Scraper mechanism and evaporation system

The automatic removal of splatter from the coating roller surface by the scraper mechanism solves the appearance quality problem caused by molten metal splashing, saves cleaning costs, and improves the efficiency of lithium battery manufacturing.

CN224548532UActive Publication Date: 2026-07-24JIANGSU ENPACK COMPOSITE CURRENT COLLECTORS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
JIANGSU ENPACK COMPOSITE CURRENT COLLECTORS CO LTD
Filing Date
2025-07-04
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

During the preparation of positive and negative aluminum and copper foils for lithium batteries, splashing of molten metal causes splashes to adhere to the surface of the coating roller, affecting the appearance quality of the metal layer, and cleaning operations consume a lot of manpower, resources, and time.

Method used

Design a scraper mechanism including a scraper, a baffle, and a trough. The scraper scrapes away splashes in close proximity to the surface of the coating roller, the baffle blocks the drifting debris, and the trough collects the splashes. By automatically removing splashes as the coating roller rotates, the need for manual cleaning is reduced.

Benefits of technology

It automatically removes splatter from the surface of the coating roller, improves the appearance quality of the metal layer, saves manpower, resources and time for cleaning operations, improves cleanliness, and avoids secondary pollution.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a scraper mechanism, include: scraper, the periphery of immediate vicinity of coating roll is established, is used for scraping the splatter of its surface when the coating roll rotates, the baffle is located splatter is scraped after the path of the dispersion, is used for blocking splatter dispersion, the groove box is set up in the below area of scraper and baffle, is used for bearing the splatter of gravity action direct fall or after being blocked by baffle and falling. The utility model can automatically remove the splatter on the surface of coating roll, thereby improving the appearance of metal layer, reduce the manpower, material resources and time of consumption, and the splatter after cleaning can be collected in batches, and prevent causing secondary pollution.
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Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a scraper mechanism and a vapor deposition system. Background Technology

[0002] Composite current collectors, as alternatives to aluminum and copper foils for the positive and negative electrodes of lithium-ion batteries, are widely used in the preparation of lithium-ion battery products. Vacuum evaporation coating is the main production method for composite current collectors. Specifically, a roll conveying device, a wire feeding mechanism, and an evaporation boat are set up in a vacuum chamber. The roll conveying device typically includes an unwinding roller, a winding roller, and a coating roller located between the two. The base film roll can be unwound by the unwinding roller, flow through the coating roller, and be wound up by the winding roller. The evaporation boat is located below the coating roller. The feeding mechanism can transport the metal wire to be evaporated to the top of the evaporation boat. The evaporation boat can heat the metal wire, causing the metal wire to melt and drip into the evaporation boat. As the molten metal continues to be heated, it vaporizes to form metal vapor and is deposited onto the surface of the base film at the coating roller, thereby preparing the composite current collector.

[0003] However, in the actual preparation process, factors such as the instability of the molten metal surface due to the melting and dripping of the metal wire, or the boiling of aluminum liquid when the molten metal vaporizes, can cause splashing of the molten metal. Most of the splashed molten metal will adhere to the base film, but a small amount of splashed molten metal will penetrate the base film and adhere to the surface of the coating roller, forming dot-like splashes. As the coating roller rotates, the base film and the splashes are squeezed against each other, forming pressure points on the surface of the base film, which continue until the end of the operation. This results in poor appearance quality of the metal layer after vapor deposition, affecting its use. Furthermore, when the operator cleans the coating roller afterward, the small size of the splashes and their firm adhesion to the coating roller make the cleaning operation very labor-intensive, resource-intensive, and time-consuming.

[0004] Therefore, it is necessary to improve the existing technology to overcome the aforementioned defects. Utility Model Content

[0005] The purpose of this invention is to provide a scraper mechanism and a vapor deposition system that can automatically remove spatter from the surface of the coating roller, thereby improving the appearance of the metal layer, and reducing the manpower, material resources and time required for maintaining the coating roller.

