A cleaning device
By designing an automated cleaning device, utilizing a handling component and multiple cleaning components, the problem of multiple loading and unloading processes in the cleaning of indium phosphide substrates was solved, achieving a highly efficient cleaning process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- VITAL MICRO-ELECTRONICS TECH CO LTD
- Filing Date
- 2025-08-15
- Publication Date
- 2026-07-24
AI Technical Summary
In the existing technology, the cleaning process of indium phosphide substrates requires multiple loading and unloading operations, resulting in a lengthy cleaning process and low efficiency.
A cleaning device was designed, comprising a loading component, a unloading component, multiple cleaning components, and a conveying component. The conveying component uses a conveying rod and an adsorber to achieve automated handling and position change of the substrate, reducing the loading and unloading steps. Multiple cleaning components are used to clean the substrate sequentially with different cleaning solutions.
The cleaning process has been simplified, cleaning efficiency has been improved, and multiple loading and unloading steps have been reduced, resulting in a highly efficient multi-stage cleaning process.
Smart Images
Figure CN224556210U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor substrate manufacturing technology, and in particular to a cleaning device. Background Technology
[0002] Indium phosphide substrate is a semiconductor substrate with indium phosphide as its core material. It is one of the key basic materials for the manufacture of microelectronic and optoelectronic devices and is widely used in fields such as high-frequency and high-power devices, optical fiber communication, wireless transmission, and radio frequency devices in radio astronomy.
[0003] In the indium phosphide substrate processing, before or after certain steps (such as after polishing, before photolithography, or before epitaxial growth), the substrate needs to be cleaned with multiple cleaning solutions to remove various physical residues (such as abrasive particles and polishing pad debris) and chemical residues (such as organic binders and metal ions) to ensure the smooth progress of subsequent processes. Typically, this multi-stage cleaning process requires multiple cleaning units, with the following steps: the substrate is loaded into the first cleaning unit, cleaned with the first cleaning solution, unloaded, then loaded into the second cleaning unit, cleaned with the second cleaning solution, and unloaded again, until the substrate has been cleaned with all the specified cleaning solutions. This cleaning process involves multiple loading and unloading of the substrate, making the process lengthy and resulting in low cleaning efficiency. Utility Model Content
[0004] The purpose of this invention is to provide a cleaning device to solve the technical problem that in the cleaning process using multiple cleaning solutions, the substrate needs to be loaded and unloaded multiple times, making the cleaning process very lengthy and resulting in low cleaning efficiency.
[0005] To achieve the above objectives, this utility model provides a cleaning device, including a feeding assembly, a discharging assembly, multiple cleaning assemblies, and multiple conveying assemblies;
[0006] The feeding component is located in front of the unloading component, and a plurality of conveying components are spaced apart between the feeding component and the unloading component. A cleaning component is provided between any two conveying components.
[0007] The feeding assembly is used to place the substrate wafer, and the unloading assembly is used to place the substrate wafer;
[0008] The cleaning assembly includes a cleaning container and an active cleaner. The top surface of the cleaning container is provided with a cleaning tank. The active cleaner is used to spray cleaning liquid into the cleaning tank to clean the substrate located in the cleaning tank.
[0009] The transport assembly includes a transport platform, a transport rod, a transport cylinder, an adsorber, and a transport driver. The transport rod is rotatably mounted on the transport platform. The cylinder body of the transport cylinder is mounted on the end of the transport rod away from the transport platform and is positioned downwards. The adsorber is mounted on the end of the rod body of the transport cylinder away from the cylinder body. The transport driver is connected to the transport rod and is used to drive the transport rod to rotate. The rotation of the transport rod enables the adsorber to correspond to the feeding assembly, the unloading assembly, or the cleaning tank.
[0010] Optionally, the transport assembly includes two adsorbers and two transport cylinders. The transport rod is disposed on the top surface of the transport platform, with its middle section connected to the transport platform. Both ends of the transport rod protrude horizontally outward from the outside of the transport platform. The two transport cylinders are respectively disposed at both ends of the transport rod, and the two adsorbers are arranged one-to-one with the transport cylinders.
[0011] Optionally, the transport platform has an installation cavity, and the outer side of the transport platform has a maintenance port that extends through the installation cavity. The transport driver is installed on the top surface of the installation cavity.
