Focusing device correction jig

Abstract

The utility model relates to the technical field of semiconductor manufacturing provides a kind of focusing device correction jig, including base body and correction component;The base body has a positioning part, the positioning part is used to fix focusing device;The correction component is set to the base body, and the correction component is used to calibrate the position of each through-hole for ion beam to pass through on focusing device.This focusing device correction jig can calibrate the position of each through-hole of focusing device, to improve the coaxiality of each component through-hole in focusing device.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a focusing device calibration fixture. Background Technology

[0002] Ion implantation is a crucial technology in modern integrated circuit manufacturing. It involves precisely controlling a high-energy ion beam to directly implant into semiconductor materials, altering their conductivity and ultimately forming the desired device. This technology demands extremely high beam stability; therefore, focusing devices are typically used in ion implantation.

[0003] Focusing devices typically include multiple components with through holes, such as a focusing ring and a graphite blocking element. The focusing ring is used to connect an external power source to control the direction of the ions so that the beam is focused. The graphite blocking element has through holes for the focused beam to pass through. The graphite blocking element is installed near the path of the ion beam to block excess ions, shape the ion beam, and prevent these ions from directly hitting the metal wall of the focusing device and causing metal contamination in the chamber.

[0004] In the focusing device, the assembly accuracy of the through holes on the above-mentioned components through which the ion beam passes has a direct impact on the beam stability. If there is a deviation between the through holes, it will affect the stability of the beam.

[0005] In the current assembly process of focusing devices, it is usually confirmed by visual inspection whether the central axes of the holes of the above-mentioned components are collinear. This method is difficult to accurately position, has low assembly accuracy, and is prone to beam instability, affecting the ion implantation quality and requiring rework for maintenance.

[0006] Therefore, this utility model provides a focusing device calibration fixture to ensure the coaxiality of each through hole in the focusing device. Utility Model Content

[0007] The purpose of this invention is to provide a focusing device calibration fixture, which can calibrate the position of each through hole of the focusing device to improve the coaxiality of the through holes of each component in the focusing device.

[0008] This utility model provides a focusing device calibration fixture, including: a base and a calibration component;

[0009] The substrate has a positioning part for fixing the focusing device;

[0010] The calibration component is disposed on the substrate and is used to calibrate the position of each through hole on the focusing device through which the ion beam passes.

[0011] Optionally, the calibration assembly includes a first calibration shaft and a second calibration shaft, which are coaxially arranged. The outer diameter of the first calibration shaft is the same as the diameter of a portion of the through holes, and the outer diameter of the second calibration shaft is the same as the diameter of another portion of the through holes.

[0012] Optionally, one end of the first correction axis is connected to one end of the second correction axis.

[0013] Optionally, the focusing device calibration fixture further includes a positioning component disposed on the calibration component and / or the base, for defining the mounting positions of the first calibration axis and the second calibration axis.

[0014] Optionally, the substrate has a chamber for accommodating at least the components where the through holes of the focusing device are located, and at least a portion of the calibration assembly is located within the chamber for calibrating the position of each of the through holes.

[0015] Optionally, the positioning part includes a groove disposed on the substrate.

[0016] Optionally, the groove is disposed on the outer wall of the substrate, and the bottom of the groove is provided with a channel communicating with the cavity.

[0017] Optionally, the substrate has a mounting hole that communicates with the chamber, and a portion of the correction component is conformally mounted in the mounting hole.

[0018] Optionally, when the calibration component includes a first calibration shaft and a second calibration shaft, the mounting hole includes a first mounting hole and a second mounting hole;

[0019] The first mounting hole and the second mounting hole are coaxially arranged, and the first mounting hole and the second mounting hole are respectively opened on the two opposite side walls of the base along the axial direction of the first mounting hole;

[0020] The diameter of the first mounting hole is the same as the outer diameter of the first correction shaft, and the first correction shaft is mounted in the first mounting hole. The diameter of the second mounting hole is the same as the outer diameter of the second correction shaft, and the second correction shaft is mounted in the second mounting hole.

[0021] Optionally, when one end of the first correction shaft is connected to one end of the second correction shaft, the correction assembly further includes a first locking member and a second locking member;

[0022] The first locking member is connected to the end of the first correction shaft away from the second correction shaft and is attached to the outer wall of the base;

[0023] The second locking member is connected to the end of the second correction shaft away from the first correction shaft and is attached to the outer wall of the base.

