Gas circulating device and photovoltaic thermal diffusion apparatus

Abstract

The application relates to a gas circulating device and a photovoltaic thermal diffusion equipment, the photovoltaic thermal diffusion equipment comprises a diffusion furnace and the gas circulating device, the gas circulating device is used in cooperation with the diffusion furnace, the gas circulating device comprises a shell, a convection cavity, an air inlet end and an air outlet end communicated with the convection cavity, the air inlet end and the air outlet end are communicated with two ends of a reaction cavity of the diffusion furnace respectively, and a flow guide assembly is arranged in the convection cavity at least partially, the flow guide assembly is used for driving the gas flow in the convection cavity, so that the gas in the reaction cavity of the diffusion furnace enters the convection cavity from the air inlet end and is then returned to the reaction cavity of the diffusion furnace through the air outlet end.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic technology, and in particular to a gas circulation device and a photovoltaic heat diffusion device. Background Technology

[0002] The diffusion furnace is the core equipment for forming doped or coated layers. Its process principle is to place the silicon wafer in a high-temperature vacuum reaction chamber, introduce a specific process gas, and generate the required film layer on the surface of the silicon wafer through a chemical reaction.

[0003] However, with the advent of large-size silicon wafers, the size of the reaction chamber in traditional diffusion furnaces has increased significantly, resulting in uneven distribution of process gases within the chamber and affecting the quality of the film layer formed on the silicon wafer surface.

[0004] The above information disclosed in the background art of this application is only for understanding the background of the concept of this application, and does not indicate or imply that it includes information of the prior art. Utility Model Content

[0005] Therefore, it is necessary to provide a gas circulation device and a photovoltaic thermal diffusion device to address the above problems.

[0006] A gas circulation device for use in conjunction with a diffusion furnace, the gas circulation device comprising:

[0007] A housing, wherein a convection cavity is provided within the housing, and an inlet and an outlet communicating with the convection cavity, the inlet and the outlet respectively communicating with the two ends of the reaction chamber of the diffusion furnace; and

[0008] A flow guiding component is provided at least partially within the convection cavity. The flow guiding component is used to drive the gas flow within the convection cavity so that the gas in the reaction chamber of the diffusion furnace enters the convection cavity from the inlet end and is then returned to the reaction chamber of the diffusion furnace via the outlet end.

[0009] The aforementioned gas circulation device can achieve at least the following beneficial effects: This gas circulation device can be used in conjunction with a diffusion furnace. The flow guiding component drives the gas to circulate between the reaction chamber and the convection chamber. That is, by driving the gas circulation within the reaction chamber, the uniformity of the process gas within the reaction chamber is significantly improved, ensuring the uniformity of the process gas (such as...) This technology can uniformly cover the silicon wafer surface, thereby improving the thickness consistency and quality of doped or coated layers. This application eliminates the need for additional inert gas flow; the uniformity is improved simply by achieving internal gas circulation within the reaction chamber through a gas circulation device. This avoids vacuum disturbances caused by fluctuations in the gas intake, ensuring the stability of the film growth process. Simultaneously, it reduces the consumption of inert gases (such as Ar), saving on consumable costs and preventing excessive gas from introducing impurities, thus improving product yield.

[0010] In some embodiments, the gas circulation device further includes a heat insulation component. An installation port is provided on the housing, and the heat insulation component is embedded within the installation port, forming the convection cavity together with the inner surface of the housing. The installation port on the housing allows the heat insulation component (such as a heat insulation plate made of high-temperature resistant composite materials) to be inserted, forming the convection cavity together with the inner wall of the housing. The heat insulation component significantly reduces the influence of the external temperature of the housing on the gas within the convection cavity, reducing heat loss and maintaining gas temperature stability.