[0012] Optionally, the feeding assembly includes a feeding seat, a first feeding guide rail, a second feeding guide rail, a first feeding driver, and a second feeding driver. The second feeding guide rail is slidably disposed on the top surface of the first feeding guide rail in the front-to-back direction. The first feeding driver is mounted on the first feeding guide rail and connected to the second feeding guide rail. The first feeding driver is used to drive the second feeding guide rail to move in the front-to-back direction. The feeding seat is slidably disposed on the rear side of the second feeding guide rail in the up-down direction. The second feeding driver is mounted on the second feeding guide rail and connected to the feeding seat. The second feeding driver is used to drive the feeding seat to move in the up-down direction. The feeding seat has a feeding cavity inside. The top surface of the feeding seat has a first through hole penetrating into the feeding cavity. The rear side of the feeding seat has a feeding hole penetrating into the feeding cavity. The two side walls of the feeding cavity in the left-to-right direction are provided with first slots. The feeding cavity has multiple first slots spaced apart in the up-down direction relative to the left-to-right cavity walls. The first slots and the first through holes communicate with the feeding holes.
[0013] Optionally, the feeding assembly includes a feeding seat, a first feeding guide rail, a second feeding guide rail, a first feeding driver, and a second feeding driver. The second feeding guide rail is slidably disposed on the top surface of the first feeding guide rail in the front-to-back direction. The first feeding driver is mounted on the first feeding guide rail and connected to the second feeding guide rail. The first feeding driver is used to drive the second feeding guide rail to move in the front-to-back direction. The feeding seat is slidably disposed on the rear side of the second feeding guide rail in the up-down direction. The second feeding driver is mounted on the second feeding guide rail and connected to the feeding seat. The second feeding driver is used to drive the feeding seat to move in the up-down direction. The feeding seat has a feeding cavity inside. The top surface of the feeding seat has a second through hole penetrating into the feeding cavity. The rear side of the feeding seat has a feeding hole penetrating into the feeding cavity. The two side walls of the feeding cavity in the left-to-right direction are provided with first slots. The feeding cavity has multiple first slots spaced apart in the up-down direction relative to the left-to-right cavity walls. The first slots and the second through holes communicate with the feeding holes.
[0014] Optionally, the cleaning assembly further includes an adsorption platform and a rotation driver. The adsorption platform is disposed in the cleaning tank, and the top surface of the adsorption platform is used to connect to the substrate. The rotation driver is mounted on the bottom surface of the cleaning container and connected to the adsorption platform. The rotation driver is used to drive the adsorption platform to rotate.
[0015] Optionally, the cleaning assembly further includes a plurality of guide posts, which are disposed on the top surface of the adsorption platform around the axis of the adsorption platform. The top of each guide post has a guide portion along its edge, and the guide portion is chamfered or rounded.
[0016] Optionally, the cleaning tank is provided with a plurality of drainage holes around the adsorption platform, and the drainage holes extend through the cleaning container in the vertical direction.
[0017] Optionally, the active cleaner is located on one side of the cleaning container in the left-right direction. The active cleaner includes a nozzle, a movable plate, and a cleaning driver. The nozzle is disposed downward on the movable plate, and the cleaning driver is connected to the movable plate. The cleaning driver is used to drive the movable plate to move in the left-right direction, so that the nozzle can move to directly above the cleaning tank, and so that the nozzle can move to a position away from the cleaning container.
[0018] Optionally, it includes four of the cleaning components and five of the transport components.
[0019] Compared with the prior art, the cleaning device implemented in this utility model has the following advantages:
[0020] In this cleaning device, the loading component is used to place the unwashed substrate wafers, and the unloading component is used to place the washed substrate wafers. The loading and unloading components are located on opposite sides in the front-to-back direction, serving as the start and end points of the cleaning process, respectively. Within the cleaning components, a cleaning container is provided with a cleaning tank for loading the substrate wafers. An active cleaner sprays cleaning fluid into the cleaning tank to clean the substrate wafers within it. Furthermore, multiple cleaning components are positioned between the loading and unloading components to sequentially clean the substrate wafers using various cleaning fluids. In the transport component, a transport rod is rotatably mounted on a transport platform. A transport cylinder is located at one end of the transport rod, and an adsorber is located at the bottom of the transport cylinder. This adsorber can adsorb and release the substrate wafers at any time. A transport driver drives the transport. The rod rotates to change the position of the adsorber, allowing it to be positioned above the loading assembly, unloading assembly, or cleaning tank. The extension of the transport cylinder allows the adsorber to contact the substrate sheet at the corresponding position, or to lower the substrate sheet to a designated location. Furthermore, multiple transport assemblies are positioned between the loading and unloading assemblies, enabling the transfer of the substrate sheet from a component in front of the transport assemblies to a component behind them. In summary, this cleaning device can sequentially transport the substrate sheet from the loading assembly to multiple cleaning assemblies for cleaning, and then to the unloading assembly for unloading. This allows for the use of multiple cleaning solutions to clean the substrate sheet, reducing the need for multiple loading and unloading steps required in conventional methods. This simplified cleaning process results in higher cleaning efficiency. Attached Figure Description
[0021] Figure 1 This is a schematic diagram of the cleaning device of this utility model.
