Wafer sawing machine gantry main structure
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-15
- Publication Date
- 2026-08-11
AI Technical Summary
[0003]为了克服现有技术的上述缺陷，本实用新型提供一种晶圆划片机龙门主体结构，旨在解决机架表面粗糙度较差，在水雾环境中容易表面积水，堆积切削杂质，制造成本高的问题
[0013]本实用新型水泥填充底座提供高刚性和承载能力，抑制变形。橡胶垫隔离外部振动，保护大理石。铸铁立柱提供强度并吸收振动。大理石本身稳定性好，不易变形，受温度影响小。大理石底座/横梁平面度高(≤0.5μm)，为微米级切割提供基础。整体结构刚性和减震设计确保切割过程精度稳定。底座外侧凸起支架方便安装水路、气路、电控箱，不占工作空间，布局合理。水泥填充简化结构，降低成本(替代加强筋)。铸铁立柱适合批量生产，成本低，加工装配便利。大理石耐磨损、易清洁、寿命长、不生锈。
Smart Images
Figure CN224616696U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wafer dicing machine technology, specifically a gantry main structure for a wafer dicing machine. Background Technology
[0002] Existing semiconductor equipment racks are difficult to move and bulky. For high-precision wafer dicing machines, this can affect the overall assembly accuracy, potentially leading to unstable equipment movement, incoordination between components, and increased risk of equipment failure. Furthermore, existing racks have poor surface roughness, making them prone to water accumulation and the buildup of cutting impurities in wet environments. Additional surface treatment is required, increasing manufacturing costs. Utility Model Content
[0003] In order to overcome the above-mentioned defects of the prior art, this utility model provides a gantry main structure for a wafer dicing machine, which aims to solve the problems of poor surface roughness of the frame, easy water accumulation on the surface in a water mist environment, accumulation of cutting impurities, and high manufacturing cost.
[0004] This utility model provides a gantry main structure for a wafer dicing machine, including: a frame welding base, a rubber pad, a marble base, a lower bed column, an upper bed column, and a marble crossbeam. The rubber pad is fixedly installed on the upper side of the frame welding base, and the marble base is fixedly installed on the upper side of the frame welding base and located above the rubber pad. The lower bed column is symmetrically fixedly installed on both sides of the upper part of the marble base, and the upper bed column is fixedly installed on the upper side of the lower bed column. The marble crossbeam is fixedly installed between the upper bed columns and is parallel to the upper side of the marble base.
[0005] In a preferred embodiment, the frame welding base is a rectangular frame structure, and the internal cavity of the frame welding base is filled with cement.
[0006] In a preferred embodiment, raised supports are uniformly fixed on the outer side of the frame welding base.
[0007] In a preferred embodiment, the upper side of the rubber pad is provided with anti-slip texture that contacts the lower side of the marble base.
[0008] In a preferred embodiment, the flatness of the upper and side portions of the marble base is ≤0.5μm.
[0009] In a preferred embodiment, the lower uprights and upper uprights of the bed are made of cast iron.
[0010] In a preferred embodiment, both the upper side of the frame welding base and the marble base are provided with guide rail mounting grooves.
[0011] In a preferred embodiment, mounting pads are fixedly provided on the upper side of each of the protruding brackets.
[0012] The technical effects and advantages of this utility model are as follows:
[0013] This utility model features a cement-filled base that provides high rigidity and load-bearing capacity, suppressing deformation. Rubber pads isolate external vibrations, protecting the marble. Cast iron columns provide strength and absorb vibrations. Marble itself is stable, not easily deformed, and minimally affected by temperature. The marble base / beam has high flatness (≤0.5μm), providing a foundation for micron-level cutting. The overall structural rigidity and vibration-damping design ensure stable precision during the cutting process. The raised brackets on the outer side of the base facilitate the installation of water lines, air lines, and electrical control boxes, saving workspace and providing a rational layout. Cement filling simplifies the structure and reduces costs (replacing reinforcing ribs). Cast iron columns are suitable for mass production, offering low cost and convenient processing and assembly. Marble is wear-resistant, easy to clean, long-lasting, and rust-free. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the structure of this utility model;
[0015] Figure 2 This is a schematic diagram of the welded base structure of the frame after cement removal according to this utility model;
[0016] Figure 3 This is a schematic diagram of the structure of this utility model after removing the welded base of the frame;
[0017] For example: 1-Frame welding base; 2-Rubber pad; 3-Marble base; 4-Lower bed column; 5-Upper bed column; 6-Marble crossbeam; 7-Cement; 8-Raised bracket; 9-Anti-slip texture; 10-Guide rail mounting groove; 11-Mounting pad. Detailed Implementation
[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0019] like Figure 1 , Figure 2 and Figure 3 As shown
[0020] A gantry structure for a wafer dicing machine, characterized in that it comprises: a frame welding base 1, a rubber pad 2, a marble base 3, a lower bed column 4, an upper bed column 5, and a marble crossbeam 6. The rubber pad 2 is fixedly disposed on the upper side of the frame welding base 1, the marble base 3 is fixedly disposed on the upper side of the frame welding base 1 and located above the rubber pad 2, the lower bed column 4 is symmetrically fixedly disposed on both sides of the upper part of the marble base 3, the upper bed column 5 is fixedly disposed on the upper side of the lower bed column 4, and the marble crossbeam 6 is fixedly disposed between the upper bed columns 5 and is arranged parallel to the upper side of the marble base 3.
