the traditional wire feeding wheel, tension wheel, or reversing wheel (such as the redistribution of total energy).

[0042] As can be seen, in the preferred embodiment of this utility model, by configuring a coplanar detection device for the wire EDM machine, when the coplanar detection device is in working condition, the coplanar state between the cutting wire and the guide wheel can be accurately determined based on its detection results. Based on the detection results, the position / orientation of the guide wheel can be finely adjusted to bring the cutting wire to a level coplanar position with the guide wheel that meets the standard. This reduces the operation time for coplanar adjustment, improves the accuracy of wire wiring, and ensures the cutting stability and quality of the wire EDM machine. This is of great significance for the future development and application of related wire EDM products such as high-precision slicing equipment. When the coplanar detection device is not in working condition, the impact of coplanar detection on the normal operation of the slicing machine can be avoided. Furthermore, with the reserved space formed in the carrier, modular production of the coplanar detection device is also possible. For example, the coplanar detection device of this utility model can be configured at any position near the guide wheel according to actual needs. In addition, this utility model also has the advantages of compact structure and ingenious transmission. Attached Figure Description

[0043] The preferred embodiment of this utility model is described below using a silicon rod to be cut (hereinafter referred to as silicon rod) as the workpiece to be processed and a wire cutting machine as the slicing machine as an example, with reference to the accompanying drawings. In the drawings:

[0044] Figure 1 This diagram illustrates the structure of a coplanarity detection device configured in a slicer according to an embodiment of the present invention.

[0045] Figure 2 This diagram illustrates the assembly of a coplanarity detection device according to an embodiment of the present invention, when it is configured in a slicer.

[0046] Figure 3 This diagram shows a state diagram of the detection component of a coplanar detection device according to an embodiment of the present invention in a non-working state;

[0047] Figure 4 This diagram illustrates the working state of the detection component of a coplanar detection device according to an embodiment of the present invention. Figure 1 (Before fine-tuning the position of the tension wheel), in the diagram, the coplanar level between the diamond wire and the guide wheel is not up to standard;

[0048] Figure 5 This diagram illustrates the working state of the detection component of a coplanar detection device according to an embodiment of the present invention. Figure 2 (After fine-tuning the position of the tension wheel), as shown in the figure, the coplanar horizontal alignment between the diamond wire and the guide wheel meets the standard.

[0049] Figure 6 This is a flowchart illustrating the operation process of coplanar adjustment of a slicer according to an embodiment of the present invention;

[0050] Figure 7 This diagram shows a structural schematic of a slicer according to a first embodiment of the present invention.

[0051] Figure 8 A schematic diagram of the slicer according to the second embodiment of the present invention is shown; and

[0052] Figure 9 A schematic diagram of the slicer according to the third embodiment of the present invention is shown.

[0053] List of reference numerals in the attached diagram:

[0054] 1. Wire feeding and take-up mechanism;

[0055] 21. Cable guide wheel;

[0056] 22. Tension wheel;

[0057] 23. Reversing wheel;

[0058] 31. First cutting main roller; 32. Second cutting main roller; 33. Third cutting main roller;

[0059] 4. Silicon rods;

[0060] 5. Diamond wire;

[0061] 6. Coplanarity detection device;

[0062] 61. Matrix;

[0063] 62. Cylinder; 621. Pneumatic connector;

[0064] 63. Couplings;

[0065] 64. Cam;

[0066] 65. Detection components;

[0067] 651. Linkage (mounting part); 6511. First link (first mounting part); 6512. Second link (second mounting part);

[0068] 652. Contact (Detection Section);

[0069] 653. Spring (reset component);

[0070] 654. Sealing ring;

[0071] 7. Threading board;

[0072] 71. Cable tray; 72. Mounting hole (reserved space). Detailed Implementation

[0073] The preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention. For example, although this embodiment uses a two-point detection method on the diamond wire (corresponding to the exit and inlet positions of the threading plate) on the side of the tension wheel near the cutting main roller for coplanar adjustment, it is also possible to: detect the first section of diamond wire on the side of the tension wheel near the cutting main roller and the other section of diamond wire on the side of the tension wheel near the take-up and unwinding rollers respectively; and determine the coplanar level between the diamond wire and the tension wheel based on the two detection values; or replace the guide wheel with a reversing wheel, a wire guide wheel, etc.