[0006] The purpose of this utility model is achieved through the following technical solution: a scraper mechanism, characterized in that it includes:

[0007] A scraper, disposed adjacent to the circumferential surface of the coating roller, is used to scrape off splatter from the surface of the coating roller as it rotates;

[0008] A baffle, located in the path of the debris after it has been scraped away, is used to block the debris from spreading further.

[0009] A trough, located in the area below the scraper and the baffle, is used to catch splashes that fall directly under gravity or are blocked by the baffle.

[0010] Furthermore, the scraper is located between the coating roller and the baffle, and the top of the trough is recessed inward to form a collection groove, which is located between the bottom of the scraper and the bottom of the baffle.

[0011] Furthermore, the coating roller has radial lines parallel to the horizontal direction, and the trough is located above the horizontal plane containing these radial lines.

[0012] Furthermore, the scraper extends upward from its bottom, and a blade is formed at the extended end of the scraper. The blade is tangent to the circumferential surface of the coating roller and has a cutting edge line parallel to the axial direction of the coating roller.

[0013] The scraper has an upwardly oriented guide surface, and the splatter scraped off by the blade is adapted to fall into the slot along the guide surface under the action of gravity.

[0014] Furthermore, there is a gap between the cutting edge line and the circumferential surface of the coating roller, the gap being in the range of 5μm to 10μm.

[0015] Furthermore, the scraper is a straight triangular prism with its axial direction parallel to that of the coating roller. One of the side edges of the scraper forms the cutting edge. One side of the scraper that is in contact with the cutting edge is arranged upward and inclined downward relative to the horizontal surface to form the guide surface. The bottom of the scraper is the side that is not in contact with the cutting edge.

[0016] Furthermore, the baffle is an arc-shaped plate extending upward from its bottom along the circumference of the coating roller, and a blocking area is formed between the baffle and the circumferential surface of the coating roller. The scraper and the slot are adapted to cooperate in sealing the lower end of the blocking area, and the upper end of the blocking area is located above the top of the coating roller.

[0017] Furthermore, the baffle and the coating roller are coaxial, the trough is inclined toward the coating roller about the axis of the coating roller, and the opening of the collection trough is directly opposite the lower end of the blocking area.

[0018] Furthermore, the scraper, the trough, and the baffle are all elongated structures extending along the axial direction of the coating roller. The coating roller has a working area for contacting the base film. The two ends of the scraper extend to or beyond the axial boundary of the working area. The two ends of the baffle extend to or beyond the end of the scraper. The top of the trough is recessed inward to form a collection groove adapted to the contour of the trough. The two ends of the collection groove extend to or beyond the end of the baffle.

[0019] In addition, this utility model also provides a vapor deposition system, comprising:

[0020] Vacuum cavity;

[0021] A conveying device, housed in the vacuum chamber, is used to convey a roll of base film, comprising a coating roller located on the base film conveying path, the base film flowing over the bottom of the coating roller;

[0022] An evaporation boat is housed in the vacuum chamber and located below the coating roller to deposit metal vapor onto the surface of the base film at the coating roller.

[0023] A scraper mechanism, housed in the vacuum chamber, is adapted to scrape off splatter from the surface of the coating roller as it rotates;

[0024] The scraper mechanism includes a first adjustment structure between the scraper and the trough, the first adjustment structure being adapted to drive the scraper to move relative to the trough to adjust the gap between the scraper and the coating roller; and / or, the scraper mechanism includes a second adjustment structure between the scraper mechanism and the vacuum chamber, the second adjustment structure being adapted to drive the scraper mechanism to move relative to the vacuum chamber to adjust the gap between the scraper mechanism and the coating roller.