[0011] In some embodiments, the flow guiding assembly includes a driving section, a transmission section, and a flow guiding section. The flow guiding section is disposed within the convection cavity and connected to one end of the transmission section. The other end of the transmission section rotatably passes through the heat insulation member and is connected to the driving section. The driving section is disposed on the side of the heat insulation member facing away from the convection cavity and can drive the flow guiding section through the transmission section to drive the gas flow within the convection cavity. The transmission section passes through the heat insulation member, utilizing the low thermal conductivity of the heat insulation member (such as ceramic, aerogel, or composite heat insulation material) to reduce heat transfer to the driving section, ensuring stable operation of the driving section at room temperature or lower temperatures, reducing thermal damage to the electronic components of the driving section due to high temperatures, lowering the failure rate, and improving the overall service life of the equipment. The driving section (such as a motor, magnetic coupler, etc.) is located outside the heat insulation member, avoiding direct exposure to the high-temperature environment of the convection cavity (such as a semiconductor diffusion furnace, CVD reaction chamber, etc.), preventing failure of the driving components (such as motor windings) due to high temperatures. An external drive unit design can also reduce the space occupied inside the convection chamber and avoid interfering with the gas flow path, making it suitable for miniaturized or highly integrated equipment (such as MOCVD reactors). The drive unit can be made of high-temperature resistant materials and combined with thermal expansion compensation design (such as reserved gaps or elastic connections) to prevent jamming or deformation at high temperatures.

[0012] In some embodiments, the flow guiding assembly further includes a coupling. The flow guiding part is a fan blade, the transmission part is a rotating shaft, and the drive part is a motor. The drive shaft of the motor is connected to the rotating shaft via the coupling and drives the fan blade to rotate, thereby driving the gas flow within the convection chamber. The coupling ensures efficient power transmission: the coupling connects the motor drive shaft and the rotating shaft, reducing vibration and energy loss during transmission, ensuring stable fan blade speed, and avoiding airflow fluctuations. The motor speed can be precisely controlled (e.g., through frequency converter speed regulation), allowing the fan blade to generate airflow of varying intensities. When the fan blade rotates, a pressure difference can be generated between the side of the convection chamber near the outlet and the side near the inlet, thereby achieving gas flow. Different fan blade specifications (such as blade angle and number) can be replaced according to airflow requirements, or the motor speed can be adjusted to optimize gas flow characteristics.

[0013] In some embodiments, the inner wall of the convection cavity is provided with a fixing groove, and the flow guiding assembly further includes a first bearing, the outer ring of the first bearing being fixedly embedded in the fixing groove, and the inner ring of the first bearing being fixedly sleeved on one end of the transmission part.

[0014] In some embodiments, the gas circulation device further includes a partition covering the mounting port, the partition being disposed on the side of the heat insulation member facing away from the convection cavity, the partition having a limiting hole, the flow guiding assembly further including a second bearing, the outer ring of the second bearing being fixedly embedded in the limiting hole, and the inner ring of the second bearing being fixedly sleeved on the other end of the transmission part.

[0015] In some embodiments, the gas circulation device further includes a partition covering the mounting port, the partition being located on the side of the heat insulation member facing away from the convection cavity.

[0016] In some embodiments, the gas circulation device further includes a sealing assembly that covers the side of the partition facing away from the heat insulation member and forms a sealed cavity with the partition. The drive unit is disposed within the sealed cavity. The sealed cavity completely isolates the drive unit (such as a motor) from the external environment (dust, corrosive gases, moisture, etc.). On the one hand, this prevents foreign objects from entering and causing short circuits, wear, or corrosion; on the other hand, it maintains stable internal gas pressure and prevents external air from seeping in and affecting the purity of the process gas. Furthermore, the gap between the convection cavity and the sealed cavity may allow some process gas to flow from the convection cavity into the sealed cavity, thus the sealed cavity also prevents gas leakage.

[0017] In some embodiments, the sealing assembly includes a sealing shell and a bottom cover, the bottom cover being sealed at one end of the sealing shell, the sealing shell being sealed to the partition, and the bottom cover, the sealing shell, and the partition forming the sealing cavity.

[0018] In some embodiments, the gas circulation device further includes a first seal disposed between the housing and the partition.

[0019] In some embodiments, the gas circulation device includes a second seal that is sealed between the partition and the sealing shell.