[0074] It should be noted that in the description of this utility model, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. These are merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0075] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "setting," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection, an indirect connection through an intermediate medium, or a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0076] Furthermore, to better illustrate this utility model, numerous specific details are provided in the following detailed embodiments. Those skilled in the art should understand that this utility model can be implemented even without certain specific details. In some examples, the principles of slicers, which are well-known to those skilled in the art, are not described in detail in order to highlight the main points of this utility model.

[0077] There are three types of wire EDM machines: cutting machines, squaring machines, and slicing machines. Taking silicon rods as an example, the cutting machine is mainly used to cut long silicon rods into shorter ones (such as silicon rods with a circular cross-section, referred to as round rods). Specifically, it cuts a silicon rod into multiple segments by cutting along the radial direction. The squaring machine is mainly used to cut round rods into silicon rods with a rectangular cross-section (such as square rods) (referred to as square rods; if the square rods at this stage have not undergone grinding, they are usually called rough rods). Specifically, it cuts the round rods into square rods by cutting along the axial direction to remove the edge skin. The slicing machine is mainly used to densely and continuously cut square rods that meet the required precision (if the square rods at this stage have undergone grinding, they are usually called finished rods) using multi-wire cutting to obtain thin slices for use. This utility model mainly uses a slicing machine with diamond wire as an example to illustrate wire EDM machines.

[0078] The slicing machine mainly includes a slicing machine body, a wire saw unit, and a feed mechanism. The wire saw unit primarily includes two wire take-up and unwinding mechanisms, a cutting mechanism located within the cutting chamber, and two guide roller assemblies located between the cutting mechanism and each wire take-up and unwinding mechanism. The wire take-up and unwinding mechanisms, guide roller assemblies, and cutting mechanism together form a wire feeding mechanism capable of continuously cutting silicon rods into a wire mesh. The feed mechanism is mainly used to carry the silicon rod (the silicon rod is fixed to a workpiece stage such as a crystal tray, which is mounted on the feed mechanism) and provide a vertical feed motion to bring the silicon rod close to the diamond wire mesh wound on the cutting mechanism, thereby performing the slicing operation. In this invention, a coplanarity detection device is provided for the slicing machine, mainly used to detect the coplanarity between the diamond wire mesh near the guide rollers and the guide rollers.

[0079] Main reference Figures 1 to 5In one possible implementation, the coplanar detection device 6 mainly includes a base 61, a driving component, an eccentric structure, and a detection assembly 65. In this example, the driving component is a cylinder 62, and a pneumatic connector 621 is provided on the cylinder 62. The slicer typically has multiple pneumatic driving components, and the driving force for each pneumatic driving component can be provided by the same air source. In this example, the eccentric structure is a cam 64.

[0080] In accordance with Figure 1 In this example, the cylinder can output power simultaneously from both ends. The cylinder's left and right ends are connected to two power output shafts via couplings, and cams 64 are fixedly mounted on these shafts. The cylinder drives the power output shafts to rotate, which in turn drives the cams. When the long side of the cam is close to the detection component, it can push the detection component closer to the diamond wire 5, thus putting it into working condition.

[0081] In one possible implementation, the detection component 65 mainly includes a connecting rod 651 as a mounting part and a contact 652 as a detection component. Under the push of the cam, the contact can approach and contact the diamond wire 5, thereby putting it into a working state.

[0082] In this example, the link 651 includes a first link 6511 with a larger radial dimension and a second link 6512 with a smaller radial dimension located at its front end, and a contact 652 is disposed at the front end of the second link.