[0021] The frame welding base 1 has a rectangular frame structure, and the internal cavity of the frame welding base 1 is filled with cement 7. Raised supports 8 are evenly fixed to the outer side of the frame welding base 1. Mounting shims 11 are fixed to the upper side of each raised support 8.
[0022] The rubber pad 2 has anti-slip texture 9 on its upper side that contacts the lower side of the marble base 3. The flatness of the upper and side parts of the marble base 3 is ≤0.5μm. The lower bed column 4 and the upper bed column 5 are made of cast iron. The upper side of both the frame welding base 1 and the marble base 3 is provided with guide rail mounting grooves 10.
[0023] The frame welded base 1, with its internal cavity filled with cement 7, enhances the stability and load-bearing capacity of the entire structure. It also helps reduce vibration and deformation, especially beneficial for high-precision or frequently moved wafer dicing equipment. This simplifies the structure and reduces manufacturing costs, replacing traditional reinforcing ribs and support structures. The raised brackets 8 on both sides of the frame welded base 1 facilitate the placement of water lines, air lines, electrical control boxes, etc., without occupying workbench space, thus optimizing space utilization. The rubber pads 2 provide shock absorption and anti-slip properties, reducing direct impact and scratches on the marble surface.
[0024] Marble base and marble crossbeam; the marble boasts high precision, with a flatness below 0.5µm. This reduces machine vibration during wafer dicing, ensuring micron-level accuracy. It offers long service life, excellent stability, resistance to deformation, and rust prevention. It also features a low coefficient of linear expansion and minimal temperature influence. The finely ground and polished marble facilitates cleaning and maintenance, removing dust and impurities, is unaffected by moisture, and exhibits excellent flatness stability.
[0025] The lower column 4 and upper column 5 are made of cast iron, resulting in low cost, high efficiency, and the ability to produce a large number of identical castings. They have small machining allowances and high-precision ground assembly contact surfaces. This reduces assembly steps and potential connection problems, improving assembly stability.
[0026] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A gantry main structure for a wafer dicing machine, characterized in that, include: The machine frame welding base (1), rubber pad (2), marble base (3), bed lower column (4), bed upper column (5) and marble crossbeam (6) are provided. The rubber pad (2) is fixedly installed on the upper side of the machine frame welding base (1). The marble base (3) is fixedly installed on the upper side of the machine frame welding base (1) and located above the rubber pad (2). The bed lower column (4) is symmetrically fixed on both sides of the upper part of the marble base (3). The bed upper column (5) is fixedly installed on the upper side of the bed lower column (4). The marble crossbeam (6) is fixedly installed between the bed upper columns (5) and is parallel to the upper side of the marble base (3).
2. The gantry main structure of a wafer dicing machine according to claim 1, characterized in that, The frame welding base (1) is a rectangular frame structure, and the internal cavity of the frame welding base (1) is filled with cement (7).
3. The gantry main structure of a wafer dicing machine according to claim 1 or 2, characterized in that, The outer side of the frame welding base (1) is uniformly fixed with protruding brackets (8).
4. The gantry main structure of a wafer dicing machine according to claim 1, characterized in that, The rubber pad (2) has anti-slip texture (9) on its upper side that contacts the lower side of the marble base (3).
5. The gantry main structure of a wafer dicing machine according to claim 1, characterized in that, The flatness of the upper and side parts of the marble base (3) is ≤0.5μm.
6. The gantry main structure of a wafer dicing machine according to claim 1, characterized in that, The lower support column (4) and the upper support column (5) of the bed are made of cast iron.
7. The gantry main structure of a wafer dicing machine according to claim 1, characterized in that, The upper side of both the frame welding base (1) and the marble base (3) is provided with a guide rail mounting groove (10).
8. The gantry main structure of a wafer dicing machine according to claim 3, characterized in that, Mounting pads (11) are fixedly provided on the upper side of the protruding bracket (8).