A grid arrangement and ion source apparatus

Abstract

The utility model relates to the technical field of semiconductor processing equipment, concretely relates to a grid device and ion source equipment. The grid device includes conducting assembly, screen grid, acceleration grid, deceleration grid and grid mounting plate, screen grid, acceleration grid and deceleration grid are sequentially laminated and mutually spaced insulation settings, and all are installed in the open end of external ion source shell through grid mounting plate, screen grid, acceleration grid and deceleration grid all are insulated with grid mounting plate setting, and deceleration grid is close to grid mounting plate setting and is electrically connected with external current detection module through conducting assembly to output the current for detecting. The application is through the insulation setting of screen grid, acceleration grid, deceleration grid with grid mounting plate, and adds conducting assembly, and deceleration grid can be electrically connected with external current detection module through conducting assembly, and the current of deceleration grid is detected, so that the performance of ion source is more accurately evaluated, and the increasingly higher process requirement and stability requirement are satisfied.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a grid device and an ion source device. Background Technology

[0002] Radio frequency (RF) ion sources are used in semiconductor processing equipment such as vacuum coating equipment and ion beam etching equipment, and are widely used in high-precision optical fields such as optical communication, visual optics, and navigation guidance. In operation, a high-frequency alternating electric field is applied to the RF electrodes, ionizing the working gas (such as argon or oxygen) to generate plasma. Ions in this plasma are accelerated, focused, and drawn out under the bias voltage of the grid device to form an ion beam. This ion beam bombards the target or the substrate to be etched, thereby achieving ion beam deposition or etching.

[0003] When evaluating the performance of radio frequency (RF) ion sources, the deceleration gate of the grid device is typically grounded. The current in the power supply loop of the DC bias voltage between the screen and acceleration gates in the grid device is monitored to determine if the RF ion source is operating normally, thus assessing its performance. However, as ion sources are used more widely and the process requirements become more stringent, the stability requirements for the ion source also increase. The aforementioned grid device can no longer meet the performance evaluation needs of RF ion sources. Utility Model Content

[0004] This utility model provides a grid device and an ion source equipment to solve the problem that existing grid devices cannot meet the performance evaluation requirements of radio frequency ion sources.

[0005] This utility model discloses a grid device, including a conductive component, a screen grid, an acceleration grid, a deceleration grid, and a grid mounting plate. The screen grid, acceleration grid, and deceleration grid are stacked sequentially and spaced apart and insulated from each other. They are all mounted on the opening end of the outer shell of an external ion source through the grid mounting plate. The screen grid, acceleration grid, and deceleration grid are all insulated from the grid mounting plate. The deceleration grid is disposed close to the grid mounting plate and is electrically connected to an external current detection module through the conductive component to output a current for detection.

[0006] Optionally, the grid device further includes an insulating ring sandwiched between the deceleration grid and the grid mounting plate.

[0007] Optionally, the conductive component includes a guide component and a positioning component. The guide component is electrically connected to and insulated from the deceleration grid and the positioning component and is mounted on the grid mounting plate. The positioning component is insulated from the external ion source housing and can be electrically connected to an external current detection module.

[0008] Optionally, the guide assembly includes a first support post, a first electrode lead, and a second electrode lead. The first support post is fixed to the grid mounting plate. The first electrode lead and the second electrode lead are both insulated and positioned on the first support post. The first electrode lead is electrically connected to the deceleration grid, and the second electrode lead is electrically connected to the first electrode lead and the positioning sub-assembly.

[0009] Optionally, the guide assembly further includes a first insulating element, a second insulating element, and a first fixing element. The first support column is sequentially disposed through the grid mounting plate, the first insulating element, the second insulating element, and the first fixing element. The first insulating element and the second insulating element are sandwiched between the grid mounting plate and the first fixing element. The first electrode lead and the second electrode lead are clamped and positioned between the first insulating element and the second insulating element.