[0083] In this example, the guide wheel to be ensured to be coplanar and horizontal is tension wheel 22 (corresponding to...). Figure 8 In one embodiment, a threading plate 7 is provided between the tension wheel and the cutting mechanism. The threading plate 7 has a threading groove 71 that can freely accommodate diamond wire. The end of the threading plate away from the tension wheel extends into the cutting chamber of the slicing machine. Obviously, those skilled in the art can determine the position and function of the guide wheel to be ensured to be coplanar according to actual needs. Correspondingly, according to the position of the selected guide wheel, the configuration of the coplanar detection device on the slicing machine can be reasonably selected. For example, the coplanar detection device can be fixed to the existing structure of the slicing machine, or a corresponding structure can be added near the guide wheel, and the coplanar detection device can be configured on the structure. The threading plate 7 has a mounting hole 72 along a direction approximately perpendicular to the threading groove (the threading direction of the diamond wire). Under the drive of the cylinder, the front end of the connecting rod (the second connecting rod 6512) and the contact 652 provided thereon can move forward in the mounting hole 72, so that the contact 652 contacts the diamond wire 5.

[0084] In one possible implementation, the cam has mounting positions corresponding to its long and short sides, respectively, that can be adapted to the ends of the first link. Thus, when the contact is in an active or inactive state, the ends of the first link are adapted to the corresponding mounting positions. The simplest example is where the cam is not machined; therefore, the line contact corresponding to the long and short sides represents the adaptation to the mounting positions at the corresponding locations.

[0085] Since slicing machines typically have multiple guide rollers, each positioned differently, and considering the varying working environments of different slicing machines and the different specifications and processing precision of the silicon rods processed within those environments, there may be a need to replace the detection components. Therefore, multiple detection components can be configured for the coplanar detection device. By placing detection components with different principles and specifications within the mounting holes, coplanar detection of diamond wire can be achieved. These components can include various contact-type detection components with varying precision, various contact-type detection components with different mounting structures, contact-type detection components, and non-contact detection components such as distance sensors.

[0086] Based on this setup, the coplanarity detection device can be added as a module to any slicer. In this example, reserved space is provided on the slicing machine's threading plate, so modifying the threading plate is part of the modularization process. Alternatively, a dedicated carrier can be added, incorporating the coplanarity detection device, with reserved space on the carrier. In this way, modular installation of the coplanarity detection device can be achieved simply by fixing the carrier to a position on the slicer near the guide rollers.

[0087] In one possible implementation, the coplanar detection device includes a spring 653, which is housed within an annular space formed by the mounting hole and the outer wall of the second connecting rod. One end of the spring is connected to the second connecting rod, and the other end is connected to the slicer at a position corresponding to the annular structure. This allows the contact to retract under the preload of the spring after detection. If the cylinder rotates the cam to the short side position, the end of the first connecting rod can abut against the cam after the contact retracts.

[0088] In one possible implementation, the coplanar detection device includes a sealing ring 654, which is fitted onto the portion of the second link near the contact point and positioned between the second link and the reserved space. This prevents substances such as cutting fluid and silica sludge from entering the reserved space, which could potentially reach the surface of the cam and affect transmission accuracy.

[0089] Based on the above structure, the working principle of the coplanarity detection device is as follows: the cylinder drives the cam to rotate, and the cam pushes the detection components, causing the contacts of the two detection components to synchronously approach the diamond wire. Assuming that both contacts simultaneously contact the diamond wire, it indicates that the coplanarity is within acceptable limits. When both contacts are in contact with the diamond wire, the coplanarity detection device and the diamond wire between its two detection components form a conductive loop. This can be determined by signals such as current and voltage indicating the conduction. Conversely, if one contact is in contact with the diamond wire while the other is not, no conductive loop is formed, and therefore no signals such as voltage or current are generated. In this case, the position of the tension wheel can be finely adjusted, and the detection can be repeated. If the detection components are non-contact distance sensors, coplanarity detection can be achieved by measuring the distance between the two distance sensors and the diamond wire.

