A high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology

Abstract

The utility model discloses a kind of molybdenum tray high-efficiency chemical cleaning device based on ultrasonic technology, including main body mechanism, its inner cavity is equipped with the clamping mechanism for clamping molybdenum tray and the spray mechanism for flushing molybdenum tray, the top of main body mechanism is equipped with the support mechanism that can provide installation base for clamping mechanism, driving mechanism for being equipped with on support mechanism for rotating molybdenum tray with clamping mechanism is driven;By the cooperation of clamping mechanism, support mechanism, driving mechanism and displacement mechanism, molybdenum tray can be clamped in main body mechanism and rotate at uniform speed, the contact area between molybdenum tray and main body mechanism can be reduced, while reducing compound residual rate, increase the contact area between chemical medicine water, improve compound stripping efficiency, in turn help to shorten cleaning time;Ultrasonic cleaning and pure water flushing to molybdenum tray can be realized, so that molybdenum tray is cleaned more cleanly.

Description

Technical Field

[0001] This utility model relates to the field of molybdenum tray cleaning technology, and in particular to a high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology. Background Technology

[0002] As a key load-bearing component in high-temperature processes, molybdenum trays develop a thick and dense epitaxial compound layer on their surface due to the long-term growth of compound crystals. Traditional cleaning processes have the following drawbacks: Chemical cleaning solutions have poor penetration, requiring prolonged soaking (usually more than 6 hours), and high concentrations of acid mist pollute the environment. Existing ultrasonic cleaning equipment is not optimized for the characteristics of molybdenum materials. The ultrasonic cavitation effect is prone to be too strong in local areas, resulting in ineffective decomposition of the cleaning solution. Furthermore, when the molybdenum tray is laid flat for cleaning, a chemical residue area is easily formed on the bottom contact surface, resulting in a compound residue rate of more than 15%.

[0003] To address this, a high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology, in order to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the main technical solutions adopted by this utility model include: A high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology, comprising: The main body has an internal cavity equipped with a clamping mechanism for holding a molybdenum tray and a spraying mechanism for rinsing the molybdenum tray. The top of the main body has a support mechanism that provides a mounting base for the clamping mechanism. The support mechanism has a drive mechanism for rotating the clamping mechanism and the molybdenum tray. The main body also has a displacement mechanism for vertically and horizontally moving the clamping mechanism, support mechanism, and drive mechanism. The clamping mechanism includes a cylinder movably mounted on a support mechanism. An electric telescopic rod A is installed inside the cylinder. The output end of the electric telescopic rod A is movably connected to two symmetrical grippers through a linkage. A support plate is fixedly connected to the bottom end of the cylinder. The grippers are rotatably connected to the inner wall surface of the support plate.

[0006] As a preferred technical solution, the main body includes a machine body, and cleaning tank A and cleaning tank B are fixedly connected to both sides of the inner cavity of the machine body, respectively. The bottom of the cleaning tank A is fixedly connected to the ultrasonic transducer inside the machine body.

[0007] As a preferred technical solution, the top of one side of the cleaning tank A is connected to a liquid filling pipe that can be connected to a chemical isolation pump connected to an external medicine storage tank, the bottom of one side of the cleaning tank A is connected to a liquid drain pipe, the top of one side of the cleaning tank B is connected to a liquid inlet pipe that can be connected to a chemical isolation pump connected to an external pure water system pipeline, and the bottom of one side of the cleaning tank B is connected to a sewage drain pipe. The ports of the liquid filling pipe, liquid drain pipe, liquid inlet pipe, and sewage drain pipe all extend to the outside of the machine body, and valves are installed on the liquid filling pipe, liquid drain pipe, liquid inlet pipe, and sewage drain pipe.

[0008] As a preferred technical solution, the linkage includes a protrusion fixedly connected to the output end of the electric telescopic rod A, and the protrusion and the gripper are rotatably connected by a connecting rod through a rotating shaft.

[0009] As a preferred technical solution, the support mechanism includes a support plate located at the top of the machine body, the support plate having a through hole for the cylinder to pass through, the inner wall of the through hole being rotatably connected to the surface of the cylinder, a housing being fixedly connected to the top of the support plate, and the drive mechanism being located in the inner cavity of the housing.

[0010] As a preferred technical solution, one side of the housing has an open structure, and a cover plate that can be detachably installed on one side of the housing to cover the open.

