Liquid supply assembly and liquid supply system

Abstract

The utility model discloses a kind of liquid supply assembly and liquid supply system, and liquid supply assembly includes supply pump, first control module, second control module, the first control module has the first gas flow channel of the communication drive gas source that can be on-off, the second control module has the second gas flow channel that can be communicated with the gas cavity of the supply pump;The first control module and the second control module are separately arranged and can be detachably sealed connection, to communicate the first gas flow channel and the second gas flow channel;So that first control module becomes standard part, specially control supply pump, with the most basic provide pump positive pressure function, second control module becomes adapter, can be adjusted second control module according to the number and function of on-off valve, other optional function module can also be set on second control module, realize the function of independent structure and associated control each other.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a liquid supply component and a liquid supply system. Background Technology

[0002] In the chemical solution application process of semiconductor manufacturing equipment, in order to coat the semiconductor wafer with a predetermined amount of photoresist solution each time, a chemical solution supply system as described in patent number JP4265820B2 has been proposed. This patent's chemical solution supply system includes a chemical solution supply pump that draws the chemical solution contained in a chemical solution tank and coats the drawn-in chemical solution onto the semiconductor wafer in a predetermined amount each time. Specifically, the chemical solution supply pump has a diaphragm separating a pump chamber for filling the chemical solution and a working chamber for gas flow. The outer edge of the diaphragm is sealed. One side of the diaphragm forms the pump chamber, which is a liquid chamber, and the opposite side forms the working chamber, which is a gas chamber. During liquid discharge, gas is introduced into the gas chamber to apply positive pressure to the diaphragm, causing it to deform towards the liquid chamber side and compress the pump chamber volume. During liquid suction, a vacuum is drawn into the gas chamber to generate negative pressure, causing the diaphragm to deform towards the gas chamber side and expand the pump chamber volume. The switching between positive and negative pressure is achieved by controlling two solenoid valves in conjunction with positive and negative pressure sources.

[0003] In existing pharmaceutical supply systems / photoresist supply components, the flow path includes at least the aforementioned supply pump and multiple on / off valves that work in conjunction with it. As described above, pneumatic control of the supply pump's dispensing and suction of the photoresist is required, which in turn necessitates pneumatic control of the on / off valves. Therefore, a pump control module for controlling the supply pump and a valve control module for controlling the on / off valves are needed. Both control modules include flow channels for gas inflow and outflow, as well as solenoid valves for controlling the gas flow within these channels.

[0004] However, existing pump control modules and valve control modules are often complex and varied. They are either set up separately and far apart, making centralized management difficult, or they are integrated into one unit to reduce the size of the control module and facilitate maintenance. However, modifications to the valve control module can affect the pump control module, resulting in high modification costs. Furthermore, depending on different functions and usage requirements, changes to either the valve control module or the pump control module can become cumbersome, leading to low overall applicability. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a liquid supply component and a liquid supply system, which solves the problem of low applicability of existing integrated control modules.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A liquid supply assembly includes a supply pump, a first control module, a second control module, and a plurality of on / off valves located upstream and downstream of the supply pump, wherein the second control module is capable of controlling the opening and closing of the on / off valves.

[0008] The supply pump includes a deformable component and a liquid chamber and a gas chamber separated by the deformable component. The first control module is able to communicate with the gas chamber and control the gas to enter or flow out of the gas chamber, and control the movement of the deformable component to reduce or expand the volume of the liquid chamber to discharge or draw in liquid.

[0009] The first control module has a first gas flow channel that can be switched on and off to connect to the driving gas source, and the second control module has a second gas flow channel that can communicate with the gas chamber;

[0010] The first control module and the second control module are separately configured and detachably and sealed to connect the first gas flow channel and the second gas flow channel.

[0011] This utility model discloses a liquid supply assembly. A first control module controls the entry or exit of gas to pneumatically control the supply pump's discharge or suction. A second control module controls the opening and closing of multiple on / off valves upstream and downstream of the supply pump. The two control modules are modularly designed and detachably sealed. This makes the first control module a standard component, specifically controlling the supply pump and providing basic positive and negative pressure. The second control module is an adaptable component, adjustable according to the number and function of the on / off valves. Other optional functional modules can also be installed within the second control module for separate management. Furthermore, to reduce the size of the first control module and improve the three-dimensional space utilization of the second control module, a second gas flow channel connected to the supply pump's air chamber is located within the second control module, linking the first and second gas flow channels. Other optional functional modules can be configured on the second gas flow channel to improve gas flow detection capabilities or implement other functions in the supply pump's gas control without affecting the first control module's basic control of the supply pump.

[0012] Preferably, the first control module and the second control module are spaced apart and are detachably and sealedly connected by a first connector. The first connector has a first hollow channel that connects the first gas channel and the second gas channel. The first control module has a first mounting groove, and the second control module has a second mounting groove. Elastic seals are respectively fitted onto both ends of the first connector and placed in the first mounting groove and the second mounting groove to form a seal.

[0013] With this configuration, the first and second control modules are independent of each other. The first and second gas channels are connected through the first hollow flow channel of the first connector, but not connected to other internal structures of the first and second control modules. This reduces heat transfer between the two control modules, especially the second control module, which has more control elements and generates more heat. This prevents heat transfer from the second control module to the first control module, thus avoiding interference with the normal operation of the control elements in the first control module and ensuring the independent operation of the first control module and precise control of the supply pump. The first mounting groove is connected to the first gas channel, and the second mounting groove is connected to the second gas channel. When the two ends of the first connector are placed in the first and second mounting grooves respectively, the first hollow flow channel inside it connects the first and second gas channels. The elastic sealing elements sleeved on the outer periphery of its two ends seal against the inner walls of the first and second mounting grooves respectively, achieving a sealed isolation between the first hollow flow channel and the outside, and ensuring the airtightness between the first and second gas channels.

[0014] Preferably, a support member is provided between the first control module and the second control module. The support member is located on one side of the first connector in the horizontal direction and is fixedly connected to the first control module and the second control module respectively.

