High-precision transmission structure of worm

Abstract

The utility model discloses a kind of worm high-precision transmission structure, it is related to transmission technical field, including outer shell, power device, worm, worm wheel and external shaft, the output end of the power device is connected with power transmission component, the power transmission component is connected with worm transmission, the worm and the worm wheel meshing connection, first bevel gear meshing second bevel gear in the utility model, so that second bevel gear, primary gear and the wheel group of short shaft composition rotates, primary gear engages secondary gear, realizes twice speed reduction and increases the moment, and worm engages worm wheel rotation, to drive shaft coupling component and external shaft rotation, to drive executive component work, increase power transmission component before worm power route, so that the transmission ratio of entire transmission route expands, large transmission ratio can accurately control the rotation angle of power device to realize high-precision positioning and fine adjustment, for photolithography machine and other precision equipment, precision positioning and fine adjustment can improve product machining accuracy.

Description

Technical Field

[0001] This utility model relates to the field of transmission technology, and in particular to a high-precision worm gear transmission structure. Background Technology

[0002] In the field of mechanical transmission, worm gear drives are widely used in applications with stringent requirements for transmission accuracy, such as precision machine tools, industrial robots, and aerospace equipment, due to their compact structure and smooth operation.

[0003] However, the small transmission ratio of worm gears limits positioning accuracy in precision positioning and fine-tuning mechanisms. Taking the fine-tuning device of a lithography machine's stage as an example, to achieve nanometer-level positioning accuracy, the minute rotation of the motor needs to be precisely converted into a tiny displacement of the stage. If a worm gear drive with a small transmission ratio is used, the motor needs to rotate a relatively large angle to produce a minute movement of the stage. This makes it difficult to precisely control the motor angle to achieve high-precision positioning, resulting in positioning errors of tens of micrometers or even higher. This cannot meet the stringent requirements for sub-micrometer or even nanometer-level positioning accuracy in ultra-precision machining fields such as chip manufacturing. Utility Model Content

[0004] The purpose of this invention is to solve the problems existing in the prior art by proposing a high-precision worm gear transmission structure.

[0005] To achieve the above objectives, this utility model adopts the following technical solution: a high-precision worm gear transmission structure, comprising an outer casing, a power unit, a worm, a worm wheel, and an external shaft. The output end of the power unit is connected to a power transmission assembly, which is connected to the worm. The worm and the worm wheel are meshed together. A coupling assembly is fixedly installed in the middle of the worm wheel, and the coupling assembly is connected to the external shaft. The power transmission assembly includes a first bevel gear, a second bevel gear, a primary gear, a short shaft, and a secondary gear. The first bevel gear is fixedly installed on the output shaft of the power unit. The second bevel gear and the primary gear are coaxially installed in the middle of the short shaft. The first bevel gear and the second bevel gear are meshed together. The primary gear and the secondary gear are meshed together. The secondary gear is fixedly installed at the end of the worm.

[0006] Preferably, the short shaft is rotatably mounted inside the outer casing, and an oil storage groove is provided at the bottom of the inner cavity of the outer casing.

[0007] Preferably, the second bevel gear, the first-stage gear, and the second-stage gear are all located above the oil reservoir.

[0008] Preferably, the coupling assembly includes an outer shaft, a pin, an extended ring, and a positioning seat, wherein the extended ring is welded to both sides of the worm gear.

[0009] Preferably, the outer sleeve shaft passes through the outer ring and the worm gear, and the pin sequentially passes through the hole of the outer ring and the hole of the outer sleeve shaft.

[0010] Preferably, the two sets of positioning seats are located on both sides of the worm gear, the positioning seats are rotatably connected to the outer sleeve shaft through bearings installed inside them, and the positioning seats are fixedly connected to the outer cover by bolts.

[0011] Preferably, the outer sleeve shaft has an internal spline inside, and the end of the outer shaft has an external spline, with the external spline and the internal spline interlocking.

[0012] Compared with the prior art, the advantages and positive effects of this utility model are as follows: 1. In this utility model, the first bevel gear meshes with the second bevel gear, causing the gear set composed of the second bevel gear, the first-stage gear, and the short shaft to rotate. The first-stage gear meshes with the second-stage gear, achieving two speed reductions and torque increases. The worm gear meshes with the worm wheel to rotate, thereby driving the coupling assembly and the external shaft to rotate, which in turn drives the actuator to work. By adding a power transmission assembly before the worm gear power path, the transmission ratio of the entire transmission path is increased. The large transmission ratio can accurately control the rotation angle of the power device to achieve high-precision positioning and fine-tuning. For precision equipment such as lithography machines, precise positioning and fine-tuning can improve the product processing accuracy.

