A gas humidity control system

Abstract

The utility model discloses a gas humidity control system in the technical field of silicon polycrystal preparation, which aims at solving the problem that the gas humidity of humidification cannot be controlled in the prior art. The system comprises: a moisture supply unit, which comprises a water vapor generating device, a water vapor pipeline connected with the water vapor generating device, and a water vapor regulating valve arranged on the water vapor pipeline; a gas supply unit for providing nitrogen; a mixer provided with a first inlet and a second inlet, the first inlet of the mixer being connected with the gas supply unit, and the second inlet of the mixer being connected with the water vapor pipeline; a humidity monitoring unit comprising a nitrogen humidity meter arranged at the output end of the mixer; and a feedback control unit, the signal input end of which is connected with the nitrogen humidity meter, and the signal output end of which is connected with the water vapor regulating valve. The utility model can accurately control the gas humidity.

Description

Technical Field

[0001] This utility model relates to a gas humidity control system and belongs to the field of polycrystalline silicon preparation technology. Background Technology

[0002] In gas handling processes, such as in the processing of polycrystalline silicon or granular polycrystalline silicon, humidified purge gases or clean gases are often used to remove dust from the material surface. Existing technologies offer various solutions for using humidified gases to purge, remove dust from granular or lumpy materials, or regulate indoor humidity. However, these methods focus on the introduction and purging of the gas, with significant shortcomings in controlling the humidity of the gas itself. While some solutions involve gas humidification, they lack precise means to adjust the humidity of the humidified gas, resulting in poor humidity stability and failing to meet the needs of processes requiring precise gas humidity control. Other solutions attempt to regulate humidity by mixing dry and wet gases, but this is insufficient in achieving wide-range, uniform, and stable humidity control, and may also be accompanied by low energy efficiency. Therefore, there is a need for precise, stable, and efficient control of gas humidity in existing technologies. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a gas humidity control system that can control the amount of water vapor introduced by analyzing the humidity of the gas, thereby controlling the gas humidity and controlling the power of water vapor heating by controlling the water vapor flow rate, thus achieving the purpose of energy saving.

[0004] To solve the above-mentioned technical problems, this utility model is implemented using the following technical solution: A gas humidity control system, characterized in that it comprises: A moisture supply unit includes a steam generator, a steam pipe connected to the steam generator, and a steam regulating valve installed on the steam pipe. A gas supply unit is used to supply nitrogen. A mixer having a first inlet and a second inlet, the first inlet of the mixer being connected to the gas supply unit, and the second inlet of the mixer being connected to the steam pipe; A humidity monitoring unit, which includes a nitrogen hygrometer disposed at the output of the mixer; The feedback control unit has its signal input terminal connected to the nitrogen hygrometer and its signal output terminal connected to the water vapor regulating valve.

[0005] Preferably, the steam generator is provided with a water inlet and a steam outlet. The water inlet of the steam generator is connected to a high-purity water pipeline through a high-purity water pipeline valve, and the steam outlet of the steam generator is connected to the steam pipeline through a steam regulating valve.

[0006] Preferably, the steam pipe is equipped with a steam flow meter for measuring the steam flow rate.

[0007] Preferably, the steam generator is equipped with a high-purity water level gauge for monitoring its internal liquid level.

[0008] Preferably, the moisture supply unit further includes an energy supply device connected to the steam generator.

[0009] Preferably, the gas supply unit includes a first nitrogen pipeline, a nitrogen pipeline valve, and a nitrogen flow meter; the nitrogen pipeline valve and the nitrogen flow meter are sequentially arranged on the first nitrogen pipeline.

[0010] Preferably, the mixer has a venturi structure.

[0011] Preferably, the outlet of the mixer is connected to a storage tank via a third nitrogen pipeline.

[0012] Preferably, the outlet of the storage tank is connected to a downstream user device via a second nitrogen pipeline to distribute the humidified gas from the mixer downstream.