[0090] Reference Figure 7 In one possible implementation, the wire saw unit includes two take-up and unwind mechanisms 1, a cutting mechanism, and a guide wheel assembly. The guide wheel assembly, located between the cutting mechanism and one of the take-up and unwind mechanisms, includes three guide wheels, such as a wire feeding wheel 21, a tension wheel 22, and a reversing wheel 23. The cutting mechanism includes a first cutting main roller 31, a second cutting main roller 32, and a third cutting main roller 33 arranged in an inverted triangular configuration. The cutting main rollers (31 and 32) are located above the third cutting main roller 33, and the wheelbase between the two upper cutting main rollers is adjustable. Accordingly, based on the winding path of the diamond wire 5 formed by this structure, the silicon rod 4 can be cut to obtain a silicon wafer through the reciprocating motion of the diamond wire between the two take-up and unwind mechanisms, the guide wheel assembly, and the cutting mechanism.

[0091] Reference Figure 8 In one possible implementation, the wire take-up / delivery mechanism 1 and the cutting mechanism in the wire saw unit are... Figure 7 Similarly, however, the guide wheel assembly located between the cutting mechanism and one of the take-up and unwinding mechanisms includes only one guide wheel, which, according to its main function, can be called the tension wheel 22. Accordingly, in the winding path of the diamond wire 5 formed based on this structure, the diamond wire enters the cutting chamber via the lower third cutting main roller, and then winds around to the upper pair of cutting main rollers. Likewise, through the reciprocating motion of the diamond wire between the two take-up and unwinding mechanisms, the tension wheel 22, and the cutting mechanism, the silicon rod 4 can be cut to obtain a silicon wafer. Figure 7 compared to, Figure 8 The guide wheel assembly omits the wire feeding wheel and reversing wheel. To ensure the reliability of the slicing machine, a wire feeding assembly can be added to the take-up and unload mechanism. The wire feeding assembly is mainly used to drive the take-up and unload roller assembly to reciprocate along the axis of the take-up and unload roller, thereby realizing the wire feeding function and ensuring the uniform distribution of diamond wire on the take-up and unload roller.

[0092] Reference Figure 9 In one possible implementation, the wire take-up / delivery mechanism 1 and the cutting mechanism in the wire saw unit are... Figure 7 , Figure 8 Similarly, however, the guide wheel assembly located between the cutting mechanism and one of the take-up and undo mechanisms consists of only two guide wheels, which, according to their main functions, can be called tension wheel 22 and reversing wheel 23. Correspondingly, in the winding path of the diamond wire 5 formed based on this structure, the diamond wire enters through the lower third main cutting roller, and then winds around to the upper pair of main cutting rollers and rewinds to form a cutting wire mesh. Likewise, through the reciprocating motion of the diamond wire between the two take-up and undo mechanisms, tension wheel 22, reversing wheel 23, and the cutting mechanism, the silicon rod 4 can be cut to obtain a silicon wafer. Figure 7 compared to, Figure 9 The guide wheel assembly omits the wire feeding wheel. To ensure the reliability of the slicer's operation, a wire feeding assembly can be added to the wire take-up and unwinding mechanism, and the tension motor can be replaced with a linear module.

[0093] Obviously, provided it is feasible, those skilled in the art can flexibly adjust the number of guide wheels, their relative positions, and the functions of each guide wheel according to actual needs. The coplanar adjustment in this invention can be achieved using any one or more of the guide wheels.

[0094] The tension wheel is defined below as the guide wheel that requires the diamond wire to be coplanar with it. Figure 8 The following example illustrates a method for adjusting the coplanarity of a slicer using a coplanar detection device based on the present invention.

[0095] In one possible implementation, the coplanarity between the diamond wire and the tension wheel can be determined using the control method of this slicing machine. The control method of the slicing machine mainly includes the following steps:

[0096] During or after the wiring process, the cylinder drives the cams on both sides to rotate. When the long side of the cam is close to the coplanar detection device, the two cams push the two detection components to move in the direction of the diamond wire.