[0022] Figure 2 for Figure 1 A magnified view of part A in the middle.
[0023] Figure 3 for Figure 1 A magnified view of part B in the middle.
[0024] Figure 4 This is a structural schematic diagram of the cleaning device of this utility model from another perspective.
[0025] Figure 5 for Figure 4 A magnified view of part C in the middle.
[0026] Figure 6 This is a front view of the cleaning device of this utility model.
[0027] Figure 7 This is a top view of the cleaning device of this utility model.
[0028] Reference numerals: 1. Feeding assembly; 11. Feeding base; 111. Feeding cavity; 112. First slot; 113. First through hole; 114. Feeding hole; 12. First feeding guide rail; 13. Second feeding guide rail; 14. First feeding driver; 15. Second feeding driver; 2. Unloading assembly; 21. Unloading base; 211. Unloading cavity; 212. Second slot; 213. Second through hole; 214. Unloading hole; 22. First unloading guide rail; 23. Second unloading guide rail; 24. First unloading guide rail; 25. Second feeding driver; 3. Cleaning assembly; 31. Cleaning container; 311. Cleaning tank; 312. Drainage hole; 32. Active cleaner; 321. Nozzle; 322. Movable plate; 323. Cleaning driver; 33. Adsorption platform; 34. Rotary driver; 35. Guide column; 4. Transfer assembly; 41. Transfer table; 411. Mounting cavity; 412. Maintenance port; 42. Transfer rod; 43. Transfer cylinder; 44. Adsorber; 45. Transfer driver; 5. Substrate. Detailed Implementation
[0029] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.
[0030] In the description of this utility model, it should be understood that the terms "top", "bottom", "inner", "outer", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0032] like Figures 1 to 7 As shown, a cleaning device of this utility model includes a feeding assembly 1, a discharging assembly 2, multiple cleaning assemblies 3 and multiple conveying assemblies 4;
[0033] The feeding component 1 is located in front of the unloading component 2, and a plurality of conveying components 4 are spaced apart between the feeding component 1 and the unloading component 2. A cleaning component 3 is provided between any two conveying components 4.
[0034] The feeding assembly 1 is used to place the substrate 5, and the unloading assembly 2 is used to place the substrate 5.
[0035] The cleaning assembly 3 includes a cleaning container 31 and an active cleaner 32. The top surface of the cleaning container 31 is provided with a cleaning tank 311. The active cleaner 32 is used to spray cleaning liquid into the cleaning tank 311 to clean the substrate 5 located in the cleaning tank 311.
[0036] The transport assembly 4 includes a transport platform 41, a transport rod 42, a transport cylinder 43, an adsorber 44, and a transport driver 45. The transport rod 42 is rotatably mounted on the transport platform 41. The cylinder body of the transport cylinder 43 is mounted on the end of the transport rod 42 away from the transport platform 41 and is positioned downwards. The adsorber 44 is mounted on the end of the rod body of the transport cylinder 43 away from the cylinder body. The transport driver 45 is connected to the transport rod 42 and is used to drive the transport rod 42 to rotate. The rotation of the transport rod 42 enables the adsorber 44 to correspond to the loading assembly 1, the unloading assembly 2, or the cleaning tank 311.