[0015] Since the first connector needs to detachably connect the first control module and the second control module, and simultaneously achieve a sealed connection between the first gas flow channel and the second gas flow channel, the stability of the first connector is crucial. If either the first control module or the second control module is subjected to force and becomes skewed or offset, the first connector may rotate and contract at the connection position with the first mounting groove or the second mounting groove, excessively or loosely compressing the elastic seal, disrupting the compression ratio of the elastic seal in the gas flow channel, and causing leakage. Therefore, a support member is provided between the opposing surfaces of the first control module and the second control module. The support member is located on one side of the first connector in the horizontal direction, that is, the support member and the first connector are arranged side by side between the first control module and the second control module, and the support member is also fixedly connected to the first control module and the second control module to maintain the distance between the first control module and the second control module, preventing the first control module and the second control module from rotating with the first connector as the hinge fulcrum, thus ensuring the sealing between the first gas flow channel and the second gas flow channel.

[0016] Preferably, the first control module includes a pump control main housing and a pump control sub-housing covering a first surface in the thickness direction of the pump control main housing, and the second control module includes a valve control main housing and a valve control sub-housing covering a first surface in the thickness direction of the valve control main housing.

[0017] The first mounting groove is located on the side of the pump control main housing, and the second mounting groove is located on the side of the valve control main housing. The first mounting groove and the second mounting groove are arranged opposite to each other.

[0018] The first gas flow channel is located inside the pump control main housing, and the second gas flow channel is located inside the valve control main housing.

[0019] With this configuration, the first and second gas channels do not require external pipe fittings, resulting in higher sealing performance of the channels themselves. The first mounting groove directly connects to the first gas channel, and the second mounting groove directly connects to the second gas channel. No additional joints are needed; the gas channels can be sealed and isolated from the outside environment simply by using elastic sealing elements, ensuring the airtightness of the gas channels.

[0020] Preferably, the support member is located between and fixed to the pump control sub-casing and the valve control sub-casing, and extends from the top to the bottom of the pump control sub-casing and the valve control sub-casing along the height direction.

[0021] With this configuration, the first connector connects to both the pump control main housing and the valve control main housing, while the support is located on the horizontal side of the first connector and is fixedly connected to both the pump control sub-housing and the valve control sub-housing. Thus, the first connector maintains the distance between the pump control main housing and the valve control main housing, and the support maintains the distance between the pump control sub-housing and the valve control sub-housing, preventing the first and second control modules from rotating horizontally with the first connector as a hinge point. Simultaneously, the support extends vertically from the top to the bottom of the pump control sub-housing and the valve control sub-housing, preventing the first and second control modules from rotating vertically with the first connector as a hinge point. This achieves the goal of omnidirectional fixation of the first and second control modules, and the first connector and the support do not interfere with each other. The support can be a flat plate structure, simplifying the overall structure and assembly process of the support, and improving the assembly efficiency of the liquid supply assembly.

[0022] Preferably, the deformable component is a diaphragm, the second control module is provided with a valve unit and a third gas flow channel communicating with the valve unit, the valve unit is used to control the opening and closing of the third gas flow channel, the first connector is provided with a second connector on one side in the height direction, the second connector has a second hollow flow channel to connect the first gas flow channel and the third gas flow channel.

[0023] With this configuration, the valve unit and the third gas flow channel serve as optional functional modules in the first control module for controlling the inflow or outflow of gas into the gas chamber. When the first control module is not in operation and is used for other purposes (such as stress relief of the diaphragm), the third gas flow channel is connected to the driving gas source, and the valve unit opens the third gas flow channel, allowing gas to flow into or out of the gas chamber through the third gas flow channel, part of the first gas flow channel, and the second gas flow channel. The valve unit and the third gas flow channel in the second control module do not interfere with each other and can be added or not added in specific scenarios, demonstrating the adaptability of the second control module.

[0024] Preferably, the second connector is spaced above the first connector, and a third connector is provided below the first connector. The first connector is located above the height midline of the pump control main housing and the valve control main housing, and the third connector is located below the height midline of the pump control main housing and the valve control main housing.

[0025] With this configuration, the first, second, and third connectors are spaced apart in the height direction, forming multiple connection points. These points provide support for the pump control main housing and the valve control main housing in the height direction, maintaining the distance between them and preventing the first and second control modules from rotating in the height direction with the first connector as the hinge fulcrum. This also ensures the connection and sealing functions of the first and second connectors for the pump control main housing and the valve control main housing, respectively.

[0026] Preferably, the first connector includes a large-diameter portion in the middle and small-diameter portions at both ends. Both the first mounting groove and the second mounting groove include a large-diameter groove corresponding to the large-diameter portion and a small-diameter groove corresponding to the small-diameter portion. The large-diameter portion can abut against the step between the large-diameter groove and the small-diameter groove. A sealing groove is provided on the small-diameter portion. The elastic seal is placed in the sealing groove and abuts against the inner wall of the small-diameter groove.

[0027] This configuration increases the contact area between the large-diameter portion and the large-diameter groove, improving connection stability. Simultaneously, the stepped contact between the large-diameter portion and the large-diameter groove and the small-diameter groove positions the two ends of the first connector in the first and second mounting grooves, reducing the impact of machining and assembly errors. Furthermore, a sealing groove is provided on the small-diameter portion, with an elastic seal disposed within it, sealing the outer wall of the small-diameter portion and the inner wall of the small-diameter groove. Both the small-diameter portion and the sealing groove are closer to the first and second gas flow channels, avoiding dead zones between the outer wall of the small-diameter portion and the inner wall of the small-diameter groove, thus reducing interference from gas in the gas flow channels on the elastic seal.

[0028] Preferably, the large-diameter portion includes a snap-fit ​​groove, and a slot is provided on the inner sidewall of the large-diameter groove, with one end of the slot protruding from the sidewall of the pump control main housing and the valve control main housing;

[0029] A plug is inserted into the slot, and the plug engages with the snap-fit ​​groove to fix the first connector to the pump control main housing and the valve control main housing respectively.

[0030] With this configuration, the two ends of the first connector are respectively inserted into the first mounting groove and the second mounting groove. If the dimensions do not match, the first control module and the second control module may still separate along the axial direction of the first hollow flow channel, which may lead to the failure of the sealing connection between the first connector and the first and second gas flow channels. Therefore, by setting the snap-fit ​​groove, slot, and plug, the first connector is limited along the axial direction of the first hollow flow channel, preventing the end of the first connector from moving relative to the first or second control module. This improves the connection strength between the first connector and the first and second control modules, as well as the fit of the elastic seal with the first or second mounting groove, thus improving the sealing performance. Furthermore, removing the plug allows the two ends of the first connector to be removed from the first and second mounting grooves, making installation and disassembly more convenient.

