A high-flux tube furnace system and a high-flux water-oxygen mixing device thereof

Abstract

This utility model discloses a high-throughput tubular furnace system and its high-throughput water-oxygen mixing device, relating to the technical field of gas mixing equipment. The high-throughput water-oxygen mixing device includes: a steam generator, comprising a control system and at least two peristaltic pumps connected in parallel, each peristaltic pump connected to a corresponding passage, each passage including: a mixing tank, the outlet of which is connected to a mixed gas outlet pipe; a steam delivery branch, one end of which is connected to the corresponding peristaltic pump, and the other end of which is connected to the inlet of the corresponding mixing tank; an oxygen delivery branch, one end of which is connected to an oxygen source through a pressure reducing valve, and the other end of which is connected to the inlet of the corresponding mixing tank; each steam delivery branch and each oxygen delivery branch includes a gas pipe and a heat tracing system sleeved on the outer periphery of the gas pipe, and a mass flow controller and a one-way valve are sequentially provided along the delivery direction of the gas pipe. This device can be adapted to a high-throughput tubular furnace to complete high-throughput experiments.

Description

Technical Field

[0001] This utility model relates to the field of gas mixing equipment technology, and more specifically, to a high-throughput water-oxygen mixing device. Furthermore, it also relates to a high-throughput tubular furnace system including the aforementioned high-throughput water-oxygen mixing device. Background Technology

[0002] In existing technologies, ceramic matrix composites possess a series of advantages such as high strength, high modulus, high temperature resistance, oxidation resistance, corrosion resistance, and creep resistance, and have broad application prospects in the aerospace field. When ceramic matrix composites are used in hot-end components such as turbine blades, nozzles, and guide vanes of aero-engines, they are subjected to long-term erosion in harsh hot water-oxygen coupled environments during service, resulting in thermophysical and chemical damage coupling. This further damages the internal network structure of the material, generating defects and leading to a sharp decline in component stability, or even failure. Therefore, studying the structural damage and failure mechanisms of ceramic matrix composites in high-temperature hot water-oxygen coupled environments is of great significance.

[0003] However, traditional material heat treatment methods can only prepare one sample per experiment for testing heat treatment parameters, resulting in low research efficiency, long experimental cycles, and high R&D costs. High-throughput experiments, on the other hand, can simultaneously study the effects of material structure, composition, heat treatment temperature, time, or water-oxygen coupling environment on the material, significantly improving experimental efficiency. Currently, high-throughput tube furnaces are increasingly widely used in the high-throughput preparation of ceramic matrix composites; however, there is a lack of compatible water-oxygen mixing devices (used to mix water vapor and oxygen at different flow rates into gases of varying proportions and concentrations) to support high-throughput experiments.

[0004] In summary, how to provide a high-throughput water-oxygen mixing device that is compatible with a high-throughput tubular furnace to complete high-throughput experiments is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide a high-throughput water-oxygen mixing device that is compatible with a high-throughput tubular furnace and can be used in conjunction with the high-throughput tubular furnace to complete high-throughput experiments. Another purpose of this utility model is to provide a high-throughput tubular furnace system including the above-mentioned high-throughput water-oxygen mixing device.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A high-flux water-oxygen mixing device, comprising:

[0008] A steam generator includes a control system and at least two peristaltic pumps connected in parallel, each pump being connected to a corresponding passage, each passage including:

[0009] A gas mixing tank, the outlet of which is connected to a gas mixing outlet pipe;

[0010] A steam delivery branch has one end connected to the corresponding peristaltic pump and the other end connected to the air inlet of the corresponding mixing tank.

[0011] An oxygen delivery branch has one end connected to an oxygen source via a pressure reducing valve and the other end connected to the inlet of the corresponding mixing tank. Each steam delivery branch and each oxygen delivery branch includes a gas pipe and a heat tracing system fitted around the outer periphery of the gas pipe. The gas pipe is sequentially equipped with a mass flow controller and a one-way valve along the delivery direction. The peristaltic pump, the heat tracing system, the pressure reducing valve, and the mass flow controller are all connected to the control system.

[0012] In one embodiment, the trachea is provided with a section of serpentine trachea, and the mass flow controller and the one-way valve are sequentially arranged between the serpentine trachea and the mixing tank.

