Temperature control structure and magnetic control double-winding film material heating and cooling device

Abstract

The utility model discloses a kind of temperature control structure and magnetically controlled double-wound film material heating and cooling device, including, heat conduction plate, it has the contact surface of adaptation with film material surface;And, temperature regulating assembly, it has temperature-adjustable heat exchange medium, heat exchange medium is connected with heat conduction plate;Wherein, contact surface is plane.The temperature control structure and magnetically controlled double-wound film material heating and cooling device, by preheating system, film material surface is contacted closely by contact plate, effectively remove the water vapor carried by film material, prevent the defects such as bulge, poor adhesion during plating process;Through cooling system, through the surface of closely contacted film material, quickly reduce film layer temperature, cooperate the structure of driving assembly and realize the spacing of automatic regulating constant temperature / refrigeration plate, adapt to different thickness film material, improve process flexibility, adopt PLC system centralized control temperature, position and operating procedure in control, improve automation level.

Description

Technical Field

[0001] This utility model relates to the technical field of metal coating, and in particular to a temperature control structure and a magnetically controlled double-wound film heating and cooling device. Background Technology

[0002] Magnetron sputtering is a technique commonly used to prepare thin films of materials such as metals, semiconductors, and insulators. It increases plasma density by introducing a magnetic field on the cathode surface of the target material to enhance the sputtering rate. In continuous coating applications of flexible materials, roll-to-roll vacuum magnetron sputtering equipment is commonly used. This type of equipment outputs the film material through an unwinding roller, passes through a guide roller, enters the vacuum chamber to complete the coating process, and is finally recovered by a rewinding roller. This process has advantages in terms of continuity and efficiency.

[0003] Existing roll-to-roll vacuum coating equipment has the following main problems: When the film material is unwound, it may be accompanied by ambient moisture, which evaporates rapidly after entering the high-temperature vacuum chamber, causing bulging or adhesion defects on the film surface. Traditional unwinding heating methods have low temperature control accuracy, cannot stably evaporate moisture, and are prone to local overheating. After coating, the film material temperature is high. If it is not sufficiently cooled before winding, it is easy to cause thermal expansion and contraction, resulting in loose winding, wrinkling of the film layer, or even film breakage. Moreover, under different film thicknesses, conventional heating methods cannot effectively and reliably heat different film layers, affecting the stability of film material operation and temperature control uniformity. Utility Model Content

[0004] In view of the problems existing in the above-mentioned temperature control structure and magnetic double-wound film heating and cooling device, this utility model is proposed.

[0005] Therefore, one of the objectives of this utility model is to provide a temperature control structure that can precisely preheat the film material to remove moisture during unwinding and quickly cool the film surface before winding.

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution: including,

[0007] A heat-conducting plate having a contact surface adapted to the surface of the membrane material; and,

[0008] A temperature regulating component having a temperature-adjustable heat exchange medium connected to a heat-conducting plate;

[0009] The contact surface is a plane.

[0010] As a preferred embodiment of the temperature control structure of this utility model, the contact surface roughness of the heat-conducting plate is ≤Ra0.2, and the overall flatness is ≤0.1mm.

[0011] In a preferred embodiment of the temperature control structure described in this utility model, the temperature adjustment component is a serpentine structure or a flat plate structure.

[0012] In a preferred embodiment of the temperature control structure of this utility model, two heat-conducting plates are provided, which are located on different surfaces and are arranged in parallel opposite directions.

[0013] As a preferred embodiment of the temperature control structure described in this utility model, it further includes:

[0014] The outer casing has an internal receiving space, and the temperature regulating component is located inside the receiving space;

[0015] The temperature regulation component has a first interface and a second interface, and one end of both the first interface and the second interface is located outside the housing.

[0016] The beneficial effects of this utility model are as follows: the preheating system ensures that the contact plate is in close contact with the film surface, effectively removing the moisture carried by the film and preventing defects such as blistering and poor adhesion during the coating process; the cooling system quickly reduces the film temperature by being in close contact with the film surface, solving problems such as low efficiency of traditional natural cooling and thermal expansion and contraction during winding, ensuring that the film is tightly wound and has a smooth surface.

[0017] Another objective of this invention is to provide a magnetically controlled double-wound film heating and cooling device, the purpose of which is to adjust the distance between the heating and cooling device and the film surface, thereby improving the applicability of the device while ensuring the heating and cooling effect.