[0031] Preferably, the slot is a U-shaped groove with two ends communicating with the large-diameter groove, the plug is a U-shaped piece, and the snap-fit ​​groove is an annular groove; the U-shaped plug applies more even force to both sides of the first connector in the circumferential direction, avoiding the end of the first connector from being misaligned in the first mounting groove or the second mounting groove, which would cause excessive compression or loosening on one side of the elastic seal, thereby improving the stability and sealing of both ends of the first connector in the first mounting groove and the second mounting groove.

[0032] Preferably, the slot has a flared groove on one end of the side wall of the pump control main housing and the valve control main housing; the function of the flared groove is to facilitate the insertion of fingers or clamps into the slot to contact the plug-in, so as to pull out the plug-in with less effort, which is beneficial to improving the disassembly and assembly efficiency of the first connector and the first control module or the second control module.

[0033] Preferably, the second control module is further provided with a flow meter, which is connected to the second gas flow channel. After passing through the flow meter, the gas enters or flows out of the gas chamber. The flow meter can accurately measure the amount of gas flowing into or out of the gas chamber, providing a reference for the specific control process of the first or second control module. The flow meter is an optional functional module for pump control, thereby improving the control accuracy and automation of the entire liquid supply component.

[0034] To achieve the above objectives, the present invention also adopts the following technical solution:

[0035] A liquid supply system includes an inlet assembly and a outlet assembly, and further includes the aforementioned liquid supply assembly, wherein the inlet assembly is used to supply liquid to the supply pump, and the outlet assembly is used to enable the supply pump to output liquid to the outside.

[0036] Multiple on / off valves are used in the liquid inlet and liquid outlet components. These valves are controlled by a second control module. Meanwhile, the liquid intake and discharge of the supply pump are controlled by a first control module. The first and second control modules work together to control the entire liquid supply system. Since there are various types and specific structures of liquid inlet and liquid outlet components, the second control module is detachably connected to the first control module. Different second control modules can be designed, selected, and installed to match the liquid inlet and liquid outlet components to meet usage requirements and improve adaptability.

[0037] In summary, compared with the prior art, the present invention has at least the following beneficial effects:

[0038] The first control module of this utility model is used to control the liquid intake and discharge of the supply pump, and the second control module is used to control multiple on / off valves upstream and downstream of the supply pump. The two modules are modularly implemented separately, which facilitates separate management of the two. The two modules are detachably and sealedly connected by the first connector. The first control module becomes a standard part, which is dedicated to controlling the supply pump and has the most basic function of providing positive and negative pressure to the pump. The second control module becomes an adapter, which can be adjusted according to the number and function of the on / off valves. Other optional functional modules can also be set on the second control module.

[0039] Other optional functional modules for the supply pump can be configured on the second gas flow channel in the second control module to improve detection capabilities or achieve other functions without affecting the control of the supply pump by the first control module. Furthermore, the first and second control modules are independent of each other, and the first hollow flow channel is only connected to the first and second gas flow channels, not to other internal structures of the first and second control modules. This reduces heat transfer between the two control modules, especially since the second control module, which has more control components, generates more heat. This design prevents heat from the second control module from being transferred to the first control module and interfering with the normal operation of the control components in the first control module. This ensures the independent operation of the first control module and its precise control of the supply pump. At the same time, this modular design also greatly improves the maintainability and assembly efficiency of the product.

[0040] The first and second control modules work together to control the entire liquid supply system. Since there are various types and specific structures of liquid inlet and liquid outlet components, the second control module is detachably connected to the first control module through the first connector. Different second control modules can be designed, selected, and installed to match the liquid inlet and liquid outlet components to meet usage requirements and improve adaptability. Attached Figure Description

[0041] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0042] Figure 1 This is a schematic diagram of the frame of the liquid supply assembly according to an embodiment of the present utility model;

[0043] Figure 2 This is a front view of the first control module and the second control module according to an embodiment of the present utility model.

[0044] Figure 3 This is a schematic diagram of the rear structure of the first control module and the second control module according to an embodiment of the present utility model;

[0045] Figure 4 for Figure 3 Enlarged view of point A in the image;

[0046] Figure 5 This is a schematic diagram of the internal structure of the first control module and the second control module in an embodiment of the present utility model;

[0047] Figure 6 This is a cross-sectional structural diagram of the first control module and the second control module according to an embodiment of the present utility model;

[0048] Figure 7 This is a schematic diagram of the structure of the first control shell according to an embodiment of the present utility model;

[0049] Figure 8 This is a schematic diagram of the structure of the first control module in an embodiment of the present utility model;

[0050] Figure 9 This is a schematic diagram of the structure of the second control shell according to an embodiment of the present invention;

[0051] Figure 10 This is a schematic diagram of the structure of the valve control sub-shell, the second mounting plate, and the third mounting plate according to an embodiment of the present utility model;

[0052] Figure 11 This is a schematic diagram showing the insertion of the plug-in and the first connector in an embodiment of the present invention;

[0053] Figure 12 This is a schematic diagram of the framework of the liquid supply system according to an embodiment of the present invention;

[0054] Figure 13 for Figure 6 Enlarged view of point B in the image.