[0010] Optionally, a limiting protrusion is provided on the end face of the first insulating member facing the second insulating member, and a limiting groove is provided on the end face of the second insulating member facing the first insulating member. A first through hole is provided on the first electrode lead, and a second through hole is provided on the second electrode lead. The limiting protrusion passes through the first through hole and the second through hole and is housed in the limiting groove. The groove edge of the limiting groove abuts the first electrode lead and the second electrode lead against the end face of the first insulating member facing the second insulating member. The support column passes through the middle of the limiting protrusion and the bottom wall of the limiting groove.

[0011] Optionally, the positioning sub-assembly includes a second support post, a third electrode lead, a fourth electrode lead, a conductive mounting component, and a second fixing component. The second support post is used to fix the second electrode lead to the inner wall of the external ion source housing. The third electrode lead is insulated and mounted on the second support post. The conductive mounting component passes through the second electrode lead, the third electrode lead, the fourth electrode lead, and the second fixing component to electrically connect the second electrode lead, the third electrode lead, and the fourth electrode lead to each other. The fourth electrode lead can be electrically connected to an external current detection module.

[0012] This utility model also discloses an ion source device, including an ion source housing with an opening, a current detection module, and a grid device as described in any of the above. The grid mounting plate of the grid device is installed at the opening end of the ion source housing. The current detection module is electrically connected to and grounded to the conductive component of the grid device. The current detection module is used to detect the current value of the deceleration grid of the grid device.

[0013] Optionally, the current detection module includes a current detection instrument and a high-frequency filtering circuit. The current detection instrument is used to detect the current value of the deceleration grid of the grid device. Both the current detection instrument and the high-frequency filtering circuit are connected in series between the conductive components of the grid device and the ground terminal.

[0014] Optionally, the high-frequency filtering circuit includes a first inductor, a second inductor, a third inductor, a fourth inductor, a first capacitor, a second capacitor, a third capacitor, and a fourth capacitor. The first inductor, the second inductor, the third inductor, and the fourth inductor are connected in series. The other end of the first inductor is connected to the conductive component of the grid device, and the other end of the fourth inductor serves as the output terminal. The first capacitor, the second capacitor, the third capacitor, and the fourth capacitor are connected in parallel. The first parallel node is connected to the conductive component of the grid device, and the second parallel node is grounded.

[0015] The beneficial effects of the grid device and ion source equipment provided in this utility model embodiment are as follows: the screen grid, the acceleration grid, and the deceleration grid are installed at the opening end of the external ion source shell through the grid mounting plate. By insulating the screen grid, the acceleration grid, and the deceleration grid from the grid mounting plate and adding conductive components, the deceleration grid can be electrically connected to the external current detection module through the conductive components to detect the current of the deceleration grid, so as to achieve a more accurate evaluation of the ion source performance, meet the performance evaluation requirements of radio frequency ion sources, and meet increasingly higher process requirements and stability requirements. Attached Figure Description

[0016] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. In the accompanying drawings: Figure 1 This is a three-dimensional structural schematic diagram of the grid device (omitting the mesh structure in the middle of the screen grid, acceleration grid, and deceleration grid) according to an embodiment of the present utility model; Figure 2 yes Figure 1 The diagram shows an exploded view of the grid device. Figure 3 This is a schematic diagram of the conductive component according to an embodiment of the present utility model; Figure 4 This is a cross-sectional view of the guide assembly of this utility model in the state of being installed on the grid mounting plate according to an embodiment of the present utility model; Figure 5 This is a three-dimensional structural schematic diagram of the ion source device according to an embodiment of the present invention; Figure 6 This is a structural block diagram of the current detection module of this utility model connected to the deceleration grid through conductive components; Figure 7 This is a circuit diagram of the high-frequency filter circuit according to an embodiment of the present invention.

