Crucible taking-out tool for indium phosphide production

Abstract

The utility model discloses a production of indium phosphide is with the crucible and takes out frock relates to semiconductor material preparation technical field, including mounting block, the inner wall of mounting block is fixedly installed with the grip lever, the inner wall of mounting block is provided with movable connecting plate, the bottom fixedly connected with connecting rod of connecting plate, the inside of mounting block is slidably located in connecting rod, the bottom height of connecting rod is connected with square plate, the outer wall of square plate is fixedly installed with drive column, the outer wall bottom of mounting block is provided with movable moving link, the inner wall of moving link is fixedly installed with drive plate, in the utility model, this frock is through the curved surface design of upper arc -shaped clamping, lower arc -shaped clamping, and the contact area of frock and crucible outer wall is enlarged, and the clamping force is evenly distributed in the circumference of crucible, avoids single -point stress, fundamentally eliminates local stress concentration, makes the crucible damage rate to reduce greatly.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material preparation technology, specifically to a crucible removal tool for indium phosphide production. Background Technology

[0002] Indium phosphide (InP) is a core material for high-frequency, high-speed semiconductor devices. Its production process (such as the vertical gradient solidification method, VGF) requires crystal growth to be completed in a high-temperature environment above 1000℃. After crystal growth is completed, the crucible containing the indium phosphide single crystal must be removed from the furnace.

[0003] However, traditional manual operation methods have the following prominent problems. In the existing technology, operators need to wear high-temperature resistant gloves and use crucible tongs to directly clamp the top edge of the crucible. The clamping surface of the crucible tongs is usually flat or toothed, and the contact area with the top of the crucible is less than 10%. This results in uneven clamping force and local stress exceeding the yield strength of the material. Uneven clamping force can cause micro-cracks or breakage at the top edge of the crucible, thereby increasing the crucible damage rate and reducing production efficiency.

[0004] In view of this, a crucible removal tooling for indium phosphide production is provided to overcome the above-mentioned defects. Utility Model Content

[0005] The purpose of this invention is to provide a crucible removal tool for indium phosphide production, in order to solve the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, the present invention provides a crucible removal tool for indium phosphide production, comprising a mounting block, a gripping rod fixedly mounted on the inner wall of the mounting block, a movable connecting plate provided on the inner wall of the mounting block, a connecting rod fixedly connected to the bottom of the connecting plate, the connecting rod slidably located inside the mounting block, a square plate connected at the bottom height of the connecting rod, a driving column fixedly mounted on the outer wall of the square plate, a movable moving rod provided at the bottom of the outer wall of the mounting block, a driving plate fixedly mounted on the inner wall of the moving rod, and a driving groove integrally inclined on the inner wall of the driving plate, the driving column and the driving groove being mutually adapted.

[0007] Furthermore, the specific number of the moving rod, drive plate, and drive slot is two, and they are arranged symmetrically as a whole.

[0008] Furthermore, the drive column is initially located inside both drive slots simultaneously.

[0009] Furthermore, a return spring is fixedly connected between the connecting plate and the bottom of the inner wall of the mounting block, and the return spring is coaxially arranged with the connecting rod.

[0010] Furthermore, the inner wall side of the mounting block is provided with a first limiting groove, and there are two first limiting grooves. The connecting plate is simultaneously slidably located inside the two first limiting grooves.

[0011] Furthermore, an arc-shaped plate is fixedly installed on the top surface of the connecting plate. The arc-shaped plate is arc-shaped and has rounded corners at its edges.

[0012] Furthermore, a guide groove is provided at the bottom of the outer wall of the mounting block, and a second limiting groove is provided on the side wall of the guide groove.

[0013] Furthermore, a limiting block is fixedly connected to the top of the moving rod, and the limiting block is simultaneously located inside the guide groove and the second limiting groove.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] This fixture, through the curved surface design of the upper and lower arc-shaped clamps, expands the contact area between the fixture and the outer wall of the crucible, and the clamping force is evenly distributed around the circumference of the crucible, avoiding single-point stress and fundamentally eliminating local stress concentration, thus significantly reducing the crucible damage rate. Attached Figure Description

[0016] Figure 1 This is a front view structural diagram of the present invention;

[0017] Figure 2 This is a side view of the structure of this utility model;

[0018] Figure 3 This is a top view of the structure of this utility model;

[0019] Figure 4 for Figure 3 A magnified structural diagram of point A in the middle.