[0018] As a preferred embodiment of the magnetically controlled double-wound film heating and cooling device of this utility model, it includes: a temperature control mechanism, and further includes,

[0019] The device base assembly includes a first device base and a second device base, and the first device base and the second device base are respectively fixedly connected to two housings;

[0020] A fixed base, wherein a sliding groove is provided on the side of the fixed base opposite to the device base assembly;

[0021] Drive components adjust the gap size between the two housings.

[0022] As a preferred embodiment of the magnetically controlled double-wound film heating and cooling device of this utility model, the driving component includes a motor base, a lead screw and a lead screw nut, the motor base is fixedly connected to a motor, and the lead screw is fixedly connected to the output end of the motor;

[0023] The first device base is provided with a lead screw nut, and the motor base and the second device base are fixedly connected.

[0024] As a preferred embodiment of the magnetically controlled double-wound film heating and cooling device of this utility model, wherein: one side of the motor base is fixedly connected to the fixed base, and both the first device base and the second device base are provided with lead screw nuts, and the lead screw is a double-ended lead screw.

[0025] As a preferred embodiment of the magnetically controlled double-wound film heating and cooling device of this utility model, the driving component includes two servo cylinders, and the movable ends of the two servo cylinders are respectively fixedly connected to the first device base and the second device base.

[0026] As a preferred embodiment of the magnetically controlled double-wound film heating and cooling device of this utility model, it further includes:

[0027] A three-way welding valve, wherein the outlet of the three-way welding valve is connected to the first interface, and the main inlet of the three-way welding valve is connected to the outlet of the external temperature control device;

[0028] The second interface is connected to the inlet of the external temperature control device, and both the first and second interfaces are located on one side.

[0029] The beneficial effects of this utility model are: the structure of the equipment and the drive component enables automatic adjustment of the spacing of the constant temperature / cooling plate to adapt to film materials of different thicknesses, improves process flexibility, and adopts a PLC system to centrally control temperature, position and operation process, thereby improving the overall level of automation. Attached Figure Description

[0030] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 A perspective view of a first embodiment of the temperature control device is shown;

[0032] Figure 2 A perspective view of a second embodiment of the temperature control device is shown;

[0033] Figure 3 A perspective view of a third embodiment of the control device is shown;

[0034] Figure 4 A perspective view of the first scenario of Embodiment 2 of the magneto-controlled double-wound film heating and cooling device is shown;

[0035] Figure 5A rear perspective view of the first scenario of Embodiment 2 of the magneto-controlled double-wound film heating and cooling device is shown;

[0036] Figure 6 A perspective view of the second scenario of Embodiment 2 of the magnetically controlled double-wound film heating and cooling device is shown;

[0037] Figure 7 A perspective view of Embodiment 3 of the magnetically controlled double-wound film heating and cooling device is shown;

[0038] Figure 8 A perspective view of Embodiment 4 of the magnetically controlled double-wound film heating and cooling device is shown. Detailed Implementation

[0039] To enable those skilled in the art to better understand this utility model, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0040] The terminology used in this invention refers to those general terms currently widely used in the art in consideration of the functionality of this invention; however, these terms may vary according to the intent, precedent, or new technology of those skilled in the art. Furthermore, specific terms may be chosen by the applicant, and in such cases, their detailed meanings will be described in the detailed description of this invention. Therefore, the terminology used in this specification should not be construed as simple names, but rather based on the meaning of the terms and the overall description of this invention.

[0041] Example 1, referring to Figure 1 , Figure 2 and Figure 3 This embodiment provides a temperature control structure, including,

[0042] The heat-conducting plate 100 has a contact surface 101 adapted to the surface of the membrane material; and a temperature regulating component 200 has a temperature-adjustable heat exchange medium connected to the heat-conducting plate 100; the temperature regulating component 200 has a serpentine structure or a flat plate structure; wherein the contact surface 101 is a plane; the roughness of the contact surface 101 of the heat-conducting plate 100 is ≤Ra0.2, and the overall flatness is ≤0.1mm;

[0043] Two heat-conducting plates 100 are provided, which are disposed on different surfaces and are arranged in parallel opposite directions; it also includes a housing 102, which has an internal receiving space 103, and a temperature regulating component 200 is disposed inside the receiving space 103; the temperature regulating component 200 has a first interface 201 and a second interface 202, and one end of the first interface 201 and the second interface 202 are both located outside the housing 102.

[0044] During use, the two heat-conducting plates 100 are arranged opposite each other and then assembled with the outer shell 102 to form a parallel plate structure, which serves as the base of the heating or cooling device.