[0017] The labels for the attached figures are as follows: 100. Fence device; 110. Conductive component; 111. Guide assembly; 1111. First support post; 1112. First electrode lead; 1113. Second electrode lead; 1114. First insulating component; 11141. Limiting protrusion; 1115. Second insulating component; 1115a. Limiting groove; 1116. First fixing component; 112. Positioning sub-assembly; 1121. Second support post; 1122. Third electrode lead; 1123. Fourth electrode lead; 1124. Conductive mounting component; 1125. Second fixing component; 120. Grid; 130. Acceleration grid; 140. Deceleration grid; 150. Grid mounting plate; 160. Insulating ring; 200, Ion source casing; 200a, Opening; 300. Current detection module; 310. Current detection instrument; 320. High-frequency filter circuit; L1. First inductor; L2. Second inductor; L3. Third inductor; L4. Fourth inductor; C1. First capacitor; C2. Second capacitor; C3. Third capacitor; C4. Fourth capacitor. Detailed Implementation

[0018] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The preferred embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0019] Existing grid devices typically include a shield grid, an accelerating grid, and a decelerating grid. Each of these grids absorbs a certain amount of electrons or ions, generating its own current. The shield grid and accelerating grid require a DC bias voltage during operation, and their respective currents can be detected in real time through their respective power supply loops. The decelerating grid is connected to ground, usually directly to the process chamber via the ion source's metal casing—essentially, directly grounded.

[0020] However, as ion sources are used more and more widely, the process requirements are also becoming more and more stringent, which in turn places higher demands on the stability of ion sources. Simply monitoring the current from the screen grid and the accelerating grid is no longer sufficient to make more accurate judgments on the performance of ion sources (such as the collimation of the pulled ion beam, working stability, and lifespan prediction).

[0021] Therefore, this utility model embodiment provides a grid device 100 that can extract the current of the deceleration grid 140 for detection. The current of the deceleration grid 140 can help to more accurately judge the performance of the ion source and meet the needs of higher stability and higher process requirements of the ion source.

[0022] This utility model embodiment provides a grid device 100, such as Figure 1 and Figure 2As shown, the grid device 100 includes a conductive component 110, a screen grid 120, an acceleration grid 130, a deceleration grid 140, and a grid mounting plate 150. The screen grid 120, acceleration grid 130, and deceleration grid 140 are stacked sequentially and insulated from each other. They are all mounted on the opening 200a end of the external ion source housing 200 through the grid mounting plate 150. The screen grid 120, acceleration grid 130, and deceleration grid 140 are all insulated from the grid mounting plate 150. The deceleration grid 140 is disposed close to the grid mounting plate 150 and is electrically connected to the external current detection module 300 through the conductive component 110 to output a current for detection.

[0023] The grid device 100 of this utility model is installed at the opening 200a end of the external ion source housing 200 by setting a screen grid 120, an acceleration grid 130 and a deceleration grid 140 through a grid mounting plate 150. By insulating the screen grid 120, acceleration grid 130 and deceleration grid 140 from the grid mounting plate 150 and adding a conductive component 110, the deceleration grid 140 can be electrically connected to the external current detection module 300 through the conductive component 110, thereby detecting the current of the deceleration grid 140, helping to more accurately evaluate the performance of the ion source, meet the performance evaluation requirements of the radio frequency ion source, and meet increasingly higher process requirements and ion source stability requirements.

[0024] When using the grid device 100 of this application embodiment, the grid device 100 is installed at the opening 200a end of the ion source housing 200, and the screen grid 120, accelerating grid 130, and decelerating grid 140 are distributed sequentially along the emission direction of the ion beam. When ions pass through the grid holes of the screen grid 120, they are accelerated in the electric field between the screen grid 120 and the accelerating grid 130 (positive ions move towards the lower potential direction under the electric field force), gaining kinetic energy. The decelerating grid 140 is located outside the accelerating grid 130 (the side closest to the target or workpiece), and its potential is usually higher than that of the accelerating grid 130, forming a reverse electric field with the accelerating grid 130. The reverse electric field will have a converging effect on the high-speed ion beam, counteracting the diffusion of the ion beam caused by the space charge repulsion force, making the ion beam more concentrated. The grid mounting plate 150 serves to fix and support the screen grid 120, accelerating grid 130, and decelerating grid 140, positioning them at the opening 200a end of the external ion source housing 200. When the ion source malfunctions, the current on the deceleration grid 140 will change significantly, while the currents on the screen grid 120 and the acceleration grid 130 may not change much. Therefore, by insulating the deceleration grid 140 from the grid mounting plate 150 and connecting the current of the deceleration grid 140 to an external current detection module 300 through the conductive component 110, the current of the deceleration grid 140 can be monitored, and the performance of the ion source can be evaluated more accurately.

