A swing flush system

Abstract

The application relates to a swing flushing system, which comprises a water inlet pipe connected with a water source at one end, a flushing seat sleeved at the other end of the water inlet pipe, a spray pipe arranged on the flushing seat and rotatable relative to the water inlet pipe, a plurality of spray heads arranged on the spray pipe, a water outlet arranged on the side wall of the flushing seat into which the water inlet pipe is inserted, an annular groove arranged in the flushing seat and communicated with the water outlet, and a flow channel arranged in the flushing seat and communicated with the annular groove and the spray pipe. The application has the effect of reducing the influence of the rotation of a rotating disc on the flushing device.

Description

Technical Field

[0001] This application relates to the field of polishing equipment accessories, and in particular to a oscillating flushing system. Background Technology

[0002] Chemical mechanical polishing (CMP) is a key process for achieving wafer surface planarization in integrated circuit manufacturing. CMP combines surface chemical action with mechanical abrasion to remove micron / nanoscale materials from the wafer surface, achieving nanoscale surface planarization and enabling subsequent photolithography processes. Wafer polishing can be categorized into double-sided polishing and single-sided polishing, depending on the requirements.

[0003] Existing single-sided polishing is carried out by single-sided polishing equipment. After the product processing, the single-sided polishing equipment needs to use pure water to rinse the chemical reagents on the surface of the workpiece to prevent the chemical reagents from causing excessive chemical corrosion to the product. Existing rinsing devices mostly connect to the pure water from the side. When the rotation is started, it is easy to be pulled by the water pipe, which can easily cause the rotation to jam or even fail, thus affecting production. Utility Model Content

[0004] In order to reduce the impact of the rotating disc on the rinsing device, this application provides an oscillating rinsing system.

[0005] The swing flushing system structure provided in this application adopts the following technical solution:

[0006] A swing-type flushing system includes an inlet pipe connected to a water source at one end, a flushing seat fitted at the other end of the inlet pipe, the flushing seat being rotatably arranged relative to the inlet pipe, a spray pipe installed on the flushing seat, a plurality of nozzles being provided on the spray pipe, an outlet being provided on the side wall of one end of the inlet pipe, an annular groove being provided inside the flushing seat, the annular groove being connected to the outlet, and a flow channel being provided inside the flushing seat, the flow channel being connected to the annular groove and the spray pipe.

[0007] By adopting the above technical solution, the rotating water inlet pipe and the rinsing seat can reduce the impact of the rotating disc on the water inlet pipe and the rinsing seat by rotating the spray pipe.

[0008] Optionally, a sealing ring is provided at one end of the water inlet pipe inserted into the flushing seat. Two sealing rings are provided, and the two sealing rings are respectively embedded in the water inlet pipe on both sides of the water outlet.

[0009] By adopting the above technical solution, the sealing ring can reduce the probability of water leaking out from the gaps in the water inlet pipe and the flush seat.

[0010] Optionally, the end of the water inlet pipe connected to the water source is equipped with a water inlet connector, which is a right-angle connector.

[0011] By adopting the above technical solution, the right-angle water inlet connector can change the direction of water source access, thereby facilitating water source access.

[0012] Optionally, a rotating fixing seat is installed on the water inlet pipe, and the rotating fixing seat is fixed to the polishing equipment.

[0013] By adopting the above technical solution, the rotating fixing seat is used to connect and fix to the polishing equipment, thereby improving the stability of the water inlet pipe.

[0014] Optionally, a bearing is provided between the rotating fixed base and the water inlet pipe.

[0015] By adopting the above technical solution, the rotating fixed seat is rotated relative to the water inlet pipe, which allows the water inlet pipe to rotate relative to the polishing equipment, thereby adjusting the direction of water source access. The bearing arrangement makes the rotation of the water inlet pipe and the rotating fixed seat smoother.

[0016] Optionally, a first dust cover is provided at the connection between the water inlet pipe and the flushing seat.