[0011] As a preferred technical solution, the driving mechanism includes a motor installed on the top of the pallet and located in the inner cavity of the housing, the output shaft of the motor is fixedly connected to a driving gear, and a driven gear that meshes with the driving gear is fixedly sleeved on the surface of the cylinder.

[0012] As a preferred technical solution, the displacement mechanism includes a rodless cylinder installed on the surface of the machine body and arranged along the length of the machine body. An electric telescopic rod B is fixedly connected to the slide of the rodless cylinder, and the output end of the electric telescopic rod B is fixedly connected to the bottom of the support plate.

[0013] As a preferred technical solution, a rodless cylinder and an electric telescopic rod B are respectively provided on the left and right sides of the machine body. The rodless cylinders on both sides are symmetrically arranged with respect to the center line of the machine body, and the electric telescopic rods B on both sides are symmetrically arranged with respect to the center line of the machine body.

[0014] As a preferred technical solution, the spraying mechanism includes a main conduit located in the inner cavity of the cleaning tank B and connected to the liquid inlet pipe. The top and bottom ends of the main conduit are respectively connected to branch conduits. The inner side of the surface of the branch conduit is connected to a number of regularly distributed nozzles. The nozzles located in the upper layer are straight nozzles, and the nozzles located in the lower layer are fan-shaped nozzles.

[0015] This utility model has at least the following beneficial effects: This application utilizes a clamping mechanism, a support mechanism, a drive mechanism, and a displacement mechanism to clamp a molybdenum tray within the main body for uniform rotation cleaning. This reduces the contact area between the molybdenum tray and the main body, lowers the compound residue rate, and increases the contact area between the molybdenum tray and the chemical solution, thereby improving the compound removal efficiency and helping to shorten the cleaning time. Furthermore, through ultrasonic cleaning and pure water rinsing processes, multi-stage deep cleaning of the molybdenum tray can be achieved. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention. Figure 1 ; Figure 2 This is a schematic diagram of the structure of the present invention. Figure 2 ; Figure 3 This is a schematic diagram of the clamping mechanism, support mechanism and driving mechanism of this utility model; Figure 4 This is a schematic diagram of the clamping mechanism and the driving mechanism of this utility model.

[0017] In the diagram: 100, Main body; 110, Machine body; 120, Cleaning tank A; 121, Liquid inlet pipe; 122, Liquid outlet pipe; 130, Cleaning tank B; 131, Liquid inlet pipe; 132, Sewage outlet pipe; 200, Clamping mechanism; 210, Cylinder; 220, Electric telescopic rod A; 230, Gripper; 240, Support plate; 250, Protrusion; 260, Connecting rod; 300, Support mechanism; 310, Support plate; 320, Shell; 321, Cover plate; 400, Drive mechanism; 410, Motor; 420, Drive gear; 430, Driven gear; 500, Displacement mechanism; 510, Rodless cylinder; 520, Electric telescopic rod B; 600, Spraying mechanism; 610, Main pipe; 620, Branch pipe; 630, Nozzle. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Please see Figures 1-4This utility model provides a high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology, including a main body 100, a clamping mechanism 200 for clamping the molybdenum tray, a support mechanism 300 for providing an installation base for the clamping mechanism 200, a drive mechanism 400 for rotating the clamping mechanism 200 and the molybdenum tray, a displacement mechanism 500 for moving the clamping mechanism 200, the support mechanism 300, and the drive mechanism 400 vertically and horizontally, and a spraying mechanism 600 for rinsing the molybdenum tray. The clamping mechanism 200 is located inside the cavity of the main body 100, the support mechanism 300 is located on the top of the main body 100, the drive mechanism 400 is located on the support mechanism 300, and the displacement mechanism 500 and the spraying mechanism 600 are both located on the main body 100. The surface of the displacement mechanism 500 is coated with Teflon. The Teflon coating can reduce the risk of chemical corrosion and compound adhesion. At the same time, its self-lubricating properties can ensure the reliability of the above mechanism in long-term high-frequency operation, thus achieving a synergistic effect of improving cleaning efficiency and extending equipment life. The clamping mechanism 200 includes a cylinder 210 movably mounted on the support mechanism 300. An electric telescopic rod A220 is installed in the inner cavity of the cylinder 210. The output end of the electric telescopic rod A220 is movably connected to two symmetrical grippers 230 through a linkage. A support plate 240 is fixedly connected to the bottom end of the cylinder 210. The grippers 230 are rotatably connected to the inner wall of the support plate 240 through a rotating shaft. The electric telescopic rod A220 is powered by a battery, which can avoid the phenomenon of the electric telescopic rod A220 being entangled and broken when rotating, and ensure the normal operation of the clamping mechanism 200 and the drive mechanism 400.