[0020] In some embodiments, the gas circulation device includes a third seal that is sealed between the sealing housing and the bottom cover.

[0021] In some embodiments, the flow guiding assembly further includes a conductive element and a sealing plate fixedly sleeved on the conductive element. A through hole is provided on the bottom cover, and the sealing plate seals the through hole. One end of the conductive element is electrically connected to the driving unit, and the other end of the conductive element passes through the through hole and is used for electrical connection to an external circuit. The conductive element directly penetrates the sealing structure, ensuring an efficient and reliable electrical connection between the driving unit and the external circuit. The sealing plate seals the through hole, preventing gas leakage, and is resistant to high temperature, high pressure, or corrosive environments, balancing electrical performance, sealing reliability, and maintenance efficiency.

[0022] In some embodiments, the gas circulation device further includes an insulation shell fitted over the outer shell. The insulation shell has a first through-hole and a second through-hole. The inlet end passes through the first through-hole, and the outlet end passes through the second through-hole. This structural design effectively reduces heat loss of the process gas within the convection cavity and minimizes the impact of the external ambient temperature on the gas temperature. In high-temperature processes, the insulation shell maintains the temperature of the gas flowing through the convection cavity, preventing temperature fluctuations in the gas returning to the reaction cavity due to heat dissipation, thus improving process stability. For easily condensable process gases, the insulation design prevents liquefaction due to temperature drops during circulation, ensuring process reliability.

[0023] This application also provides a photovoltaic thermal diffusion device, which includes a diffusion furnace and a gas circulation device as described in any of the above embodiments.

[0024] The aforementioned photovoltaic thermal diffusion equipment includes the gas circulation device described in the above embodiments. Therefore, the photovoltaic thermal diffusion equipment also has at least the following beneficial effects: the gas circulation device is used in conjunction with the diffusion furnace, and the flow guiding component drives the gas to circulate between the reaction chamber and the convection chamber. That is, by driving the gas circulation within the reaction chamber, the uniformity of the process gas within the reaction chamber is significantly improved, ensuring the uniformity of the process gas (such as...) This technology can uniformly cover the silicon wafer surface, thereby improving the thickness consistency and quality of doped or coated layers. This application eliminates the need for additional inert gas flow; the uniformity is improved simply by achieving internal gas circulation within the reaction chamber through a gas circulation device. This avoids vacuum disturbances caused by fluctuations in the gas intake, ensuring the stability of the film growth process. Simultaneously, it reduces the consumption of inert gases (such as Ar), saving on consumable costs and preventing excessive gas from introducing impurities, thus improving product yield. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of a photovoltaic heat diffusion device provided in one embodiment of the present invention.

[0027] Figure 2 A cross-sectional view of a gas circulation device provided in one embodiment of the present invention.

[0028] Figure 3 An exploded schematic diagram of a gas circulation device provided in one embodiment of the present invention.

[0029] Figure label:

[0030] 10. Photovoltaic thermal diffusion equipment; 11. Diffusion furnace; 12. Gas circulation device; 13. Vacuum pump; 14. Reaction chamber; 141. First convection end; 142. Second convection end; 151. Gas injection end; 152. Gas extraction end; 100. Shell; 110. Convection chamber; 120. Gas inlet end; 130. Gas outlet end; 140. Mounting port; 150. Fixing groove; 200. Flow guiding component; 210. Drive unit; 220. Transmission unit; 230. Flow guiding unit; 2 41. First bearing; 242. Second bearing; 250. Coupling; 260. Conductive component; 270. Sealing plate; 300. Thermal insulation component; 400. Partition plate; 410. Limiting hole; 500. Sealing assembly; 510. Sealing shell; 520. Bottom cover; 521. Through hole; 530. Sealing cavity; 610. First seal; 620. Second seal; 630. Third seal; 700. Thermal insulation shell; 710. First through hole; 720. Second through hole. Detailed Implementation