[0013] In one embodiment, the steam delivery branch is further provided with a needle valve to control the delivery of steam by opening and closing the needle valve.

[0014] In one embodiment, the airway is made of stainless steel.

[0015] In one embodiment, the mixing tank is provided with at least two porous baffles, the outer diameter of the porous baffles is the same as the inner diameter of the mixing tank, the porous baffles are provided with a plurality of holes, and the holes between adjacent porous baffles are staggered.

[0016] In one embodiment, a safety valve is provided on one side of the mixing tank, and a ball valve is provided on the other side of the mixing tank.

[0017] In one embodiment, the porous partition is welded or snapped into the mixing tank.

[0018] In one embodiment, the mixed gas outlet pipe includes the gas pipe and the heat tracing system sleeved on the outer periphery of the gas pipe. The gas pipe is provided with a high-temperature humidity transmitter and the one-way valve in sequence along the conveying direction. The high-temperature humidity transmitter and the heat tracing system are both connected to the control system.

[0019] A high-throughput tubular furnace system, comprising the high-throughput water-oxygen mixing device described in any of the preceding claims.

[0020] In one embodiment, the high-throughput tubular furnace system is provided with a furnace chamber, in which at least two furnace tubes are provided. The inlet of each furnace tube is connected to an inert gas supply pipe and a mixed gas outlet pipe of the high-throughput water-oxygen mixing device. The outlet of each furnace tube is connected to a tail gas treatment component.

[0021] When using the high-throughput water-oxygen mixing device provided by this invention, the control system can control different peristaltic pumps to operate simultaneously. Each peristaltic pump is connected to one end of its corresponding steam delivery branch, and the other end of each steam delivery branch is connected to one end of its corresponding mixing tank. Similarly, each oxygen source is connected to one end of its corresponding oxygen delivery branch, and the other end of each oxygen delivery branch is connected to one end of its corresponding mixing tank. In other words, both the steam delivery branch and the oxygen delivery branch are connected to the same mixing tank.

[0022] Furthermore, since each steam and oxygen delivery branch includes a gas pipe and a heat tracing system surrounding the pipe, the gas pipe is equipped with a mass flow controller and a check valve sequentially along the delivery direction. The check valve effectively limits the flow direction of oxygen and steam, preventing backflow within the gas pipe. The heat tracing system regulates the temperature of the gas pipe. Oxygen output is initially controlled by a pressure reducing valve for stable control, and then further precisely controlled by the mass flow controller in the oxygen delivery branch. Steam output is initially controlled by a peristaltic pump, thus controlling the steam output, and then further precisely controlled by the mass flow controller. The mass flow controller is connected to the control system, which controls the operation of the mass flow controller and the heat tracing system to regulate the flow and temperature of each steam and oxygen delivery branch—that is, to regulate the steam flow rate in each steam delivery branch and the oxygen flow rate in each oxygen delivery branch. Finally, after mixing in the mixing tank, the oxygen and steam are discharged to the next component through the mixed gas outlet pipe.

[0023] This device can simultaneously control the operation of at least two steam and oxygen delivery branches to adjust the ratio of steam and oxygen in each mixing tank. In other words, the high-throughput steam-oxygen mixing device can significantly increase the mixing efficiency of the steam-oxygen mixture. By combining the high-throughput steam-oxygen mixing device with a high-throughput tubular furnace, high-throughput experiments using a high-throughput tubular furnace can be achieved, greatly helping materials scientists improve experimental efficiency, shorten experimental cycles, and reduce experimental costs.

[0024] In summary, the high-throughput water-oxygen mixing device provided by this utility model is compatible with high-throughput tubular furnaces and can be used in conjunction with high-throughput tubular furnaces to complete high-throughput experiments.

[0025] In addition, this utility model also provides a high-throughput tubular furnace system including the above-mentioned high-throughput water-oxygen mixing device. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the high-throughput water-oxygen mixing device provided by this utility model.