[0025] Compared with the prior art, the present invention has the following beneficial effects: By adopting the above-mentioned structure, when the splashed molten metal penetrates the base film and adheres to the surface of the coating roller, the scraper can automatically scrape off the splashes on the surface of the coating roller as the coating roller rotates, saving the manpower, material resources and time consumed in cleaning operations, and improving the quality of the prepared composite current collector; by setting a trough in the area below the scraper, most of the splashes scraped by the scraper can fall into the trough under gravity for centralized collection, improving the cleanliness around the coating roller after the scraper operation and avoiding manual cleaning of the scraped splashes; in addition, since a small amount of splashes may scatter during the scraping operation, by setting a baffle, the baffle can block the scattered splashes and ensure that the splashes eventually fall into the trough, so as to prevent them from leaving the trough and scattering to other roller systems, causing secondary pollution to the base film on other roller systems. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the installation of the scraper mechanism in this utility model.

[0027] Figure 2 yes Figure 1 A cross-sectional schematic diagram.

[0028] Figure 3 yes Figure 2 A magnified view of a portion at point A.

[0029] Figure 4This is a schematic diagram of the scraper mechanism in this utility model.

[0030] Figure 5 This is a schematic diagram of the vapor deposition system of this utility model.

[0031] Explanation of reference numerals in the attached figures:

[0032] 100. Scraper mechanism; 110. Scraper; 111. Blade; 112. Guide surface; 120. Baffle; 121. Blocking surface; 130. Tank; 131. Collection tank; 140. Blocking area; 200. Coating roller; 300. Base film; 400. Evaporation boat. Detailed Implementation

[0033] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0034] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0035] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0036] Please see Figures 1 to 4 As shown, the scraper mechanism 100 corresponding to a preferred embodiment of the present invention includes: a scraper 110, which is disposed adjacent to the circumferential surface of the coating roller 200 and is used to scrape off the splatter on the surface of the coating roller 200 when the coating roller 200 rotates; a baffle 120, which is located on the scattering path of the splatter after it is scraped off and is used to block the splatter from scattering; and a trough 130, which is disposed in the area below the scraper 110 and the baffle 120 and is used to receive the splatter that falls directly under gravity or falls after being blocked by the baffle 120.

[0037] By employing the aforementioned structure, this invention allows the scraper 110 to automatically remove the splashes from the coating roller 200 surface as the coating roller 200 rotates, saving manpower, resources, and time spent on cleaning and improving the quality of the prepared composite current collector. Furthermore, by providing a trough 130 below the scraper 110, most of the splashes scraped by the scraper 110 fall into the trough 130 under gravity for centralized collection, improving the cleanliness around the coating roller 200 after the scraper 110's operation and avoiding manual cleaning of the scraped splashes. Additionally, since a small amount of splashes may scatter during the scraping operation, a baffle 120 is provided to block the scattering splashes, ensuring they ultimately fall into the trough 130 and prevent them from drifting away and spreading to other roller systems, causing secondary contamination of the base film 300 on those roller systems.

[0038] Furthermore, the scraper 110 is located between the coating roller 200 and the baffle 120, and both the scraper 110 and the baffle 120 are connected to the trough 130. The top of the trough 130 is recessed inward to form a collection groove 131, which is located between the bottom of the scraper 110 and the bottom of the baffle 120 to receive falling splatter.

[0039] By adopting the above structure, the trough 130, scraper 110, and baffle 120 are connected as a whole, which facilitates the overall disassembly, assembly, and adjustment of the scraper mechanism 100. Moreover, the scraper 110 is arranged closer to the coating roller 200 than the baffle 120, which makes it easier for the scraper 110 to act directly on the coating roller 200. At the same time, the splattering material scattered by the scraper 110 during the scraping operation can be effectively blocked by the baffle 120.

[0040] Furthermore, the doctor blade 110, baffle 120, and collection trough 130 are all elongated structures extending along the axial direction of the coating roller 200. The coating roller 200 has a working area for contacting the base film 300. The two ends of the doctor blade 110 extend to or beyond the axial boundary of the working area, the two ends of the baffle 120 extend to or beyond the ends of the doctor blade 110, and the contour of the collection trough 131 is adapted to the contour of the collection trough 130. The two ends of the collection trough 131 extend to or beyond the ends of the baffle 120. With the above structure, during the rotation of the coating roller 200, the doctor blade 110 can completely cover the working area of ​​the coating roller 200, ensuring that it can effectively scrape off the splashes at various positions along the axial direction of the coating roller 200. The baffle 120 can reliably block the splashes at various positions along the axial direction of the coating roller 200, and the collection trough 131 can reliably collect the scraped splashes at various positions along the axial direction of the coating roller 200.