[0037] In the above technical solution, the loading component 1 is used to place the unwashed substrate 5, and the unloading component 2 is used to place the washed substrate 5. The loading component 1 and the unloading component 2 are located on opposite sides in the front-rear direction, respectively, serving as the start and end points of the cleaning process. In the cleaning component 3, the cleaning container 31 is provided with a cleaning tank 311 for loading the substrate 5, and the active cleaner 32 is used to spray cleaning liquid into the cleaning tank 311 to clean the substrate 5 located in the cleaning tank 311. Furthermore, multiple cleaning components 3 are arranged between the loading component 1 and the unloading component 2 to use multiple cleaning liquids to clean the substrate 5 sequentially. In the conveying component 4, the conveying rod 42 is rotatably mounted on the conveying table 41, the cylinder body of the conveying cylinder 43 is located at one end of the conveying rod 42, and the adsorber 44 is located at the bottom end of the cylinder body of the conveying cylinder 43. The adsorber 44 can adsorb the substrate 5 at any time and can also release the substrate 5 at any time. The drive rod 42 rotates to change the position of the adsorber 44, allowing it to be positioned above the loading assembly 1, unloading assembly 2, or cleaning tank 311. The extension action of the transport cylinder 43 allows the adsorber 44 to contact the substrate 5 at the corresponding position downwards, and also allows the adsorber 44 to lower the substrate 5 to a designated position. Furthermore, multiple transport assemblies 4 are located between the loading assembly 1 and the unloading assembly 2, enabling the transfer of the substrate 5 from the component in front of the transport assembly 4 to the component behind the transport assembly 4. In summary, the cleaning device of this utility model can sequentially transport the substrate 5 from the loading assembly 1 to multiple cleaning assemblies 3 for cleaning, and then to the unloading assembly 2 for unloading, thereby realizing the function of cleaning the substrate 5 with multiple cleaning solutions. This reduces the multiple loading and unloading steps required when cleaning the substrate 5 with multiple cleaning solutions in conventional methods, simplifying the cleaning process and resulting in higher cleaning efficiency.
[0038] The adsorber 44 can be an electric suction cup, which can adsorb the substrate 5 at any time according to an electrical signal, and can also release the substrate 5 at any time according to an electrical signal.
[0039] Furthermore, the transport assembly 4 includes two adsorbers 44 and two transport cylinders 43. The transport rod 42 is disposed on the top surface of the transport platform 41. The middle part of the transport rod 42 is connected to the transport platform 41. The two ends of the transport rod 42 protrude horizontally outward from the outside of the transport platform 41. The two transport cylinders 43 are respectively disposed at the two ends of the transport rod 42. The two adsorbers 44 are arranged one-to-one with the transport cylinders 43.
[0040] Two transport cylinders 43 are respectively located on both sides of the transport rod 42, so that the transport rod 42 can perform a transport operation once every half revolution, thereby increasing transport efficiency and maintaining the balance at both ends of the transport rod 42.
[0041] Furthermore, the transport platform 41 is provided with an installation cavity 411, and the outer side of the transport platform 41 is provided with a maintenance port 412 that extends through the installation cavity 411. The transport driver 45 is installed on the top surface of the installation cavity 411.
[0042] The mounting cavity 411 provides mounting space for the transport drive 45, and the maintenance port 412 facilitates maintenance of the transport assembly 4 by personnel.
[0043] Alternatively, the transport driver 45 can be a motor. The top surface of the transport table 41 is provided with a top hole that extends through to the mounting cavity 411. The drive shaft of the transport driver 45 passes through the top hole and protrudes from the top surface of the transport table 41. The drive shaft of the transport driver 45 is fixedly connected to the middle of the transport rod 42.
[0044] In addition, if both ends of the substrate 5 need to be cleaned, the device needs to be used to clean the substrate 5 twice.
[0045] Furthermore, the feeding assembly 1 includes a feeding base 11, a first feeding guide rail 12, a second feeding guide rail 13, a first feeding driver 14, and a second feeding driver 15. The second feeding guide rail 13 is slidably disposed on the top surface of the first feeding guide rail 12 in the front-back direction. The first feeding driver 14 is mounted on the first feeding guide rail 12 and connected to the second feeding guide rail 13. The first feeding driver 14 is used to drive the second feeding guide rail 13 to move in the front-back direction. The feeding base 11 is slidably disposed on the rear side of the second feeding guide rail 13 in the up-down direction. The second feeding driver 15 is mounted on the second feeding guide rail 13 and connected to the second feeding guide rail 15. Connected to the feeding seat 11, the second feeding driver 15 is used to drive the feeding seat 11 to move in the vertical direction. The feeding seat 11 is provided with a feeding cavity 111. The top surface of the feeding seat 11 is provided with a first through hole 113 that penetrates into the feeding cavity 111. The rear side of the feeding seat 11 is provided with a feeding hole 114 that penetrates into the feeding cavity 111. The two side walls of the feeding cavity 111 in the left and right directions are provided with first slots 112. The feeding cavity 111 is provided with a plurality of first slots 112 spaced in the vertical direction relative to the left and right side walls. The first slots 112 and the first through hole 113 are connected to the feeding hole 114.