[0045] The membrane material is fed out by the unwinding roller. First, it passes through the unwinding temperature control device. The PLC control system activates the unwinding temperature control system in advance to heat the contact surface 101 to the set temperature of about 20°C. The temperature regulating component 200 circulates the liquid medium to heat the heat-conducting plate 100. The contact surface 101 at the bottom of the heat-conducting plate 100 just contacts the surface of the membrane material. This ensures that the contact temperature can be maintained at the specified 20°C for constant preheating when in contact with the membrane material, thus achieving more precise heating.

[0046] The temperature regulation component 200 can be a serpentine copper tube, a microchannel, or a semiconductor heating plate. When using a serpentine copper tube, the brazing technology is low-cost, but it may produce verdigris and reduce thermal conductivity in the long term. Using a microchannel heating can save space and avoid verdigris, but it requires a separate manufacturing process to cut a separate slot on the movable plate 100, which is slightly more expensive. The semiconductor heating plate can precisely control the temperature and achieve dynamic adjustment of ±0.1℃. It has a large contact area, but its thermoelectric conversion efficiency is low and its power consumption is high.

[0047] With a surface roughness ≤ Ra0.2 and an overall flatness ≤ 0.1 mm, when two surfaces are in contact, heat is mainly conducted through the microscopic "high points" of the actual contact. A lower surface roughness (Ra0.2 μm) means that the height difference between microscopic peaks and valleys is very small, and the surface is smoother and "flatter". This significantly increases the number of microscopic contact points between the two contacting surfaces after pressure is applied, and the microscopic contact area for effective heat conduction is larger. On the other hand, the strict flatness of the overall flatness ≤ 0.1 mm ensures that the working surface of the flattening mechanism is very flat. When the membrane material enters / exits or slides relative to the flattening surface, the smooth surface greatly reduces the risk of scratching and friction loss on the membrane material surface, protecting the quality of the membrane material surface.

[0048] During use, a light contact method is used to smooth out wrinkles in the membrane material, avoiding the large local pressure changes that occur when the membrane material needs to pass over the heating roller as with traditional heating rollers, which would affect the subsequent surface smoothness of the membrane material.

[0049] On the other hand, it makes full use of the heating heat, avoiding the additional heat loss caused by the inability of traditional heating box heating methods to fully contact the membrane material, thereby improving the heating efficiency and effectively evaporating the water vapor carried in the membrane material, thus avoiding the subsequent coating blistering phenomenon.

[0050] After preheating, the film material undergoes magnetron sputtering coating. The coated film material then enters the winding and cooling device. Here, the PLC command switches to the cooling mode, controlling the circulation of the cooling liquid into the temperature regulating component 200. This keeps the temperature of the contact surface 101 at the bottom of the heat-conducting plate 100 at around 5°C. The heat-conducting plate 100 contacts the film surface, rapidly reducing the film temperature and preventing problems such as loose winding, thermal expansion and contraction, or breakage of the film material caused by high temperature residue.

[0051] Example 2, refer to Figure 4 , Figure 5 and Figure 6 This is the second embodiment of the present invention, providing a magnetically controlled double-wound film heating and cooling device. This device includes a temperature control mechanism and a device base assembly 300, comprising a first device base 300a and a second device base 300b, both of which are fixedly connected to two outer shells 102; a fixed base 400, with a sliding groove 401 on the side opposite to the device base assembly 300; and a drive assembly 500 for adjusting the gap between the two heat-conducting plates 100. The drive assembly 500 includes a motor base 501, a lead screw 503, and a lead screw nut 504. A motor 502 is fixedly connected to the motor base 501, and the lead screw 503 is fixedly connected to the output end of the motor 502. The lead screw nut 504 is provided on the first device base 300a, and the motor base 501 and the second device base 300b are fixedly connected.

[0052] It also includes a three-way welded valve 600, the outlet 601 of which is connected to the first interface 201, the total inlet 602 of which is connected to the outlet of the external temperature control device; the second interface 202 is connected to the inlet of the external temperature control device, and both the first interface 201 and the second interface 202 are located on one side.

[0053] During use, the two heat-conducting plates 100 are arranged opposite each other and then assembled with the outer shell 102 to form a parallel plate structure. This parallel plate structure serves as the base of the heating or cooling device. The heating or cooling device and the device base assembly 300 are then fixed and assembled with other equipment to form an unwinding constant temperature device or a winding cooling device.

[0054] The membrane material is fed out by the unwinding roller. First, it passes through the unwinding constant temperature device. The PLC control system activates the external temperature control system in advance, allowing the external liquid medium to enter and heat the contact surface 101 to the set temperature of about 20°C. The liquid medium is circulated through the copper pipe system to preheat the membrane material at a constant temperature, thereby effectively evaporating the water vapor carried in the membrane material and avoiding the subsequent coating blistering phenomenon. The evaporated water vapor is collected by the cryogenic water vapor capture device to prevent water vapor and other high-boiling-point gases in the high vacuum system from contaminating the membrane material again.