[0041] Furthermore, the trough 130 is a cuboid, and the collection trough 131 is a cuboid groove adapted to the contour of the trough 130, making the forming and subsequent cleaning of the collection trough 131 very convenient. The scraper 110 and the baffle 120 can be connected to the top of the trough 130 or other non-top positions. The bottom of the scraper 110 and the bottom of the baffle 120 can be fixedly connected to the trough 130 by welding, threaded connection, or integral bending. Admittedly, in other embodiments, the scraper 110 can be detachably connected to the trough 130 so that the scraper 110 can be replaced separately when damaged or worn.

[0042] In this embodiment, the top of the slot 130 has an unrecessed portion, which forms two strip-shaped surfaces arranged opposite each other along the width direction of the slot 130 and parallel to the length direction of the slot 130, for connecting the scraper 110 and the baffle 120 respectively. By connecting the scraper 110 and the baffle 120 to the strip-shaped surfaces, the connection between the scraper 110 and the slot 130 and the connection between the baffle 120 and the slot 130 is smoother, avoiding the obstruction of splashed material entering the slot 130 due to dead corners, and the overall structure of the scraper 110 and the baffle 120 is simpler.

[0043] Preferably, the coating roller 200 has a radial line parallel to the horizontal direction, and the trough 130 is located above the horizontal plane where the radial line is located, that is, the trough 130 is set near the top of the coating roller 200. Since the trough 130 is set in the area below the scraper 110 and the baffle 120, when the base film 300 flows through the bottom of the coating roller 200 during the conveying process, the scraper mechanism 100 can be prevented from obstructing the conveying of the base film 300.

[0044] Furthermore, the scraper 110 extends upward from its bottom, and a blade 111 is formed at the extended end of the scraper 110. The blade 111 is tangent to the circumferential surface of the coating roller 200 and has a cutting edge line parallel to the axial direction of the coating roller 200, ensuring that the blade 111 can effectively scrape away debris from all areas along the axial direction of the coating roller 200. Preferably, there is a gap between the cutting edge line and the circumferential surface of the coating roller 200, with the gap ranging from 5μm to 10μm. By limiting the above parameters, it is possible to effectively remove spatter adhering to the surface of the coating roller 200 while reducing its resistance to the rotation of the coating roller 200, making the rotation of the coating roller 200 smoother.

[0045] In this embodiment, the scraper 110 has an upwardly arranged guide surface 112, which can be an inclined plane or a curved surface. The splatter scraped off by the blade 111 falls into the trough 130 under the action of gravity along the guide surface 112. Preferably, the guide surface 112 smoothly transitions to the side wall of the collection trough 131 to prevent dead zones from obstructing the flow of splatter into the collection trough 131.

[0046] Furthermore, in one embodiment, the scraper 110 is a straight triangular prism with its axial direction parallel to that of the coating roller 200. The straight triangular prism scraper 110 has high structural strength, excellent scraping effect, and is easy and secure to install. One side edge of the scraper 110 forms a cutting edge 111. One side of the scraper 110 that contacts the cutting edge 111 faces upward and is inclined downward relative to the horizontal to form a guide surface 112. The bottom of the scraper 110 is a side that does not contact the cutting edge 111, facilitating reliable fixation to the tray 130. Preferably, the end face profile of the scraper 110 perpendicular to the axial direction of the coating roller 200 is an obtuse triangle, and the side edge that contacts the smallest vertex of this end face forms the cutting edge 111, making the cutting edge 111 sharper and improving the scraping effect.

[0047] Admittedly, in other embodiments, the scraper 110 may also take the form of other shapes, such as a sheet.

[0048] Furthermore, the baffle 120 is an arc-shaped plate extending upwards from its bottom along the circumference of the coating roller 200. The arc-shaped baffle 120 allows for a more compact fit with the coating roller 200, saving installation space, while also providing better protection against flying debris.