[0025] refer to Figure 1 and Figure 2In an optional embodiment of this application, the grid device 100 further includes an insulating ring 160, which is sandwiched between the deceleration grid 140 and the grid mounting plate 150.

[0026] The insulating ring 160 separates and insulates the grid mounting plate 150 from the deceleration grid 140, further preventing contact between them and ensuring the authenticity of the current detection data from the deceleration grid 140. Additionally, the insulating ring 160 reduces the possibility of gas leakage from the gap between the deceleration grid 140 and the grid mounting plate 150 during ion source operation.

[0027] Optionally, the insulating ring 160 is usually made of insulating materials with moderate hardness, such as ceramic. The ceramic insulating ring 160 can not only achieve the separation and insulation between the grid mounting plate 150 and the deceleration grid 140, but also withstand the high temperature when the ion source is working.

[0028] refer to Figures 1 to 3 In an optional embodiment of this application, the conductive component 110 includes a guide component 111 and a positioning component 112. The guide component 111 is electrically connected to the deceleration grid 140 and the positioning component 112 and is insulatedly mounted on the grid mounting plate 150. The positioning component 112 is insulatedly mounted on the external ion source housing 200 and can be electrically connected to the external current detection module 300.

[0029] The guide component 111 acts as a bridge between the deceleration grid 140 and the positioning sub-component 112, drawing out the current from the deceleration grid 140 and ensuring that the current from the deceleration grid 140 is conducted to the positioning sub-component 112 through a preset path, avoiding contact with the grid mounting plate 150 or other grids. The positioning sub-component 112 is insulated and mounted on the external ion source housing 200, cutting off the current flow path from the deceleration grid 140 to the ion source housing 200 (the ion source housing 200 is usually grounded; direct conduction could cause signal shunting), ensuring the authenticity of the current detection of the deceleration grid 140. Simultaneously, since the positioning sub-component 112 is mounted on the ion source housing 200, it ensures that the connection point with the external current detection module 300 is stable in a preset fixed position, reducing fluctuations in the contact resistance between the current detection module 300 and the positioning sub-component 112, and providing more stable and reliable raw current data for subsequent ion source performance evaluation.

[0030] refer to Figure 3 and Figure 4In an optional embodiment of this application, the guide assembly 111 includes a first support post 1111, a first electrode lead 1112, and a second electrode lead 1113. The first support post 1111 is fixed on the grid mounting plate 150. The first electrode lead 1112 and the second electrode lead 1113 are both insulated and positioned on the first support post 1111. The first electrode lead 1112 is electrically connected to the deceleration grid 140, and the second electrode lead 1113 is electrically connected to the first electrode lead 1112 and the positioning sub-assembly 112.

[0031] The first electrode lead 1112 is directly electrically connected to the deceleration gate 140, responsible for capturing the current signal on the deceleration gate 140 at close range. The second electrode lead 1113 serves as an intermediate conduction carrier, receiving the current from the first electrode lead 1112 and transmitting it to the positioning sub-assembly 112. This two-stage conduction design reduces the risk of poor contact caused by excessive length or assembly deviation of a single lead. The first support post 1111 is fixed on the grid mounting plate 150, providing a stable mounting reference for the first electrode lead 1112 and the second electrode lead 1113. Furthermore, using the first electrode lead 1112 and the second electrode lead 1113 as current conduction carriers maintains conductivity while possessing a certain degree of deformation capability. This allows them to adapt to the slight thermal expansion and contraction displacement of the deceleration gate 140 during operation, and also maintain close contact with the mating parts through their own elasticity, avoiding contact resistance fluctuations caused by rigid connections, thus meeting higher signal accuracy requirements.