[0024] With this configuration, the focusing device calibration fixture, in which the focusing device is connected to the positioning part on the substrate, positions the focusing device relative to the substrate. The calibration component is used to calibrate the positions of each through-hole on the focusing device through which the ion beam passes, thereby positioning the installation position of each through-hole to ensure high coaxiality and improve the stability of the ion beam. This calibration fixture is easy to use, facilitates rapid positioning of each through-hole on the focusing device, reduces machine maintenance time, extends the effective working time of the machine, and helps improve the machine's working efficiency. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of the focusing device calibration fixture and the focusing device after they are combined according to an embodiment of the present invention;

[0026] Figure 2 This is a schematic diagram of the structure of the base of the focusing device calibration fixture according to an embodiment of the present invention. Figure 1 ;

[0027] Figure 3 This is a schematic diagram of the structure of the base of the focusing device calibration fixture according to an embodiment of the present invention. Figure 2 ;

[0028] Figure 4 This is a partial structural diagram of the correction component according to an embodiment of the present invention. Figure 1 ;

[0029] Figure 5 This is a partial structural diagram of the correction component according to an embodiment of the present invention. Figure 2 .

[0030] In the attached diagram:

[0031] 10-Base; 11-Positioning part; 111-Groove; 12-Cavity; 13-Channel; 14-First mounting hole; 15-Second mounting hole; 16-First recessed area; 17-Second recessed area;

[0032] 20 - Correction assembly; 21 - First correction shaft; 22 - Second correction shaft; 23 - First locking element; 24 - Second locking element;

[0033] 30 - Positioning component; 31 - Positioning protrusion; 32 - Positioning groove;

[0034] 40-Focusing device; 41-Base; 42-First component; 43-Second component; 44-Third component; 45-Adjusting component. Detailed Implementation

[0035] The focusing device calibration fixture proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0036] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Furthermore, the terms "installed," "connected," and "attached," as used in this utility model, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0037] This embodiment provides a focusing device calibration fixture, including: a base 10 and a calibration component 20;

[0038] The substrate 10 has a positioning part 11 for fixing the focusing device 40;

[0039] The calibration component 20 is disposed on the substrate 10, and the calibration component 20 is used to calibrate the position of each through hole on the focusing device 40 through which the ion beam passes.

[0040] Combination Figure 1 As shown, the focusing device 40 includes a base 41, a first component 42, a second component 43, a third component 44, and an adjustment component 45.

[0041] The first component 42 is connected to one side of the base 41. The first component 42 has a plate-like structure and a first through-hole for the ion beam to pass through. The first through-hole is used to shape the ion beam, allowing it to pass through in a specific shape and blocking scattered ions. The second component 43 is a thin sheet structure and has a second through-hole with the same diameter as the first through-hole, and they are coaxially arranged. Since the second component 43 is fixed to the first component 42, the coaxiality accuracy of the first through-hole and the second through-hole is guaranteed after the first component 42 and the second component 43 are positioned relative to each other. The second component 43 can be made of graphite to protect the first component 42 and to directly block the emitted ions, preventing the ions from directly contacting the first component 42. The third component 44 is a graphite ring, which is connected to one side of the base 41 through an adjusting member 45. The adjusting member 45 is connected to the base 41. The third through hole in the middle of the third component 44 is used to allow the ion beam to pass through. The third component 44 can be connected to an external power source, and the direction of the ions can be controlled by the generated magnetic field or electric field to form an ion beam.

[0042] The third through hole of the third component 44 should be coaxial with the first through hole on the first component 42 and the second through hole on the second component 43. The position of the third component 44 can be adjusted by adjusting the adjusting member 45, thereby adjusting the installation position of the third component 44. The connection method between the third component 44 and the adjusting member 45 is existing technology and will not be described in detail here. When the relative position of the third component 44 is deviated from that of the first component 42 and the second component 43, it will affect the stability of the ion beam.

[0043] Combination Figure 1 and Figure 2 As shown, in this embodiment, the base 41 of the focusing device 40 is connected to the positioning part 11 on the base 10, so that the focusing device 40 is positioned relative to the base 10. The calibration component 20 is used to calibrate the positions of each through hole (the first through hole on the first component 42, the second through hole on the second component 43, and the through hole on the third component 44) on the focusing device 40 through which the ion beam passes, and then to position the installation position of each through hole so that the installation of each through hole has a high coaxiality, thereby improving the stability of the ion beam.