[0017] By adopting the above technical solution, the first dust cover is used to reduce the probability of dust and debris entering from the connection between the water inlet pipe and the flushing seat, thereby reducing the influence of dust and debris on the mutual rotation of the water inlet pipe and the flushing seat.

[0018] Optionally, a second dust cover is installed on the first dust cover, and the second dust cover is positioned at the connection between the rotating fixed base and the water inlet pipe.

[0019] By adopting the above technical solution, the second dust cover is used to reduce the probability of dust and debris entering from the connection between the rotating fixed seat and the water inlet pipe, thereby reducing the influence of dust and debris on the mutual rotation of the water inlet pipe and the rotating fixed seat.

[0020] Optionally, the flushing seat has a rotating part and a mounting part, wherein the rotating part is rotatably connected to the water inlet pipe, the mounting part is detachably mounted on the rotating part, and the spray pipe is mounted on the mounting part.

[0021] By adopting the above technical solution, the installation part is used to install and fix the spray pipe, and the separate arrangement of the installation part and the rotating part can facilitate the cleaning of the flow channel.

[0022] In summary, this application includes at least one of the following beneficial technical effects:

[0023] 1. By rotating the water inlet pipe and the flushing seat, the spray pipe can be rotated by the flushing seat, thereby reducing the impact of the rotating disc on the water inlet pipe and the spray pipe.

[0024] 2. The sealing ring reduces the probability of water leakage from the gaps in the inlet pipe and flush seat;

[0025] 3. The right-angle water inlet connector allows for changing the direction of water supply, thus facilitating water connection;

[0026] 4. The rotating fixed base is set to rotate relative to the water inlet pipe, which allows the water inlet pipe to rotate relative to the polishing equipment, thereby adjusting the direction of water inlet. The bearing setting makes the rotation of the water inlet pipe and the rotating fixed base smoother.

[0027] 5. The mounting section is used to install and fix the spray pipe. The separate design of the mounting section and the rotating section facilitates cleaning of the flow channel. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application.

[0029] Figure 2 This is a cross-sectional view of the overall structure of an embodiment of this application.

[0030] Figure 3 yes Figure 2 A magnified view of section A in the middle.

[0031] Explanation of reference numerals in the attached drawings: 1. Water inlet pipe; 2. Flushing seat; 21. Rotating part; 22. Mounting part; 3. Spray pipe; 4. Spray head; 5. Water outlet; 6. Annular groove; 7. Flow channel; 8. Sealing ring; 9. Water inlet connector; 10. Rotating fixed seat; 11. Bearing; 12. First dust cover; 13. Second dust cover. Detailed Implementation

[0032] The following is in conjunction with the appendix Figure 1-3 This application will be described in further detail.

[0033] First, it should be noted that in the description of this application, the use of directional terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" indicates the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used solely for descriptive purposes and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the use of numerical quantifiers such as "first," "second," and "third" is for descriptive purposes only and should not be construed as indicating or implying relative importance. Additionally, in this application, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, interference fits, transition fits, or integral connections; they can refer to direct connections or indirect connections through an intermediate medium. Therefore, those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0034] This application discloses a swing flushing system, referring to... Figure 1 , Figure 2 and Figure 3 The system includes a long, cylindrical water inlet pipe 1 connected to a water source at one end, and a rectangular flushing seat 2 fitted at the other end. The water inlet pipe 1 is inserted into the flushing seat 2 and rotates relative to it. The flushing seat 2 is mounted on a rotating disk, with the water inlet pipe 1 coaxial with the rotating disk's axis. A spray pipe 3 is installed on the flushing seat 2, and several nozzles 4 are provided on the spray pipe 3. In this embodiment, three nozzles 4 are evenly arranged along the length of the spray pipe 3. An outlet 5 is provided on the side wall of one end of the water inlet pipe 1 where it is inserted into the flushing seat 2, and the outlet 5 connects to the internal channel of the water inlet pipe 1. The rinsing seat 2 has an annular groove 6 connected to the water outlet 5. The rinsing seat 2 also has a flow channel 7 connected to the annular groove 6 and the spray pipe 3. Water for cleaning is introduced through the water inlet pipe 1 and discharged from the water outlet 5. The discharged water enters the annular groove 6 and is sent to the spray pipe 3 through the flow channel 7. Then it is sprayed out from the nozzle 4 on the spray pipe 3. The rinsing seat 2 and the water inlet pipe 1 rotate relative to each other, and the water inlet pipe 2 can rotate the spray pipe 3, thereby reducing the impact of the rotating disc on the water inlet pipe 1 and the spray pipe 3.

