A sputter film-removing and re-passivating testing device

Abstract

The utility model discloses a sputter film removing and re -passivation testing arrangement, including vacuum box and work piece, the top fixedly connected with the butt joint of vacuum box, the top threaded connection of butt joint has the sealing head, rotates and inserts in sealing head and has the worm wheel, the threaded connection of worm wheel has screw rod in, the top end rotationally connected with the top plate of screw rod, the top fixedly connected with a plurality of guide rods of sealing head, and the top plate and a plurality of guide rods slide sleeve joint, be equipped with the bellows between the top plate and sealing head, and the bellows cover the outside of screw rod. The utility model discloses through the argon gas input to the vacuum box through the air inlet pipe, then opens radio frequency power supply, and the alternating electric field between the anode and the cathode makes Ar atom ionization and forms the plasma, and the surface of work piece is bombarded, so that work piece is deformed layer removal, thereby overcoming the deformation layer introduced by mechanical film removing, reduce the influence factor that has not been considered in the past testing process, improve the test reliability.

Description

Technical Field

[0001] This utility model relates to the field of material corrosion performance testing technology, and in particular to a sputtering film removal and repassivation testing device. Background Technology

[0002] When metals are used in corrosive environments for extended periods, the passivation film on their surface is likely to be destroyed due to dissolution or mechanical wear, leading to localized corrosion failures such as pitting corrosion, crevice corrosion, or wear corrosion. The corrosion failure behavior depends on the passivation film's growth capacity, and research on repassivation is of great significance for understanding the passivation mechanism of metallic materials in service environments. Furthermore, studying the in-situ growth process of the passivation film using electrochemical monitoring methods provides important guidance for the development and selection of corrosion-resistant materials.

[0003] Currently, existing repassivation testing methods include the scratch electrode method and the abrasion electrode method. The former uses a needle-shaped electrode pressed into the metal surface under a certain load, tracing the surface in a straight line to continuously remove the passivation film and expose fresh surface. The latter removes the passivation film by grinding with sandpaper in an inert environment, with the sandpaper covering the entire sample surface to remove the passivation film simultaneously. Both of these tests are mechanical film removal methods, which inevitably introduce a mechanical deformation layer and cannot accurately reflect the repassivation process of the metal substrate. Therefore, to better achieve the desired metal repassivation testing effect, and to promote technological advancement and enhance core technological competitiveness in the industry, this application proposes a new implementation scheme that differs from existing repassivation testing devices and applications. Summary of the Invention

[0004] The purpose of this invention is to solve the problem that existing metal repassivation tests inevitably introduce a mechanical deformation layer, which cannot truly reflect the repassivation process of the metal substrate. Therefore, a sputtering film removal and repassivation test device is proposed.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A sputtering film removal and passivation testing apparatus includes a vacuum chamber and a workpiece. A butt joint is fixedly connected to the top of the vacuum chamber, and a sealing head is threadedly connected to the top of the butt joint. A worm gear is rotatably fitted inside the sealing head, and a screw is threadedly connected to the worm gear. A top plate is rotatably connected to the top of the screw. Multiple guide rods are fixedly connected to the top of the sealing head, and the top plate is slidably sleeved with the guide rods. A bellows is provided between the top plate and the sealing head, covering the outside of the screw. Pressure rings are fixedly connected to the bottom of the top plate and the top of the sealing head, respectively pressing against the top and bottom of the bellows. A target is fixedly connected to the bottom of the screw, located inside the vacuum chamber. The bottom of the target is fixedly connected to... The vacuum chamber is equipped with a clamping seat, in which the workpiece is held. A servo motor is fixedly connected to one side of the sealing head, and a drive shaft is keyed to the output end of the servo motor. The other end of the drive shaft is connected to a worm gear via a flange, and the worm gear meshes with a worm wheel. An electrolytic cell is provided on the bottom inner wall of the vacuum chamber, and a positive and negative electrode are provided in the electrolytic cell. A vacuum pump is fixedly connected to one side outer wall of the vacuum chamber. A suction pipe is sealed and inserted into the inlet end of the vacuum pump, and the other end of the suction pipe is sealed and inserted into the vacuum chamber. A support frame is fixedly connected to one side outer wall of the vacuum chamber, and a gas cylinder is clamped to the top of the support frame. An inlet pipe is sealed and inserted into one end of the gas cylinder, and the other end of the inlet pipe is sealed and inserted into the vacuum chamber. An inlet valve is provided on the inlet pipe.