[0049] A blocking region 140 is formed between the baffle 120 and the circumferential surface of the coating roller 200. The scraper 110 and the trough 130 are adapted to cooperate in sealing the lower end of the blocking region 140, and the upper end of the blocking region 140 is located above the top of the coating roller 200. That is, the baffle 120 is located outside the circumferential surface of the coating roller 200 and extends upward to the top of the coating roller 200. At the same time, no additional sealing structure is required at the other end of the blocking region 140, which greatly reduces the probability of scattered splashes flowing out from the upper end of the blocking region 140.

[0050] In this embodiment, the baffle 120 and the coating roller 200 are preferably coaxial, so that the distance between the baffle 120 and the coating roller 200 is constant at all positions in the circumferential direction of the coating roller 200, which improves the blocking and guiding effect on the scattered splashes. The distance between the baffle 120 and the coating roller 200 is between 150mm and 250mm, preferably 200mm, which allows them to be more compact while avoiding affecting the blocking and reflux effect on the splashes.

[0051] Preferably, the trough 130 is inclined toward the coating roller 200 around the axis of the coating roller 200, so that the opening of the collection trough 131 is directly opposite the lower end of the blocking area 140, avoiding the opening of the collection trough 131 being blocked by the baffle 120, and the scattered splashes are more likely to fall back into the collection trough 131.

[0052] Preferably, the baffle 120 has a smooth transition between its blocking surface 121 and the side wall of the collection tank 131 to prevent dead zones from obstructing the flow of splashes into the collection tank 131. In this embodiment, the baffle 120 extends upward from the top of the tank 130 along the circumference of the coating roller 200, i.e., the two are integrally formed without the need for additional connecting structures, making assembly convenient. The blocking surface 121 of the baffle 120 and the collection tank 131 are coplanar on one of their radial side walls.

[0053] Furthermore, in one embodiment, a first adjustment structure (not shown) is provided between the scraper 110 and the trough 130. The first adjustment structure is adapted to drive the scraper 110 to move relative to the trough 130 to adjust the gap between the scraper 110 and the coating roller 200. Specifically, the first adjustment structure can be a pneumatic or electric drive to realize the automatic adjustment of the position of the scraper 110. During the preparation process, the gap between the two can be adjusted to achieve the best scraping effect.

[0054] Furthermore, referring to Figure 5 As shown, this utility model also provides a vapor deposition system, including a vacuum chamber, a conveying device, an evaporation boat 400, and the aforementioned scraper mechanism 100. The conveying device, evaporation boat 400, and scraper mechanism 100 are all housed within the vacuum chamber. The conveying device is a roll-to-roll structure for conveying a rolled base film 300, and includes a coating roller 200 located on the conveying path of the base film 300. The base film 300 flows through the bottom of the coating roller 200. The conveying device is a known structure and will not be described in detail here. The evaporation boat 400 is located below the coating roller 200 to vaporize metal vapor onto the surface of the base film 300 at the bottom of the coating roller 200. The scraper mechanism 100 is adapted to scrape off spatter from the surface of the coating roller 200 as it rotates.

[0055] Preferably, a second adjustment structure (not shown) can be provided between the scraper mechanism 100 and the vacuum chamber. This second adjustment structure is suitable for adjusting the position of the scraper mechanism 100 relative to the coating roller 200 before or during preparation to achieve the best scraping effect. It can also adapt to coating rollers 200 of different diameters, improving versatility. Specifically, the second adjustment structure can also use pneumatic, electric, or other driving components to automatically adjust the position of the scraper mechanism 100, which will not be elaborated further here.

[0056] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A scraper mechanism, characterized in that, include: A scraper (110) is disposed adjacent to the circumferential surface of the coating roller (200) for scraping off splatter from its surface as the coating roller (200) rotates; A baffle (120) is located in the path of the splash after it has been scraped away, and is used to block the splash from spreading. The trough (130) is located in the area below the scraper (110) and the baffle (120) to receive splashes that fall directly under gravity or are blocked by the baffle (120).