[0035] Reference Figure 2 and Figure 3 A sealing ring 8 is provided at one end of the water inlet pipe 1 inserted into the flushing seat 2. There are two sealing rings 8, which are respectively embedded in the water inlet pipe 1 on both sides of the water outlet 5. The sealing rings 8 can reduce the probability of water leaking out from the gap between the water inlet pipe 1 and the flushing seat 2.

[0036] Reference Figure 1 and Figure 2 The water inlet pipe 1 is connected to a water source and has a water inlet connector 9 installed at one end. The water inlet connector 9 is a right-angle connector, which allows the direction of water inlet to be changed, thus facilitating water inlet connection. A rotating fixing seat 10 is installed on the water inlet pipe 1 and is fixed to the polishing equipment. The rotating fixing seat 10 is used to connect and fix the water inlet pipe 1 to the polishing equipment, thereby improving the stability of the water inlet pipe 1. The rotating fixing seat 10 is rotatably set relative to the water inlet pipe 1, which allows the water inlet pipe 1 to rotate relative to the polishing equipment, thereby adjusting the direction of water inlet connection. A bearing 11 is set between the rotating fixing seat 10 and the water inlet pipe 1. The bearing 11 makes the rotation of the water inlet pipe 1 and the rotating fixing seat 10 smoother.

[0037] Reference Figure 1 and Figure 2A first dust cover 12, which is circular in shape, is provided at the connection between the water inlet pipe 1 and the flushing seat 2. The first dust cover 12 is detachably installed on the flushing seat 2 by bolts. The first dust cover 12 is used to reduce the probability of dust and debris entering from the connection between the water inlet pipe 1 and the flushing seat 2, thereby reducing the influence of dust and debris on the mutual rotation of the water inlet pipe 1 and the flushing seat 2. A second dust cover 13, which is circular in shape, is detachably installed on the first dust cover 12 by bolts. The second dust cover 13 covers the connection between the rotating fixed seat 10 and the water inlet pipe 1. 13 is used to reduce the probability of dust and debris entering from the connection between the rotating fixed seat 10 and the water inlet pipe 1, thereby reducing the influence of dust and debris on the mutual rotation of the water inlet pipe 1 and the rotating fixed seat 10. A sealing gasket is installed at the connection between the second dust cover 13 and the first dust cover 12. The sealing gasket is used to reduce the probability of water and dust entering from the connection between the second dust cover 13 and the first dust cover 12. The second dust cover 13 is installed and fixed to the polishing equipment at a position away from the first dust cover 12, thereby improving the overall structural stability of the second dust cover 13 and the first dust cover 12.

[0038] Reference Figure 1 and Figure 2 The flushing seat 2 includes a rotating part 21 and a mounting part 22. The water inlet pipe 1 is rotatably inserted into the rotating part 21, and the rotating part 21 and the water inlet pipe 1 rotate relative to each other. The mounting part 22 is detachably installed on the rotating part 21 by bolts. The spray pipe 3 is installed on the mounting part 22. The flow channel 7 is opened on the rotating part 21, passes through the mounting part 22, and communicates with the spray pipe 3. The mounting part 22 is used to install and fix the spray pipe 3. The separate arrangement of the mounting part 22 and the rotating part 21 can facilitate the cleaning of the flow channel 7.

