Ultrapure gas detection backflow prevention quick connect

Abstract

The utility model relates to backflow prevention quick interface technical field, especially pure gas detection backflow prevention quick interface, including transmission pipe and link pipe, the one end intercommunication of transmission pipe is equipped with link pipe, the outside of link pipe installs detection module, the one end of detection module is fixed with detection head, the outside of link pipe is located the one side of detection module and is equipped with alarm lamp, the outside intercommunication of transmission pipe is equipped with branch pipe, the one end of transmission pipe away from link pipe is fixed with link disc, the utility model discloses realized through adopting detection module in the pure gas transmission process, real -time monitoring gas purity, once discovers the purity to be in conformity with the standard, can immediately alarm prompt staff to take measures to adjust, prevent the production interruption and repeated operation caused by gas purity problem, simultaneously, real -time detection gas purity, avoid because gas purity is not pure to the follow -up process influence, guarantee the production quality of follow -up product, improve the quality of final product.

Description

Technical Field

[0001] This utility model relates to the field of anti-backflow quick interface technology, and in particular to an anti-backflow quick interface for ultrapure gas detection. Background Technology

[0002] Ultrapure gas is a gas with extremely high purity and very low impurity content, typically reaching 99.999% or even higher. This gas has extremely important applications in many high-tech fields, and its preparation and use are governed by strict standards and requirements. It plays a crucial role in many high-tech fields because these fields have extremely high requirements for gas purity; even the slightest impurity can significantly affect the process or test results. Ultrapure gas anti-backflow quick-connect interfaces are devices used to prevent ultrapure gas from flowing back during transmission. Combining anti-backflow functionality with quick connection and disconnection features, it plays a vital role in ensuring gas purity and preventing contamination, and is widely used in semiconductor manufacturing, the electronics industry, and high-precision analysis.

[0003] Existing backflow prevention quick-connect interfaces typically use check valves to control gas transmission. However, impurities may be introduced into the gas during transmission, making it difficult for the gas purity to meet standard parameters. This affects subsequent production processes and reduces overall production efficiency. Utility Model Content

[0004] To overcome the problem that existing backflow prevention quick interfaces typically use check valves to control gas transmission, impurities may be introduced into the gas during transmission, making it difficult for the gas purity to meet standard parameters, affecting subsequent production processes and reducing overall production efficiency, this utility model provides an ultrapure gas detection backflow prevention quick interface.

[0005] The technical solution is as follows: a quick-connect interface for preventing backflow of ultrapure gas detection, including a transmission pipe and a connecting pipe; one end of the transmission pipe is connected to the connecting pipe, a detection module is installed on the outside of the connecting pipe, a detection head is fixed at one end of the detection module, an alarm light is installed on the outer end of the connecting pipe on one side of the detection module, a secondary pipe is connected to the outer end of the transmission pipe, and a connecting plate is fixed at the end of the transmission pipe away from the connecting pipe.

[0006] Furthermore, the detection head extends through the connecting tube into the interior. The outer wall of the connecting tube has a connection hole for accommodating the detection head. One end of the detection module is fixed to a connecting block on one side of the detection head. The detection module is sealed and fixed to the connecting tube through the connecting block.

[0007] Furthermore, a connector is installed at the lower end of the alarm light, and the alarm light is fixedly connected to the connecting pipe through the connector.

[0008] Furthermore, the alarm light is equipped with a transmission cable at its outer end, and the alarm light is electrically connected to the detection module through the transmission cable.

[0009] Furthermore, a flow-limiting plate is installed inside the connecting tube, and a positioning groove for accommodating the flow-limiting plate is opened inside the connecting tube.

[0010] Furthermore, a docking plate is fixed at the end of the connecting pipe and the secondary pipe away from the transmission pipe, and several sets of connecting holes are circumferentially opened inside the docking plate.

[0011] Furthermore, a sealing ring is provided at the outer end of the mating plate, and a connecting groove for accommodating the sealing ring is provided on the outer wall of the mating plate.

[0012] Furthermore, a drive rod is installed inside the transmission tube. One end of the drive rod is located inside the transmission tube and has a return head installed thereon. The other end of the drive rod extends through the connecting plate to the outer end, and an adjustment lever is fitted on the outer wall of the drive rod.

