Evaporation source fixing mechanism for thermal evaporation coating

Abstract

This invention provides an evaporation source fixing mechanism for thermal evaporation coating, comprising a sealing cover and an electrode post. The sealing cover is adapted to be fastened to the top of a vacuum chamber, forming a sealed space with the vacuum chamber. The electrode post includes an end platform, a column, a spring, a movable seat, and a fixed head. The end platform is engaged with the sealing cover. The column passes through the sealing cover, with one end connected to the end platform and the other end connected to the fixed head. The spring and the movable seat are both sleeved on the column, with the movable seat located between the spring and the fixed head. The movable seat is adapted to slide along the column and, under the action of the spring, clamps the evaporation source with the fixed head. The evaporation source fixing mechanism for thermal evaporation coating described in this invention has a simple structure and is convenient for installing and removing the evaporation source.

Description

Technical Field

[0001] This utility model relates to the field of thermal evaporation coating technology, and in particular to an evaporation source fixing mechanism for thermal evaporation coating. Background Technology

[0002] Thermal evaporation coating is a process that, under vacuum conditions, heats an evaporation source to cause the substances in the source to evaporate and escape, forming a vapor stream in the vacuum chamber that diffuses into space and eventually deposits onto the surface of the part, either through adhesion, condensation, or a chemical reaction to form a thin film. Depending on the coating material required for thermal evaporation coating, the evaporation source can be made of various materials such as metals, metal oxides, and carbon.

[0003] Since the evaporation source requires an external power source for heating to achieve the evaporation of the coating material, its fixing structure must be designed as a sealed conductive path penetrating the vacuum chamber wall. Its inner end is located inside the vacuum chamber and reliably connected to the evaporation source body; its outer end is located outside the vacuum chamber and used to connect to an external power source. This structure must provide a stable current transmission channel for the evaporation source while ensuring vacuum sealing to achieve the heating and evaporation of the coating material. As the evaporation source is a consumable, it is continuously consumed during the thermal evaporation coating process and needs to be replenished as needed. Therefore, the fixing structure of the evaporation source must ensure a convenient and detachable connection between the evaporation source and the connection structure inside the vacuum chamber while maintaining vacuum sealing. Currently, common evaporation source fixing structures often lack optimized quick-disassembly mechanisms, and replacement operations often rely on auxiliary tools such as screwdrivers, making the process cumbersome and affecting equipment operating efficiency. Utility Model Content

[0004] The present invention aims to provide an evaporation source fixing mechanism for thermal evaporation coating, so as to solve the problem of cumbersome operation of changing the evaporation source in the existing evaporation source fixing mechanism for thermal evaporation coating.

[0005] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:

[0006] An evaporation source fixing mechanism for thermal evaporation coating includes:

[0007] A sealing cover, which is adapted to be fastened to the top of the vacuum chamber and form a sealed space with the vacuum chamber;

[0008] An electrode post, comprising: an end plate, a post body, a spring, a movable seat, and a fixed head;

[0009] The end cap is mounted on the sealing cover;

[0010] The column passes through the sealing cover, with one end connected to the end platform and the other end connected to the fixing head;

[0011] Both the spring and the movable seat are sleeved on the column, and the movable seat is located between the spring and the fixed head;

[0012] The movable seat is adapted to slide along the column and clamp the evaporation source with the fixed head under the action of the spring.

[0013] Preferably, there are two or more electrode posts, which are suitable for the evaporation source to be wound between adjacent electrode posts.

[0014] Preferably, the electrode posts are arranged in at least two columns, with the electrode posts in adjacent columns being staggered.

[0015] Preferably, the sealing cap is provided with a sealing gasket; the sealing gasket is sleeved on the outside of the electrode post; and / or,

[0016] The sealing cover has a sealing groove at its edge.

[0017] Preferably, the upper surface of the sealing cap is provided with a first annular groove, the first annular groove being located below the end platform and adapted to accommodate the sealing gasket; and / or,

[0018] The lower surface of the sealing cap is provided with a second annular groove, which is located below the end platform and is suitable for accommodating the sealing gasket; a fixing platform is provided on the column; the fixing platform is located between the second annular groove and the spring.