[0097] Based on the contact between the contacts of the two detection components and the diamond wire, determine whether the coplanarity between the diamond wire and the tension wheel meets the standard. If yes, the wiring is complete; if not, the coplanarity can be achieved by means such as fine-tuning the position of the tension wheel.

[0098] In this example, the two detection points are located on the same side of the tension wheel (between the tension wheel and the cutting mechanism). Alternatively, they can be located on the other side of the tension wheel (between the tension wheel and the take-up / unwinding line) or on both sides of the tension wheel. Furthermore, a coplanar detection device can be configured on each side of the tension wheel, and the current coplanar state can be confirmed based on the detection results of the two coplanar detection devices.

[0099] Main reference Figure 6 Based on the above-mentioned control method for the slicer, in a specific implementation, the coplanar adjustment operation mainly includes the following steps:

[0100] S601, coarse adjustment coplanarity.

[0101] Specifically, before operating the aforementioned slicing machine control method, the tension wheel is first adjusted to ensure that the diamond wire is approximately coplanar between the third cutting main roller 33 and the tension wheel 22. The adjustment target is the level of coplanarity between the diamond wire and the guide wheel, as described earlier. The coplanar adjustment to approximately coplanar position should be close to this target. In this way, only small adjustments or a few repetitions are needed to complete the coplanarity finding process.

[0102] For example, the coarse adjustment of coplanarity is performed as follows: when the diamond wire is wound manually to two adjacent wheels, the difference in the actual position between the two wheels is visually assessed, and adjustments are made manually or with the help of an automatic adjustment mechanism to meet the necessary operations of the winding process.

[0103] It should be noted that the coarse adjustment coplanarity mentioned here should be understood as a necessary starting point for adjustment when introducing the detection mechanism in this utility model, rather than the necessity of having a coarse adjustment action / step.

[0104] S602, the cylinder drives (the air source supplies air to the cylinder) the cams on both sides to rotate, and the detection components switch to the working state. If the cams rotate to the point where the long side is close to the coplanar detection device, the two cams push the two detection components to move in the direction toward the diamond wire.

[0105] S603. Determine whether the contacts of the two detection components are simultaneously in contact with the diamond wire. If not, proceed to S604; if yes, complete the coplanarity check and proceed to S605.

[0106] In this example, when the contacts of the two detection components are in contact with the diamond wire at the same time, a current will be generated because the circuit is open. Therefore, whether the contacts of the two detection components are in contact with the diamond wire at the same time can be determined by whether a current is generated.

[0107] S604. Manually or automatically fine-tune the position of tension wheel 22, and repeat S602-S603.

[0108] For example, the tension wheel is equipped with a servo control system or other mechanism, which can be used to make small adjustments to the position of the tension wheel.

[0109] S605. The cams on both sides of the cylinder starter rotate again, switching the detection components to a non-operating state. The cams rotate until their short sides are close to the detection components. This allows the contacts of the two detection components to move away from the diamond wire under the preload of the springs, such as when the ends of the connecting rods of the two detection components abut against the outer edge of the short side of the cam. This ensures that the coplanar detection device is in a non-operating state that does not interfere with the normal operation of the slicer after wiring.

[0110] Reference Figure 4 Before adjustment, in one of the two detection components, the contact of one component was in contact with the diamond wire, while the contact of the other component was not. At this time, the circuit was not conductive, and the coplanar level of the diamond wire and the tension wheel was not up to standard. (Refer to...) Figure 6 After adjustment, until the contacts of the two detection components are in contact with the diamond wire simultaneously, the circuit is connected, and the coplanarity of the diamond wire and the tension wheel is met, thus completing the coplanarity finding process.