[0020] The main structure 100 includes a body 110, with a cleaning tank A120 and a cleaning tank B130 fixedly connected to both sides of the inner cavity of the body 110, respectively. The bottom of the cleaning tank A120 is fixedly connected to an ultrasonic transducer inside the body 110. The cleaning tank A120 can store chemical solutions, and the cleaning tank B130 can collect wastewater generated after rinsing.

[0021] The cleaning tank A120 has a top side connected to a chemical isolation pump that can connect to an external storage tank. A drain pipe 122 is connected to the bottom side of the cleaning tank A120. The cleaning tank B130 has a top side connected to a chemical isolation pump that can connect to an external pure water system pipeline. A drain pipe 132 is connected to the bottom side of the cleaning tank B130. The top side of the cleaning tank B130 has a top side connected to a chemical isolation pump that can connect to an external pure water system pipeline. A drain pipe 132 is connected to the bottom side of the cleaning tank B130. The top side of the cleaning tank A120 has a top side connected to a chemical isolation pump that can connect to an external pure water system pipeline. The bottom side of the cleaning tank B130 has a bottom side connected to a drain pipe 132. The ports of liquid pipe 131 and drain pipe 132 both extend to the outside of the machine body 110. Valves are installed on liquid inlet pipe 121, liquid outlet pipe 122, liquid inlet pipe 131 and drain pipe 132. Chemical solutions and pure water can be introduced into cleaning tank A120 and cleaning tank B130 for use through liquid inlet pipe 121 and liquid inlet pipe 131. Used chemical solutions and pure water can be discharged through liquid outlet pipe 122 and drain pipe 132.

[0022] The linkage includes a protrusion 250 fixedly connected to the output end of the electric telescopic rod A220. The protrusion 250 and the gripper 230 are rotatably connected by a connecting rod 260 through a rotating shaft. The linkage can ensure that the output end of the electric telescopic rod A220 drives the two grippers 230 to rotate, and can also enable the two grippers 230 to open and close, so as to achieve the clamping operation of the molybdenum tray to be cleaned.

[0023] The support mechanism 300 includes a support plate 310 located on the top of the body 110. The support plate 310 has a through hole for the cylinder 210 to pass through. The inner wall of the through hole is rotatably connected to the surface of the cylinder 210 through a bearing. The top of the support plate 310 is fixedly connected to a housing 320. The drive mechanism 400 is located in the inner cavity of the housing 320. The support mechanism 300 can provide a mounting base for the clamping mechanism 200 and the drive mechanism 400, and can cooperate with the displacement mechanism 500 to realize the vertical and horizontal movement of the clamping mechanism 200 and the drive mechanism 400.

[0024] One side of the housing 320 has an open structure, and a cover plate 321 that can cover the open is detachably installed on one side of the housing 320 by screws. The open design facilitates the maintenance and repair of the internal structure of the housing 320, and the cover plate 321 can improve the safety of the drive mechanism 400 during operation.

[0025] The drive mechanism 400 includes a motor 410 mounted on the top of the pallet 310 and located in the inner cavity of the housing 320. The output shaft of the motor 410 is fixedly connected to a drive gear 420. A driven gear 430 that meshes with the drive gear 420 is fixedly sleeved on the surface of the cylinder 210. By starting the motor 410, the output shaft of the motor 410 can drive the clamping mechanism 200 to rotate around the bearing in the through hole as the axis, so as to achieve uniform rotation of the molybdenum pallet from 0 to 360°.

[0026] The displacement mechanism 500 includes a rodless cylinder 510 horizontally mounted on the surface of the body 110 and arranged along the length of the body 110. An electric telescopic rod B520 is vertically fixedly connected to the slide of the rodless cylinder 510. The output end of the electric telescopic rod B520 is fixedly connected to the bottom of the support plate 310. By activating the rodless cylinder 510, the electric telescopic rod B520, the support mechanism 300, the drive mechanism 400, and the clamping mechanism 200 can be moved horizontally, causing the clamping mechanism 200 to... The clamped molybdenum tray can move horizontally back and forth between the cleaning tank A120 and the cleaning tank B130. By activating the electric telescopic rod B520, the support mechanism 300, the drive mechanism 400 and the clamping mechanism 200 can move vertically, so that the molybdenum tray clamped by the clamping mechanism 200 can move up and down in the inner cavity of the cleaning tank A120 or the cleaning tank B130, so as to facilitate the movement of the molybdenum tray into the cleaning tank A120 for chemical cleaning and into the cleaning tank B130 for pure water rinsing.