[0031] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0032] Please see Figure 1 and Figure 2In some embodiments, this application provides a gas circulation device 12, which can be used in conjunction with a diffusion furnace 11. The gas circulation device 12 includes a housing 100 and a flow guiding assembly 200. The housing 100 is provided with a convection chamber 110 and an inlet end 120 and an outlet end 130 communicating with the convection chamber 110. The inlet end 120 and the outlet end 130 are respectively connected to the two ends of the reaction chamber 14 of the diffusion furnace 11. The flow guiding assembly 200 is at least partially disposed in the convection chamber 110. The flow guiding assembly 200 is used to drive the gas flow in the convection chamber 110 so that the gas in the reaction chamber 14 of the diffusion furnace 11 enters the convection chamber 110 from the inlet end 120 and is then returned to the reaction chamber 14 of the diffusion furnace 11 via the outlet end 130.

[0033] The aforementioned gas circulation device 12 can achieve at least the following beneficial effects: the gas circulation device 12 can be used in conjunction with the diffusion furnace 11, and the flow guiding component 200 drives the gas to circulate between the reaction chamber 14 and the convection chamber 110, that is, by driving the gas circulation within the reaction chamber 14 ( Figure 1 The arrows in the diagram indicate the direction of gas circulation. This significantly improves the uniformity of the process gas within reaction chamber 14, ensuring the process gas (such as...)... (etc.) can uniformly cover the silicon wafer surface, thereby improving the thickness uniformity and quality of doped or coated layers. This application does not require additional inert gas flow; the uniformity can be improved simply by using the gas circulation device 12 to achieve internal gas circulation within the reaction chamber 14. This avoids vacuum disturbances caused by fluctuations in the gas intake, ensuring the stability of the film growth process. At the same time, it also reduces the consumption of inert gases (such as Ar), saving consumable costs and preventing excessive gas from introducing impurities, thus improving product yield.

[0034] like Figure 2 and Figure 3 As shown, in some embodiments, the gas circulation device 12 further includes a heat insulation shell 700, which is fitted onto the housing 100. The heat insulation shell 700 has a first through hole 710 and a second through hole 720. The inlet end 120 passes through the first through hole 710, and the outlet end 130 passes through the second through hole 720. This structural design is equivalent to the heat insulation shell 700 wrapping the housing 100, which can effectively reduce the heat loss of the process gas in the convection cavity 110 and reduce the influence of the external ambient temperature on the gas temperature. In high-temperature processes, the heat insulation shell 700 can maintain the temperature of the gas flowing through the convection cavity 110, avoiding temperature fluctuations in the gas flowing back into the reaction chamber 14 due to heat dissipation, and improving process stability. For easily condensable process gases, the heat insulation design can prevent the gas from liquefying due to temperature drop during circulation, ensuring process reliability.

[0035] like Figure 2 and Figure 3 As shown, in some embodiments, the gas circulation device 12 further includes a heat insulation component 300. The housing 100 has an installation port 140, and the heat insulation component 300 is embedded in the installation port 140, forming the convection cavity 110 together with the inner surface of the housing 100. The installation port 140 is provided on the housing 100, and the heat insulation component 300 (such as a heat insulation board made of high-temperature resistant composite materials) is embedded in the installation port 140, forming the convection cavity 110 together with the inner wall of the housing 100. The heat insulation component 300 significantly reduces the influence of the external temperature of the housing 100 on the gas inside the convection cavity 110, reduces heat loss, and maintains the stability of the gas temperature.