[0013] Compared with the prior art, the beneficial effects achieved by this utility model are as follows: This invention utilizes a closed-loop control system comprised of a moisture supply unit, a gas supply unit, a mixer, a humidity monitoring unit, and a feedback control unit to achieve precise and automatic adjustment of gas humidity, effectively solving the problems of poor gas humidity stability and insufficient control precision in existing technologies.

[0014] The system employs a Venturi structure as the mixer. When nitrogen passes through, the negative pressure generated by the nitrogen automatically draws in water vapor from the steam pipe. This structure eliminates the need for additional moving equipment, avoiding the energy consumption and maintenance issues associated with using moving equipment such as steam pumps or compressors. Furthermore, its static mixing characteristic fundamentally eliminates the risk of lubricant or external impurity leakage due to wear of seals in moving equipment, effectively ensuring the purity of downstream products. The system's steam flow meter, high-purity water level gauge, and nitrogen flow meter enable real-time monitoring of key parameters, ensuring the reliability and continuity of system operation.

[0015] In addition, the system can be flexibly configured according to actual needs. When a single steam generator corresponds to a single user, the storage tank can be eliminated, which reduces equipment costs and system complexity while ensuring control accuracy. Ultimately, it achieves efficient, energy-saving and stable gas humidity control under a wide range of humidity conditions. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the gas humidity control system provided by this utility model; Figure 2 This is a schematic diagram of the structure of the tankless gas humidity control system provided by this utility model. In the diagram: 1. Steam generator; 2. Energy supply device; 3. Mixer; 4. Storage tank; 13. High-purity water pipeline valve; 14. Steam pipeline; 15. Steam regulating valve; 16. Steam flow meter; 31. First nitrogen pipeline; 32. Nitrogen pipeline valve; 33. Nitrogen flow meter; 34. Third nitrogen pipeline; 35. Nitrogen hygrometer; 41. Second nitrogen pipeline. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and should not be used to limit the scope of protection of the present invention.

[0018] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0019] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Example 1

[0020] See Figure 2 A gas humidity control system, comprising: A moisture supply unit includes a steam generator 1, a steam pipe 14 connected to the steam generator 1, and a steam regulating valve 15 installed on the steam pipe 14. Gas supply unit for providing dry nitrogen; The mixer 3 has a first inlet and a second inlet. The first inlet of the mixer 3 is connected to the gas supply unit, and the second inlet of the mixer 3 is connected to the water vapor pipe 4. The mixer 3 can adopt a Venturi structure, which uses the negative pressure generated by the Venturi effect to naturally draw in water vapor and mix it with nitrogen.

[0021] A humidity monitoring unit, which includes a nitrogen hygrometer 35 disposed at the output of the mixer 3; The feedback control unit has its signal input terminal connected to a nitrogen hygrometer 35 and its signal output terminal connected to a water vapor regulating valve 15 to form a closed-loop control circuit.

[0022] In summary, this system achieves precise control over the humidity of the output gas by real-time monitoring of the humidity of the mixed gas and adjusting the amount of water vapor injected accordingly. Compared to existing technologies, it not only solves the problem of poor gas humidity stability but also achieves energy-saving effects through the linkage control of flow rate and heating power. Example 2

[0023] See Figure 2 This example provides a gas humidity control system, including: a humidity supply unit, a gas supply unit, a mixer 3, a humidity monitoring unit, and a feedback control unit.

[0024] The water vapor generator 1 in the moisture supply unit is equipped with a water inlet and a steam outlet. The water inlet is connected to the high-purity water pipeline 12 through the high-purity water pipeline valve 13 to receive high-purity water, and the steam outlet is connected to the water vapor pipeline 14 through the water vapor regulating valve 15 to output water vapor.

[0025] To achieve more precise control over the steam flow rate, a steam flow meter 16 is installed on the steam pipe 14 to measure the steam flow rate. Simultaneously, the steam generator 1 itself is also equipped with a high-purity water level gauge 11 for real-time monitoring of its internal liquid level.

[0026] In a further embodiment of the present invention, the moisture supply unit is also equipped with an energy supply device 2, which is connected to the steam generator 1 to provide it with the energy required for vaporization.