[0055] Explanation of reference numerals in the attached figures

[0056] 1. Supply pump; 11. Deformable component; 12. Gas chamber; 13. Liquid chamber;

[0057] 2. First control module; 21. First gas flow channel; 211. Inlet flow channel; 212. Outlet flow channel; 213. Branch channel; 22. First mounting groove; 221. Large diameter groove; 222. Small diameter groove; 223. Slot; 224. Flared groove; 23. Support component; 24. First control valve; 25. Second control valve; 26. Pump control main housing; 261. First control housing; 262. First mounting plate; 27. Pump control secondary housing;

[0058] 3. Second control module; 31. Second gas flow channel; 32. Flow meter; 33. Second mounting groove; 34. Solenoid valve; 35. Gas passage; 36. Valve control main housing; 361. Second control housing; 362. Second mounting plate; 363. Third mounting plate; 37. Valve control sub-housing; 38. Valve unit; 39. Third gas flow channel;

[0059] 4. First connector; 41. First hollow flow channel; 42. Elastic seal; 43. Large diameter section; 44. Small diameter section; 45. Sealing groove; 46. Snap-fit ​​groove; 47. Insert;

[0060] 5. Second connecting component; 51. Second hollow flow channel;

[0061] 6. Third connector;

[0062] 7. On / off valve;

[0063] 8. Liquid inlet assembly;

[0064] 9. Drainage assembly. Detailed Implementation

[0065] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0066] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0067] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0068] like Figure 1 As shown, the liquid supply assembly of this embodiment includes a supply pump 1, a first control module 2, a second control module 3, and multiple on / off valves 7 located upstream and downstream of the supply pump 1. The supply pump 1 includes a deformable component 11 and a liquid chamber 13 and a gas chamber 12 separated by the deformable component 11. The deformable component 11 can be a diaphragm, such as a PTFE diaphragm, or a bellows. In this embodiment, the deformable component 11 is a PTFE diaphragm. When gas flows into the gas chamber 12, the diaphragm 11 deforms towards the liquid chamber 13, causing the volume of the liquid chamber 13 to decrease and allowing the liquid in the liquid chamber 13 to flow out of the supply pump 1. When gas is extracted from the gas chamber 12, the diaphragm 11 deforms towards the gas chamber 12, and the volume of the liquid chamber 13 expands, allowing external liquid to flow into the liquid chamber 13. Thus, the first control module 2 can communicate with the gas chamber 12 and control the gas to enter or exit the gas chamber 12, thereby controlling the deformation direction of the diaphragm 11 to discharge or draw in the liquid.

[0069] The on / off valves 7, located upstream and downstream of the supply pump 1, are installed in the liquid flow path to facilitate the inflow or outflow of liquid from the supply pump 1. The second control module 3 controls the opening and closing of the on / off valves 7. It can control the opening and closing of a single on / off valve 7 or control multiple on / off valves 7 simultaneously. This control can be pneumatically controlled as described in the background art valve control module, where the on / off valve 7 is a pneumatic on / off valve such as a pneumatic diaphragm valve. The second control module 3 has a gas flow path and a solenoid valve. The gas flow path in the second control module 3 can be connected to a driving gas source to control the gas to enter the driving chamber of the on / off valve 7 to open the valve or to allow the gas in the driving chamber to leak out to close the valve. In some other embodiments, the on / off valve 7 can be other valves, such as an electric valve. The second control module 3 is equipped with electrical components that correspond to the circuit board for electrically controlling the electric valve. The on / off valve 7 can also be a gate valve, plug valve, or stop valve, etc., not limited to a diaphragm valve, as long as it is controlled by the second control module 3 to open and close.

[0070] In this embodiment, the on / off valve 7 is a conventional diaphragm on / off valve and is normally closed, meaning it closes the liquid flow path when the supply pump 1 is not pumping or charging air. The number of on / off valves 7 is at least two, and both are normally closed valves. Figure 1 The diagram shows one on / off valve 7 upstream of supply pump 1 and one on / off valve 7 downstream (defined by the direction of liquid flow). It's also worth noting that five, six, or seven on / off valves 7 can be installed depending on the configuration of reservoirs, filters, etc., to achieve complex liquid flow path on / off control. Specifically, the second control module 3 contains a gas flow channel and a solenoid valve corresponding to each on / off valve 7. The solenoid valve controls the opening and closing of the gas flow channel within the second control module 3, allowing for on / off communication with the driving gas source, thereby controlling the inflow and outflow of gas into the driving chamber of the on / off valve 7. When the supply pump 1 draws liquid, the solenoid valve switches to allow gas to enter the drive chamber on the piston side of the on / off valve 7. Under the gas supply from the first control module 2, the upstream on / off valve 7 pushes the piston to open, while the downstream on / off valve 7 remains normally closed. This allows the supply pump 1 to draw liquid from the upstream pool or reservoir. When the supply pump 1 discharges liquid, the solenoid valve switches to allow the gas in the drive chamber on the piston side of the on / off valve 7 to escape. Under the gas supply from the piston side of the upstream on / off valve 7, the gas releases, causing the upstream on / off valve 7 to return to its closed state. The first control module 2 then supplies gas to the downstream on / off valve 7, causing it to open and squeezing out the liquid from the liquid chamber 13 of the supply pump 1. Both the gas used for the on / off valve 7 and the gas used for the supply pump 1 can be inert gases, such as nitrogen. Furthermore, the first control module 2 and the second control module 3 can be connected to the same or different drive gas sources.

[0071] Therefore, when the supply pump 1 draws in liquid, the upstream on / off valve 7 opens and the downstream on / off valve 7 closes, allowing the liquid at the front end to approach the supply pump 1 and be drawn into the liquid chamber 13 of the supply pump 1. When the supply pump 1 discharges liquid, the upstream on / off valve 7 closes and the downstream on / off valve 7 opens, causing the liquid from the liquid chamber 13 of the supply pump 1 to be squeezed out and flow to the next station. The first control module 2 and the second control module 3 work together to control the liquid supply components to ensure normal liquid delivery. Simultaneously, the two control modules are separately configured and modularly designed, allowing for independent management. This makes the first control module 2 a standard component, specifically controlling the supply pump 1 and possessing the most basic function of providing positive and negative pressure to the pump. The control module 3 becomes an adapter, and the second control module 3 can be adjusted according to the number and function of the on / off valves 7. For example, the number of gas flow paths and solenoid valves or electronic control components in the second control module 3 can be set according to the number of on / off valves 7. Other optional functional modules for supplying pump 1 can also be set in the second control module 3. In this embodiment, the first control module 2 and the second control module 3 are arranged side by side with intervals, and are detachably connected by the first connector 4 to form a whole. The first connector 4 can be a plug, pipe, special connecting block, etc. The preferred first connector 4 is a metal pipe to improve the connection strength. Of course, in other embodiments, the first control module 2 and the second control module 3 can be directly sealed and assembled without the aid of the first connector 4. For example, a sealing element is provided on the surface of one of the first control module 2 and the second control module 3, and the surface of the other directly presses against the sealing element.