[0028] Figure 1 middle:

[0029] 1 is a steam generator, 2 is a control system, 3 is a peristaltic pump, 4 is an oxygen source, 5 is a pressure reducing valve, 6 is a gas pipe, 7 is a serpentine gas pipe, 8 is a heat tracing system, 9 is a mass flow controller, 10 is a check valve, 11 is a gas mixing tank, 12 is a perforated baffle, 13 is a safety valve, 14 is a high-temperature humidity transmitter, 15 is a ball valve, 16 is a needle valve, 17 is a steam delivery branch, and 18 is an oxygen delivery branch. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] The core of this invention is to provide a high-throughput water-oxygen mixing device, which is compatible with a high-throughput tubular furnace and can be used in conjunction with the high-throughput tubular furnace to complete high-throughput experiments. Another core aspect of this invention is to provide a high-throughput tubular furnace system that includes the aforementioned high-throughput water-oxygen mixing device.

[0032] like Figure 1 As shown in the figure, this specific embodiment provides a high-throughput water-oxygen mixing device, including:

[0033] A steam generator 1 includes a control system 2 and at least two peristaltic pumps 3 connected in parallel. Each peristaltic pump 3 is connected to a corresponding passage, and each passage includes:

[0034] Mixing tank 11, the outlet end of which is connected to the mixed gas outlet pipe;

[0035] The steam delivery branch 17 is connected at one end to the corresponding peristaltic pump 3 and at the other end to the air inlet of the corresponding mixing tank 11.

[0036] The oxygen delivery branch 18 has one end connected to the oxygen source 4 via the pressure reducing valve 5, and the other end connected to the air inlet of the corresponding mixing tank 11.

[0037] Each steam delivery branch 17 and each oxygen delivery branch 18 includes a gas pipe 6 and a heat tracing system 8 fitted around the outer periphery of the gas pipe 6. The gas pipe 6 is provided with a mass flow controller 9 and a one-way valve 10 in sequence along the delivery direction. A one-way valve 10 is provided between the mass flow controller 9 and the mixing tank 11. The other end of the mixing tank 11 is connected to the mixed gas outlet pipe. The peristaltic pump 3, the heat tracing system 8, the pressure reducing valve 5, and the mass flow controller 9 are all connected to the control system 2.

[0038] It should be noted that the steam generator 1 can simultaneously generate at least two steam streams. One end of the steam delivery branch 17 is connected to the steam generator 1, and the other end is connected to the mixing tank 11. The peristaltic pump 3 is connected to the control system 2 via a data transmission line. The control system 2 can control and display the rotation speed of the peristaltic pump 3, that is, by controlling the rotation speed of the peristaltic pump 3, a stable water output can be obtained. Furthermore, the mass flow controllers 9 on both the steam delivery branch 17 and the oxygen delivery branch 18 can be connected to the control system 2 via data transmission lines to display the steam flow rate and oxygen flow rate on the display screen of the control system 2. The steam delivery branch 17 and the oxygen delivery branch 18 in the same group are both connected to the inlet end of the same mixing tank 11, and the mixing tank 11 is connected to the outlet end of a mixed gas outlet pipe.

[0039] It should also be noted that this device can simultaneously control the flow rate of water vapor and oxygen. Water vapor and oxygen at different flow rates can be mixed to form gases with different mixing ratios and concentrations. That is, this device can control the water-oxygen ratio in each mixing tank 11 at one time, which is convenient for studying the effects of multiple different water-oxygen ratio environments on materials simultaneously. In actual application, the shape, structure, position, and number of the water vapor generator 1, mixing tank 11, water vapor delivery branch 17, and oxygen delivery branch 18 can be determined according to the actual situation and needs.

[0040] When using the high-throughput water-oxygen mixing device provided by this invention, the control system 2 can control at least two peristaltic pumps 3 to operate simultaneously. Each peristaltic pump 3 is connected to one end of a corresponding water vapor delivery branch 17, and the other end of each water vapor delivery branch 17 is connected to one end of a corresponding mixing tank 11. Furthermore, each oxygen source 4 is connected to one end of a corresponding oxygen delivery branch 18, and the other end of each oxygen delivery branch 18 is connected to one end of a corresponding mixing tank 11. That is, the water vapor delivery branch 17 and the oxygen delivery branch 18 in the same group are all connected to the same mixing tank 11.