[0006] Furthermore, a first sealing gasket and a second sealing gasket are provided between the connector and the sealing head.

[0007] Furthermore, a sealing ring is snapped onto one end of the sealing head, and the sealing ring is fitted around the outside of the output end of the servo motor.

[0008] Furthermore, a liquid pump is fixedly connected to one side of the vacuum chamber, with a water inlet pipe sealed and inserted into the inlet end of the liquid pump, and a connecting pipe sealed and inserted into the outlet end of the liquid pump. The other end of the connecting pipe is inserted into the electrolytic cell, and an exhaust pipe is sealed and inserted into one side of the vacuum chamber.

[0009] Furthermore, the top of the electrolytic cell is provided with a water outlet pipe, one end of which extends into the electrolytic cell and the other end of which passes through the vacuum box.

[0010] Furthermore, control valves are provided on the water outlet pipe, connecting pipe, and vent pipe.

[0011] Furthermore, slide rails are fixedly connected to both inner walls of the vacuum chamber, and a shielding cover is slidably connected between the two slide rails. The shielding cover is located below the card seat, and an iron plate is fixedly connected to the top of the shielding cover.

[0012] Furthermore, a magnet is adsorbed on one side of the outer wall of the vacuum chamber, and the magnet is attracted to the iron plate across one side of the vacuum chamber.

[0013] The beneficial effects of this utility model are as follows: 1. Argon gas is introduced into the vacuum chamber through the inlet pipe, and then the radio frequency power supply is turned on. An alternating electric field is generated between the positive and negative electrodes, which ionizes Ar atoms to form plasma. This plasma bombards the surface of the workpiece, thereby removing the deformable layer. This overcomes the deformation layer introduced by mechanical film removal, reduces the influencing factors that were not considered in previous testing processes, and improves the reliability of the test.

[0014] 2. The device is completely sealed by a bellows, a first sealing gasket, a second sealing gasket, and a sealing ring. The entire test is conducted inside a vacuum chamber, isolated from the outside world, forming a closed environment that facilitates control of the test atmosphere. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural schematic diagram of a sputtering film removal and repassivation testing device proposed in this utility model; Figure 2 This is a rear view structural schematic diagram of a sputtering film removal and repassivation test device proposed in this utility model; Figure 3 This is a partial cross-sectional view of a sputtering film removal and repassivation test device proposed in this utility model; Figure 4 This is a cross-sectional enlarged structural schematic diagram of a sputtering film removal and passivation test device proposed in this utility model.