[0036] like Figure 2 and Figure 3 As shown, in some embodiments, the flow guiding assembly 200 includes a driving part 210, a transmission part 220, and a flow guiding part 230. The flow guiding part 230 is disposed within the convection cavity 110 and connected to one end of the transmission part 220. The other end of the transmission part 220 is rotatably inserted through the heat insulation member 300 and connected to the driving part 210. The driving part 210 is disposed on the side of the heat insulation member 300 facing away from the convection cavity 110 and can drive the flow guiding part 230 through the transmission part 220 to drive the gas flow within the convection cavity 110. The transmission part 220 passes through the heat insulation member 300, utilizing the low thermal conductivity of the heat insulation member 300 (such as ceramic, aerogel, or composite heat insulation material) to reduce heat transfer to the driving part 210, ensuring stable operation of the driving part 210 at room temperature or lower temperatures, reducing thermal damage to the electronic components of the driving part 210 caused by high temperatures, lowering the failure rate, and improving the overall service life of the equipment. The drive unit 210 (such as a motor, magnetic coupler, etc.) is located outside the heat insulation component 300 to avoid direct exposure to the high-temperature environment of the convection cavity 110 (such as the semiconductor diffusion furnace 11, CVD reaction chamber 14, etc.), thus preventing failure of the drive unit 210 components (such as motor windings) due to high temperatures. The external design of the drive unit 210 also reduces the space occupied inside the convection cavity 110, avoids interference with the gas flow path, and is suitable for miniaturized or highly integrated equipment (such as MOCVD reactors). The transmission unit 220 can be made of high-temperature resistant materials and combined with thermal expansion compensation design (such as reserved gaps or elastic connections) to prevent jamming or deformation at high temperatures.

[0037] like Figure 2 and Figure 3As shown, in some embodiments, the flow guiding assembly 200 further includes a coupling 250. The flow guiding part 230 is a fan blade, the transmission part 220 is a rotating shaft, and the drive part 210 is a motor. The drive shaft of the motor is connected to the rotating shaft through the coupling 250 and drives the fan blade to rotate, thereby driving the gas flow within the convection chamber 110. The coupling 250 ensures efficient power transmission: the coupling 250 connects the motor drive shaft and the rotating shaft, reducing vibration and energy loss during transmission, ensuring stable fan blade speed, and avoiding airflow fluctuations. The motor speed can be precisely controlled (e.g., through frequency conversion speed regulation), allowing the fan blade to generate airflow of different intensities. When the fan blade rotates, a pressure difference can be generated between the side of the convection chamber 110 near the outlet end 130 and the side of the convection chamber 110 near the inlet end 120, thereby achieving gas flow. Different fan blade specifications (such as blade angle and number) can be replaced according to airflow requirements, or the motor speed can be adjusted to optimize gas flow characteristics.

[0038] like Figure 2 As shown, in some embodiments, the inner wall of the convection cavity 110 is provided with a fixing groove 150, and the flow guiding assembly 200 further includes a first bearing 241. The outer ring of the first bearing 241 is fixedly embedded in the fixing groove 150, and the inner ring of the first bearing 241 is fixedly sleeved on one end of the transmission part 220.

[0039] like Figure 2 As shown, in some embodiments, the gas circulation device 12 further includes a partition 400 covering the mounting port 140. The partition 400 is located on the side of the heat insulation member 300 facing away from the convection cavity 110. A limiting hole 410 is formed on the partition 400. The flow guiding assembly 200 further includes a second bearing 242. The outer ring of the second bearing 242 is fixedly embedded in the limiting hole 410, and the inner ring of the second bearing 242 is fixedly sleeved on the other end of the transmission part 220.

[0040] like Figure 2 and Figure 3As shown, in some embodiments, the gas circulation device 12 further includes a sealing assembly 500, which covers the side of the partition 400 facing away from the heat insulation member 300 and forms a sealed cavity 530 with the partition 400. The driving part 210 is disposed within the sealed cavity 530. Further, in some embodiments, the sealing assembly 500 includes a sealing shell 510 and a bottom cover 520. The bottom cover 520 is sealed over one end of the sealing shell 510, and the sealing shell 510 is sealed to the partition 400. The bottom cover 520, the sealing shell 510, and the partition 400 form the sealed cavity 530. The sealing cavity 530 completely isolates the drive unit 210 (such as a motor) from the external environment (dust, corrosive gases, moisture, etc.). On the one hand, it can prevent foreign objects from entering and causing short circuits, wear or corrosion, and it can also maintain stable internal air pressure and prevent external air from seeping in and affecting the purity of process gas. On the other hand, the gap between the convection cavity 110 and the sealing cavity 530 may allow some process gas to flow from the convection cavity 110 into the sealing cavity 530, so the sealing cavity 530 can also prevent gas leakage.