[0046] The loading chamber 111 can accommodate multiple substrate sheets 5 for continuous loading of multiple substrate sheets 5. Furthermore, the substrate sheets 5 accommodated in the loading chamber 111 are fixed within the loading chamber 111 by inserting into the first slots 112 on both sides. Furthermore, the substrate sheets 5 can be inserted into the loading chamber 111 by passing through the loading hole 114 from back to front, aligned with the first slots 112 on both sides. Furthermore, the adsorber 44 can pass downwards through the first through hole 113 and contact the uppermost substrate sheet 5 in the accommodating chamber. After the adsorber 44 adsorbs and connects to the substrate sheet 5, the first loading is complete. The driver 14 drives the second feeding guide rail 13 to move forward, so that the adsorbed substrate 5 passes through the feeding hole 114 relative to the feeding seat 11, thereby separating the substrate 5 from the feeding seat 11. Then, the second feeding driver 15 drives the feeding seat 11 to move upward, thereby increasing the height of the substrate 5 in the receiving cavity, so that the adsorber 44 can adsorb and connect at the same height. Then, the conveying rod 42 rotates, causing the adsorber 44 with the adsorbed substrate 5 to leave. Then, the first feeding driver 14 drives the second feeding guide rail 13 to move backward, thereby resetting the second feeding guide rail 13.
[0047] Furthermore, the feeding assembly 2 includes a feeding seat 21, a first feeding guide rail 22, a second feeding guide rail 23, a first feeding driver 24, and a second feeding driver 25. The second feeding guide rail 23 is slidably disposed on the top surface of the first feeding guide rail 22 in the front-back direction. The first feeding driver 24 is mounted on the first feeding guide rail 22 and connected to the second feeding guide rail 23. The first feeding driver 24 is used to drive the second feeding guide rail 23 to move in the front-back direction. The feeding seat 21 is slidably disposed on the rear side of the second feeding guide rail 23 in the up-down direction. The second feeding driver 25 is mounted on the second feeding guide rail 23 and connected to the second feeding guide rail 25. Connected to the feeding seat 21, the second feeding driver 25 is used to drive the feeding seat 21 to move in the vertical direction. The feeding seat 21 is provided with a feeding cavity 211. The top surface of the feeding seat 21 is provided with a second through hole 213 that penetrates into the feeding cavity 211. The rear side of the feeding seat 21 is provided with a feeding hole 214 that penetrates into the feeding cavity 211. The two side walls of the feeding cavity 211 in the left and right directions are provided with first slots 112. The feeding cavity 211 is provided with a plurality of first slots 112 spaced in the vertical direction relative to the left and right side walls. The first slots 112 and the second through hole 213 are connected to the feeding hole 214.
[0048] The feeding chamber 211 can accommodate multiple substrate sheets 5 for continuous feeding of multiple substrate sheets 5. Furthermore, the substrate sheets 5 accommodated in the feeding chamber 211 are fixed within the feeding chamber 211 by inserting into the second slots 212 on both sides. Furthermore, the substrate sheets 5 located in the feeding chamber 211 can be pulled outwards from back to front to pass through the feeding holes 214 from back to front, thereby removing the substrate sheets 5 from the feeding seat 21. Furthermore, when the conveying rod 42 rotates to the rear facing position of its suction unit 44, which is connected to the substrate sheets 5, the substrate sheets 5 correspond to the second slots 212 on both sides. The first feeding driver 24 drives the second feeding guide rail 23 to move forward, so that... The substrate 5 passes through the feeding hole 214 from front to back relative to the feeding seat 21, is inserted into the feeding cavity 211, and is inserted into the second slots 212 on both sides. This also causes the rod of the transfer cylinder 43 to pass through the feeding hole 214 from front to back relative to the feeding seat 21, and then through the second through hole 213. Then the suction cup 44 releases the substrate 5, the rod of the transfer cylinder 43 retracts upward, the suction cup passes upward through the second through hole 213, and leaves the feeding seat 21. Then the second feeding driver 25 drives the feeding seat 21 to move downward to reduce the height of the empty second slots 212 in the receiving cavity. Then the first feeding driver 24 drives the second feeding guide rail 23 to move backward, so that the second feeding guide rail 23 is reset.