[0016] In the diagram: 1. Vacuum chamber; 2. Connector; 3. Sealing head; 4. First sealing gasket; 5. Second sealing gasket; 6. Worm gear; 7. Drive shaft; 8. Worm; 9. Servo motor; 10. Sealing ring; 11. Screw; 12. Top plate; 13. Pressure ring; 14. Bellows; 15. Target material; 16. Card holder; 17. Workpiece; 18. Electrolytic cell; 19. Positive electrode; 20. Negative electrode; 21. Guide rod; 22. Evacuation pipe; 23. Vacuum pump; 24. Gas cylinder; 25. Inlet pipe; 26. Inlet valve; 27. Water inlet pipe; 28. Liquid pump; 29. ​​Water outlet pipe; 30. Exhaust pipe; 31. Control valve; 32. Slide rail; 33. Shielding cover; 34. Iron plate; 35. Magnet block. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0018] Reference Figures 1-4 A sputtering film removal and passivation test device includes a vacuum chamber 1, a workpiece 17, a control panel and a processor. The processor is an ARM9TDMI and is connected to the control panel via wires. A sealing door is hinged to one side of the vacuum chamber 1. A butt joint 2 is welded to the top of the vacuum chamber 1, and a sealing head 3 is threadedly connected to the top of the butt joint 2. A sealing gasket is placed between the butt joint 2 and the sealing head 3. A worm gear 6 is rotatably installed inside the sealing head 3. The worm gear 6 has a stepped structure and is rotatably fitted into the sealing head 3 by installing a bearing on the stepped surface of the worm gear 6. The worm gear 6 has an internal thread, and a screw 11 is connected to the internal thread of the worm gear 6. A top plate 12 is rotatably connected to the top of the screw 11. The lower surface of the top plate 12 has a bearing groove, which is rotatably connected to the top of the screw 11 through an embedded bearing. The center of the top plate 12 has an electric slip ring mounting hole 1201, which is connected to the bearing groove. An electric slip ring is sealed and installed in the electric slip ring mounting hole 1201. The wire on one rotor of the electric slip ring is welded to the top of the screw 11. The wire on the other rotor of the electric slip ring is connected to an external radio frequency power supply with a radio frequency power of 300W-1000W and an argon pressure of 0.5Pa. Multiple guide rods 21 are welded to the top of the sealing head 3. The top plate 12 is slidably sleeved with the multiple guide rods 21. A bellows 14 is provided between the top plate 12 and the sealing head 3. The bellows 14 is made of fluororubber. The bellows 14 covers the outside of the screw 11. The two ends of the bellows 14 are sealed and fixed to the top plate 12 and the sealing head 3 respectively through sealing gaskets. The bottom of the top plate 12 and the top of the sealing head 3 are both fixed with pressure rings 13 by bolts. The two pressure rings 13 press on the top and bottom of the bellows 14 respectively, so that the installation is stable and the seal is stable. The bottom end of the screw 11 is fixed with a target 15 by bolts, and the target 15 is located inside the vacuum chamber 1; The bottom of the target material 15 is fixed with a clamping seat 16 by bolts. The workpiece 17 is clamped in the clamping seat 16. A servo motor 9 is fixed with bolts on one side of the sealing head 3. The output end of the servo motor 9 is keyed to the drive shaft 7. The other end of the drive shaft 7 is connected to the worm 8 through a flange. The worm 8 meshes with the worm wheel 6. Driven by the servo motor 9, the worm 8 rotates. Under the action of the worm 8 meshing with the worm wheel 6 and the action of the screw 11 threadedly connected to the worm wheel 6, the screw 11 moves downward, thereby driving the workpiece 17 to move downward, and then sending the workpiece 17 into the electrolytic cell 18 for testing. An electrolytic cell 18 is provided on the bottom inner wall of the vacuum chamber 1. The electrolytic cell 18 contains a positive electrode 19 and a negative electrode 20. The target material 15, the positive electrode 19 and the negative electrode 20 are connected to the electrochemical workstation by wires. The electrochemical workstation is connected to the computer by wires. When the radio frequency power supply is turned on, an alternating electric field is generated between the positive electrode 19 and the negative electrode 20 to ionize Ar atoms and form plasma, which bombards the surface of the workpiece 17, thereby removing the layer to be deformed from the workpiece 17. A vacuum pump 23 and a vacuum level detector are fixed to one side of the outer wall of the vacuum chamber 1 by bolts. The models of the vacuum pump 23 and the vacuum level detector can be selected according to the actual situation. For example, the vacuum pump 23 can be selected from GXS160 or GXS750 / 4200, and the vacuum level detector can be selected from ZKZ-IV or GSZK-IV. The air inlet end of the vacuum pump 23 is sealed and inserted with a suction pipe 22. The other end of the suction pipe 22 is sealed and inserted with the vacuum chamber 1. Under the action of the vacuum pump 23, the gas in the vacuum chamber 1 is extracted through the suction pipe 22, thereby performing a vacuuming operation in the vacuum chamber 1. A support frame is fixed to one side of the outer wall of the vacuum chamber 1 by bolts. A gas cylinder 24 is clamped to the top of the support frame. One end of the gas cylinder 24 is sealed and inserted into the inlet pipe 25. The other end of the inlet pipe 25 is sealed and inserted into the vacuum chamber 1. An inlet valve 26 is provided on the inlet pipe 25. When the inlet valve 26 is opened, the argon gas in the gas cylinder 24 is introduced into the vacuum chamber 1 through the inlet pipe 25.

[0019] A first sealing gasket 4 and a second sealing gasket 5 are provided between the connector 2 and the sealing head 3 to seal the connection between them.