[0020] In the diagram: 1. Mounting block; 2. Grip rod; 3. Connecting plate; 4. Arc-shaped plate; 5. Connecting rod; 6. Return spring; 7. Square plate; 8. Drive column; 9. Moving rod; 10. Drive plate; 11. Drive groove; 12. Mounting rod; 13. Upper arc-shaped clamp; 14. Lower arc-shaped clamp; 15. First limiting groove; 16. Guide groove; 17. Second limiting groove; 18. Limiting block. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Example 1

[0023] See Figure 1-4 The indium phosphide production crucible removal fixture includes a mounting block 1. A gripping rod 2 is fixedly installed on the inner wall of the mounting block 1. A movable connecting plate 3 is provided on the inner wall of the mounting block 1. A connecting rod 5 is fixedly connected to the bottom of the connecting plate 3. The connecting rod 5 is slidably located inside the mounting block 1. A square plate 7 is connected to the bottom of the connecting rod 5. A driving column 8 is fixedly installed on the outer wall of the square plate 7. A movable moving rod 9 is provided at the bottom of the outer wall of the mounting block 1. A driving plate 10 is fixedly installed on the inner wall of the moving rod 9. A driving groove 11 with an overall inclined arrangement is opened on the inner wall of the driving plate 10. The driving column 8 and the driving groove 11 are adapted to each other.

[0024] Furthermore, in the initial state, the drive column 8 is simultaneously located inside both drive slots 11.

[0025] By setting the drive column 8 to be inside both drive slots 11 simultaneously in the initial state, the two drive slots 11 and the drive plate 10 with the drive slots 11 will be driven to move relative to each other or towards each other after the user moves the drive column 8.

[0026] Furthermore, a guide groove 16 is provided at the bottom of the outer wall of the mounting block 1, and a second limiting groove 17 is provided on the side wall of the guide groove 16. A limiting block 18 is fixedly connected to the top of the moving rod 9. The limiting block 18 is located inside both the guide groove 16 and the second limiting groove 17. By setting the guide groove 16 and the second limiting groove 17, and setting the limiting block 18 fixedly connected to the top of the moving rod 9 to be located inside both the guide groove 16 and the second limiting groove 17, the moving direction of the moving rod 9 is limited, and it can only move laterally.

[0027] In addition, the inner wall side of the mounting block 1 is provided with a first limiting groove 15. There are two first limiting grooves 15. The connecting plate 3 can slide inside the two first limiting grooves 15 at the same time. An arc plate 4 is fixedly installed on the top surface of the connecting plate 3. The arc plate 4 is arc-shaped and the edges of the arc plate 4 are rounded.

[0028] By setting a first limiting groove 15 and setting the connecting plate 3 to slide inside the two first limiting grooves 15 simultaneously, the connecting plate 3 will not easily deviate during movement. The arc plate 4 is set and its specific shape is arc, so that the user can drive the connecting plate 3 to move by pulling the arc plate 4.

[0029] It should be noted that a return spring 6 is fixedly connected between the connecting plate 3 and the bottom of the inner wall of the mounting block 1, and the return spring 6 and the connecting rod 5 are coaxially arranged.

[0030] By setting a reset spring 6, when the arc plate 4 and the connecting plate 3 lose tension after being driven by the user, the device can be quickly reset by the elastic force of the reset spring 6.

[0031] In addition, there are two moving rods 9, two driving plates 10, and two driving slots 11, and they are arranged symmetrically. The bottom end of the moving rod 9 is fixedly connected to the mounting rod 12. The bottom end of the mounting rod 12 is provided with an upper arc-shaped clamp 13 and a lower arc-shaped clamp 14. By setting the upper arc-shaped clamp 13 and the lower arc-shaped clamp 14, and setting the radius of the lower arc-shaped clamp 14 to be smaller than that of the upper arc-shaped clamp 13, the device can be more stable when picking up and placing crucibles that are larger at the top and smaller at the bottom.

[0032] In practice, the operator pulls the arc-shaped plate 4, causing the connecting plate 3 to move upward along the first limiting groove 15. The square plate 7 is then lifted via the connecting rod 5, and the driving column 8 slides upward within the driving groove 11. Due to the inclined setting of the driving groove 11, the movement of the driving column 8 forces the two driving plates 10 to move laterally outward via the moving rod 9, causing the upper arc-shaped clamp 13 and the lower arc-shaped clamp 14 to open simultaneously.

[0033] The crucible is placed between the open arc-shaped clamps. The arc-shaped plate 4 is released, and the elastic force of the return spring 6 pushes the connecting plate 3 downward. The drive column 8 slides in the opposite direction along the drive groove 11, and the drive plate 10 drives the moving rod 9 to retract inward. The upper arc-shaped clamp 13 and the lower arc-shaped clamp 14 fit against the outer wall of the crucible. The lower arc-shaped clamp 14 has a smaller radius and tightly clamps the lower part of the crucible, while the upper arc-shaped clamp 13 covers a larger area at the top, forming a stable three-point contact clamping.