[0027] The machine body 110 is provided with a rodless cylinder 510 and an electric telescopic rod B520 on its left and right sides respectively. The rodless cylinders 510 on both sides are symmetrically arranged with respect to the center line of the machine body 110, and the electric telescopic rods B520 on both sides are symmetrically arranged with respect to the center line of the machine body 110, so as to ensure the stability of the support mechanism 300 when moving vertically and horizontally and avoid the swaying phenomenon of the support mechanism 300.

[0028] The spraying mechanism 600 includes a main conduit 610 located inside the cleaning tank B130 and connected to the liquid inlet pipe 131. The top and bottom ends of the main conduit 610 are respectively connected to a branch conduit 620 with an annular structure. The inner side of the surface of the branch conduit 620 is connected to several regularly distributed nozzles 630. The upper nozzles 630 are straight nozzles, and the lower nozzles 630 are fan-shaped nozzles. The spraying mechanism 600 can spray pure water into the cleaning tank B130 to rinse the surface of the molybdenum tray placed inside the cleaning tank B130. The straight nozzles are used to concentrate the rinsing of the molybdenum tray surface, and the fan-shaped nozzles are used to cover a large area, which can reduce the consumption of pure water while ensuring the rinsing effect.

[0029] Both cleaning tanks A120 and B130 are equipped with level sensors. The level sensors can be TWRD33 models. The level sensors can detect the amount of chemical solution in cleaning tank A120 and the amount of wastewater in cleaning tank B130, so as to drain the wastewater and replenish the solution in a timely manner.

[0030] The working principle of this utility model is as follows: Open the valve on the liquid addition pipe 121 and the chemical isolation pump on the external storage tank to add chemical solution into the cleaning tank A120 through the liquid addition pipe 121. Place the molybdenum tray to be cleaned between the two grippers 230. Activate the electric telescopic rod A220. The output end of the electric telescopic rod A220 drives the protrusion 250 to move downwards. The protrusion 250 drives one end of the connecting rod 260 to move, and the other end of the connecting rod 260 drives the grippers 230 to rotate, causing the bottom ends of the two grippers 230 to rotate towards each other until the grippers 230 clamp and fix the molybdenum tray. Then, activate the electric telescopic rod B520 to extend the electric telescopic rod. The output end of the retractable rod B520 drives the support mechanism 300, drive mechanism 400, clamping mechanism 200, and the clamped molybdenum tray to move downwards until the molybdenum tray is placed in the chemical solution in the cleaning tank A120. Then, the ultrasonic generator and ultrasonic transducer inside the machine body 110 work together to perform ultrasonic cleaning on the molybdenum tray. The motor 410 is started, and its output shaft drives the drive gear 420 to rotate. The drive gear 420 drives the driven gear 430, clamping mechanism 200, and the clamped molybdenum tray to rotate synchronously and uniformly in the chemical solution, increasing the contact area with the chemical solution and improving the removal of compounds. This improves efficiency and helps shorten cleaning time. After chemical cleaning, the electric telescopic rod B520 is activated again. The output of the electric telescopic rod B520 drives the support mechanism 300, drive mechanism 400, clamping mechanism 200, and the clamped molybdenum tray upwards until the molybdenum tray is away from the inner cavity of the cleaning tank A120. At this time, the rodless cylinder 510 is activated. The slide of the rodless cylinder 510 drives the electric telescopic rod B520, support mechanism 300, drive mechanism 400, clamping mechanism 200, and the clamped molybdenum tray towards the inner cavity of the cleaning tank B130 until the molybdenum tray moves into the cleaning tank B130. At this point, the electric telescopic rod B520 is activated, causing its output end to move the molybdenum tray into the cleaning tank B130. Next, the valve on the inlet pipe 131 and the chemical isolation pump on the external pure water system pipeline are opened, allowing pure water to be delivered through the inlet pipe 131 to the main pipe 610 and branch pipe 620, and then sprayed onto the surface of the molybdenum tray by the nozzle 630, thus rinsing the molybdenum tray with pure water. Finally, the valves on the drain pipe 122 and the sewage pipe 132 are opened to discharge the chemical solutions used in the cleaning tank A120 and the sewage generated in the cleaning tank B130 for unified collection and treatment.