[0049] Furthermore, the cleaning assembly 3 also includes an adsorption platform 33 and a rotation driver 34. The adsorption platform 33 is disposed in the cleaning tank 311, and the top surface of the adsorption platform 33 is used to connect to the substrate 5. The rotation driver 34 is installed on the bottom surface of the cleaning container 31 and connected to the adsorption platform 33. The rotation driver 34 is used to drive the adsorption platform 33 to rotate.
[0050] An electric suction cup can be provided at the middle position of the top surface of the adsorption platform 33 to adsorb and connect to the substrate 5. The rotation driver 34 drives the adsorption platform 33 to rotate, thereby causing the substrate 5 to rotate during the cleaning process, which can make the substrate 5 more uniform and comprehensive.
[0051] Furthermore, the cleaning assembly 3 also includes a plurality of guide posts 35, which are arranged on the top surface of the adsorption platform 33 around the axis of the adsorption platform 33. The top of each guide post 35 has a guide portion along its edge, and the guide portion is chamfered or rounded.
[0052] When the substrate 5 is lowered onto the adsorption platform 33, the edge of the substrate 5 presses against the guide portion and then slides along the guide portion between the guide posts 35, so that the substrate 5 falls precisely into the designated position on the adsorption platform 33, thereby improving the stability of the cleaning process and reducing the probability and degree of eccentric rotation of the substrate 5.
[0053] Furthermore, the cleaning tank 311 is provided with a plurality of drainage holes 312 around the adsorption platform 33, and the drainage holes 312 penetrate the cleaning container 31 in the vertical direction.
[0054] The solution used to clean the substrate 5 can leave the cleaning tank 311 through the drainage hole 312 to avoid water accumulation in the cleaning tank 311.
[0055] Furthermore, the active cleaner 32 is disposed on one side of the cleaning container 31 in the left-right direction. The active cleaner 32 includes a nozzle 321, a movable plate 322, and a cleaning actuator 323. The nozzle 321 is disposed downward on the movable plate 322, and the cleaning actuator 323 is connected to the movable plate 322. The cleaning actuator 323 is used to drive the movable plate 322 to move in the left-right direction, so that the nozzle 321 can move to a position directly above the cleaning tank 311, and so that the nozzle 321 can move to a position away from the cleaning container 31.
[0056] When a substrate 5 is placed on the adsorption platform 33, the cleaning driver 323 drives the movable plate 322 to move toward the substrate 5, so that the nozzle 321 is above the substrate 5, and the nozzle 321 can spray cleaning liquid onto the substrate 5. After cleaning, the cleaning driver 323 drives the movable plate 322 to move away from the substrate 5, so that the transport component 4 can transport the substrate 5.
[0057] Furthermore, it includes four of the cleaning components 3 and five of the transport components 4.
[0058] Among them, the four cleaning components 3 are cleaned using ultrapure water, alcohol, ammonia and ultrapure water respectively.
[0059] Furthermore, each actuator can be an electric motor or a piston cylinder (pneumatic cylinder, electric cylinder, and hydraulic cylinder).
[0060] Furthermore, fixed setting and fixed connection refer to the fixed relative positional relationship of two components, including but not limited to fixing by connectors, fixing by welding, fixing by adhesive, fixing by integral molding, and fixing by snap-fit connection.
[0061] Furthermore, sliding connection and sliding setting refer to the connection between two connected components, where one component can slide along a fixed trajectory on the other component, including but not limited to connection by sliding a slider into a groove, or connection by inserting a slider into a hole whose size and profile match the slider.
[0062] Furthermore, rotatable connection and rotatable setting refer to the ability of two connected components to rotate, including but not limited to connections via bearings or clearance fits.
[0063] Furthermore, the connectors include, but are not limited to, fasteners, straps, ropes, pneumatic connectors, hydraulic connectors, flanges, Velcro, and buttons.