[0032] Further reference Figure 3 and Figure 4 The guide assembly 111 also includes a first insulating member 1114, a second insulating member 1115, and a first fixing member 1116. The first support column 1111 is sequentially disposed through the grid mounting plate 150, the first insulating member 1114, the second insulating member 1115, and the first fixing member 1116. The first insulating member 1114 and the second insulating member 1115 are sandwiched between the grid mounting plate 150 and the first fixing member 1116. The first electrode lead 1112 and the second electrode lead 1113 are sandwiched and positioned between the first insulating member 1114 and the second insulating member 1115.

[0033] After the first support post 1111 passes through the grid mounting plate 150, the grid mounting plate 150 becomes the primary fixing point of the first support post 1111, forming a two-end clamping structure with the first fixing member 1116. This positions and installs the first electrode lead 1112 and the second electrode lead 1113 on the first support post 1111, ensuring stable position and good contact of the first electrode lead 1112 and the second electrode lead 1113. Through the clamping of the first insulating member 1114 and the second insulating member 1115, the first electrode lead 1112 and the second electrode lead 1113 can achieve a stable electrical connection, and the first insulating member 1114 and the second insulating member 1115 can prevent the first electrode lead 1112 and the second electrode lead 1113 from contacting the grid mounting plate 150.

[0034] Optionally, the first fixing member 1116 can be a nut to lock the first insulating member 1114, the second insulating member 1115, the first electrode lead 1112, and the second electrode lead 1113 onto the first support post 1111. Optionally, the first support post 1111 is typically made of screws or bolts, which can cooperate with the nut to lock and position the first insulating member 1114, the second insulating member 1115, the first electrode lead 1112, and the second electrode lead 1113. Locking and positioning the first insulating member 1114, the second insulating member 1115, the first electrode lead 1112, and the second electrode lead 1113 onto the grid mounting plate 150 using screws or bolts in conjunction with nuts is simple and convenient.

[0035] Further reference Figure 3 and Figure 4 A limiting protrusion 11141 is provided on the end face of the first insulating member 1114 facing the second insulating member 1115. A limiting groove 1115a is provided on the end face of the second insulating member 1115 facing the first insulating member 1114. A first through hole is provided on the first electrode lead 1112 and a second through hole is provided on the second electrode lead 1113. The limiting protrusion 11141 passes through the first through hole and the second through hole and is housed in the limiting groove 1115a. The groove edge of the limiting groove 1115a presses the first electrode lead 1112 and the second electrode lead 1113 against the end face of the first insulating member 1114 facing the second insulating member 1115. A support column passes through the middle of the limiting protrusion 11141 and the bottom wall of the limiting groove 1115a.

[0036] The limiting protrusion 11141 passes through the first through hole of the first electrode lead 1112 and the second through hole of the second electrode lead 1113, which can isolate and insulate the first electrode lead 1112 and the second electrode lead 1113 from the first support post 1111, preventing the first electrode lead 1112 and the second electrode lead 1113 from forming a current loop with the grid mounting plate 150 through the first support post 1111. After the limiting protrusion 11141 is received in the limiting groove 1115a, the groove edge of the limiting groove 1115a presses the first electrode lead 1112 and the second electrode lead 1113 against the end face of the first insulating member 1114, realizing a stable electrical connection between the first electrode lead 1112 and the second electrode lead 1113. When assembling the guide assembly 111, the assembler only needs to pass through the through holes of each component in sequence to simultaneously complete the assembly and positioning of the grid mounting plate 150, the first insulating component 1114, the second insulating component 1115, the first electrode lead 1112, and the second electrode lead 1113. There is no need to calibrate the position of each component separately, thus shortening the assembly time.

[0037] refer to Figure 3 In an optional embodiment of this application, the positioning sub-assembly 112 includes a second support post 1121, a third electrode lead 1122, a fourth electrode lead 1123, a conductive mounting member 1124, and a second fixing member 1125. The second support post 1121 is used to fix it to the inner wall of the external ion source housing 200. The third electrode lead is insulated and mounted on the second support post 1121. The conductive mounting member 1124 passes through the second electrode lead 1113, the third electrode lead 1122, the fourth electrode lead 1123, and the second fixing member 1125 so that the second electrode lead 1113, the third electrode lead 1122, and the fourth electrode lead 1123 are electrically connected to each other. The fourth electrode lead 1123 can be electrically connected to the external current detection module 300.