[0019] Preferably, the movable seat is provided with a fixing groove, which is adapted to accommodate the end of the spring, so that one end of the spring is connected to the fixed platform and the other end is connected to the fixing groove.

[0020] Preferably, the fixing head is connected to the column body through a screw hole.

[0021] Preferably, the evaporation source fixing mechanism for thermal evaporation coating further includes a top cover; the top cover is located above the sealing cover and forms a cavity between the top cover and the sealing cover; the end platform is located inside the cavity.

[0022] Preferably, the top cover has a mounting member at its end; the mounting member is adapted to rotatably connect the sealing cover to the vacuum chamber.

[0023] Preferably, the evaporation source fixing mechanism for thermal evaporation coating further includes an evaporation plate, which is located below the sealing cover, fixed to the sealing cover, and has a through hole at the movable seat.

[0024] The above-described solution of this utility model has at least the following beneficial effects:

[0025] The evaporation source fixing mechanism for thermal evaporation coating of this utility model includes a sealing cover and an electrode post. The sealing cover is adapted to be fastened to the top of a vacuum chamber, forming a sealed space with the vacuum chamber. The electrode post includes an end platform, a column, a spring, a movable seat, and a fixed head. The end platform is engaged with the sealing cover. The column passes through the sealing cover, with one end connected to the end platform and the other end connected to the fixed head. The spring and the movable seat are both sleeved on the column, with the movable seat located between the spring and the fixed head. The movable seat is adapted to slide along the column and, under the action of the spring, clamps the evaporation source with the fixed head. The evaporation source fixing mechanism for thermal evaporation coating of this utility model has a simple structure and is convenient to operate when installing and removing the evaporation source. The operator only needs to push the movable seat, wrap or remove the evaporation source, and loosen the movable seat. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the evaporation source fixing mechanism for thermal evaporation coating according to this utility model;

[0027] Figure 2 This is a top view of the evaporation source fixing mechanism for thermal evaporation coating according to this utility model.

[0028] Figure 3 This is a cross-sectional structural schematic diagram of the evaporation source fixing mechanism for thermal evaporation coating according to this utility model.

[0029] Figure 4 This is a schematic diagram of the electrode column of the evaporation source fixing mechanism for thermal evaporation coating according to this utility model.

[0030] Figure 5 This is a structural schematic diagram of the evaporation source fixing mechanism for thermal evaporation coating of this utility model, showing the installation state of the evaporation source;

[0031] Figure 6 This is a schematic diagram of the structure of the present invention with the evaporation source installed on the electrode post;

[0032] Among them, 1. Sealing cap; 11. Sealing gasket; 12. Sealing groove; 13. First annular groove; 14. Second annular groove; 2. Electrode post; 21. End platform; 22. Column; 23. Spring; 24. Movable seat; 241. Fixed groove; 25. Fixed head; 26. Fixed platform; 3. Evaporation source; 4. Top cover; 41. Cavity; 42. Mounting component; 5. Evaporation plate; 51. Through hole. Detailed Implementation

[0033] Exemplary embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0034] An embodiment of this utility model proposes an evaporation source fixing mechanism for thermal evaporation coating, such as... Figure 1-6 As shown, it includes: a sealing cap 1 and an electrode post 2;

[0035] The sealing cover 1 is adapted to be fastened to the top of the vacuum chamber and form a sealed space with the vacuum chamber; the electrode post 2 includes: end plate 21, post body 22, spring 23, movable seat 24, and fixed head 25;

[0036] The end platform 21 is fitted onto the sealing cover 1; the column 22 passes through the sealing cover 1, with one end connected to the end platform 21 and the other end connected to the fixing head 25; the spring 23 and the movable seat 24 are both sleeved on the column 22, and the movable seat 24 is located between the spring 23 and the fixing head 25; the movable seat 24 is adapted to slide along the column 22 and, under the action of the spring 23, clamps the evaporation source 3 with the fixing head 25.