[0041] like Figure 2 and Figure 3 As shown, in some embodiments, the gas circulation device 12 further includes a first seal 610, a second seal 620, and a third seal 630. The first seal 610 is sealed between the housing 100 and the partition 400, the second seal 620 is sealed between the partition 400 and the sealing shell 510, and the third seal 630 is sealed between the sealing shell 510 and the bottom cover 520. The first seal 610, the second seal 620, and the third seal 630 may include, but are not limited to, sealing rings.

[0042] like Figure 2 and Figure 3 As shown, in some embodiments, the flow guiding assembly 200 further includes a conductive element 260 and a sealing plate 270 fixedly sleeved on the conductive element 260. A through hole 521 is provided on the bottom cover 520, and the sealing plate 270 seals the through hole 521. One end of the conductive element 260 is electrically connected to the driving unit 210, and the other end of the conductive element 260 passes through the through hole 521 and is used for electrical connection with an external circuit. The conductive element 260 directly penetrates the sealing structure, ensuring an efficient and reliable electrical connection between the driving unit 210 and the external circuit. The sealing plate 270 seals the through hole 521, preventing gas leakage and resisting high temperature, high pressure, or corrosive environments, thus balancing electrical performance, sealing reliability, and maintenance efficiency.

[0043] In addition, such as Figure 1As shown, this application also provides a photovoltaic thermal diffusion device 10, which includes a diffusion furnace 11 and a gas circulation device 12 as described in any of the above embodiments.

[0044] The aforementioned photovoltaic thermal diffusion equipment 10 includes the gas circulation device 12 described in the above embodiments. Therefore, the photovoltaic thermal diffusion equipment 10 also has at least the following beneficial effects: the gas circulation device 12 is used in conjunction with the diffusion furnace 11, and the flow guiding component 200 drives the gas to circulate between the reaction chamber 14 and the convection chamber 110. That is, by driving the gas circulation within the reaction chamber 14, the uniformity of the process gas within the reaction chamber 14 is significantly improved, ensuring that the process gas can uniformly cover the silicon wafer surface, thereby improving the thickness consistency and quality of doped or coated layers. This application does not require additional inert gas flow; the uniformity can be improved simply by achieving internal gas circulation within the reaction chamber 14 through the gas circulation device 12. This avoids consumption due to intake gas waves (such as Ar), saves consumable costs, and also avoids the introduction of impurities by excessive gas, thus improving product yield.

[0045] In some embodiments, the photovoltaic thermal diffusion device 10 includes a vacuum pump 13, a diffusion furnace 11, and a gas circulation device 12 as described in any of the above embodiments. The diffusion furnace 11 contains a reaction chamber 14. The diffusion furnace 11 is provided with a first convection end 141, a second convection end 142, a gas injection end 151, and a gas extraction end 152. The vacuum pump 13 is connected to the reaction chamber 14 through the gas extraction end 152 and is capable of extracting gas from the reaction chamber 14. The gas injection end 151 is connected to the reaction chamber 14 and is capable of injecting process gas into the reaction chamber 14. The first convection end 141 and the second convection end 142 are respectively located on both sides of the diffusion furnace 11. The first convection end 141 is connected to the gas inlet end 120 of the gas circulation device 12, and the second convection end 142 is connected to the gas outlet end 130 of the gas circulation device 12.

[0046] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0047] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

[0048] In the description of this utility model, it should be understood that the terms "axial", "radial", "circumferential", "length", "width", "thickness", "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0049] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0050] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0051] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0052] It should be noted that when an element is referred to as being "attached to," "fixed to," or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0053] In this specification, the use of terms such as "an embodiment," "another implementation," etc., refers to a specific feature, structure, material, or characteristic described in connection with that embodiment or example that is included in at least one embodiment or example of the present invention. In this specification, the illustrative descriptions of the above terms do not necessarily refer to the same embodiment or example. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of this application.