[0038] The second support column 1121 is fixed to the inner wall of the ion source housing 200. Its length and installation angle can be designed according to the internal space dimensions of the ion source housing 200, providing a stable mounting reference for the third electrode lead 1122 and the fourth electrode lead 1123. The third electrode lead 1122 is electrically connected to the second electrode lead 1113 of the guide assembly 111, responsible for receiving the current signal from the deceleration grid 140; the fourth electrode lead 1123 serves as the output terminal, transmitting the current to the external current detection module 300. This relay-type conduction allows for flexible path adjustment based on the internal spatial layout of the ion source housing 200. Furthermore, using the third electrode lead 1122 and the fourth electrode lead 1123 as current carriers maintains conductivity while possessing a certain degree of deformation capability. This allows them to adapt to temperature changes within the ion source and maintain tight contact with the docking components through their own elasticity, avoiding contact resistance fluctuations caused by rigid connections and meeting higher signal accuracy requirements.

[0039] In terms of assembly, the conductive mounting component 1124 sequentially passes through the second electrode lead 1113, the third electrode lead 1122, and the fourth electrode lead 1123, achieving direct electrical connection between the three via metal contact. The conductive mounting component 1124 not only serves as a carrier for current conduction but also indirectly fixes the second electrode lead 1113, the third electrode lead 1122, and the fourth electrode lead 1123 to the second support post 1121 via the second fixing component 1125. This design eliminates the need for separate conductive connectors and fixing structures, reducing the number of parts (e.g., eliminating the need for additional wires or clips), making the overall structure more compact, especially suitable for the confined space inside the ion source housing 200. The locking force of the second fixing component 1125 is evenly transmitted to the contact surface of each electrode lead through the conductive mounting component 1124, preventing lead deformation (such as dents in thin sheet-like leads) due to excessive local pressure. Meanwhile, the stress points of the second electrode lead 1113, the third electrode lead 1122, and the fourth electrode lead 1123 are concentrated around the conductive mounting component 1124, reducing stress concentration at the edges and extending the fatigue life of the second electrode lead 1113, the third electrode lead 1122, and the fourth electrode lead 1123.

[0040] Optionally, the conductive mounting component 1124 can be a conductive copper bolt, conductive rivet, etc. The second fixing component 1125 can be a nut, which locks the second electrode lead 1113, the third electrode lead 1122, and the fourth electrode lead 1123 onto the conductive mounting component 1124. The locking and positioning of the second electrode lead 1113, the third electrode lead 1122, and the fourth electrode lead 1123 can be quickly achieved through the engagement of the conductive copper bolt or conductive rivet and the nut, making assembly simple and convenient.

[0041] This utility model embodiment also provides an ion source device. (See reference) Figure 1 , Figure 5 and Figure 6 The ion source device includes an ion source housing 200 with an opening 200a, a current detection module 300, and a grid device 100 as described above. The grid mounting plate 150 of the grid device 100 is installed at the opening 200a end of the ion source housing 200. The current detection module 300 is electrically connected to and grounded to the conductive component 110 of the grid device 100. The current detection module 300 is used to detect the current value of the deceleration grid 140 of the grid device 100.

[0042] In this embodiment of the ion source equipment, the grid device 100 is installed at the opening 200a end of the ion source housing 200 via a grid mounting plate 150, consisting of a screen grid 120, an acceleration grid 130, and a deceleration grid 140. By insulating the screen grid 120, acceleration grid 130, and deceleration grid 140 from the grid mounting plate 150 and adding a conductive component 110, the deceleration grid 140 can be electrically connected to the current detection module 300 via the conductive component 110. The current detection module 300 is also grounded, thereby detecting the current of the deceleration grid 140 to achieve a more accurate evaluation of the ion source performance and meet increasingly higher process and stability requirements.

[0043] The grid device 100 in the ion source device has the same structure and beneficial effects as the grid device 100 in the foregoing embodiments. The structure and beneficial effects of the grid device 100 have been described in detail in the foregoing embodiments and will not be repeated here.