[0037] It should be noted that the evaporation source 3 can be selected from various materials such as metals, metal oxides, and carbon, depending on the coating material required for thermal evaporation coating. In this embodiment, the evaporation source 3 is carbon, in the form of a rope, which is convenient to wrap around the column 22. In addition, in this embodiment, the vacuum chamber (not shown in the figure) has at least an open space, for example, it can be an open cylinder, an open cube, an open cuboid, etc., and the port can be fastened to the sealing cover 1. When the sealing cover 1 is fastened to the top of the vacuum chamber, a sealed space can be formed.

[0038] The movable seat 24, under the action of the spring 23, is tightly fitted with the fixed head 25, clamping the evaporation source 3 between the fixed head 25 and the movable seat 24. When installing the evaporation source 3, the operator can push the movable seat 24 to slide it towards the end platform 21. At this time, the spring 23 is compressed, and the column 22 near the fixed head 25 is exposed. The evaporation source 3 is wound around the column 22, and the movable seat 24 is released, causing it to tightly fit against the fixed head 25 under the restoring force of the spring 23, clamping the evaporation source 3. The above structure is simple, and the operation of installing or removing the evaporation source 3 is convenient; the operator only needs to push the movable seat 24, wrap or remove the evaporation source 3, and release the movable seat 24.

[0039] For achieving the purpose of this utility model, the number and arrangement of the electrode posts 2 are not unique, as long as at least one electrode post 2 fixes the evaporation source 3. In this embodiment, a preferred design is provided, in which there are two or more electrode posts 2, suitable for the evaporation source 3 to be wound between adjacent electrode posts 2. That is, each electrode post 2 is clamped by the movable seat 24 and the fixing head 25, and the evaporation source 3 is wound at the above-mentioned positions of multiple electrode posts 2. The arrangement of multiple electrode posts 2 can better ensure the uniform heating of the evaporation source 3, improve heating efficiency, optimize temperature field distribution, and improve the uniformity of coating.

[0040] To conserve the evaporation source 3, the electrode posts 2 are arranged in at least two columns, with adjacent columns staggered. This arrangement allows for a more compact placement of the electrode posts 2, and the staggered winding of the evaporation source 3 between adjacent columns increases the contact area between the evaporation source 3 and the electrode posts 2. This allows the evaporation source 3 to be consumed more by thermal evaporation than other losses, resulting in less waste. Those skilled in the art can arrange two or more columns of electrode posts 2 according to actual conditions, with each column containing two or more electrode posts 2. As a specific design method in this embodiment, such as... Figure 5 As shown, there are five electrode posts 2, arranged in two columns: three in the first column and two in the second column. The electrode posts 2 in the first and second columns are staggered, meaning that the electrode posts 2 in the second column are located at the gaps between two adjacent electrode posts 2 in the first column. The evaporation source 3 sequentially bypasses the two adjacent columns of electrode posts 2 in a serpentine pattern. Figure 6 The diagram shown illustrates the state in which the electrode post 2 presses against the evaporation source 3.

[0041] Since the electrode post 2 needs to be partially located above the sealing cover 1 (atmospheric pressure side) to connect electrical components such as power supply, and the other part needs to be located below the sealing cover 1 (vacuum side) to fix the evaporation source 3 in the vacuum chamber, a sealing gasket 11 is provided on the sealing cover 1 to achieve a good seal between the electrode post 2 and the sealing cover 1; the sealing gasket 11 is sleeved on the outside of the electrode post 2.

[0042] It should be noted that the upper / upper surface and lower / lower surface of the sealing cover 1 refer to the following: when the sealing cover 1 is engaged with the vacuum chamber, the sealing cover 1 and the vacuum chamber form a sealed space. With the sealing cover 1 as the boundary, one side is under normal pressure, which is the normal pressure side, i.e., the upper / upper surface of the sealing cover; the other side can be engaged with the vacuum chamber and is under vacuum, which is the vacuum side, i.e., the lower / lower surface of the sealing cover 1 (the same applies below, and will not be repeated hereafter).