[0034] Pull the curved plate 4 again to repeat the opening action, and the crucible can be removed. The limiting grooves 15 and 17 ensure that the connecting plate 3 and the moving rod 9 move only in the preset direction to avoid deflection.

[0035] This fixture, through the curved surface design of the upper arc clamp 13 and the lower arc clamp 14, expands the contact area between the fixture and the outer wall of the crucible, and the clamping force is evenly distributed around the crucible, avoiding single-point force and fundamentally eliminating local stress concentration, thus significantly reducing the crucible damage rate.

[0036] The radius difference design of the arc-shaped clamp (the radius of the lower arc-shaped clamp is smaller than that of the upper arc-shaped clamp) perfectly matches the crucible structure with a larger upper part and a smaller lower part commonly used in indium phosphide production, allowing the device to fix the crucible more stably.

[0037] Working principle: The operator pulls the arc plate 4, which moves the connecting plate 3 upward along the first limiting groove 15. The square plate 7 is lifted by the connecting rod 5, and the driving column 8 slides upward in the driving groove 11. Because the driving groove 11 is inclined, the movement of the driving column 8 forces the two driving plates 10 to move laterally outward through the moving rod 9, and the upper arc clamp 13 and the lower arc clamp 14 open simultaneously.

[0038] The crucible is placed between the open arc-shaped clamps. The arc-shaped plate 4 is released, and the elastic force of the return spring 6 pushes the connecting plate 3 downward. The drive column 8 slides in the opposite direction along the drive groove 11, and the drive plate 10 drives the moving rod 9 to retract inward. The upper arc-shaped clamp 13 and the lower arc-shaped clamp 14 fit against the outer wall of the crucible. The lower arc-shaped clamp 14 has a smaller radius and tightly clamps the lower part of the crucible, while the upper arc-shaped clamp 13 covers a larger area at the top, forming a stable three-point contact clamping.

[0039] Pull the curved plate 4 again to repeat the opening action, and the crucible can be removed. The limiting grooves 15 and 17 ensure that the connecting plate 3 and the moving rod 9 move only in the preset direction to avoid deflection.

[0040] This fixture, through the curved surface design of the upper arc clamp 13 and the lower arc clamp 14, expands the contact area between the fixture and the outer wall of the crucible, and the clamping force is evenly distributed around the crucible, avoiding single-point force and fundamentally eliminating local stress concentration, thus significantly reducing the crucible damage rate.

[0041] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A crucible removal tooling for indium phosphide production, comprising a mounting block (1), characterized in that, A gripping rod (2) is fixedly installed on the inner wall of the mounting block (1). A movable connecting plate (3) is provided on the inner wall of the mounting block (1). A connecting rod (5) is fixedly connected to the bottom of the connecting plate (3). The connecting rod (5) is slidably located inside the mounting block (1). A square plate (7) is connected to the bottom of the connecting rod (5). A driving column (8) is fixedly installed on the outer wall of the square plate (7). A movable moving rod (9) is provided at the bottom of the outer wall of the mounting block (1). A driving plate (10) is fixedly installed on the inner wall of the moving rod (9). A driving groove (11) is opened on the inner wall of the driving plate (10) and is inclined as a whole. The driving column (8) and the driving groove (11) are adapted to each other.

2. The crucible removal tooling for indium phosphide production as described in claim 1, characterized in that: The number of the moving rod (9), the drive plate (10), and the drive groove (11) is two, and they are arranged symmetrically as a whole.

3. The crucible removal tooling for indium phosphide production as described in claim 2, characterized in that: The drive column (8) is initially located inside both drive slots (11).

4. The crucible removal tooling for indium phosphide production as described in claim 3, characterized in that: A reset spring (6) is fixedly connected between the bottom of the inner wall of the connecting plate (3) and the mounting block (1), and the reset spring (6) and the connecting rod (5) are coaxially arranged.

5. The crucible removal tooling for indium phosphide production as described in claim 4, characterized in that: The inner wall side of the mounting block (1) is provided with a first limiting groove (15), and there are two first limiting grooves (15). The connecting plate (3) is simultaneously slidably located inside the two first limiting grooves (15).

6. The crucible removal tooling for indium phosphide production as described in claim 5, characterized in that: An arc-shaped plate (4) is fixedly installed on the top surface of the connecting plate (3). The arc-shaped plate (4) is arc-shaped and has rounded corners at its edges.

7. The crucible removal tooling for indium phosphide production as described in claim 6, characterized in that: The bottom of the outer wall of the mounting block (1) is provided with a guide groove (16), and a second limiting groove (17) is provided on the side wall of the guide groove (16).

8. The crucible removal tooling for indium phosphide production as described in claim 7, characterized in that: The top of the moving rod (9) is fixedly connected to a limiting block (18), which is simultaneously located inside the guide groove (16) and the second limiting groove (17).

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