[0044] refer to Figure 5 and Figure 6 In an optional embodiment of this application, the current detection module 300 includes a current detection instrument 310 and a high-frequency filter circuit 320. The current detection instrument 310 is used to detect the current value of the deceleration grid 140 of the grid device 100. The current detection instrument 310 and the high-frequency filter circuit 320 are both connected in series between the conductive component 110 of the grid device 100 and the ground terminal.

[0045] The current detection instrument 310 can detect and acquire the current value of the deceleration grid 140 of the grid device 100 for subsequent evaluation of the ion source performance. Since the grid device 100 operates in a radio frequency environment, it is subject to high-frequency electromagnetic interference. This interference can be superimposed on the actual current signal of the deceleration grid 140, causing misreading by the current detection instrument 310. To solve this problem, this embodiment of the application provides a high-frequency filtering circuit 320, which can filter high-frequency current, ensuring that the detected current is not interfered with, guaranteeing the authenticity of the detected current, and further improving the accuracy of the ion source performance evaluation.

[0046] refer to Figure 6 and Figure 7 In an optional embodiment of this application, the high-frequency filter circuit 320 includes a first inductor L1, a second inductor L2, a third inductor L3, a fourth inductor L4, a first capacitor C1, a second capacitor C2, a third capacitor C3, and a fourth capacitor C4. The first inductor L1, the second inductor L2, the third inductor L3, and the fourth inductor L4 are connected in series. The other end of the first inductor L1 is connected to the conductive component 110 of the grid device 100, and the other end of the fourth inductor L4 serves as the output terminal. The first capacitor C1, the second capacitor C2, the third capacitor C3, and the fourth capacitor C4 are connected in parallel. The first parallel node is connected to the conductive component 110 of the grid device 100, and the second parallel node is grounded.

[0047] A high-frequency filter circuit 320 is constructed by setting up a first inductor L1, a second inductor L2, a third inductor L3, a fourth inductor L4, a first capacitor C1, a second capacitor C2, a third capacitor C3, and a fourth capacitor C4. Inductors have the characteristic of "passing low frequencies and blocking high frequencies," and the higher the frequency, the greater the inductive reactance. When a current signal containing high-frequency interference is introduced from the conductive component 110, the low-frequency real current can pass smoothly through the first inductor L1, the second inductor L2, the third inductor L3, and the fourth inductor L4, while the high-frequency interference will be attenuated step by step due to the sharp increase in inductive reactance, thereby filtering out the high-frequency current. At the same time, the first capacitor C1, the second capacitor C2, the third capacitor C3, and the fourth capacitor C4 are connected in parallel, with one end connected to the conductive component 110 and the other end grounded, forming a high-frequency discharge channel. The high-frequency interference signal will preferentially flow to the ground through the first capacitor C1, the second capacitor C2, the third capacitor C3, and the fourth capacitor C4. The parallel connection of the first capacitor C1, the second capacitor C2, the third capacitor C3, and the fourth capacitor C4 increases the discharge capability of high-frequency signals. Even when faced with short-duration strong high-frequency pulses (such as spike interference generated by plasma discharge), it can quickly absorb them, preventing interference signals from breaking through the inductance barrier. Therefore, the high-frequency filter circuit 320 of this embodiment can filter high-frequency current, ensuring that the detected current is not disturbed and guaranteeing the authenticity of the detected current.

[0048] In an optional embodiment of this application, the current detection instrument 310 can also be connected to a terminal device, such as a computer or host computer, and the terminal device can receive and record the current value detected and acquired by the current detection instrument 310.

[0049] The ion source device in this embodiment of the utility model can be a device that uses an ion source, such as a vacuum coating device or an ion beam etching device.

[0050] It should be understood that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Those skilled in the art can modify the technical solutions described in the above embodiments, or make equivalent substitutions for some of the technical features; and all such modifications and substitutions should fall within the protection scope of the appended claims of this utility model.