[0039] The implementation principle of this application embodiment is as follows: A rotating fixed seat 10 is rotatably set on the water inlet pipe 1 via a bearing 11. The water inlet pipe 1 is installed on the polishing equipment via the rotating fixed seat 10. Then, the first dust cover 12 and the second dust cover 13, which are fixed to each other, are fitted onto the water inlet pipe 1. A water inlet connector 9 is installed at the end of the water inlet pipe 1 away from the rotating disk and connected to a water source. A sealing ring 8 is embedded at the end of the water inlet pipe 1 that is located on the rotating disk. Then, the rotating part 21 is fitted onto the end of the water inlet pipe 1 where the sealing ring 8 is embedded and the rotating part 21 is installed on the rotating disk of the polishing equipment. The spray pipe 3 with the nozzle 4 is installed and fixed to the mounting part 22 with sealing tape. Then, the mounting part 22 is installed on the rotating part 21 with bolts. At the same time, the first dust cover 12 is installed on the rotating part 21 with bolts. The installation of the rinsing device on the polishing equipment is completed. When the polishing equipment is polishing, the rotating disk rotates with the water inlet pipe 1 as the axis. The rinsing seat 2 rotates with the rotating disk relative to the water inlet pipe 1 to rinse the chemical reagents on the surface of the workpiece.

[0040] It should be noted that the above embodiments are only used to illustrate this application and are not intended to limit the technical solutions described in this application. Although this specification has described this application in detail with reference to the above embodiments, those skilled in the art should understand that they can still make modifications or equivalent substitutions to this application. All technical solutions and improvements that do not depart from the spirit and scope of this application should be covered within the scope of the claims of this application.

Claims

1. A swing-flushing flushing system, characterized in that: It includes an inlet pipe (1) connected to a water source at one end, a flushing seat (2) sleeved at the other end of the inlet pipe (1), the flushing seat (2) being rotatably arranged relative to the inlet pipe (1), a spray pipe (3) being installed on the flushing seat (2), a number of nozzles (4) being provided on the spray pipe (3), an outlet (5) being opened on the side wall of one end of the inlet pipe (1), an annular groove (6) being opened inside the flushing seat (2), the annular groove (6) being connected to the outlet (5), and a flow channel (7) being opened inside the flushing seat (2), the flow channel (7) being connected to the annular groove (6) and the spray pipe (3).

2. The oscillating flushing system according to claim 1, characterized in that: The water inlet pipe (1) is inserted into the flushing seat (2) and a sealing ring (8) is provided at one end. There are two sealing rings (8), and the two sealing rings (8) are respectively embedded in the water inlet pipe (1) on both sides of the water outlet (5).

3. The oscillating flushing system according to claim 2, characterized in that: The water inlet pipe (1) is connected to a water source and has a water inlet connector (9) installed at one end. The water inlet connector (9) is a right-angle connector.

4. The oscillating flushing system according to claim 3, characterized in that: A rotating fixing seat (10) is installed on the water inlet pipe (1), and the rotating fixing seat (10) is fixed to the polishing equipment.

5. The oscillating flushing system according to claim 4, characterized in that: A bearing (11) is provided between the rotating fixed seat (10) and the water inlet pipe (1).

6. The oscillating flushing system according to claim 5, characterized in that: A first dust cover (12) is provided at the connection between the water inlet pipe (1) and the flushing seat (2).

7. The oscillating flushing system according to claim 6, characterized in that: A second dust cover (13) is installed on the first dust cover (12), and the second dust cover (13) is located at the connection between the rotating fixed seat (10) and the water inlet pipe (1).

8. The oscillating flushing system according to claim 1, characterized in that: The flushing seat (2) includes a rotating part (21) and a mounting part (22). The rotating part (21) is rotatably connected to the water inlet pipe (1). The mounting part (22) is detachably mounted on the rotating part (21). The spray pipe (3) is mounted on the mounting part (22).

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