[0044] This calibration fixture is easy to use and helps to quickly position the through holes on the focusing device 40, reducing machine maintenance time, extending the effective working time of the machine, and helping to improve the working efficiency of the machine.

[0045] Furthermore, in this utility model, the correction component 20 includes a first correction shaft 21 and a second correction shaft 22, the first correction shaft 21 and the second correction shaft 22 are coaxially arranged, the outer diameter of the first correction shaft 21 is larger than the outer diameter of the second correction shaft 22, the outer diameter of the first correction shaft 21 is the same as the diameter of a portion of the through holes, and the outer diameter of the second correction shaft 22 is the same as the diameter of another portion of the through holes.

[0046] like Figure 1 As shown, in this embodiment, the outer diameter of the first correction shaft 21 is the same as the diameter of the third through hole on the third component 44. When the first correction shaft 21 is disposed on the base 10, the first correction shaft 21 can pass through the third through hole on the third component 44 to mark the position of the third through hole.

[0047] In this embodiment, the outer diameter of the second correction shaft 22 is the same as the diameter of the first through hole on the first component 42 and the second through hole on the second component 43. When the second correction shaft 22 is disposed on the base 10, the second correction shaft 22 can pass through the first through hole on the first component 42 and the second through hole on the second component 43 to mark the position of the first through hole and the second through hole.

[0048] In this embodiment, the first through hole, the second through hole, and the third through hole are all circular holes, therefore the first correction shaft 21 and the second correction shaft 22 are cylindrical shafts. In other alternative embodiments, if the shape of each through hole changes, the cross-sectional shape of the first correction shaft 21 and the second correction shaft 22 adapts to the change, so that the first correction shaft 21 and the second correction shaft 22 conformally fit with the corresponding through hole.

[0049] Since the first correction shaft 21 and the second correction shaft 22 are coaxially arranged, the first through hole on the first component 42, the second through hole on the second component 43, and the third through hole on the third component 44 are also coaxially arranged, thereby ensuring the coaxiality of the three through holes. During the correction process, when the third component 44 has a positional deviation, the position of the third component 44 can be adjusted by the adjusting member 45 so that the third through hole on the third component 44 can conformally pass through the first correction shaft 21, and then the position of the third component 44 can be locked by the adjusting member 45.

[0050] In this embodiment, the positions of two types of through holes (one type being first and second through holes, and the other type being third through holes) are calibrated using the first calibration shaft 21 and the second calibration shaft 22. In other alternative embodiments, when there are many through hole diameters, the number of calibration shafts can be increased so that each calibration shaft calibrates the position of one type of through hole.

[0051] In this embodiment, the diameter of the corresponding through hole is calibrated by the cylindrical shaft structure of the first calibration shaft 21 and the second calibration shaft 22. When the calibration shaft conformally fits the corresponding through hole, it naturally corrects the position of the corresponding through hole. In other alternative embodiments, the cylindrical shaft structure of the first calibration shaft 21 and the second calibration shaft 22 can be replaced by a polygonal columnar structure inscribed within the corresponding through hole, such as a triangular columnar, quadrilateral, pentagonal, or hexagonal columnar structure. The position of the through hole is calibrated by the polygonal columnar structure inscribed within the corresponding through hole. Furthermore, the first calibration shaft 21 and the second calibration shaft 22 can also be replaced by a structure with a positioning arc surface, which conformally fits the inner wall of the through hole to calibrate the position of the through hole. The calibration component 20 can also calibrate the position of the through hole using other existing methods, which will not be elaborated here.

[0052] In this embodiment, one axial end of the first correction shaft 21 is connected to one axial end of the second correction shaft 22. For example, the first correction shaft 21 and the second correction shaft 22 are integrally formed, which facilitates the installation of the first correction shaft 21 and the second correction shaft 22. In other alternative embodiments, the first correction shaft 21 and the second correction shaft 22 can be configured as separate structures. In this case, when the first correction shaft 21 and the second correction shaft 22 are installed on the base 10, they should be ensured to be coaxial.

[0053] Please continue to refer to this. Figure 1 As shown, the substrate 10 has a chamber 12, which is used to simulate the process chamber of an ion implantation device, and thus simulates the situation where the focusing device 40 is installed in the process chamber of the machine.