[0072] like Figures 2 to 6 As shown, in this embodiment, the first control module 2 has a first gas flow channel 21 that can be switched on and off to connect to the driving gas source, and the second control module 3 has a second gas flow channel 31 that can be connected to the gas chamber 12 of the supply pump 1. The switchable connection means that the first gas flow channel 21 is equipped with a solenoid valve. Whether the solenoid valve is energized or not controls the opening and closing of the first gas flow channel 21, thereby enabling a positive pressure gas source to deliver gas to the gas chamber 12 to provide positive pressure, or a negative pressure gas source to evacuate gas from the gas chamber 12 to provide negative pressure. The first gas flow channel 21 refers to the gas flow channel within the first control module 2 that includes both positive and negative pressure gas flow. It may include the flow channel in the connector at the top of the first control module 2, or it may not include the flow channel in the connector. Two solenoid valves are used; how the two solenoid valves work together to control the gas flow channel's on / off state will not be described further here, but will be discussed later.

[0073] To reduce the size of the first control module 2 and improve the three-dimensional space utilization of the second control module 3, a second gas flow channel 31, connected to the gas chamber 12 of the supply pump 1, is set in the second control module 3. The second gas flow channel 31 is a flow channel in the second control module 3 isolated from the related structures used to control the on / off valve 7. A first hollow flow channel 41 is provided in the first connector 4 to connect the first gas flow channel 21 and the second gas flow channel 31. In some embodiments, no other optional functional modules are configured on the second gas flow channel 31. In other embodiments, other optional functional modules can be configured on the second gas flow channel 31 and connected to the first gas flow channel 21 and the gas chamber 12 to improve detection capabilities or realize other functions of the supply pump 1. With this configuration, the optional functional modules do not affect the control of the supply pump 1 by the first control module 2, providing greater flexibility and versatility. It can also be achieved through... Figure 6 , 9 As shown in Figure 13, one end of the first gas flow channel 21 is connected to the driving gas source, and the other end is connected to the first hollow flow channel 41. One end of the second gas flow channel 31 is connected to the first hollow flow channel 41, and the other end is connected to the gas chamber 12 of the supply pump 1, such as through a pipeline.

[0074] For example, in some embodiments, the second control module 3 is also provided with a flow meter 32. As an optional functional module on the second gas flow channel 31, the flow meter 32 is connected to the second gas flow channel 31. After passing through the flow meter 32, the gas enters or flows out of the gas chamber 12. The flow meter 32 can accurately measure the amount of gas flowing into or out of the gas chamber 12, providing a reference for the specific control process of the first control module 2 or the second control module 3, thereby improving the control accuracy and automation of the entire liquid supply component.

[0075] The first control module 2 and the second control module 3 are independent of each other. The first hollow flow channel 41 is only connected to the first gas flow channel 21 and the second gas flow channel 31, and is not connected to other internal structures of the first control module 2 and the second control module 3. This reduces heat transfer between the two control modules. In particular, the second control module 3, which has more control elements, will generate more heat. This setting can prevent the heat in the second control module 3 from being transferred to the first control module 2 and interfering with the normal operation of the control elements in the first control module 2. This ensures the independent operation of the first control module 2 and the precise control of the supply pump 1.

[0076] To achieve a detachable and sealed connection between the first connector 4 and the first control module 2 and the second control module 3, the first control module 2 has a first mounting groove 22, which is connected to the first gas flow channel 21. The second control module 3 has a second mounting groove 33, which is connected to the second gas flow channel 31. Both ends of the first connector 4 are fitted with elastic sealing elements 42 and placed in the first mounting groove 22 and the second mounting groove 33 to form a seal. The first hollow flow channel 41 inside it is connected to the first gas flow channel 21 and the second gas flow channel 31. The O-rings fitted on the outer periphery of both ends of the connector 42, which are elastic sealing elements 42, respectively seal against the inner walls of the first mounting groove 22 and the second mounting groove 33, thereby achieving a sealed isolation between the first hollow flow channel 41 and the outside world and ensuring the airtightness between the first gas flow channel 21 and the second gas flow channel 31.

[0077] like Figure 7 As shown, the first mounting groove 22 is formed by recessing inward from the side of the first control module 2, as... Figure 9 As shown, the second mounting groove 33 is formed by recessing inward from the side of the second control module 3. The two sides are opposite surfaces. The recessed directions of the first mounting groove 22 and the second mounting groove 33 are opposite and they are arranged opposite to each other. The shapes of the first mounting groove 22 and the second mounting groove 33 can be the same or different. In this embodiment, both the first mounting groove 22 and the second mounting groove 33 are circular grooves, corresponding to, as Figure 7 As shown, the first connector 4 is nearly cylindrical in shape. Both ends of the first connector 4 are inserted into the first mounting groove 22 and the second mounting groove 33, respectively. In some embodiments, the ends of the first connector 4 can be inserted into the first mounting groove 22 and the second mounting groove 33 with an interference fit, or a detachable fixed connection can be achieved by relying on the friction between the elastic seal 42 and the inner wall of the groove. Of course, in other embodiments, other methods such as snap-fit ​​or threads can be used to achieve a detachable connection.

[0078] Specifically, such as Figure 6 and Figure 13As shown, the first connector 4 includes a large-diameter portion 43 in the middle and small-diameter portions 44 at both ends. The first mounting groove 22 and the second mounting groove 33 both include a large-diameter groove 221 corresponding to the large-diameter portion 43 and a small-diameter groove 222 corresponding to the small-diameter portions 44. The large-diameter portion 43 can abut against the step between the large-diameter groove 221 and the small-diameter groove 222. The large-diameter portion 43 and the large-diameter groove 221 increase the contact area between the first connector 4 and the first mounting groove 22 and the second mounting groove, improving connection stability. Simultaneously, the step abutment between the large-diameter portion 43 and the large-diameter groove 221 and the small-diameter groove 222 is used to position the first connector 4. The two ends are located at the first mounting groove 22 and the second mounting groove 33, which can reduce the impact of processing errors and assembly errors; a sealing groove 45 is provided on the small diameter portion 44, and the elastic seal 42 is placed in the sealing groove 45 and seals against the inner wall of the small diameter groove 222; the outer wall of the small diameter portion 44 and the inner wall of the small diameter groove 222 are sealed, and the small diameter portion 44 and the sealing groove 45 are closer to the first gas flow channel 21 and the second gas flow channel 31, avoiding leaving more dead zones between the outer wall of the small diameter portion 44 and the inner wall of the small diameter groove 222, and reducing the interference of gas in the gas flow channel on the elastic seal 42.

