An apparatus for producing a tantalum carbide coated graphite component
By designing a preparation equipment for tantalum carbide coated graphite components and utilizing stirring and tapping mechanisms, the problems of TaCl5 powder agglomeration and clogging were solved, achieving efficient delivery and uniform deposition of TaCl5 powder and improving production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DEPOSITED SEMICON MATERIALS (NANTONG) CO LTD
- Filing Date
- 2025-05-27
- Publication Date
- 2026-07-17
AI Technical Summary
TaCl5 powder is prone to absorbing moisture and clumping at room temperature, which can lead to uneven feeding and even blockage of pipelines, affecting deposition uniformity and production efficiency. In addition, it tends to adhere to the inner wall of the pipeline during transportation, requiring frequent cleaning.
A device for preparing tantalum carbide coated graphite components was designed, comprising a conveying box, a mixing box, a rotating shaft, a stirring rod, gears, and a conveying pipe. Through a stirring and tapping mechanism, powder accumulation and blockage are prevented, and three-dimensional stirring and rapid conveying of TaCl5 powder are achieved.
It effectively prevents TaCl5 powder from accumulating in the mixing tank, increases the feeding speed, avoids blockage of the conveying pipe, and improves production efficiency and deposition uniformity.
Smart Images
Figure CN224513608U_ABST
Abstract
Claims
1. An apparatus for the production of a tantalum carbide coated graphite component comprising a base (1), characterised in that: The top of the base (1) is fixedly connected to a conveyor box (4) via a support leg (7). The top of the base (1) away from the conveyor box (4) is fixedly connected to a chemical vapor deposition furnace body (2). An evaporator body (3) is fixedly connected to the top of the base (1) and between the conveyor box (4) and the chemical vapor deposition furnace body (2). A connecting pipe (5) is fixedly connected between the evaporator body (3) and the chemical vapor deposition furnace body (2). A stirring tank (9) is fixedly connected inside the conveyor box (4). A rotating shaft (21) is rotatably connected inside the stirring tank (9). The bottom of the rotating shaft (21) extends through the bottom of the mixing tank (9) into the conveying tank (4). The bottom of the mixing tank (9) is fixedly connected to a conveying pipe (6). The end of the conveying pipe (6) away from the conveying tank (4) passes through the side of the conveying tank (4) and is fixedly connected to the evaporator body (3). The bottom outer side of the rotating shaft (21) is fixedly connected to a connecting rod (18). The inside of the connecting rod (18) is slidably connected to a striking rod (19). The inside of the conveying tank (4) is rotatably connected to a hollow cylinder (14). The inside of the hollow cylinder (14) is slidably connected to a rotating rod (13).
2. The apparatus for producing a tantalum carbide-coated graphite member according to claim 1, wherein: The top of the rotating shaft (21) is fixedly connected to a first gear (24), and the outside of the hollow cylinder (14) is fixedly connected to a second gear (25). The first gear (24) is provided in two sets, and the outside of the two sets of the first gear (24) are meshed with the second gear (25).
3. The apparatus for producing a tantalum carbide coated graphite component according to claim 1, wherein: The top of the conveyor box (4) is fixedly connected to a support frame (10), and the bottom of the support frame (10) is rotatably connected to the conveyor box (4) by a reciprocating screw (17). The outer side of the reciprocating screw (17) is threadedly connected to a moving plate (12).
4. The apparatus for producing a tantalum carbide coated graphite component according to claim 3, wherein: The top of the hollow cylinder (14) extends outward through the top of the conveyor box (4). A driven gear (15) is fixedly connected to the top of the hollow cylinder (14). A sector gear (16) is fixedly connected to the outside of the reciprocating screw (17). One side of the sector gear (16) meshes with the driven gear (15).
5. An apparatus for producing a tantalum carbide coated graphite component according to claim 4, wherein: The top of the support frame (10) is fixedly connected to a motor (11), and the top of the reciprocating screw (17) passes through the top of the support frame (10) and is fixedly connected to the output end of the motor (11).
6. The apparatus for producing a tantalum carbide coated graphite component according to claim 1, wherein: The hollow cylinder (14) has grooves (26) on both sides of its inner wall. The rotating rod (13) has sliders (27) fixedly connected to both sides. The outer side of the sliders (27) is slidably connected to the grooves (26).
7. The apparatus of claim 1, wherein: A spring (20) is fixedly connected between one end of the striking rod (19) and the connecting rod (18).
8. The apparatus according to claim 1, wherein: Multiple stirring rods (22) are fixedly connected to the outside of the rotating shaft (21).
9. The apparatus for producing a tantalum carbide coated graphite component according to claim 1, wherein: A valve (23) is installed inside the conveying pipe (6), and an inlet (8) is fixedly connected to one end of the conveying box (4).