[0013] 2. In this utility model, the outer sleeve shaft passes sequentially through the middle of the outer ring and the worm gear, aligning the hole on the outer side of the outer sleeve shaft with the hole in the outer ring. A screwdriver is used to screw the pin into the outer ring and the outer sleeve shaft to fix them together. Two sets of positioning seats are set, located on both sides of the worm gear respectively. Under the connection of the bearings, the outer sleeve shaft is guaranteed to rotate stably. The outer shaft and the outer sleeve shaft are connected by external splines and internal splines, thereby stably transmitting power to the outer shaft and ensuring the stable operation of the actuator. Attached Figure Description

[0014] Figure 1 This utility model provides a three-dimensional structural diagram of a high-precision worm gear transmission structure; Figure 2 This utility model provides a three-dimensional structural diagram of the internal structure of a high-precision worm gear transmission structure. Figure 3 A top view of the interior of a high-precision worm gear transmission structure is provided for this utility model; Figure 4 This utility model presents a three-dimensional structural diagram of the coupling assembly in a high-precision worm gear transmission structure.

[0015] Legend: 1. Outer casing; 2. Power unit; 3. Power transmission assembly; 31. First bevel gear; 32. Second bevel gear; 33. Primary gear; 34. Short shaft; 35. Secondary gear; 4. Oil reservoir; 5. Worm; 6. Worm wheel; 7. Coupling assembly; 71. Outer shaft; 72. Internal spline; 73. Pin; 74. Outer ring; 75. Positioning seat; 8. External shaft; 81. External spline. Detailed Implementation

[0016] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0017] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0018] Example 1: As Figure 1 - Figure 4 As shown, this utility model provides a high-precision worm gear transmission structure, including an outer casing 1, a power unit 2, a worm 5, a worm wheel 6, and an external shaft 8. The output end of the power unit 2 is connected to a power transmission assembly 3, which is connected to the worm 5. The worm 5 and the worm wheel 6 are meshed together. A coupling assembly 7 is fixedly installed in the middle of the worm wheel 6, and the coupling assembly 7 is connected to the external shaft 8. The power transmission assembly 3 includes a first bevel gear 31, a second bevel gear 32, a primary gear 33, a short shaft 34, and a secondary gear 35. The first bevel gear 31 is fixedly installed on the output shaft of the power unit 2. The second bevel gear 32 and the first-stage gear 33 are coaxially installed in the middle of the short shaft 34. The first bevel gear 31 and the second bevel gear 32 are meshed together. The first-stage gear 33 and the second-stage gear 35 are meshed together. The second-stage gear 35 is fixedly installed at the end of the worm gear 5. The short shaft 34 is rotatably installed inside the outer casing 1. An oil storage tank 4 is provided at the bottom of the inner cavity of the outer casing 1. The second bevel gear 32, the first-stage gear 33 and the second-stage gear 35 are all located above the oil storage tank 4.

[0019] The specific settings and functions of this embodiment are described below: The external shaft 8 serves as the input end of the actuator. It is connected via the external spline 81 and internal spline 72, and after being fixed in place, forms a complete power transmission route. The power from the power unit 2 drives the first bevel gear 31 to rotate. The first bevel gear 31 meshes with the second bevel gear 32, causing the gear set consisting of the second bevel gear 32, the first-stage gear 33, and the short shaft 34 to rotate. The first-stage gear 33 meshes with the second-stage gear 35, thereby driving the worm gear 5 to rotate. The pitch circle radius of the first bevel gear 31 is smaller than that of the second bevel gear 32, and the pitch circle radius of the first-stage gear 33 is smaller than that of the second-stage gear 35. Therefore, the power transmission assembly 3 achieves two... The speed is reduced and the torque is increased. The worm gear 5 meshes with the worm wheel 6 and rotates, thereby driving the coupling assembly 7 and the external shaft 8 to rotate, which in turn drives the actuator to work. The oil reservoir 4 stores lubricating oil. The lowest points of the second bevel gear 32 and the second stage gear 35 are in direct contact with the lubricating oil and rotate with the lubricating oil, so that the first bevel gear 31 and the first stage gear 33, which are meshed respectively, are lubricated, reducing friction loss and improving transmission efficiency. The addition of the power transmission assembly 3 before the power path of the worm gear 5 increases the transmission ratio of the entire transmission path. The large transmission ratio can accurately control the rotation angle of the power unit 2 to achieve high-precision positioning and fine adjustment. For precision equipment such as lithography machines, precise positioning and fine adjustment can improve the product processing accuracy.

[0020] Example 2: Figure 1 - Figure 4 As shown, the coupling assembly 7 includes an outer shaft 71, a pin 73, an outer ring 74, and a positioning seat 75. The outer ring 74 is welded to both sides of the worm gear 6. The outer shaft 71 passes through the outer ring 74 and the worm gear 6. The pin 73 is threaded through the hole of the outer ring 74 and the hole of the outer shaft 71 in sequence. Two sets of positioning seats 75 are located on both sides of the worm gear 6 respectively. The positioning seats 75 are rotatably connected to the outer shaft 71 through bearings installed inside them. The positioning seats 75 are fixedly connected to the outer cover 1 by bolts. The inner spline 72 is provided inside the outer shaft 71, and the outer spline 81 is provided at the end of the outer shaft 8. The outer spline 81 and the inner spline 72 are interlocked.