[0079] In some embodiments, the two ends of the first connector 4 are respectively inserted into the first mounting groove 22 and the second mounting groove 33. If the dimensions do not match, the first control module 2 and the second control module 3 may still separate along the axial direction of the first hollow flow channel 41, thereby causing the sealing connection between the first connector 4 and the first gas flow channel 21 and the second gas flow channel 31 to fail. Preferably, in this embodiment, as Figure 4 , Figure 6 , Figure 13 As shown, the large-diameter portion 43 includes a snap-fit ​​groove 46. A slot 223 is provided on the inner sidewall of the large-diameter groove 221. One end of the slot 223 protrudes from the sidewall of the first control module 2 and the second control module 3. A plug 47 is inserted into the slot 223 and snaps into the snap-fit ​​groove 46 to fix the first connector 4 to the first control module 2 and the second control module 3 respectively. That is, the plug 47 cooperates with the snap-fit ​​groove 46, the slot 223 and the first connector 4 to limit the first connector 4 along the axial direction of the first hollow flow channel 41, preventing the end of the first connector 4 from moving relative to the first control module 2 or the second control module 3. This improves the connection strength between the first connector 4 and the first control module 2 and the second control module 3, as well as the fit of the spring seal with the first mounting groove 22 or the second mounting groove 33, thus improving the sealing performance. Furthermore, removing the plug 47 allows both ends of the first connector 4 to be removed from the first mounting groove 22 and the second mounting groove 33, making installation and disassembly more convenient.

[0080] Furthermore, such as Figure 11As shown, slot 223 is a U-shaped groove with two ends communicating with large diameter groove 221, plug 47 is a U-shaped piece, and snap-fit ​​groove 46 is an annular groove; the U-shaped plug 47 applies more balanced force to both sides of the first connector 4 in the circumferential direction, avoiding the end of the first connector 4 from being skewed in the first mounting groove 22 or the second mounting groove 33, which would cause one side of the elastic seal 42 to be over-compressed and the other side to be over-loosened, thereby improving the stability and sealing of both ends of the first connector 4 in the first mounting groove 22 and the second mounting groove 33.

[0081] like Figure 8 As shown, the slot 223 is provided with a flared groove 224 on one side of the side wall of the first control module 2 and the second control module 3. The function of the flared groove 224 is to facilitate the insertion of fingers or clamps into the slot 223 to contact the plug-in 47, so as to pull out the plug-in 47 with less effort, which is beneficial to improving the efficiency of disassembly and assembly of the first connector 4 and the first control module 2 or the second control module 3.

[0082] like Figure 7 As shown, the first gas flow channel 21 includes an inlet flow channel 211 and an outlet flow channel 212 connected to the driving gas source. Specifically, the inlet flow channel 211 is connected to a positive pressure gas source, and the outlet flow channel 212 is connected to a negative pressure gas source. There is also a branch channel 213 connected to the inlet flow channel 211 and the outlet flow channel 212. The other end of the branch channel 213 is connected to the second gas flow channel 31. The first control module 2 also includes a first control valve 24 and a second control valve 25, which are used to connect the inlet flow channel 211 and the branch channel 213 and to connect the outlet flow channel 212 and the branch channel 213, respectively, so as to control the gas to flow into the second gas flow channel 31 and the gas chamber 12 or to flow out of the gas chamber 12. The first control valve 24 and the second control valve 25 are both solenoid valves.

[0083] The first control module 2 includes a pump control main housing 26 and a pump control sub-housing 27 covering a first surface of the pump control main housing 26 in the thickness direction. The pump control main housing 26 and the pump control sub-housing 27 form a receiving cavity for accommodating a first control valve 24 and a second control valve 25. A first gas flow channel 21 is located inside the pump control main housing 26. Specifically, the pump control main housing 26 includes a first control housing 261 and a first mounting plate 262 that is sealed to the first control housing 261. The first gas flow channel 21 is at least partially formed inside the first control housing 261 and between the first control housing 261 and the first mounting plate 262. The first control valve 24 and the second control valve 25 are mounted on the back of the first mounting plate 262 away from the first control housing 261 and are located between the first mounting plate 262 and the pump control sub-housing 27.

[0084] The second control module 3 includes multiple solenoid valves 34 that control each of the on / off valves 7, and a gas channel 35. The gas channel 35 can be connected to a driving gas source. Specifically, the gas channel 35 is connected to a positive pressure gas source and is switched by the solenoid valves 34 to open or close, so as to introduce the gas from the positive pressure gas source into the driving chamber of the pneumatic on / off valve 7. It can also switch to discharge the gas in the driving chamber of the pneumatic on / off valve 7 through the gas channel 35 to realize the opening or closing of the on / off valve 7. Similarly, the second control module 3 includes a valve control main housing 36 and a valve control sub-housing 37 covering a first surface in the thickness direction of the valve control main housing 36. The valve control main housing 36 and the valve control sub-housing 37 form a receiving cavity for accommodating a plurality of solenoid valves 34. The second gas flow channel 31 is located inside the valve control main housing 36. Specifically, the valve control main housing 36 includes a second control housing 361 and a second mounting plate 362 that is sealed to the second control housing 361. The second gas flow channel 31 is partially formed inside the second control housing 361 and between the second control housing 361 and the second mounting plate 362. The valve control main housing 36 also includes a third mounting plate 363 that is sealed to the second control housing 361. A gas passage 35 is formed inside the second control housing 361 and between the second control housing 361 and the third mounting plate 363. The plurality of solenoid valves 34 are mounted on the side of the third mounting plate 363 facing away from the second control housing 361.

[0085] like Figure 7 and Figure 9 As shown, the first mounting groove 22 is located on the side of the pump control main housing 26, and the second mounting groove 33 is located on the side of the valve control main housing 36. The first mounting groove 22 and the second mounting groove 33 are arranged opposite to each other. The first gas flow channel 21 and the second gas flow channel 31 do not require external pipe fittings, and the flow channels themselves have higher sealing performance. The first mounting groove 22 is directly connected to the first gas flow channel 21, and the second mounting groove 33 is directly connected to the second gas flow channel 31. No additional joints are required. The gas flow channels can be sealed and isolated from the outside world using only the elastic sealing element 42, ensuring the airtightness of the gas flow channels.