[0043] To ensure a good seal between the sealing cover 1 and the vacuum chamber, a sealing groove 12 is provided at the edge of the sealing cover 1.

[0044] For achieving the purpose of this utility model, the arrangement of the sealing gasket 11 is not unique. In this embodiment, a preferred design is provided: the upper surface of the sealing cover 1 is provided with a first annular groove 13, which is located below the end platform 21 and is suitable for accommodating the sealing gasket 11; and / or, the lower surface of the sealing cover 1 is provided with a second annular groove 14, which is located below the end platform 21 and is suitable for accommodating the sealing gasket 11. Here, the sealing gasket 11 not only serves a sealing function but also positions the column 22 and provides insulation. The column 22 is provided with a fixing platform 26; the fixing platform 26 is located between the second annular groove 14 and the spring 23. By setting the first annular groove 13 and the second annular groove 14, and setting the sealing gasket 11 in the two annular grooves respectively, the seal between the electrode column 2 and the sealing cover 1 is more reliable and the sealing effect is better.

[0045] To better limit the movement of the spring 23, the movable seat 24 is provided with a fixing groove 241. The fixing groove 241 is adapted to accommodate the end of the spring 23, so that one end of the spring 23 is connected to the fixed platform 26 and the other end is connected to the fixing groove 241. This arrangement can limit the movement of both ends of the spring 23, ensuring that the spring 23 works stably.

[0046] It should be noted that the design of the fixing head 25 is not unique; any design that can clamp the evaporation source 3 with the movable seat 24 is acceptable. In this preferred embodiment, the fixing head 25 is connected to the column 22 via a screw hole. The fixing head 25 can be a screw. By providing a screw hole at the end of the column 22, the fixing head 25 is installed at the end of the column 22, with the screw shank screwed into the column 22 and the screw head tightly fitted against the movable seat 24. This configuration also allows the position of the fixing head 25 to be adjusted by rotating the screw, ensuring it is tightly fitted against the movable seat 24 under the elastic force of the spring 23.

[0047] To facilitate the installation of electrical components at the end plate 21 of the electrode post 2, the evaporation source fixing mechanism for thermal evaporation coating further includes a top cover 4; the top cover 4 is located above the sealing cover 1, forming a cavity 41 between the top cover 4 and the sealing cover 1; the end plate 21 is located within the cavity 41. Those skilled in the art can use existing technology to install corresponding electrical connection components on the electrode post 2 above the sealing cover 1, as long as the electrode post 2 can achieve electric heating when current is applied. The cavity 41 facilitates the installation of the aforementioned electric heating electrical connections and electrical components, preventing them from being exposed.

[0048] As a preferred design in this embodiment, the top cover 4 is provided with a mounting member 42 at its end; the mounting member 42 is adapted to rotatably connect the sealing cover 1 to the vacuum chamber.

[0049] To limit the position of the electrode post 2 at one end below the sealing cover 1 and prevent vibration or other disturbances of the evaporation source 3 fixed at its end, the evaporation source fixing mechanism for thermal evaporation coating also includes an evaporation plate 5. The evaporation plate 5 is located below the sealing cover 1, fixed to the sealing cover 1, and has a through hole 51 at the movable seat 24. With this configuration, the movable seat 24 is limited by the through hole 51 of the evaporation plate 5. When the external or internal environment of the vacuum chamber disturbs the position of the evaporation source 3, the limiting effect of the through hole 51 on the movable seat 24 can reduce the disturbance to the evaporation source 3, thereby better ensuring the uniformity of the coating.

[0050] In this embodiment, the evaporation plate 5 is fixed to the sealing cover 1 by a mounting post. Those skilled in the art can also use other fixing methods; different fixing methods do not affect the achievement of the purpose of this utility model.

[0051] The method of using the evaporation source fixing mechanism for thermal evaporation coating described in this embodiment is as follows:

[0052] When the evaporation source 3 is not installed, the movable seat 24 is tightly fitted with the fixed head 25 under the elastic force of the spring 23.

