A tool for testing the sealing of a gate valve
By designing a fixture for valve sealing performance testing, and employing a simulated vacuum chamber and support structure, the problems of inaccurate sealing performance testing and inconvenient operation in existing technologies have been solved, resulting in more efficient test results and convenient operation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUXI XIANYAN NEW MATERIAL TECH CO LTD
- Filing Date
- 2025-06-23
- Publication Date
- 2026-07-17
AI Technical Summary
Existing sealing test devices for semiconductor vacuum valves fail to effectively support the front and rear sealing plates, resulting in inaccurate test results and inconvenient operation.
A fixture for valve sealing performance testing was designed, including a first and second vertical rod arranged symmetrically at intervals, a simulated vacuum plate, a control box, and a sealing groove. The simulated vacuum chamber improves the accuracy of the test, and the simulated vacuum plate is supported by the first and second vertical rods. The control box is set up to house the controller, and the whole unit is easy to transport.
It improves the accuracy and convenience of sealing tests, enhances the reliability of test results through the stability of the support structure, and prevents excessive valve drop in case of operational errors. It is suitable for valve sealing tests in the semiconductor manufacturing field.
Smart Images
Figure CN224518025U_ABST
Abstract
Claims
1. A tooling for gate valve tightness testing, characterized in that, The device includes a first vertical rod and a second vertical rod arranged symmetrically at intervals, a simulated vacuum plate disposed on the upper part of the first vertical rod and the second vertical rod, and a control box disposed on the lower part of the first vertical rod and the second vertical rod. A simulated vacuum cavity and a sealing groove are provided on one side of the simulated vacuum plate, and a flange pipe is provided on the other side of the simulated vacuum plate. A simulated hole is provided through the simulated vacuum plate, and the simulated hole communicates with the simulated vacuum cavity and the flange pipe.
2. The tooling for testing the tightness of a gate valve according to claim 1, characterized in that, The simulated vacuum chamber is waist-shaped, and the sealing groove is annular, with the sealing groove coaxially arranged with the simulated vacuum chamber.
3. The tooling for testing the sealing of a gate valve according to claim 1, wherein, The control box includes a first upper horizontal connecting rod and a first lower horizontal connecting rod disposed between two first vertical rods and second vertical rods; a first upper longitudinal connecting rod and a first lower longitudinal connecting rod disposed on one side of the first vertical rod; a second upper longitudinal connecting rod and a second lower longitudinal connecting rod disposed on one side of the second vertical rod; a first vertical connecting rod disposed at one end of the first upper longitudinal connecting rod; a second vertical connecting rod disposed at one end of the second upper longitudinal connecting rod; a second upper horizontal connecting rod and a second lower horizontal connecting rod disposed between the first vertical connecting rod and the second vertical connecting rod; an upper cover; a lower cover; a first side cover; and a second side cover. The upper cover is connected to the first upper horizontal connecting rod, the second upper connecting rod, the first upper longitudinal connecting rod, and the second upper longitudinal connecting rod, respectively. The first side cover is connected to the first upper longitudinal connecting rod, the first vertical rod, the first vertical connecting rod, and the first lower longitudinal connecting rod, respectively. The second side cover is connected to the second upper longitudinal connecting rod, the second vertical rod, the second vertical connecting rod, and the second lower longitudinal connecting rod, respectively. The lower cover is connected to the first lower horizontal connecting rod, the second lower horizontal connecting rod, the first lower longitudinal connecting rod, and the second lower longitudinal connecting rod, respectively.
4. The tooling for testing the sealing of a gate valve according to claim 3, wherein, A first longitudinal support rod is provided on the lower part of the first vertical rod away from the first lower longitudinal connecting rod, and a second longitudinal support rod is provided on the lower part of the second vertical rod away from the second lower longitudinal connecting rod.
5. The tooling for valve sealing performance testing according to claim 1, characterized in that, The first vertical rod has a first support rod in the middle, and the second vertical rod has a second support rod in the middle.
6. The tooling for valve sealing performance testing according to claim 4, characterized in that, The first longitudinal support rod and the second longitudinal support rod are detachably connected to the first vertical rod and the second vertical rod respectively via angle brackets.
7. The tooling for testing the sealing of a gate valve according to claim 1, wherein, The simulated vacuum plate is detachably connected to the first and second vertical rods via corner brackets.
8. The tooling for testing the sealing of a gate valve according to claim 4, characterized in that, The vertical rod, connecting rod, and support rod are made of industrial aluminum profiles.
9. The tooling for testing the sealing of a gate valve according to claim 3, characterized in that, The first vertical connecting rod is hinged to a panel.