2. The scraper mechanism as described in claim 1, characterized in that, The scraper (110) is located between the coating roller (200) and the baffle (120), and the top of the trough (130) is recessed inward to form a collection groove (131), which is located between the bottom of the scraper (110) and the bottom of the baffle (120).

3. The scraper mechanism as described in claim 2, characterized in that, The coating roller (200) has radial lines parallel to the horizontal direction, and the trough (130) is located above the horizontal plane containing the radial lines.

4. The scraper mechanism as described in claim 2, characterized in that, The scraper (110) extends upward from its bottom, and the extended end of the scraper (110) forms a blade (111), which is tangent to the circumferential surface of the coating roller (200) and has a cutting edge line parallel to the axial direction of the coating roller (200). The scraper (110) has an upwardly arranged guide surface (112), and the splatter scraped off from the blade (111) is adapted to fall into the slot (130) along the guide surface (112) under the action of gravity.

5. The scraper mechanism as described in claim 4, characterized in that, There is a gap between the cutting edge and the circumferential surface of the coating roller (200), and the gap ranges from 5μm to 10μm.

6. The scraper mechanism as described in claim 4, characterized in that, The scraper (110) is a straight triangular prism with its axial direction parallel to that of the coating roller (200). One of the side edges of the scraper (110) forms the blade (111). One side of the scraper (110) that is in contact with the blade (111) is arranged facing upward and is inclined downward relative to the horizontal surface to form the guide surface (112). The bottom of the scraper (110) is the side that is not in contact with the blade (111).

7. The scraper mechanism as described in claim 2, characterized in that, The baffle (120) is an arc-shaped plate extending upward from its bottom along the circumference of the coating roller (200). A blocking area (140) is formed between the baffle (120) and the circumferential surface of the coating roller (200). The scraper (110) and the slot (130) are adapted to cooperate in blocking the lower end of the blocking area (140). The upper end of the blocking area (140) is located above the top of the coating roller (200).

8. The scraper mechanism as described in claim 7, characterized in that, The baffle (120) and the coating roller (200) are coaxial, the trough (130) is inclined toward the coating roller (200) about the axis of the coating roller (200), and the opening of the collection trough (131) is directly opposite the lower end of the blocking area (140).

9. The scraper mechanism as described in any one of claims 1 to 8, characterized in that, The scraper (110), the trough (130), and the baffle (120) are all elongated structures extending along the axial direction of the coating roller (200). The coating roller (200) has a working area for contacting the base film (300). The two ends of the scraper (110) extend to or beyond the axial boundary of the working area. The two ends of the baffle (120) extend to or beyond the end of the scraper (110). The top of the trough (130) is recessed inward to form a collection groove (131) that matches the contour of the trough (130). The two ends of the collection groove (131) extend to or beyond the end of the baffle (120).

10. A vapor deposition system, characterized in that, include: Vacuum cavity; A conveying device, housed in the vacuum chamber, is used to convey a roll of base film (300), comprising a coating roller (200) located on the conveying path of the base film (300), the base film (300) flowing over the bottom of the coating roller (200); An evaporation boat (400) is housed in the vacuum chamber and located below the coating roller (200) to deposit metal vapor onto the surface of the base film (300) at the coating roller (200); The scraper mechanism (100) as described in any one of claims 1 to 9 is housed in the vacuum chamber and is adapted to scrape off splatter from the surface of the coating roller (200) as it rotates; The scraper mechanism (100) has a first adjustment structure between the scraper (110) and the trough (130). The first adjustment structure is adapted to drive the scraper (110) to move relative to the trough (130) to adjust the gap between the scraper (110) and the coating roller (200); and / or, the scraper mechanism (100) has a second adjustment structure between the vacuum chamber and the vacuum chamber. The second adjustment structure is adapted to drive the scraper mechanism (100) to move relative to the vacuum chamber to adjust the gap between the scraper mechanism (100) and the coating roller (200).