[0053] When installing the evaporation source 3, the operator can push the movable seat 24 to slide it towards the end platform 21. At this time, the spring 23 is in a compressed state, and the column 22 near the fixed head 25 is exposed. The evaporation source 3 is wound around the column 22 above the fixed head 25, and the movable seat 24 is released, so that the movable seat 24 fits tightly against the fixed head 25 under the elastic restoring force of the spring 23, clamping the evaporation source 3.

[0054] During thermal evaporation coating, an electric current is passed through to electrically heat the electrode post 2. The heat is conducted to the evaporation source 3 fixed at the end of the electrode post 2, causing the evaporation source 3 to vaporize and escape, forming a vapor flow in the vacuum chamber and diffusing into space, finally depositing onto the surface of the part to be coated.

[0055] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. An evaporation source fixing mechanism for thermal evaporation coating, characterized in that, include: A sealing cover (1) is adapted to be fastened to the top of the vacuum chamber and form a sealed space with the vacuum chamber; Electrode post (2), the electrode post (2) includes: end plate (21), post body (22), spring (23), movable seat (24), and fixed head (25); The end plate (21) is mounted on the sealing cover (1); The column (22) passes through the sealing cover (1), with one end connected to the end platform (21) and the other end connected to the fixing head (25); The spring (23) and the movable seat (24) are both sleeved on the column (22), and the movable seat (24) is located between the spring (23) and the fixed head (25); The movable seat (24) is adapted to slide along the column (22) and clamp the evaporation source (3) with the fixed head (25) under the action of the spring (23).

2. The evaporation source fixing mechanism for thermal evaporation coating according to claim 1, characterized in that, The electrode posts (2) are two or more, and the evaporation source (3) is wound between adjacent electrode posts (2).

3. The evaporation source fixing mechanism for thermal evaporation coating according to claim 2, characterized in that, The electrode posts (2) are arranged in at least two columns, with the electrode posts (2) in adjacent columns being staggered.

4. The evaporation source fixing mechanism for thermal evaporation coating according to claim 1, characterized in that, The sealing cap (1) is provided with a sealing gasket (11); the sealing gasket (11) is fitted over the electrode post (2); and / or, The sealing cover (1) has a sealing groove (12) at its edge.

5. The evaporation source fixing mechanism for thermal evaporation coating according to claim 4, characterized in that, The sealing cap (1) has a first annular groove (13) on its upper surface, the first annular groove (13) being located below the end plate (21) and adapted to accommodate the sealing gasket (11); and / or, The lower surface of the sealing cover (1) is provided with a second annular groove (14), which is located below the end platform (21) and is suitable for accommodating the sealing gasket (11); the column (22) is provided with a fixing platform (26); the fixing platform (26) is located between the second annular groove (14) and the spring (23).

6. The evaporation source fixing mechanism for thermal evaporation coating according to claim 5, characterized in that, The movable seat (24) is provided with a fixing groove (241), which is adapted to accommodate the end of the spring (23), so that one end of the spring (23) is connected to the fixed platform (26) and the other end is connected to the fixing groove (241).

7. The evaporation source fixing mechanism for thermal evaporation coating according to claim 1, characterized in that, The fixing head (25) is connected to the column (22) through a screw hole.

8. The evaporation source fixing mechanism for thermal evaporation coating according to claim 1, characterized in that, It also includes a top cover (4); the top cover (4) is located above the sealing cover (1) and forms a cavity (41) between the top cover (4) and the sealing cover (1); the end plate (21) is located in the cavity (41).

9. The evaporation source fixing mechanism for thermal evaporation coating according to claim 8, characterized in that, The top cover (4) is provided with a mounting member (42) at its end; the mounting member (42) is adapted to rotatably connect the sealing cover (1) to the vacuum chamber.

10. The evaporation source fixing mechanism for thermal evaporation coating according to claim 1, characterized in that, It also includes an evaporation plate (5), which is located below the sealing cover (1), fixed on the sealing cover (1), and has a through hole (51) at the movable seat (24).

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