Claims

1. A grid device, characterized in that, The device includes a conductive component, a screen grid, an acceleration grid, a deceleration grid, and a grid mounting plate. The screen grid, acceleration grid, and deceleration grid are stacked sequentially and spaced apart and insulated from each other. They are all mounted on the opening end of the external ion source housing through the grid mounting plate. The screen grid, acceleration grid, and deceleration grid are all insulated from the grid mounting plate. The deceleration grid is positioned close to the grid mounting plate and is electrically connected to an external current detection module through the conductive component to output a current for detection.

2. The grid device according to claim 1, characterized in that, The grid device also includes an insulating ring, which is sandwiched between the deceleration grid and the grid mounting plate.

3. The grid device according to claim 1, characterized in that, The conductive component includes a guide component and a positioning component. The guide component is electrically connected to and insulated from the deceleration grid and the positioning component and is mounted on the grid mounting plate. The positioning component is insulated from the external ion source housing and can be electrically connected to an external current detection module.

4. The grid device according to claim 3, characterized in that, The guide assembly includes a first support post, a first electrode lead, and a second electrode lead. The first support post is fixed to the grid mounting plate. The first electrode lead and the second electrode lead are both insulated and positioned on the first support post. The first electrode lead is electrically connected to the deceleration grid, and the second electrode lead is electrically connected to the first electrode lead and the positioning sub-assembly.

5. The grid device according to claim 4, characterized in that, The guide assembly further includes a first insulating element, a second insulating element, and a first fixing element. The first support column is sequentially disposed through the grid mounting plate, the first insulating element, the second insulating element, and the first fixing element. The first insulating element and the second insulating element are sandwiched between the grid mounting plate and the first fixing element. The first electrode lead and the second electrode lead are clamped and positioned between the first insulating element and the second insulating element.

6. The grid device according to claim 5, characterized in that, A limiting protrusion is provided on the end face of the first insulating member facing the second insulating member, and a limiting groove is provided on the end face of the second insulating member facing the first insulating member. A first through hole is provided on the first electrode lead, and a second through hole is provided on the second electrode lead. The limiting protrusion passes through the first through hole and the second through hole and is housed in the limiting groove. The groove edge of the limiting groove abuts the first electrode lead and the second electrode lead against the end face of the first insulating member facing the second insulating member. The support column passes through the middle of the limiting protrusion and the bottom wall of the limiting groove.

7. The grid device according to claim 4, characterized in that, The positioning sub-assembly includes a second support post, a third electrode lead, a fourth electrode lead, a conductive mounting component, and a second fixing component. The second support post is used to fix the second electrode lead to the inner wall of the external ion source housing. The third electrode lead is insulated and mounted on the second support post. The conductive mounting component passes through the second electrode lead, the third electrode lead, the fourth electrode lead, and the second fixing component to electrically connect the second electrode lead, the third electrode lead, and the fourth electrode lead to each other. The fourth electrode lead can be electrically connected to an external current detection module.

8. An ion source device, characterized in that, The device includes an ion source housing with an opening, a current detection module, and a grid device as described in any one of claims 1-7. The grid mounting plate of the grid device is installed at the opening end of the ion source housing. The current detection module is electrically connected to and grounded to the conductive component of the grid device. The current detection module is used to detect the current value of the deceleration grid of the grid device.

9. The ion source device according to claim 8, characterized in that, The current detection module includes a current detection instrument and a high-frequency filtering circuit. The current detection instrument is used to detect the current value of the deceleration grid of the grid device. Both the current detection instrument and the high-frequency filtering circuit are connected in series between the conductive components of the grid device and the ground terminal.

10. The ion source device according to claim 9, characterized in that, The high-frequency filter circuit includes a first inductor, a second inductor, a third inductor, a fourth inductor, a first capacitor, a second capacitor, a third capacitor, and a fourth capacitor. The first inductor, the second inductor, the third inductor, and the fourth inductor are connected in series. The other end of the first inductor is connected to the conductive component of the grid device, and the other end of the fourth inductor serves as the output terminal. The first capacitor, the second capacitor, the third capacitor, and the fourth capacitor are connected in parallel. The first parallel node is connected to the conductive component of the grid device, and the second parallel node is grounded.

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