[0055] The preheated film material is then subjected to magnetron sputtering coating treatment. At this time, the film surface is clean and dry, which improves the uniformity of film adhesion and surface smoothness.

[0056] The coated film enters the winding and cooling device. Here, the temperature control system switches to cooling mode via PLC command, controls the circulation of liquid medium into the copper tube, keeps the temperature of the heat-conducting plate 100 at about 5°C, and the contact surface 101 contacts the film surface to quickly reduce the film temperature and avoid problems such as loose winding, thermal expansion and contraction, or breakage of the film caused by high temperature residue.

[0057] In one configuration, the first device base 300a is connected to the fixed base 400, and the first device base 300a is internally provided with a lead screw nut 502. The motor base 501 is fixed to one side of the second device base 300b. According to different film thicknesses or process requirements, the operator sets the target spacing of the heat-conducting plate 100 in the unwinding constant temperature device or the winding cooling device on the PLC operation panel. The PLC sends the instruction to the motor 502. The motor 502 can be a stepper motor or a servo motor. The motor 502 is driven to rotate and drive the lead screw 503, which in turn cooperates with the lead screw nut 502 to pull the second device base assembly 300b up and down. The fixed base 400 is provided with a sliding groove 401 on one side. The sliding groove 401 is located at 1 / 2 position on one side of the fixed base 400, and about 1 mm of thickness is removed to ensure that the second device base assembly 300b can slide smoothly on the fixed base 400.

[0058] In another configuration, the first device base 300a is connected to the fixed base 400, and the motor base 501 is fixed to one side of the first device base 300a. The second device base 300b has a lead screw nut 502 inside. Depending on the film thickness or process requirements, the operator sets the target spacing of the heat-conducting plates 100 in the unwinding constant temperature device or the winding cooling device on the PLC control panel. The PLC sends the command to the motor 502, driving the motor 502 to rotate and drive the lead screw 503. The lead screw 503 passes through a through hole in the first device base assembly 300a, thus not affecting its rotation. Then, in conjunction with the lead screw nut 502, it drives the second device base assembly 300b to slide up and down. At this time, the second device base assembly 300b can slide on the fixed base 400. This method achieves precise spacing adjustment, ensuring the film material runs between the two plates and ensuring stable contact between the heat-conducting plate 100 at the bottom of the heat-conducting plate 100 and the film material.

[0059] Precise spacing adjustment is achieved by driving the motor 502 to ensure that the membrane material can make stable contact with the heat-conducting plate 100 at the bottom of the heat-conducting plate 100 during operation. The total inlet 602 of the three-way welding valve 600 is connected to the liquid supply port of the external equipment, and then the outlet 601 of the three-way welding valve 600 is connected to the first interface 201 through a hose to ensure that the heat-conducting plate 100 of the equipment can move freely.

[0060] At this time, the liquid medium is input into the interior, and then the liquid medium is controlled to be distributed between the two temperature regulating components 200 through the three-way welding valve 600. After that, the medium flows back from the second interface 202 to form a complete loop.

[0061] Example 3, referring to Figure 7 This is the third embodiment of the present invention. The difference between this embodiment and the second embodiment is that one side of the motor base 501 is fixedly connected to the fixed base 400, and the first device base 300a and the second device base 300b are both provided with lead screw nuts 504. The lead screw 503 is a double-ended lead screw.

[0062] Compared to Embodiment 2, in one case, depending on different film thicknesses or process requirements, the operator sets the target spacing of the heat-conducting plate 100 in the unwinding constant temperature device or the winding cooling device on the PLC operation panel. The PLC sends the instruction to the motor 502. The motor 502 can be a stepper motor or a servo motor. The motor 502 rotates and drives the lead screw 503, which in turn cooperates with the lead screw nut 502 to pull the second device base assembly 300b up and down. A sliding groove 401 is provided on one side of the fixed base 400 to remove about 1 mm of thickness to ensure that the second device base assembly 300b can slide smoothly on the fixed base 400.

[0063] Precise spacing adjustment is achieved by driving the motor 502 to ensure stable contact between the membrane material and the contact surface 101 at the bottom of the heat-conducting plate 100 during operation. The main inlet 602 of the three-way welded valve 600 is connected to the liquid supply port of the external equipment, and then the outlet 601 of the three-way welded valve 600 is connected to the first interface 201 through a hose to ensure that the equipment can move. The liquid medium is input into the interior, and then the liquid medium is controlled to be distributed between the two temperature regulating components 200 through the three-way welded valve 600. After that, the medium flows back from the second interface 202 to form a complete loop.