[0054] like Figure 1 As shown, the chamber 12 is used to house the components (first component 42, second component 43, and third component 44) where the through holes of the focusing device are located. In addition, the chamber 12 is also used to house the adjustment component 45.

[0055] At least a portion of the calibration assembly 20 (the first calibration axis 21 and the second calibration axis 22) is located within the chamber 12 for calibrating the positions of each of the through holes.

[0056] Combination Figure 2 and Figure 3 As shown, the positioning part 11 includes a groove 111 disposed on the base 10. The groove 111 is disposed on the outer wall of the base 10, and the bottom of the groove 111 is provided with a channel 13 communicating with the chamber 12.

[0057] The groove 111 is shaped to match the shape of the base 41. The bottom of the groove 111 has multiple connecting holes, the positions of which should match the positions of the connecting holes on the existing base 41. When the base 41 is fitted into the groove 111, the base 41 is fixed by screws that pass through both, so as to position the focusing device 40 relative to the base 10.

[0058] like Figure 2 As shown, in this embodiment, the groove 111 is disposed on the outer wall of the base 10. Therefore, during the process of the seat 41 engaging with the groove 111, the first component 42, the second component 43, the third component 44, and the adjusting component 45 need to be passed through the channel 13 into the cavity 12. The external placement of the groove 111 facilitates the fixation of the seat 41. In other alternative embodiments, the groove 111 can also be disposed on the inner wall of the cavity 12, in which case it is not necessary to provide the channel 13 on the base 10.

[0059] In this embodiment, the base 41 is a cuboid structure, and the groove 111 is adapted to be a rectangular structure. Therefore, the base 41 is conformally embedded in the groove 111, so that the focusing device 40 is positioned relative to the base 10. In other alternative embodiments, the specific shape of the groove 111 can be adapted to the actual shape of the base 41.

[0060] In this embodiment, the focusing device 40 is positioned relative to the base 10 by the seat 41 being embedded in the groove 111. In other alternative embodiments, the base 10 may be provided with a pin or a protrusion structure adapted to the recessed area on the seat 41 to achieve the positioning of the focusing device 40. The specific structure of the positioning part 11 can be adjusted based on the way it mates with the seat 41.

[0061] Combination Figures 1 to 3 As shown, the base 10 has a mounting hole that communicates with the chamber 12, and a portion of the correction component 20 is conformally mounted in the mounting hole.

[0062] Specifically, the mounting holes include a first mounting hole 14 and a second mounting hole 15;

[0063] The first mounting hole 14 and the second mounting hole 15 are coaxially arranged, and the first mounting hole 14 and the second mounting hole 15 are respectively opened on the two opposite side walls of the base 10 along the axial direction of the first mounting hole 14.

[0064] The diameter of the first mounting hole 14 is the same as the outer diameter of the first correction shaft 21, and the first correction shaft 21 is mounted in the first mounting hole 14. The diameter of the second mounting hole 15 is the same as the outer diameter of the second correction shaft 22, and the second correction shaft 22 is mounted in the second mounting hole 15.

[0065] The shaft-shaped structure formed by the first correction shaft 21 and the second mounting shaft 22 is detachably inserted into the first mounting hole 14 and the second mounting hole 15. On the one hand, it can provide support for the shaft-shaped structure, and on the other hand, it facilitates the assembly and disassembly of the shaft-shaped structure.

[0066] like Figures 1 to 3 As shown, the substrate 10 has a rectangular parallelepiped structure, and the chamber 12 is also a rectangular parallelepiped chamber. The chamber 12 extends through the top of the substrate 10, meaning the substrate 10 has an open top structure. The chamber 12 is designed to simulate the process chamber when the focusing device is mounted on the machine, making the calibration process similar to the actual application scenario. Furthermore, the open top structure of the chamber 12 provides operating space for manual intervention in calibration.

[0067] The first mounting hole 14 and the second mounting hole 15 are formed on two opposite sidewalls of the base 10, and the positioning part 11 is disposed on one sidewall between the two opposite sidewalls of the base 10. The positions of the first mounting hole 14, the second mounting hole 15, and the positioning part 11 are adapted to the correction and positioning of the existing focusing device 40. In other alternative embodiments, the relative positions of the first mounting hole 14, the second mounting hole 15, and the positioning part 11 can be adaptively adjusted based on actual positioning requirements.

[0068] Combination Figure 1 as well as Figure 4 and Figure 5 As shown, based on the above installation method, the correction component 20 also includes a first locking member 23 and a second locking member 24.

