Dismountable positioned ion beam polishing sample stage apparatus

By improving the adjustable base and tray structure of the sample stage, precise positioning of the sample surface and the ion beam center was achieved during ion beam polishing, solving the problem of inaccurate positioning in existing technologies and improving polishing effect and efficiency.

CN224543998UActive Publication Date: 2026-07-24CHANGZHOU LONGSKEPU ELECTRONIC TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
CHANGZHOU LONGSKEPU ELECTRONIC TECH CO LTD
Filing Date
2025-07-31
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

In existing ion beam polishing technology, the positioning of the sample stage is not precise enough, which makes it difficult to align the center of the ion beam with the center of the sample, affecting the polishing effect and efficiency.

Method used

An adjustable sample base and tray are used. The precise positioning of the sample surface and the center of the ion beam is achieved through the cooperation of the lifting rod, locking screw and pushing screw. The position of the sample stage is adjusted by the annular convex block and pushing screw of the positioning fixture to ensure that the ion beam emission center is aligned with the center of the sample surface.

Benefits of technology

This improved the positioning accuracy of the polished sample surface to the micrometer level, thereby enhancing the precision of ion beam polishing and the working efficiency of the equipment.

✦ Generated by Eureka AI based on patent content.

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  • Figure CN224543998U_ABST
    Figure CN224543998U_ABST
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Abstract

The utility model provides a kind of detachable positioning's ion beam polishing sample table equipment, comprising: positioning tool, adjustable sample base and adjustable sample supporting plate;Supporting plate is inserted into the center position lifting hole of base by the lifting through rod of bottom center position;Base is clamped by the convex rib block of the lower inner side wall setting of columnar body positioning tool, and the locking screw hole that convex rib block's sample table locking screw inserts into the horizontal penetration base of base side, and adjustable sample base is loosened or fastened in cooperation, when lifting through rod passes through lifting hole to reach specified position, supporting plate is fixed or loosened by the locking screw of locking screw hole;The bottom center advancing screw of positioning tool is tightened or loosened, and the overall lifting of adjusting supporting plate makes that the sample surface on supporting plate is flush with the plane of the top of positioning tool, and the center of ion beam flow emission is aligned with sample surface center, realizes.The structure design of the utility model ensures that sample surface is accurately positioned to ion beam flow emission position, and micron-level positioning accuracy is realized.
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