[0064] The remaining structure is the same as that in Example 2.

[0065] Example 4, refer to Figure 8This is the fourth embodiment of the present invention. The difference between this embodiment and the second embodiment is that the drive component 500 includes a servo electric cylinder 505. There are two servo electric cylinders 505, and the two servo electric cylinders 505 are fixedly connected to the first device base 300a and the second device base 300b, respectively.

[0066] Compared to Embodiment 2, further, according to different film thicknesses or process requirements, the operator sets the target spacing of the heat-conducting plates 100 in the unwinding constant temperature device or the winding cooling device on the PLC operation panel. The PLC sends the instruction to the servo cylinders 505. The two servo cylinders 505 drive the first device base assembly 300a and the second device base assembly 300b to slide up and down respectively. Utilizing the high positional accuracy of the servo cylinders 505, high-precision control is achieved, enabling more precise spacing adjustment. This ensures that the film material runs between the two plates and that the contact surface 101 at the bottom of the heat-conducting plate 100 is in stable contact with the film material.

[0067] The remaining structure is the same as that in Example 2.

[0068] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape, and proportions of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), installation arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or rearranged according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structural equivalents but also equivalent structures. Without departing from the scope of this invention, other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0069] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to implementing the present invention) may be omitted.

[0070] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A temperature control structure, characterized in that: include, A heat-conducting plate (100) having a contact surface (101) adapted to the surface of the membrane material; and, A temperature regulating component (200) having a temperature-adjustable heat exchange medium connected to a heat-conducting plate (100); The contact surface (101) is a plane.

2. The temperature control structure according to claim 1, characterized in that: The contact surface (101) of the heat-conducting plate (100) has a roughness ≤ Ra0.2 and an overall flatness ≤ 0.1 mm.

3. The temperature control structure according to claim 2, characterized in that: The temperature regulating component (200) has a serpentine structure or a flat plate structure.

4. The temperature control structure according to claim 2 or 3, characterized in that: There are two heat-conducting plates (100), which are disposed on different surfaces and are arranged in parallel opposite directions.

5. The temperature control structure according to claim 4, characterized in that: It also includes, The outer casing (102) has an internal accommodating space (103), and the temperature regulating component (200) is disposed inside the accommodating space (103); The temperature regulating component (200) has a first interface (201) and a second interface (202), and one end of the first interface (201) and the second interface (202) are both located outside the housing (102).

6. A magnetically controlled double-wound film heating and cooling device, characterized in that: Including temperature control mechanisms, and also, The device base assembly (300) includes a first device base (300a) and a second device base (300b), and the first device base (300a) and the second device base (300b) are respectively fixedly connected to two housings (102); A fixed base (400) is provided with a sliding groove (401) on the side of the fixed base (400) opposite to the device base assembly (300); Drive assembly (500) to adjust the gap size between two heat-conducting plates (100).

7. The magnetically controlled double-wound film heating and cooling device according to claim 6, characterized in that: The drive assembly (500) includes a motor base (501), a lead screw (503) and a lead screw nut (504). The motor base (501) is fixedly connected to a motor (502), and the lead screw (503) is fixedly connected to the output end of the motor (502). A lead screw nut (504) is provided on the first device base (300a), and the motor base (501) and the second device base (300b) are fixedly connected.

8. The magnetically controlled double-wound film heating and cooling device according to claim 7, characterized in that: One side of the motor base (501) is fixedly connected to the fixed base (400). The first device base (300a) and the second device base (300b) are both provided with lead screw nuts (504). The lead screw (503) is a double-ended lead screw.

9. The magnetically controlled double-wound film heating and cooling device according to claim 6, characterized in that: The drive assembly (500) includes two servo cylinders (505), and the movable ends of the two servo cylinders (505) are fixedly connected to the first device base (300a) and the second device base (300b), respectively.

10. The magnetically controlled double-wound film heating and cooling device according to any one of claims 7, 8, and 9, characterized in that: It also includes, A three-way welding valve (600) is provided, wherein the outlet (601) of the three-way welding valve (600) is connected to the first interface (201), and the main inlet (602) of the three-way welding valve (600) is connected to the outlet of an external temperature control device. The second interface (202) is connected to the inlet of the external temperature control device, and both the first interface (201) and the second interface (202) are located on one side.

Images