Claims

1. A gas circulation device for use in conjunction with a diffusion furnace, characterized in that, The gas circulation device includes: A housing, wherein a convection cavity is provided within the housing, and an inlet and an outlet communicating with the convection cavity, the inlet and the outlet respectively communicating with the two ends of the reaction chamber of the diffusion furnace; and A flow guiding component is provided at least partially within the convection cavity. The flow guiding component is used to drive the gas flow within the convection cavity so that the gas in the reaction chamber of the diffusion furnace enters the convection cavity from the inlet end and is then returned to the reaction chamber of the diffusion furnace via the outlet end.

2. The gas circulation device according to claim 1, characterized in that, The gas circulation device also includes a heat insulation component. The housing has an installation port, and the heat insulation component is embedded in the installation port and forms the convection cavity with the inner surface of the housing.

3. The gas circulation device according to claim 2, characterized in that, The flow guiding assembly includes a driving part, a transmission part, and a flow guiding part. The flow guiding part is disposed in the convection cavity and connected to one end of the transmission part. The other end of the transmission part is rotatably inserted through the heat insulation member and connected to the driving part. The driving part is disposed on the side of the heat insulation member facing away from the convection cavity and can drive the flow guiding part through the transmission part to drive the gas flow in the convection cavity.

4. The gas circulation device according to claim 3, characterized in that, The flow guiding assembly also includes a coupling, the flow guiding part is a fan blade, the transmission part is a rotating shaft, the drive part is a motor, and the drive shaft of the motor is connected to the rotating shaft through the coupling and drives the fan blade to rotate to drive the gas flow in the convection cavity; And / or, the inner wall of the convection cavity is provided with a fixing groove, and the flow guiding assembly further includes a first bearing, the outer ring of the first bearing is fixedly embedded in the fixing groove, and the inner ring of the first bearing is fixedly sleeved on one end of the transmission part; And / or, the gas circulation device further includes a partition plate covering the mounting port, the partition plate being disposed on the side of the heat insulation member facing away from the convection cavity, the partition plate having a limiting hole, the flow guiding assembly further including a second bearing, the outer ring of the second bearing being fixedly embedded in the limiting hole, and the inner ring of the second bearing being fixedly sleeved on the other end of the transmission part.

5. The gas circulation device according to claim 3, characterized in that, The gas circulation device also includes a partition covering the mounting port, the partition being located on the side of the heat insulation component facing away from the convection cavity.

6. The gas circulation device according to claim 5, characterized in that, The gas circulation device further includes a sealing assembly, which covers the side of the partition facing away from the heat insulation member and forms a sealed cavity with the partition. The driving unit is located inside the sealed cavity.

7. The gas circulation device according to claim 6, characterized in that, The sealing assembly includes a sealing shell and a bottom cover. The bottom cover is sealed at one end of the sealing shell. The sealing shell is sealed to the partition. The bottom cover, the sealing shell, and the partition together form the sealing cavity.

8. The gas circulation device according to claim 7, characterized in that, The gas circulation device further includes a first sealing element, which is sealed between the housing and the partition plate; And / or, the gas circulation device includes a second seal, which is sealed between the partition and the sealing shell; And / or, the gas circulation device includes a third seal, which is sealed between the sealing shell and the bottom cover; And / or, the flow guiding assembly further includes a conductive element and a sealing plate fixedly sleeved on the conductive element, the bottom cover has a through hole, the sealing plate is sealed and covered in the through hole, one end of the conductive element is electrically connected to the driving part, and the other end of the conductive element passes through the through hole and is used to be electrically connected to an external circuit.

9. The gas circulation device according to any one of claims 1 to 8, characterized in that, The gas circulation device further includes an insulation shell, which is fitted onto the housing. The insulation shell has a first through hole and a second through hole. The air inlet is inserted through the first through hole, and the air outlet is inserted through the second through hole.

10. A photovoltaic heat diffusion device, characterized in that, It includes a diffusion furnace and a gas circulation device as described in any one of claims 1 to 9.

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