[0020] One end of the sealing head 3 is fitted with a sealing ring 10, which is sleeved on the outside of the output end of the servo motor 9 to prevent air leakage from the output end of the servo motor 9.

[0021] A liquid pump 28 is fixed to one side of the vacuum chamber 1 by bolts. A water inlet pipe 27 is sealed and inserted into the inlet end of the liquid pump 28, and a connecting pipe is sealed and inserted into the outlet end of the liquid pump 28. The other end of the connecting pipe is inserted into the electrolytic cell 18. Under the action of the liquid pump 28, the solution is pumped from the solution tank into the electrolytic cell 18. The electrolyte in the electrolytic cell 18 is 0.1M H2SO4. An exhaust pipe 30 is sealed and inserted into one side of the vacuum chamber 1. Argon gas is discharged from the exhaust pipe 30 into the collection device for collection.

[0022] The top of the electrolytic cell 18 is provided with a water outlet pipe 29. One end of the water outlet pipe 29 extends into the electrolytic cell 18, and the other end of the water outlet pipe 29 passes through the vacuum box 1. The solution in the electrolytic cell 18 is discharged from the water outlet pipe 29 to the filtration equipment for processing. After filtering out impurities, it is discharged back into the dissolving tank for collection.

[0023] Control valves 31 are installed on the water outlet pipe 29, the connecting pipe and the vent pipe 30.

[0024] Both sides of the inner wall of the vacuum chamber 1 are fixed with slide rails 32 by bolts. A shield 33 is slidably connected between the two slide rails 32. The shield 33 is located below the card seat 16. An iron plate 34 is welded to the top of the shield 33. A magnet block 35 is adsorbed on one side of the outer wall of the vacuum chamber 1. A samarium cobalt magnet can be selected. The magnet block 35 is attracted to the iron plate 34 across one side of the vacuum chamber 1. Under the attraction between the magnet block 35 and the iron plate 34, the shield 33 is removed from the top of the electrolytic cell 18.

[0025] The servo motor 9, vacuum pump 23, and vacuum level detector are all connected to the processor via wires, and the processor controls the working status of the servo motor 9 and vacuum pump 23.

[0026] Working principle of this embodiment: Connection with external equipment: The inlet end of the liquid pump 28 is connected to the solution tank through a connecting pipe, the exhaust pipe 30 is connected to the argon gas collection device, and the water outlet pipe 29 is connected to the solution tank; First, open the sealing door, then clamp the workpiece 17 onto the holder 16, and close the sealing door. Next, start the vacuum pump 23 through the control panel. Under the action of the vacuum pump 23, the gas in the vacuum chamber 1 is extracted through the suction pipe 22, thereby performing a vacuuming operation in the vacuum chamber 1. The vacuum degree detector is used to detect the vacuum degree, and the detection data is transmitted to the processor. Then, open the inlet valve 26, and the argon gas in the gas cylinder 24 is input into the vacuum chamber 1 through the inlet pipe 25. Then, turn on the radio frequency power supply, and generate an alternating electric field between the positive electrode 19 and the negative electrode 20 to ionize Ar atoms and form plasma, which bombards the surface of the workpiece 17, thereby removing the deformable layer of the workpiece 17. The removed deformable layer falls onto the shielding cover 33. Then, pull the magnet block 35. Under the attraction between the magnet block 35 and the iron plate 34, the shielding cover 33 is removed from the top of the electrolytic cell 18. Then, the liquid pump 28 is started and the control valve 31 is opened. Under the action of the liquid pump 28, the solution is pumped from the solution tank into the electrolytic cell 18. The electrolytic cell 18 is energized. Then, the servo motor 9 is started by controlling the control panel. Under the drive of the servo motor 9, the worm 8 rotates. Under the action of the meshing of the worm 8 and the worm wheel 6 and the threaded connection between the screw 11 and the worm wheel 6, the screw 11 moves downward, thereby driving the workpiece 17 to move downward, and then sending the workpiece 17 into the electrolytic cell 18 for testing. Then, the experimental process is monitored by the electrochemical workstation and the computer. After the test is completed, open the control valve 31 to discharge argon gas from the exhaust pipe 30 into the collection device for collection. Finally, open the control valve 31 on the water outlet pipe 29 to discharge the solution in the electrolytic cell 18 to the filtration device for processing. After filtering out impurities, the solution is discharged back into the dissolution tank for collection.