[0069] The first locking member 23 is connected to the end of the first correction shaft 21 away from the second correction shaft 22 and is attached to the outer wall of the base 10;

[0070] The second locking member 24 is connected to the end of the second correction shaft 22 away from the first correction shaft 21 and is attached to the outer wall of the base 10.

[0071] The shaft-shaped structure consisting of the first correction shaft 21 and the second correction shaft 22 is fixed to the base 10 by the cooperation of the first locking member 23 and the second locking member 24.

[0072] Please continue to refer to this. Figure 4 and Figure 5 As shown, in this embodiment, the first locking member 23 is disc-shaped and is fixedly connected to the end of the first correction shaft 21, and the first correction shaft 21 and the first locking member 23 are coaxial. The end of the second correction shaft 22 away from the first correction shaft 21 has an external thread, and the second locking member 24 has an internal thread hole. The second locking member 24 is threadedly connected to the second correction shaft 22 to lock the shaft structure formed by the first correction shaft 21 and the second correction shaft 22 onto the base 10.

[0073] During the installation of the calibration assembly 20, the second calibration shaft 22 is first passed through the first mounting hole 14 and then fitted into the second mounting hole 15, while the first calibration shaft 21 is fitted into the first mounting hole 14. The first locking member 23 abuts against the outer wall of the base 10, and the second locking member 24 is screwed onto the second calibration shaft 22 and abuts against the outer wall of the base 10, thus fixing the calibration assembly 20 to the base 10. Before installing the calibration assembly 20, the focusing device 40 should be fixed to the base 10. When passing through the first calibration shaft 21 and the second calibration shaft 22, it should be ensured that the second calibration shaft 22 passes through the first through hole on the first component 42 and the second through hole on the second component 43, and that the first calibration shaft 21 passes through the third through hole on the third component 44. At this time, the first component 42, the second component 43, and the third component 44 are relatively positioned, locking the position of the third component 44, thus achieving positional calibration of the three components. After the shaft calibration is completed, the second locking member 24 is removed, and the first calibration shaft 21 and the second calibration shaft 22 are removed.

[0074] In this embodiment, the first locking member 23 is integrally formed and connected to the first correction shaft 21, and the second locking member 24 is detachably connected to the second correction shaft 22. In other alternative embodiments, the first locking member 23 may be detachably connected to the first correction shaft 21, for example, by threaded connection, snap-fit, or other connection methods.

[0075] In this embodiment, the second locking member 24 is connected to the second alignment shaft 22 by a threaded connection. In other alternative embodiments, the second locking member 24 may be connected to the second alignment shaft 22 by a snap-fit ​​or other known detachable connection method.

[0076] like Figure 5 As shown, in this embodiment, the outer contour of the second locking member 24 is a stepped shaft structure, and its large diameter end is used to abut against the outer wall of the base 10. The large diameter end is convenient to screw.

[0077] Combination Figure 1 and Figure 3 As shown, in this embodiment, a first recessed area 16 is provided on the outer wall of the base 10, and a first mounting hole 14 is provided at the bottom of the first recessed area 16. The first recessed area 16 has a circular structure and fits conformally with the first locking member 23.

[0078] Combination Figure 1 and Figure 2 As shown, in this embodiment, a second recessed area 17 is provided on the outer wall of the base 10, and a second mounting hole 15 is opened at the bottom of the second recessed area 17. The second recessed area 17 has a circular structure and is used to accommodate the large diameter end of the second locking member 24.

[0079] Furthermore, the focusing device calibration fixture also includes a positioning component 30. In this embodiment, the positioning component 30 includes two positioning protrusions 31 and two positioning grooves 32. The positioning protrusions 31 are disposed at the bottom of the first recessed area 16, and the positioning grooves 32 are disposed at the ends of the first locking member 23. When the first locking member 23 fits into the first recessed area 16, and one end of the first locking member 23 abuts against the bottom of the first recessed area 16, the two positioning protrusions 31 are inserted into the two positioning grooves 32 to achieve circumferential positioning of the first locking member 23 and prevent the first locking member 23, the first calibration shaft 21, and the second calibration shaft 22 from rotating.

[0080] In other alternative embodiments, the first recessed area 16 can serve as the positioning component 30. For example, the first recessed area 16 can be set as a square groove. Adaptively, the first locking member 23 can be set as a square block structure. After the first locking member 23 conformally fits the first recessed area 16, the circumferential direction of the first locking member 23 is naturally positioned.