[0041] Furthermore, each steam delivery branch 17 and each oxygen delivery branch 18 includes a gas pipe 6 and a heat tracing system 8 fitted around the outer periphery of the gas pipe 6. The gas pipe 6 is sequentially equipped with a mass flow controller 9 and a one-way valve 10 along the delivery direction. The one-way valve 10 effectively limits the flow direction of oxygen and steam, preventing backflow within the gas pipe 6. The heat tracing system 8 regulates the temperature of the gas pipe 6. Oxygen output is initially controlled stably by a pressure reducing valve 5, and then the oxygen flow rate is further precisely controlled by the mass flow controller 9 of the oxygen delivery branch. Steam output is initially controlled by a peristaltic pump 3, and then further precisely controlled by the mass flow controller 9. The mass flow controller 9 is connected to the control system 2. The control system 2 controls and regulates the flow rate and temperature of each steam delivery branch 17 and each oxygen delivery branch 18 by controlling the operation of the mass flow controller 9 and the heat tracing system 8, that is, it regulates and controls the steam flow rate of each steam delivery branch 17 and the oxygen flow rate of each oxygen delivery branch 18. Finally, after the oxygen and water vapor are mixed in the mixing tank 11, they are discharged to the next component through the mixed gas outlet pipe.

[0042] This device can simultaneously control the operation of multiple steam delivery branches 17 and oxygen delivery branches 18 to adjust the ratio of steam and oxygen in each mixing tank 11. In other words, the high-throughput steam-oxygen mixing device can significantly increase the mixing efficiency of the steam-oxygen mixture. By combining the high-throughput steam-oxygen mixing device with a high-throughput tubular furnace, high-throughput experiments using a high-throughput tubular furnace can be achieved, greatly helping materials scientists improve experimental efficiency, shorten experimental cycles, and reduce experimental costs.

[0043] In summary, the high-throughput water-oxygen mixing device provided by this utility model is compatible with high-throughput tubular furnaces and can be used in conjunction with high-throughput tubular furnaces to complete high-throughput experiments.

[0044] In one embodiment, the trachea 6 is provided with a section of serpentine trachea 7, and a mass flow controller 9 and a one-way valve 10 are sequentially provided between the serpentine trachea 7 and the mixing tank 11.

[0045] It should be noted that the heat tracing system 8 is installed around the outer periphery of the gas pipe 6, and the control system 2 controls the operation of the heat tracing system 8 to heat the gas pipe 6. Furthermore, by installing a serpentine gas pipe 7 on the gas pipe 6, the oxygen and water vapor can be fully heated. Moreover, a mass flow controller 9 and a one-way valve 10 (which can limit the gas flow direction) are sequentially installed between the serpentine gas pipe 7 and the mixing tank 11. The mass flow controller 9 can be connected to the control system 2 of the water vapor generator 1, and the control system 2 controls the operation of the mass flow controller 9, which can control the gas flow rate within the gas pipe 6.

[0046] In one embodiment, the steam delivery branch 17 is further provided with a needle valve 16 to control the delivery of steam by opening and closing the needle valve 16.

[0047] It should be noted that both the steam delivery branch 17 and the oxygen delivery branch 18 contain a gas pipe 6, a heat tracing system 8, a mass flow controller 9, and a one-way valve 10. Furthermore, the steam delivery branch 17 is also equipped with a needle valve 16, located between the peristaltic pump 3 and the serpentine gas pipe 7. The steam delivery process can be controlled by opening and closing the needle valve 16. The oxygen delivery branch 18 is also equipped with a pressure reducing valve 5, located between the oxygen source 4 and the serpentine gas pipe 7, to prevent excessive gas pressure within the oxygen delivery branch 18.

[0048] In one embodiment, the air pipe 6 is made of stainless steel to avoid corrosion damage after a period of use, which helps to improve the performance and service life of the device.

[0049] In one embodiment, such as Figure 1 As shown, the mixing tank 11 is provided with at least two porous baffles 12. The outer diameter of the porous baffles 12 is the same as the inner diameter of the mixing tank 11. The porous baffles 12 are provided with multiple holes, and the holes of adjacent porous baffles 12 are staggered.