[0013] The beneficial effects are: This utility model realizes the real-time monitoring of gas purity during the ultrapure gas transmission process by using a detection module. Once the purity is found to be non-compliant with the standard, an alarm can be immediately triggered to prompt the staff to take measures to make adjustments, preventing production interruptions and repeated operations caused by gas purity issues. At the same time, real-time detection of gas purity avoids the impact of impurity on subsequent processes, ensuring the production quality of subsequent products and improving the quality of the final product. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the ultrapure gas detection anti-backflow quick interface of this utility model;

[0015] Figure 2 This is a three-dimensional structural diagram of the detection module of this utility model;

[0016] Figure 3 This is a three-dimensional structural diagram of the alarm light of this utility model;

[0017] Figure 4 This is a three-dimensional structural diagram of the current limiting plate of this utility model;

[0018] Figure 5 This is a three-dimensional structural diagram of the sealing ring of this utility model.

[0019] In the attached diagram, the following are the reference numerals: 1. Transmission pipe; 2. Connecting pipe; 3. Secondary pipe; 4. Detection module; 5. Alarm light; 6. Connecting head; 7. Connecting block; 8. Connecting plate; 9. Sealing ring; 10. Connecting plate; 11. Drive rod; 12. Adjusting handle; 13. Flow restrictor. Detailed Implementation

[0020] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0021] In the process of preparing ultrapure gas, a variety of advanced purification technologies are required. First, the gas raw material will undergo a pretreatment stage, which mainly removes larger particulate impurities and some moisture from the gas. Common pretreatment methods include filtration and drying. Filtration can use filter materials with different pore sizes to intercept solid particulate impurities in the gas, while drying removes moisture from the gas through physical adsorption or chemical absorption. The presence of moisture not only affects the purity of the gas, but may also react with other substances in subsequent processes to produce new impurities.

[0022] After pretreatment, the gas enters the deep purification stage. The purpose of this stage is to remove smaller impurities and specific gaseous impurity components from the gas. For example, in the electronics industry, the ultrapure gas used for chip manufacturing needs to remove impurities such as oxygen, carbon dioxide, and hydrocarbons. These impurities may react with reactants during chip manufacturing, causing defects on the chip surface and affecting chip performance and yield. Therefore, deep purification uses a variety of methods such as adsorption, condensation, and distillation. Adsorption uses the adsorption effect of adsorbents to separate impurities from the gas. Condensation lowers the gas temperature to condense impurities into liquids or solids, thus separating them from the gas. Distillation utilizes the difference in boiling points between different impurities and the target gas, carrying out multiple vaporization and condensation processes in a distillation column to separate the impurities from the target gas.

[0023] The detection and quality control of ultrapure gases are also very important. Due to their extremely high purity, high-precision detection instruments and methods are required to ensure that their quality meets the requirements. Commonly used detection methods include gas chromatography and mass spectrometry. Gas chromatography can separate and quantitatively analyze various components in a gas. By comparing the chromatograms of standard substances, the content of impurities in the gas can be accurately detected. Mass spectrometry determines the composition and purity of a gas by measuring the mass-to-charge ratio of gas molecules. This method has high sensitivity and accuracy and can detect impurities at extremely low concentrations.

[0024] In terms of applications, ultrapure gas has a wide range of uses in the electronics industry. In addition to chip manufacturing, as mentioned above, it is also used in the production of liquid crystal displays (LCDs) and fiber optic manufacturing. For example, in the manufacturing process of LCDs, ultrapure gas is used for cleaning and etching processes to ensure the quality and performance of the display. Ultrapure gas also has important applications in the field of analytical chemistry. For example, in gas chromatography analysis, ultrapure gas, as a carrier gas, can ensure the accuracy of analytical results because any tiny impurities can interfere with the separation and detection of the analyte. In addition, in the medical field, ultrapure gas used in equipment such as ventilators can provide patients with safer gases and avoid impurities from irritating or damaging the patient's respiratory system.

[0025] The high purity of ultrapure gas makes it indispensable in many high-tech fields. Its preparation process is complex and requires strict control, and testing and quality control are also very important. With the continuous development of science and technology, the demand for ultrapure gas will continue to increase, and its application areas will be further expanded.