[0081] The aforementioned positioning component 30 has a positioning protrusion 31 disposed on the base 10 and a positioning groove 32 disposed on the correction component 20. In other alternative embodiments, the positioning component 30 may be disposed only on the base 10 or the correction component 20. For example, the positioning component 30 may be a pressing block disposed on the base 10, which presses the outer peripheral surface of the first locking member 23 to position the first locking member 23 circumferentially. For example, the positioning component 30 may be an elastic layer disposed on the outer periphery of the first locking member 23. When the first locking member 23 is conformally embedded into the first recessed area 16, the elastic layer is compressed and deformed. At this time, the friction between the elastic layer and the inner wall of the recessed area 16 prevents the rotation of the first locking member 23, thereby positioning the first locking member 23 circumferentially.

[0082] In this embodiment, the positioning component 30 achieves circumferential positioning of the correction component 20. In other alternative embodiments, the positioning component 30 can achieve axial positioning of the correction component 20, in which case the first locking member 23 and the second locking member 24 can serve as the positioning component 30. In other alternative embodiments, the positioning component 30 can achieve both circumferential and axial positioning of the correction component 20. In this case, in addition to the positioning protrusion 31 and the positioning groove 32, the first locking member 23 and the second locking member 24 can serve as part of the positioning component 30, wherein the positioning protrusion 31 and the positioning groove 32 are used to achieve circumferential positioning of the correction component 20, and the first locking member 23 and the second locking member 24 are used to achieve axial positioning of the correction component 20.

[0083] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0084] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A focusing device calibration fixture, characterized in that, include: Substrate and correction components; The substrate has a positioning part for fixing the focusing device; The calibration component is disposed on the substrate and is used to calibrate the position of each through hole on the focusing device through which the ion beam passes.

2. The focusing device calibration fixture as described in claim 1, characterized in that, The calibration assembly includes a first calibration shaft and a second calibration shaft, which are coaxially arranged. The outer diameter of the first calibration shaft is the same as the diameter of a portion of the through holes, and the outer diameter of the second calibration shaft is the same as the diameter of another portion of the through holes.

3. The focusing device calibration fixture as described in claim 2, characterized in that, One end of the first correction axis is connected to one end of the second correction axis.

4. The focusing device calibration fixture as described in claim 2, characterized in that, The focusing device calibration fixture further includes a positioning component, which is disposed on the calibration component and / or the base, for defining the installation positions of the first calibration axis and the second calibration axis.

5. The focusing device calibration fixture as described in any one of claims 1 to 4, characterized in that, The substrate has a chamber for accommodating at least the components where the through holes of the focusing device are located, and at least a portion of the calibration assembly is located within the chamber for calibrating the position of each of the through holes.

6. The focusing device calibration fixture as described in claim 5, characterized in that, The positioning part includes a groove disposed on the substrate.

7. The focusing device calibration fixture as described in claim 6, characterized in that, The groove is provided on the outer wall of the substrate, and the bottom of the groove is provided with a channel communicating with the cavity.

8. The focusing device calibration fixture as described in claim 5, characterized in that, The substrate has a mounting hole that communicates with the chamber, and a portion of the correction component is conformally mounted in the mounting hole.

9. The focusing device calibration fixture as described in claim 8, characterized in that, When the calibration assembly includes a first calibration shaft and a second calibration shaft, the mounting hole includes a first mounting hole and a second mounting hole; The first mounting hole and the second mounting hole are coaxially arranged, and the first mounting hole and the second mounting hole are respectively opened on the two opposite side walls of the base along the axial direction of the first mounting hole; The diameter of the first mounting hole is the same as the outer diameter of the first correction shaft, and the first correction shaft is mounted in the first mounting hole. The diameter of the second mounting hole is the same as the outer diameter of the second correction shaft, and the second correction shaft is mounted in the second mounting hole.

10. The focusing device calibration fixture as described in claim 9, characterized in that, When one end of the first correction shaft is connected to one end of the second correction shaft, the correction assembly further includes a first locking member and a second locking member. The first locking member is connected to the end of the first correction shaft away from the second correction shaft and is attached to the outer wall of the base; The second locking member is connected to the end of the second correction shaft away from the first correction shaft and is attached to the outer wall of the base.

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