[0050] It should be noted that both the steam delivery branch 17 and the oxygen delivery branch 18 are located at the inlet end of the mixing tank 11, and the mixed gas outlet pipe is located at the outlet end of the mixing tank 11. The inlet directions of oxygen and steam are distributed along the axial direction of the mixing tank 11, so that oxygen and steam can fully impact the porous baffle 12. Under the action of the porous baffle 12, oxygen and steam can be fully mixed. Furthermore, the staggered distribution of the pores between adjacent porous baffles 12 can make the mixing of oxygen and steam more thorough and uniform.

[0051] In one embodiment, a safety valve 13 is provided on one side of the mixing tank 11, and a ball valve 15 is provided on the other side. The safety valve 13 and the ball valve 15 are located in the area between the porous partition 12 and the outlet of the mixing tank 11. If the pressure inside the mixing tank 11 is too high, the pressure can be regulated by opening the safety valve 13 to ensure safety within the mixing tank 11. By connecting other delivery pipes to the ball valve 15, the mixed gas can be connected to other components.

[0052] In one embodiment, a porous baffle 12 is welded or snap-fitted into the mixing tank 11. The connection method between the porous baffle 12 and the mixing tank 11 can be determined according to actual conditions and needs during practical application.

[0053] In one embodiment, the mixed gas outlet pipe includes a gas pipe 6 and a heat tracing system 8 sleeved around the outer periphery of the gas pipe 6. A high-temperature humidity transmitter 14 and a one-way valve 10 are sequentially arranged along the conveying direction of the gas pipe 6. Both the high-temperature humidity transmitter 14 and the heat tracing system 8 are connected to the control system 2. The heat tracing system 8 is used to regulate the temperature of the gas pipe 6, the high-temperature humidity transmitter 14 is used to detect the humidity of the mixed gas inside the gas pipe 6, and the one-way valve 10 is used to limit the flow direction of the mixed gas.

[0054] It should be noted that, as Figure 1 As shown, the high-throughput water-oxygen mixing device can be equipped with four mixing tanks 11. The inlet of each mixing tank 11 is connected to the corresponding steam delivery branch 17 and oxygen delivery branch 18, respectively, and the outlet of each mixing tank 11 is connected to the corresponding mixed gas outlet pipe. For example, during use, the control system 2 can control the operation of the heating system 8 and the mass flow controller 9 of the steam delivery branch 17 and the oxygen delivery branch 18, so that the flow rates of the four steam lines are controlled sequentially at 1800 ml / min, 900 ml / min, 500 ml / min and 100 ml / min, respectively, and the flow rates of the four oxygen lines are controlled sequentially at 200 ml / min, 100 ml / min, 500 ml / min and 900 ml / min, respectively. In addition, the temperature of the gas pipes 6 of the steam delivery branch 17 and the oxygen delivery branch 18 is controlled at around 150°C. In other words, this device can simultaneously generate multiple streams of water vapor and control and adjust the flow ratio of multiple streams of water vapor and oxygen to efficiently generate water-oxygen mixed gas. This allows the high-flux water-oxygen mixed gas device to be adapted to high-flux tubular furnaces to complete high-flux hot water oxygen environment erosion experiments, greatly shortening the experimental cycle and effectively reducing experimental costs. It has a very good application prospect in high-flux hot water oxygen environment erosion experiments.

[0055] In addition to the high-throughput water-oxygen mixing device described above, this utility model also provides a high-throughput tubular furnace system that includes the high-throughput water-oxygen mixing device disclosed in the above embodiments. For the structure of other parts of the high-throughput tubular furnace system, please refer to the prior art, which will not be repeated here.

[0056] In one embodiment, the high-throughput tubular furnace system is provided with a furnace chamber, in which at least two furnace tubes are provided. The inlet of each furnace tube is connected to an inert gas supply pipe and a mixed gas outlet pipe of a high-throughput water-oxygen mixing device, and the outlet of each furnace tube is connected to an exhaust gas treatment component.