[0064] In summary, the present invention provides a cleaning device, the technical effects of which are as follows:
[0065] In this cleaning device, the loading assembly 1 is used to place the unwashed substrate 5, and the unloading assembly 2 is used to place the washed substrate 5. The loading assembly 1 and the unloading assembly 2 are located on opposite sides in the front-rear direction, respectively, serving as the start and end points of the cleaning process. In the cleaning assembly 3, the cleaning container 31 is provided with a cleaning tank 311 for loading the substrate 5, and the active cleaner 32 is used to spray cleaning liquid into the cleaning tank 311 to clean the substrate 5 located in the cleaning tank 311. Furthermore, multiple cleaning assemblies 3 are arranged between the loading assembly 1 and the unloading assembly 2 to use multiple cleaning liquids to clean the substrate 5 sequentially. In the conveying assembly 4, the conveying rod 42 is rotatably mounted on the conveying platform 41, the cylinder body of the conveying cylinder 43 is located at one end of the conveying rod 42, and the adsorber 44 is located at the bottom end of the cylinder body of the conveying cylinder 43. The adsorber 44 can adsorb the substrate 5 at any time and can also release the substrate 5 at any time, thus driving the conveying process. The device 45 drives the conveying rod 42 to rotate, thereby changing the position of the adsorber 44 so that the adsorber 44 can be positioned above the loading assembly 1, the unloading assembly 2, or the cleaning tank 311. The extension action of the conveying cylinder 43 can cause the adsorber 44 to contact the substrate 5 at the corresponding position downwards, and can also cause the adsorber 44 to lower the substrate 5 to the designated position. Furthermore, multiple conveying assemblies 4 are arranged between the loading assembly 1 and the unloading assembly 2, which can transfer the substrate 5 from the component located in front of the conveying assembly 4 to the component located behind the conveying assembly 4. In summary, the cleaning device of this utility model can sequentially transport the substrate 5 from the loading assembly 1 to multiple cleaning assemblies 3 for cleaning, and then move it to the unloading assembly 2 for unloading, so as to realize the function of cleaning the substrate 5 with multiple cleaning solutions. This reduces the multiple loading and unloading steps required when cleaning the substrate 5 with multiple cleaning solutions in conventional methods, simplifies the cleaning process, and makes the cleaning efficiency higher.
[0066] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.
Claims
1. A cleaning device, characterized in that, It includes a feeding assembly (1), a discharging assembly (2), multiple cleaning assemblies (3) and multiple handling assemblies (4); The feeding component (1) is located in front of the unloading component (2), and a plurality of conveying components (4) are spaced apart between the feeding component (1) and the unloading component (2), and a cleaning component (3) is provided between any two conveying components (4); The loading assembly (1) is used to place the substrate (5), and the unloading assembly (2) is used to place the substrate (5); The cleaning assembly (3) includes a cleaning container (31) and an active cleaner (32). The top surface of the cleaning container (31) is provided with a cleaning tank (311). The active cleaner (32) is used to spray cleaning liquid into the cleaning tank (311) to clean the substrate (5) located in the cleaning tank (311). The transport assembly (4) includes a transport platform (41), a transport rod (42), a transport cylinder (43), an adsorber (44), and a transport driver (45). The transport rod (42) is rotatably mounted on the transport platform (41). The cylinder body of the transport cylinder (43) is mounted on the end of the transport rod (42) away from the transport platform (41) and is positioned downwards. The adsorber (44) is mounted on the end of the rod body of the transport cylinder (43) away from the cylinder body. The transport driver (45) is connected to the transport rod (42) and is used to drive the transport rod (42) to rotate. The rotation of the transport rod (42) enables the adsorber (44) to correspond to the loading assembly (1), the unloading assembly (2), or the cleaning tank (311).
2. The cleaning device according to claim 1, characterized in that, The transport assembly (4) includes two adsorbers (44) and two transport cylinders (43). The transport rod (42) is located on the top surface of the transport platform (41). The middle part of the transport rod (42) is connected to the transport platform (41). The two ends of the transport rod (42) protrude horizontally outward from the outside of the transport platform (41). The two transport cylinders (43) are located at the two ends of the transport rod (42). The two adsorbers (44) are arranged one-to-one with the transport cylinders (43).
3. The cleaning device according to claim 2, characterized in that, The transport platform (41) is provided with an installation cavity (411), and the outer side of the transport platform (41) is provided with a maintenance port (412) that extends through the installation cavity (411). The transport driver (45) is installed on the top surface of the installation cavity (411).