[0026] The pure gas anti-backflow quick-connect interface is a connection device specifically designed for ultrapure gas systems. It not only allows for quick connection and disconnection of gas pipelines but also effectively prevents gas backflow, ensuring the purity and safety of the gas system. This type of interface is typically used in applications requiring extremely high gas purity, such as semiconductor manufacturing, the electronics industry, and medical equipment, to ensure the safety and reliability of the gas system.

[0027] In terms of technical principles, ultrapure gas anti-backflow quick-connect interfaces primarily achieve their anti-backflow function through mechanical structures or physical principles. Common designs include check valves, one-way valves, and vacuum breaker mechanisms. Check valves and one-way valves control the gas flow direction by opening and closing the valve. When the gas flow direction is correct, the valve opens, allowing the gas to pass smoothly; when the gas attempts to flow in the opposite direction, the valve closes, preventing backflow. Vacuum breaker mechanisms prevent backflow by detecting the vacuum level in the system. When a vacuum condition occurs in the system, the vacuum breaker automatically opens, introducing outside air to break the vacuum and prevent gas backflow.

[0028] In terms of application scenarios, ultrapure gas anti-backflow quick-connect interfaces are widely used in various applications requiring high-purity gases. For example, in semiconductor manufacturing processes, ultrapure gases are used for cleaning, etching, and deposition processes. The anti-backflow interface prevents process gases from flowing back, avoiding contamination and equipment damage. As an important safety device, the ultrapure gas anti-backflow quick-connect interface effectively prevents gas backflow through its unique design and function, ensuring the safety and reliability of the gas system. In various high-tech and medical fields, the application of this interface is of great significance for improving system performance and ensuring user safety.

[0029] like Figures 1-5 As shown, the ultrapure gas detection anti-backflow quick interface includes a transmission pipe 1 and a connecting pipe 2; one end of the transmission pipe 1 is connected to the connecting pipe 2, and a detection module 4 is installed on the outside of the connecting pipe 2. A detection head is fixed at one end of the detection module 4. An alarm light 5 is installed on the outer end of the connecting pipe 2 on one side of the detection module 4. A secondary pipe 3 is connected to the outer end of the transmission pipe 1. A connecting plate 10 is fixed at the end of the transmission pipe 1 away from the connecting pipe 2. The detection head extends through the connecting pipe 2 into the interior. A connection hole for accommodating the detection head is opened on the outer wall of the connecting pipe 2. A connecting block 7 is fixed on one side of the detection head at one end of the detection module 4. The detection module 4 is sealed and fixed to the connecting pipe 2 through the connecting block 7.

[0030] Please see Figures 2-4The lower end of the alarm light 5 is equipped with a connector 6. The alarm light 5 is fixedly connected to the connector tube 2 through the connector 6. The outer end of the alarm light 5 is equipped with a transmission cable. The alarm light 5 is electrically connected to the detection module 4 through the transmission cable. The inside of the connector tube 2 is equipped with a current limiting plate 13. The inside of the connector tube 2 is provided with a positioning groove to accommodate the current limiting plate 13.

[0031] Please see Figures 3-5 A docking plate 8 is fixed at the end of the connecting pipe 2 and the auxiliary pipe 3 away from the transmission pipe 1. Several sets of connecting holes are opened in the circumferential direction inside the docking plate 8. A sealing ring 9 is provided at the outer end of the docking plate 8. A connecting groove for accommodating the sealing ring 9 is opened on the outer wall of the docking plate 8. A drive rod 11 is installed inside the transmission pipe 1. A return head is installed at one end of the drive rod 11 inside the transmission pipe 1. One end of the drive rod 11 extends through the connecting plate 10 to the outer end. An adjusting handle 12 is sleeved on the outer wall of the drive rod 11.