[0057] It should be noted that the inlet of each furnace tube is connected to both the inert gas supply pipe and the mixed gas outlet pipe of the high-throughput water-oxygen mixing device. The inert gas supplied by the inert gas supply pipe is introduced into the high-throughput tubular furnace system containing the test sample to purge air. Furthermore, after the test, inert gas is introduced to cool the test sample in an inert gas atmosphere. The high-throughput water-oxygen mixing device can introduce mixed gases (water vapor and oxygen) of different proportions into the high-throughput tubular furnace system, allowing the test sample to react in these different gas mixtures to assess its performance.

[0058] In addition, it should be noted that the orientation or positional relationship of the "entering and exiting" indications in this application is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the purpose of simplifying the description and making it easier to understand, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this utility model.

[0059] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. Any combination of all embodiments provided by this utility model is within the protection scope of this utility model and will not be elaborated upon here.

[0060] The high-throughput tubular furnace system and its high-throughput water-oxygen mixing device provided by this utility model have been described in detail above. Specific examples have been used to illustrate the principle and implementation of this utility model. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core idea of ​​this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principle of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A high-throughput water-oxygen mixing device, characterized in that, include: A steam generator (1) includes a control system (2) and at least two peristaltic pumps (3) connected in parallel, each of the peristaltic pumps (3) being connected to a corresponding passage, each of the passages including: Mixing tank (11), whose outlet end is connected to the mixed gas outlet pipe; The steam delivery branch (17) is connected at one end to the corresponding peristaltic pump (3) and at the other end to the air inlet of the corresponding mixing tank (11). The oxygen delivery branch (18) is connected to the oxygen source (4) at one end through the pressure reducing valve (5), and the other end is connected to the air inlet of the corresponding mixing tank (11). Each of the steam delivery branches (17) and each of the oxygen delivery branches (18) includes a gas pipe (6) and a heat tracing system (8) sleeved on the outer periphery of the gas pipe (6). The gas pipe (6) is provided with a mass flow controller (9) and a one-way valve (10) in sequence along the delivery direction. The peristaltic pump (3), the heat tracing system (8), the pressure reducing valve (5) and the mass flow controller (9) are all connected to the control system (2).

2. The high-throughput water-oxygen mixing device according to claim 1, characterized in that, The trachea (6) is provided with a section of serpentine trachea (7), and the mass flow controller (9) and the one-way valve (10) are sequentially provided between the serpentine trachea (7) and the mixing tank (11).

3. The high-throughput water-oxygen mixing device according to claim 2, characterized in that, The steam delivery branch (17) is also equipped with a needle valve (16) to control the delivery of steam by opening and closing the needle valve (16).

4. The high-throughput water-oxygen mixing device according to claim 1, characterized in that, The air pipe (6) is made of stainless steel.

5. The high-throughput water-oxygen mixing device according to any one of claims 1 to 4, characterized in that, The mixing tank (11) is provided with at least two porous baffles (12). The outer diameter of the porous baffles (12) is the same as the inner diameter of the mixing tank (11). The porous baffles (12) are provided with multiple holes, and the holes between adjacent porous baffles (12) are staggered.

6. The high-throughput water-oxygen mixing device according to claim 5, characterized in that, A safety valve (13) is provided on one side of the mixing tank (11), and a ball valve (15) is provided on the other side of the mixing tank (11).

7. The high-throughput water-oxygen mixing device according to claim 5, characterized in that, The porous partition (12) is welded or snapped into the gas mixing tank (11).

8. The high-throughput water-oxygen mixing device according to any one of claims 1 to 4, characterized in that, The mixed gas outlet pipe includes the gas pipe (6) and the heat tracing system (8) sleeved on the outer periphery of the gas pipe (6). The gas pipe (6) is provided with a high temperature humidity transmitter (14) and the one-way valve (10) in sequence along the conveying direction. The high temperature humidity transmitter (14) and the heat tracing system (8) are both connected to the control system (2).

9. A high-throughput tubular furnace system, characterized in that, The high-throughput water-oxygen mixing device includes any one of claims 1 to 8.

10. The high-throughput tubular furnace system according to claim 9, characterized in that, The high-throughput tubular furnace system is provided with a furnace chamber, and at least two furnace tubes are provided inside the furnace chamber. The inlet of each furnace tube is connected to an inert gas supply pipe and a mixed gas outlet pipe of the high-throughput water-oxygen mixing device. The outlet of each furnace tube is connected to a tail gas treatment component.

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