4. The cleaning device according to claim 1, characterized in that, The feeding assembly (1) includes a feeding base (11), a first feeding guide rail (12), a second feeding guide rail (13), a first feeding driver (14), and a second feeding driver (15). The second feeding guide rail (13) is slidably disposed on the top surface of the first feeding guide rail (12) in the front-back direction. The first feeding driver (14) is mounted on the first feeding guide rail (12) and connected to the second feeding guide rail (13). The first feeding driver (14) is used to drive the second feeding guide rail (13) to move in the front-back direction. The feeding base (11) is slidably disposed on the rear side of the second feeding guide rail (13) in the up-down direction. The second feeding driver (15) is mounted on the second feeding guide rail (13) and connected to the top surface of the first feeding guide rail (12). A feeding seat (11) is provided, and a second feeding driver (15) is used to drive the feeding seat (11) to move in the up and down direction. The feeding seat (11) is provided with a feeding cavity (111). The top surface of the feeding seat (11) is provided with a first through hole (113) that penetrates into the feeding cavity (111). The rear side of the feeding seat (11) is provided with a feeding hole (114) that penetrates into the feeding cavity (111). The two side walls of the feeding cavity (111) in the left and right directions are provided with first slots (112). The feeding cavity (111) is provided with a plurality of first slots (112) spaced in the up and down direction relative to the side walls in the left and right directions. The first slots (112) and the first through hole (113) are connected to the feeding hole (114).
5. The cleaning device according to claim 1, characterized in that, The feeding assembly (2) includes a feeding seat (21), a first feeding guide rail (22), a second feeding guide rail (23), a first feeding driver (24), and a second feeding driver (25). The second feeding guide rail (23) is slidably disposed on the top surface of the first feeding guide rail (22) in the front-back direction. The first feeding driver (24) is mounted on the first feeding guide rail (22) and connected to the second feeding guide rail (23). The first feeding driver (24) is used to drive the second feeding guide rail (23) to move in the front-back direction. The feeding seat (21) is slidably disposed on the rear side of the second feeding guide rail (23) in the up-down direction. The second feeding driver (25) is mounted on the second feeding guide rail (23) and connected to the first feeding guide rail (22). The feeding seat (21) is used to drive the feeding seat (21) to move in the up and down direction. The feeding seat (21) is provided with a feeding cavity (211). The top surface of the feeding seat (21) is provided with a second through hole (213) that penetrates into the feeding cavity (211). The rear side of the feeding seat (21) is provided with a feeding hole (214) that penetrates into the feeding cavity (211). The two side walls of the feeding cavity (211) in the left and right directions are provided with first slots (112). The feeding cavity (211) is provided with multiple first slots (112) spaced in the up and down direction relative to the left and right side walls. The first slots (112) and the second through hole (213) are connected to the feeding hole (214).
6. The cleaning apparatus according to claim 1, characterized in that, The cleaning assembly (3) further includes an adsorption platform (33) and a rotation driver (34). The adsorption platform (33) is disposed in the cleaning tank (311). The top surface of the adsorption platform (33) is used to connect to the substrate (5). The rotation driver (34) is installed on the bottom surface of the cleaning container (31) and connected to the adsorption platform (33). The rotation driver (34) is used to drive the adsorption platform (33) to rotate.
7. The cleaning apparatus according to claim 6, characterized in that, The cleaning assembly (3) also includes a plurality of guide posts (35), which are arranged on the top surface of the adsorption platform (33) around the axis of the adsorption platform (33). The top of the guide post (35) is provided with a guide portion along its edge, and the guide portion is chamfered or rounded.
8. The cleaning apparatus according to claim 6, characterized in that, The cleaning tank (311) is provided with a plurality of drainage holes (312) around the adsorption platform (33), and the drainage holes (312) penetrate the cleaning container (31) in the vertical direction.
9. The cleaning apparatus according to claim 1, characterized in that, The active cleaner (32) is located on one side of the cleaning container (31) in the left-right direction. The active cleaner (32) includes a nozzle (321), a movable plate (322), and a cleaning driver (323). The nozzle (321) is disposed downward on the movable plate (322). The cleaning driver (323) is connected to the movable plate (322). The cleaning driver (323) is used to drive the movable plate (322) to move in the left-right direction, so that the nozzle (321) can move to the top of the cleaning tank (311) and move to a position away from the cleaning container (31).
10. The cleaning apparatus according to claim 1, characterized in that, It includes four of the cleaning components (3) and five of the transport components (4).