[0021] The overall effect of this embodiment is that the outer sleeve shaft 71 passes sequentially through the middle of the outer ring 74 and the worm gear 6, aligning the outer hole of the outer sleeve shaft 71 with the hole of the outer ring 74. The pin 73 is screwed into the outer ring 74 and the outer sleeve shaft 71 with a screwdriver to fix them together. Two sets of positioning seats 75 are set, located on both sides of the worm gear 6 respectively. Under the connection of the bearings, the outer sleeve shaft 71 is guaranteed to rotate stably. The outer shaft 8 and the outer sleeve shaft 71 are connected by the external spline 81 and the internal spline 72, thereby stably transmitting power to the outer shaft 8 and ensuring the stable operation of the actuator.

[0022] The usage method and working principle of this device: This device uses... Figure 1The device is installed below a fixed carrier such as a workbench. The external shaft 8 serves as the input end of the actuator. It is connected by the external spline 81 and the internal spline 72 and forms a complete power transmission route after being fixed in place. The power of the power unit 2 drives the first bevel gear 31 to rotate. The first bevel gear 31 meshes with the second bevel gear 32, causing the gear set composed of the second bevel gear 32, the first stage gear 33 and the short shaft 34 to rotate. The first stage gear 33 meshes with the second stage gear 35, thereby driving the worm 5 to rotate. The pitch circle radius of the first bevel gear 31 is smaller than that of the second bevel gear 32, and the pitch circle radius of the first stage gear 33 is smaller than that of the second stage gear 35. Therefore, the power transmission component 3 achieves two speed reductions and torque increases. The worm 5 meshes with the worm wheel 6 to rotate, thereby driving the coupling component 7 and the external shaft 8 to rotate, thus driving the actuator to work. The addition of the power transmission component 3 before the power route of the worm 5 increases the transmission ratio of the entire transmission route. The large transmission ratio can accurately control the rotation angle of the power unit 2 to achieve high-precision positioning and fine adjustment.

[0023] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A high-precision transmission structure of a worm, comprising an outer shell (1), a power device (2), a worm (5), a worm wheel (6) and an external shaft (8), characterized in that: The output end of the power device (2) is connected to a power transmission assembly (3), which is connected to a worm (5). The worm (5) is meshed with the worm wheel (6). A coupling assembly (7) is fixedly installed in the middle of the worm wheel (6). The coupling assembly (7) is connected to an external shaft (8). The power transmission assembly (3) includes a first bevel gear (31), a second bevel gear (32), a first-stage gear (33), a short shaft (34), and a second-stage gear (35). The first bevel gear (31) is fixedly installed on the output shaft of the power device (2). The second bevel gear (32) and the first-stage gear (33) are coaxially installed in the middle of the short shaft (34). The first bevel gear (31) is meshed with the second bevel gear (32). The first-stage gear (33) is meshed with the second-stage gear (35). The second-stage gear (35) is fixedly installed at the end of the worm (5).

2. The high-precision transmission structure of a worm according to claim 1, characterized in that: The short shaft (34) is rotatably mounted inside the outer casing (1), and an oil storage tank (4) is provided at the bottom of the inner cavity of the outer casing (1).

3. The high-precision transmission structure of a worm according to claim 2, characterized in that: The second bevel gear (32), the first-stage gear (33) and the second-stage gear (35) are all located above the oil reservoir (4).

4. The high-precision transmission structure of a worm according to claim 3, characterized in that: The coupling assembly (7) includes an outer shaft (71), a pin (73), an outer ring (74), and a positioning seat (75), wherein the outer ring (74) is welded to both sides of the worm gear (6).

5. The worm gear high-precision transmission structure according to claim 4, characterized in that: The outer sleeve shaft (71) passes through the outer ring (74) and the worm gear (6), and the pin (73) is threaded through the hole of the outer ring (74) and the hole of the outer sleeve shaft (71) in sequence.

6. The high-precision transmission structure of a worm according to claim 5, characterized in that: The two sets of positioning seats (75) are located on both sides of the worm gear (6). The positioning seats (75) are rotatably connected to the outer shaft (71) through the bearing installed inside them. The positioning seats (75) are fixedly connected to the outer shell (1) by bolts.

7. The high-precision transmission structure of a worm according to claim 6, characterized in that: The inner spline (72) is provided inside the outer shaft (71), and the outer spline (81) is provided at the end of the outer shaft (8). The outer spline (81) and the inner spline (72) are interlocked.

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