[0086] like Figure 5-7As shown, the second control module 3 includes a valve unit 38 and a third gas flow channel 39 connected to the valve unit 38. The valve unit 38 controls the opening and closing of the third gas flow channel 39. The first connecting member 4 has a second connecting member 5 on one side in the height direction. The second connecting member 5 has a second hollow flow channel 51 to connect the first gas flow channel 21 and the third gas flow channel 39. Thus, the valve unit 38 and the third gas flow channel 39 serve as optional functional modules in the first control module 2 for controlling the inflow or outflow of gas into the gas chamber 12. The solenoid valve in control module 2 is closed and not used for other purposes (such as stress relief of the diaphragm of the supply pump), so that the third gas flow channel 39 is connected to the driving gas source. The valve unit 38 opens the third gas flow channel 39, so that gas flows into or out of the gas chamber 12 through the third gas flow channel 39, part of the first gas flow channel 21 and the second gas flow channel 31. The valve unit 38 and the third gas flow channel 39 in the second control module 3 do not interfere with each other and can be added or not added in specific scenarios, which reflects the adaptability of the second control module 3.

[0087] like Figure 9 As shown, the third gas flow channel 39 is formed inside the second control housing 361 and communicates with the first gas flow channel 21 through the second hollow flow channel 51 inside the second connector 5. The structure of the second connector 5 is the same as that of the first connector 4, and its connection method with the first control module 2 and the second control module 3 is also the same as that of the first connector 4, which will not be described again here.

[0088] As a preferred option, such as Figure 3 and Figure 6 As shown, the second connector 5 is positioned above the first connector 4, and the third connector 6 is positioned below the first connector 4. The first connector 4 is located above the height midline of the pump control main housing 26 and the valve control main housing 36, and the third connector 6 is located below the height midline of the pump control main housing 26 and the valve control main housing 36. Thus, the first connector 4, the second connector 5, and the third connector 6 are spaced apart in the height direction, forming multiple connection points. These points provide support for the pump control main housing 26 and the valve control main housing 36 in the height direction, maintaining the distance between them and preventing the first control module 2 and the second control module 3 from rotating in the height direction with the first connector 4 as the hinge fulcrum. This also ensures the connection and sealing functions of the first connector 4 and the second connector 5 for the pump control main housing 26 and the valve control main housing 36, respectively.

[0089] The structure of the third connector 6 can be the same as that of the first connector 4, or it can be without a hollow flow channel and only serve a connecting function. Its connection method with the first control module 2 and the second control module 3 is also the same as that of the first connector 4, and will not be described again here.

[0090] Since the first connector 4 needs to detachably connect the first control module 2 and the second control module 3, and simultaneously achieve a sealed connection between the first gas flow channel 21 and the second gas flow channel 31, the stability of the first connector 4 is crucial. If either the first control module 2 or the second control module 3 is subjected to force and becomes misaligned or offset, the first connector 4 may rotate and contract at the connection position with the first mounting groove 22 or the second mounting groove 33, excessively or excessively compressing the elastic seal 42, disrupting the compression ratio of the elastic seal 42 in the gas flow channel, and causing leakage. To further improve the connection stability between the first control module 2 and the second control module 3, such as... Figure 2 and Figure 3 As shown, a support member 23 is provided between the first control module 2 and the second control module 3. The red square represents the support member 23. The support member 23 is located on one side of the first connecting member 4 in the horizontal direction. That is, the support member 23 and part of the first connecting member 4 are arranged side by side between the first control module 2 and the second control module 3. The support member 23 is also fixedly connected to the first control module 2 and the second control module 3 to maintain the distance between the first control module 2 and the second control module 3, prevent the first control module 2 and the second control module 3 from rotating with the first connecting member 4 as the hinge fulcrum, and ensure the sealing between the first gas flow channel 21 and the second gas flow channel 31.

[0091] The support member 23 may be made of rigid plastic material, preferably rigid sponge, to be suitable for the first control module 2 and the second control module 3 with different spacing; the support member 23 is bonded and fixed to the first control module 2 and the second control module 3.

[0092] like Figure 2 and Figure 3 As shown, the first connector 4 connects the pump control main housing 26 and the valve control main housing 36 respectively. The support 23 is located on the horizontal side of the first connector 4 and is fixedly connected to the pump control sub-housing 27 and the valve control sub-housing 37 respectively. This maintains the distance between the pump control main housing 26 and the valve control main housing 36, and between the pump control sub-housing 27 and the valve control sub-housing 37, preventing the first control module 2 and the second control module 3 from rotating in the horizontal direction with the first connector 4 as the hinge fulcrum. At the same time, the support 23 extends from the top to the bottom of the pump control sub-housing 27 and the valve control sub-housing in the height direction, preventing the first control module 2 and the second control module 3 from rotating in the height direction with the first connector 4 as the hinge fulcrum. This achieves the purpose of fixing the first control module 2 and the second control module 3 in all directions, and the first connector 4 and the support 23 do not interfere with each other. The support 23 can be a flat plate structure, which simplifies the overall structure and assembly process of the support 23 and improves the assembly efficiency of the liquid supply assembly.

[0093] like Figure 12As shown, in one specific embodiment, a liquid supply system is disclosed, including an inlet assembly 8 and a drain assembly 9, and also including the aforementioned liquid supply assembly. The inlet assembly 8 is used to supply liquid to the supply pump 1, and the drain assembly 9 is used to enable the supply pump 1 to output liquid. The inlet assembly 8 and the drain assembly 9 are connected to multiple on / off valves 7, which are controlled by a second control module 3 to control the liquid flow direction in the inlet assembly 8 and the drain assembly 9. The inlet assembly 8 may include an inlet pipe, a reservoir, a filter, etc., and the drain assembly may include a drain pipe, a nozzle, etc. Simultaneously, the inlet and outlet of the supply pump 1 are controlled by a first control module 2. The first control module 2 and the second control module 3 work together to control the entire liquid supply system. Since there are various types and specific structures of the inlet assembly 8 and the drain assembly 9, the second control module 3 is detachably connected to the first control module 2 via a first connector 4. Different second control modules 3 can be selected for the inlet assembly 8 and the drain assembly 9 to meet usage requirements, improving adaptability.