[0027] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A sputtering film removal and passivation testing apparatus, comprising a vacuum chamber (1) and a workpiece (17), characterized in that, The top of the vacuum chamber (1) is fixedly connected to a connector (2), and the top of the connector (2) is threadedly connected to a sealing head (3). A worm gear (6) is rotatably fitted inside the sealing head (3), and a screw (11) is threadedly connected inside the worm gear (6). A top plate (12) is rotatably connected to the top of the screw (11). Multiple guide rods (21) are fixedly connected to the top of the sealing head (3). The top plate (12) and the multiple guide rods (21) are slidably sleeved. The top plate (12) and... A bellows (14) is provided between the sealing heads (3). The bellows (14) covers the outside of the screw (11). A pressure ring (13) is fixedly connected to the bottom of the top plate (12) and the top of the sealing head (3). The two pressure rings (13) press against the top and bottom of the bellows (14) respectively. A target material (15) is fixedly connected to the bottom of the screw (11). The target material (15) is located inside the vacuum chamber (1). A card seat (16) is fixedly connected to the bottom of the target material (15). The workpiece ( 17) Clamped in the card holder (16), a servo motor (9) is fixedly connected to one side of the sealing head (3), and a drive shaft (7) is keyed to the output end of the servo motor (9). The other end of the drive shaft (7) is connected to a worm (8) through a flange. The worm (8) meshes with a worm wheel (6). An electrolytic cell (18) is provided on the bottom inner wall of the vacuum box (1). A positive electrode (19) and a negative electrode (20) are provided in the electrolytic cell (18). One side of the outer wall of the vacuum box (1) is fixed A vacuum pump (23) is connected, and a suction pipe (22) is sealed and inserted into the air inlet end of the vacuum pump (23). The other end of the suction pipe (22) is sealed and inserted into the vacuum box (1). A support frame is fixedly connected to one side of the outer wall of the vacuum box (1). A gas cylinder (24) is clamped to the top of the support frame. One end of the gas cylinder (24) is sealed and inserted into the air inlet pipe (25). The other end of the air inlet pipe (25) is sealed and inserted into the vacuum box (1). An air inlet valve (26) is provided on the air inlet pipe (25).

2. The sputtering film removal and passivation testing apparatus according to claim 1, characterized in that, A first sealing gasket (4) and a second sealing gasket (5) are provided between the connector (2) and the sealing head (3).

3. The sputtering film removal and passivation testing apparatus according to claim 1, characterized in that, One end of the sealing head (3) is fitted with a sealing ring (10), which is placed on the outside of the output end of the servo motor (9).

4. The sputtering film removal and passivation testing apparatus according to claim 1, characterized in that, A liquid pump (28) is fixedly connected to one side of the vacuum box (1). A water inlet pipe (27) is sealed and inserted into the inlet end of the liquid pump (28). A connecting pipe is sealed and inserted into the outlet end of the liquid pump (28). The other end of the connecting pipe is inserted into the electrolytic cell (18). An exhaust pipe (30) is sealed and inserted into one side of the vacuum box (1).

5. The sputtering film removal and passivation testing apparatus according to claim 4, characterized in that, The top of the electrolytic cell (18) is provided with a water outlet pipe (29), one end of which extends into the electrolytic cell (18), and the other end of which passes through the vacuum box (1).

6. The sputtering film removal and passivation testing apparatus according to claim 5, characterized in that, The water outlet pipe (29), connecting pipe and vent pipe (30) are all equipped with control valves (31).

7. The sputtering film removal and passivation testing apparatus according to claim 1, characterized in that, The inner walls of both sides of the vacuum box (1) are fixedly connected with slides (32), and a shield (33) is slidably connected between the two slides (32). The shield (33) is located below the card seat (16), and an iron plate (34) is fixedly connected to the top of the shield (33).

8. The sputtering film removal and passivation testing apparatus according to claim 1, characterized in that, A magnet (35) is adsorbed on one side of the outer wall of the vacuum box (1), and the magnet (35) is attracted to the iron plate (34) through one side of the vacuum box (1).

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