[0032] When ultrapure gas needs to be transmitted, bolts are used to connect one end of the connecting pipe 2 to the connecting plate 8 and the delivery pipeline. Next, bolts are used again to connect one end of the auxiliary pipe 3 to the connecting plate 8 and the output pipeline. The sealing ring 9 on the outer end of the connecting plate 8 is used to seal the connection and prevent gas leakage. After pipeline installation, gas enters through the connecting pipe 2. When passing through the flow restrictor 13, the flow restrictor 13 initially controls the gas flow rate, ensuring the gas enters the subsequent detection stage at a suitable flow rate. The gas continues to flow to the detection head. The detection module 4 monitors the gas purity, composition, and other key parameters in real time through the detection head. The detection module 4 integrates a high-precision sensor, which can quickly and accurately acquire gas information and convert the data into electrical signals. The detection module 4 transmits the acquired gas detection signal to the alarm light 5 via a transmission cable to determine whether the gas meets preset purity requirements and other standards. When the detection module 4 detects that the gas purity is lower than the set threshold or other abnormalities exist, it will immediately send an electrical signal to the alarm light 5. Upon receiving a signal, alarm light 5 quickly flashes or emits a specific color to alert the operator of a gas problem, enabling them to quickly assess the severity of the gas condition and take appropriate measures. During normal gas transmission, the return head on drive rod 11 is in its initial position, allowing gas to flow smoothly through transmission pipe 1. When gas transmission stops or pressure fluctuations occur that could lead to gas backflow, the operator can adjust drive rod 11 by adjusting lever 12. The return head then moves to a specific position on transmission pipe 1, effectively blocking gas backflow. The shape and size of the return head match the inner wall of transmission pipe 1, ensuring a tight seal and preventing reverse gas flow. This ensures the unidirectional nature of gas transmission and protects the detection system and downstream equipment from interference and damage caused by backflowing gas.

[0033] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A quick-connect interface for ultrapure gas detection with backflow prevention, characterized in that, It includes a transmission pipe (1) and a connecting pipe (2); one end of the transmission pipe (1) is connected to the connecting pipe (2), a detection module (4) is installed on the outside of the connecting pipe (2), a detection head is fixed at one end of the detection module (4), an alarm light (5) is installed on the outside of the connecting pipe (2) on one side of the detection module (4), a secondary pipe (3) is connected to the outside of the transmission pipe (1), and a connecting plate (10) is fixed at the end of the transmission pipe (1) away from the connecting pipe (2).

2. The ultrapure gas detection anti-backflow quick interface according to claim 1, characterized in that, The detection head extends through the connecting tube (2) into the interior. The outer wall of the connecting tube (2) has a connection hole for accommodating the detection head. One end of the detection module (4) is fixed with a connecting block (7) on one side of the detection head. The detection module (4) is sealed and fixed to the connecting tube (2) through the connecting block (7).

3. The ultrapure gas detection anti-backflow quick interface according to claim 2, characterized in that, The lower end of the alarm light (5) is equipped with a connector (6), and the alarm light (5) is fixedly connected to the connecting pipe (2) through the connector (6).

4. The ultrapure gas detection anti-backflow quick interface according to claim 3, characterized in that, The alarm light (5) is equipped with a transmission cable at its outer end, and the alarm light (5) is electrically connected to the detection module (4) through the transmission cable.

5. The ultrapure gas detection anti-backflow quick interface according to claim 1, characterized in that, A flow limiting plate (13) is installed inside the connecting pipe (2), and a positioning groove for accommodating the flow limiting plate (13) is opened inside the connecting pipe (2).

6. The ultrapure gas detection anti-backflow quick interface according to claim 1, characterized in that, The connecting pipe (2) and the secondary pipe (3) are fixed with a docking plate (8) at the end away from the transmission pipe (1). The docking plate (8) has several sets of connecting holes circumferentially opened inside.

7. The ultrapure gas detection anti-backflow quick interface according to claim 6, characterized in that, A sealing ring (9) is provided at the outer end of the docking plate (8), and a connecting groove for accommodating the sealing ring (9) is provided on the outer wall of the docking plate (8).

8. The ultrapure gas detection anti-backflow quick interface according to claim 1, characterized in that, A drive rod (11) is installed inside the transmission pipe (1). One end of the drive rod (11) is located inside the transmission pipe (1) and a return head is installed thereon. One end of the drive rod (11) extends through the connecting plate (10) to the outer end. An adjusting handle (12) is sleeved on the outer wall of the drive rod (11).

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