[0111] It should be noted that although the steps in the above embodiments are described in a specific order, those skilled in the art will understand that, in order to achieve the effects of this invention, different steps do not necessarily have to be performed in this order. They can be performed simultaneously or in other orders, and some steps can be added, replaced, or omitted. For example, before fine-tuning the position of the tension wheel, the detection component can be retracted first, and then brought closer to the diamond wire after adjustment.

[0112] It should be noted that although the control method of the slicer constructed in the above specific manner has been described as an example, those skilled in the art will understand that this utility model is not limited thereto. In fact, users can flexibly adjust the relevant steps and parameters in the steps according to actual application scenarios and other circumstances. For example, a coplanar detection device can be configured on both sides of the tension wheel (between the tension wheel and the cutter, and between the tension wheel and the take-up and unload mechanism), and the detection results of the two coplanar detection devices can be used to determine whether the coplanar level between the diamond wire and the tension wheel meets the standard.

[0113] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A coplanar detection device for a wire cutting machine, characterized in that, The wire cutting machine includes a guide wheel assembly, which includes at least one guide wheel. The coplanar detection device can be positioned on the wire cutting machine near the guide wheel. The coplanar detection device includes: At least two detection components, and A driving component, capable of driving at least two cutting lines in the detection assembly that are close to or in contact with the guide wheel to be in an operational state, so as to: The detection component detects the relative position of the cutting line and the groove of the guide wheel.

2. The apparatus according to claim 1, characterized in that, The detection components include a first detection component and a second detection component. The drive component has a first power output terminal and a second power output terminal. The driving component drives the first power output end and the second power output end to drive the first detection component and the second detection component to synchronously approach or contact the cutting line of the guide wheel.

3. The apparatus according to claim 2, characterized in that, The driving component is a pneumatic assembly.

4. The apparatus according to claim 2 or 3, characterized in that, An eccentric structure is provided on the first power output end and the second power output end. The driving component drives the eccentric structure to rotate by driving the first power output end and the second power output end to rotate.

5. The apparatus according to claim 4, characterized in that, The eccentric structure is a cam.

6. The apparatus according to claim 4, characterized in that, The eccentric structure has mounting positions, and different detection components can be removably adapted to the mounting positions.

7. The apparatus according to claim 6, characterized in that, When both the first detection component and the second detection component are in contact with the cutting line, the first detection component, the cutting line, the second detection component, and the driving component form a loop.

8. The apparatus according to claim 6, characterized in that, The first detection component and / or the second detection component can directly detect the distance data between itself and the cutting line.

9. The apparatus according to claim 2, characterized in that, The wire cutting machine has a reserved space, or the coplanar detection device includes a carrier that can be fixed to the wire cutting machine, and the carrier has a reserved space. At least a portion of the first detection component or the second detection component is accommodated within the corresponding reserved space.

10. The apparatus according to claim 9, characterized in that, The device includes a reset component, which is connected to the wire cutting machine or the carrier on one side and to the first detection component or the second detection component on the other side.

11. The apparatus according to claim 9, characterized in that, The first detection component or the second detection component includes: The installation portion, at least a portion of which is movably disposed within the reserved space; and The detection section is located in the installation section.

12. The apparatus according to claim 11, characterized in that, The installation component includes: First installation part; and The second mounting portion is located on the side of the first mounting portion away from the drive component; The second installation part can be freely accommodated in the reserved space.

13. The apparatus according to claim 11, characterized in that, A sealing component is provided between the installation part and the reserved space.

14. A wire cutting machine, characterized in that, The wire cutting machine includes the coplanar detection device of the wire cutting machine according to any one of claims 1 to 13.

15. The wire cutting machine according to claim 14, characterized in that, The wire cutting machine includes a wire take-up and pay-off mechanism and a cutting mechanism, with the guide wheel assembly disposed between the wire take-up and pay-off mechanism and the cutting mechanism. The guide wheel assembly includes one, two, or three guide wheels located between the cutting mechanism and one of the wire take-up and unwinding mechanisms. The guide wheels to be determined to be coplanar and horizontal can be any one or more of the guide wheels.

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