[0094] Finally, it should be added that, Figure 1 and Figure 12 The liquid supply components and liquid supply system are illustrated in simple terms, especially... Figure 1 The dashed lines within the first control module 2 represent at least a hidden, invisible portion of the first gas flow channel 21 (which may include a flow channel with or without a connector), while the dashed lines outside the module represent pipes such as hoses that are airtightly connected to the gas chamber 12 of the supply pump 1 and the drive chamber of the pneumatic diaphragm valve 7, and do not represent hidden, invisible features.

[0095] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A liquid supply assembly, characterized in that: It includes a supply pump (1), a first control module (2), a second control module (3), and a plurality of on-off valves (7) located upstream and downstream of the supply pump (1), wherein the second control module (3) is capable of controlling the opening and closing of the on-off valves (7); The supply pump (1) includes a deformable component (11) and a liquid chamber (13) and a gas chamber (12) separated by the deformable component (11). The first control module (2) is able to communicate with the gas chamber (12) and control the gas to enter or flow out of the gas chamber (12), and control the movement of the deformable component (11) to reduce or expand the volume of the liquid chamber (13) to discharge or draw in liquid. The first control module (2) has a first gas flow channel (21) that can be switched on and off to connect to the driving gas source, and the second control module (3) has a second gas flow channel (31) that can be connected to the gas chamber (12); The first control module (2) and the second control module (3) are separately configured and detachably sealed to connect the first gas flow channel (21) and the second gas flow channel (31).

2. The liquid supply assembly as claimed in claim 1, characterized in that, The first control module (2) and the second control module (3) are spaced apart and are detachably sealed together by a first connector (4). The first connector (4) has a first hollow channel (41) that connects the first gas channel (21) and the second gas channel (31). The first control module (2) has a first mounting groove (22) and the second control module (3) has a second mounting groove (33). The two ends of the first connector (4) are respectively fitted with elastic sealing elements (42) and placed in the first mounting groove (22) and the second mounting groove (33) to form a seal.

3. The liquid supply assembly as described in claim 2, characterized in that, A support member (23) is provided between the first control module (2) and the second control module (3). The support member (23) is located on one side of the first connector (4) in the horizontal direction and is fixedly connected to the first control module (2) and the second control module (3) respectively.

4. The liquid supply assembly as claimed in claim 3, characterized in that, The first control module (2) includes a pump control main housing (26) and a pump control sub-housing (27) covering a first surface in the thickness direction of the pump control main housing (26). The second control module (3) includes a valve control main housing (36) and a valve control sub-housing (37) covering a first surface in the thickness direction of the valve control main housing (36). The first mounting groove (22) is provided on the side of the pump control main housing (26), and the second mounting groove (33) is provided on the side of the valve control main housing (36). The first mounting groove (22) and the second mounting groove (33) are arranged opposite to each other. The first gas flow channel (21) is located inside the pump control main housing (26), and the second gas flow channel (31) is located inside the valve control main housing (36).

5. The liquid supply assembly as claimed in claim 4, characterized in that, The support member (23) is located between and fixed to the pump control sub-shell (27) and the valve control sub-shell (37), and extends from the top to the bottom of the pump control sub-shell (27) and the valve control sub-shell (37) along the height direction.

6. The liquid supply assembly as claimed in claim 4, characterized in that, The deformable component (11) is a diaphragm. The second control module (3) is provided with a valve unit (38) and a third gas flow channel (39) communicating with the valve unit (38). The valve unit (38) is used to control the opening and closing of the third gas flow channel (39). The first connector (4) is provided with a second connector (5) on one side in the height direction. The second connector (5) has a second hollow flow channel (51) to connect the first gas flow channel (21) and the third gas flow channel (39).

7. The liquid supply assembly as claimed in claim 6, characterized in that, The second connector (5) is positioned above the first connector (4), and a third connector (6) is provided below the first connector (4). The first connector (4) is located above the height midline of the pump control main housing (26) and the valve control main housing (36), and the third connector (6) is located below the height midline of the pump control main housing (26) and the valve control main housing (36).

8. The liquid supply assembly as claimed in claim 4, characterized in that, The first connector (4) includes a large diameter portion (43) located in the middle and small diameter portions (44) at both ends. The first mounting groove (22) and the second mounting groove (33) each include a large diameter groove (221) corresponding to the large diameter portion (43) and a small diameter groove (222) corresponding to the small diameter portion (44). The large diameter portion (43) can abut against the step between the large diameter groove (221) and the small diameter groove (222). The small diameter portion (44) is provided with a sealing groove (45). The elastic seal (42) is placed in the sealing groove (45) and abuts against the inner wall of the small diameter groove (222).

9. The liquid supply assembly as claimed in claim 8, characterized in that, The large diameter portion (43) includes a snap-fit ​​groove (46), and a slot (223) is provided on the inner side wall of the large diameter groove (221). One end of the slot (223) is exposed on the side wall of the pump control main housing (26) and the valve control main housing (36). A plug-in (47) is inserted into the slot (223), and the plug-in (47) engages with the snap-fit ​​groove (46) to fix the first connector (4) to the pump control main housing (26) and the valve control main housing (36) respectively.

10. The liquid supply assembly as claimed in claim 9, characterized in that, The slot (223) is a U-shaped groove with two ends communicating with the large-diameter groove (221); the plug (47) is a U-shaped piece; and the snap-fit ​​groove (46) is an annular groove; and / or The slot (223) is provided with a flared groove (224) on one side of the side wall of the pump control main housing (26) and the valve control main housing (36).

11. The liquid supply assembly as claimed in claim 1, characterized in that, The second control module (3) is also equipped with a flow meter (32), which is connected to the second gas flow channel (31).

12. A liquid supply system, characterized in that, It includes an inlet assembly (8) and a drain assembly (9), and further includes a liquid supply assembly as described in any one of claims 1 to 11, wherein the inlet assembly (8) is used to supply liquid to the supply pump (1), and the drain assembly (9) is used to enable the supply pump (1) to output liquid to the outside.

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