[0031] All parts not described in this utility model are the same as or can be implemented using existing technology. Although embodiments of this utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this utility model, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology, characterized in that, include: The main body (100) has an inner cavity equipped with a clamping mechanism (200) for clamping a molybdenum tray and a spraying mechanism (600) for rinsing the molybdenum tray. The top of the main body (100) is equipped with a support mechanism (300) that provides an installation base for the clamping mechanism (200). The support mechanism (300) is equipped with a drive mechanism (400) for rotating the clamping mechanism (200) and the molybdenum tray. The main body (100) is also equipped with a displacement mechanism (500) for vertically and horizontally moving the clamping mechanism (200), the support mechanism (300), and the drive mechanism (400). The clamping mechanism (200) includes a cylinder (210) movably mounted on a support mechanism (300). An electric telescopic rod A (220) is installed in the inner cavity of the cylinder (210). The output end of the electric telescopic rod A (220) is movably connected to two symmetrical grippers (230) through a linkage. A support plate (240) is fixedly connected to the bottom end of the cylinder (210). The grippers (230) are rotatably connected to the inner wall surface of the support plate (240). The main body (100) includes a body (110). Cleaning tank A (120) and cleaning tank B (130) are fixedly connected to both sides of the inner cavity of the body (110). The bottom of the cleaning tank A (120) is fixedly connected to an ultrasonic transducer inside the body (110). The top of one side of the cleaning tank A (120) is connected to a liquid filling pipe (121) that can be connected to a chemical isolation pump connected to an external drug storage tank. The bottom of one side of the cleaning tank A (120) is connected to a drain pipe (122). The top of one side of the cleaning tank B (130) is connected to an inlet pipe (131) that can be connected to a chemical isolation pump of a pure water system pipeline. The bottom of one side of the cleaning tank B (130) is connected to a drain pipe (132). The ports of the liquid filling pipe (121), the liquid drain pipe (122), the liquid filling pipe (131) and the drain pipe (132) all extend to the outside of the machine body (110). Valves are installed on the liquid filling pipe (121), the liquid drain pipe (122), the liquid filling pipe (131) and the drain pipe (132). The displacement mechanism (500) includes a rodless cylinder (510) mounted on the surface of the body (110) and arranged along the length of the body (110). An electric telescopic rod B (520) is fixedly connected to the slide of the rodless cylinder (510). The output end of the electric telescopic rod B (520) is fixedly connected to the bottom of the support plate (310). The left and right sides of the body (110) are respectively provided with a rodless cylinder (510) and an electric telescopic rod B (520). The rodless cylinders (510) on both sides are symmetrically arranged with respect to the center line of the body (110), and the electric telescopic rods B (520) on both sides are symmetrically arranged with respect to the center line of the body (110). The spraying mechanism (600) includes a main conduit (610) located in the inner cavity of the cleaning tank (130) and connected to the liquid inlet pipe (131). The top and bottom ends of the main conduit (610) are respectively connected to branch conduits (620). The inner side of the surface of the branch conduit (620) is connected to a number of regularly distributed nozzles (630). The nozzles (630) located in the upper layer are straight nozzles, and the nozzles (630) located in the lower layer are fan-shaped nozzles.

2. The high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology according to claim 1, characterized in that: The linkage includes a protrusion (250) fixedly connected to the output end of the electric telescopic rod A (220), and a connecting rod (260) is rotatably connected between the protrusion (250) and the gripper (230) via a rotating shaft.

3. The high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology according to claim 2, characterized in that: The support mechanism (300) includes a support plate (310) located on the top of the body (110). The support plate (310) has a through hole for the cylinder (210) to pass through. The inner wall of the through hole is rotatably connected to the surface of the cylinder (210). The top of the support plate (310) is fixedly connected to a housing (320). The drive mechanism (400) is located in the inner cavity of the housing (320).

4. The high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology according to claim 3, characterized in that: One side of the housing (320) has an open structure, and a cover plate (321) that can cover the open is detachably installed on one side of the housing (320).

5. The high-efficiency chemical cleaning device for molybdenum trays based on ultrasonic technology according to claim 4, characterized in that: The drive mechanism (400) includes a motor (410) mounted on the top of the pallet (310) and located in the inner cavity of the housing (320). The output shaft of the motor (410) is fixedly connected to a drive gear (420), and a driven gear (430) that meshes with the drive gear (420) is fixedly sleeved on the surface of the cylinder (210).

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