[0027] In a further embodiment of the present invention, the gas supply unit includes a first nitrogen pipeline 31, a nitrogen pipeline valve 32, and a nitrogen flow meter 33. The nitrogen pipeline valve 32 and the nitrogen flow meter 33 are sequentially arranged on the first nitrogen pipeline 31 for regulating and measuring the input nitrogen.

[0028] The mixer 3 adopts a venturi structure. Its second inlet is connected to the water vapor pipe 14 of the humidification supply unit, and its first inlet is connected to the first nitrogen pipe 31 of the gas supply unit. The negative pressure generated by the venturi effect draws water vapor from the pipe 14 and mixes it thoroughly with the nitrogen from the pipe 31 inside the mixer to form humidified nitrogen.

[0029] join Figure 1 The outlet of mixer 3 is connected to storage tank 4 via a third nitrogen pipeline 34, which transports the humidified gas to storage tank 4 for temporary storage. Simultaneously, a nitrogen hygrometer 35 is installed at the output of mixer 3 to monitor the humidity of the humidified nitrogen in real time. This hygrometer 35 feeds back the detected humidity signal to water vapor regulating valve 15. By automatically adjusting the opening of this valve, the amount of water vapor introduced is precisely controlled, thus forming a closed-loop control to achieve stable and precise regulation of the final nitrogen humidity.

[0030] Finally, the humidifying gas in storage tank 4 is then distributed to downstream user units through the second nitrogen pipeline 41, thereby ensuring that the entire system can continuously provide process gas with precise and controllable humidity.

[0031] It should be noted that, according to system configuration requirements, when one steam generator 1 corresponds to one downstream user device, the storage tank 4 can be eliminated. In this case, the outlet of the mixer 3 is directly connected to the user device through a pipeline, which simplifies the system structure while still ensuring the accuracy of humidity control.

[0032] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A gas humidity control system, characterized in that, include: The moisture supply unit includes a steam generator (1), a steam pipe (14) connected to the steam generator (1), and a steam regulating valve (15) installed on the steam pipe (14). Gas supply unit for supplying nitrogen; A mixer (3) is provided with a first inlet and a second inlet. The first inlet of the mixer (3) is connected to the gas supply unit, and the second inlet of the mixer (3) is connected to the steam pipe (14). A humidity monitoring unit, which includes a nitrogen hygrometer (35) disposed at the output end of the mixer (3); The feedback control unit has its signal input terminal connected to the nitrogen hygrometer (35) and its signal output terminal connected to the water vapor regulating valve (15).

2. The gas humidity control system according to claim 1, characterized in that, The steam generator (1) is provided with a water inlet and a steam outlet. The water inlet of the steam generator (1) is connected to the high-purity water pipeline (12) through the high-purity water pipeline valve (13), and the steam outlet of the steam generator (1) is connected to the steam pipeline (14) through the steam regulating valve (15).

3. The gas humidity control system according to claim 2, characterized in that, The steam pipe (14) is equipped with a steam flow meter (16) for measuring the steam flow rate.

4. The gas humidity control system according to claim 1, characterized in that, The steam generator (1) is equipped with a high-purity water level gauge (11) for monitoring its internal liquid level.

5. The gas humidity control system according to claim 1, characterized in that, The moisture supply unit also includes an energy supply device (2), which is connected to the steam generator (1).

6. The gas humidity control system according to claim 1, characterized in that, The gas supply unit includes a first nitrogen pipeline (31), a nitrogen pipeline valve (32), and a nitrogen flow meter (33); the nitrogen pipeline valve (32) and the nitrogen flow meter (33) are sequentially arranged on the first nitrogen pipeline (31).

7. The gas humidity control system according to claim 1, characterized in that, The mixer (3) has a venturi structure.

8. The gas humidity control system according to claim 7, characterized in that, The outlet of the mixer (3) is connected to the storage tank (4) via a third nitrogen pipeline (34).

9. The gas humidity control system according to claim 8, characterized in that, The outlet of the storage tank (4) is connected to the downstream user device via a second nitrogen pipeline (41) to distribute the humidified gas from the mixer (3) downstream.

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