Vacuum coating line

Abstract

The utility model discloses a vacuum coating production line, including more than one production unit, and production unit includes transfer room and with the multiple process chambers of transfer room connection, and multiple process chambers surrounds the setting of transfer room, and is equipped with the material import and export with first openable and closable door between each process chamber and transfer room, and the transfer room is connected with the feeding and discharging device for supplying and receiving workpiece carrier, and is equipped with the transfer device for transferring workpiece carrier between feeding and discharging device and each process chamber in the transfer room. The vacuum coating production line has the advantages of simple structure, low manufacturing and maintenance cost, low control difficulty, stable and reliable workpiece carrier transfer and the like.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and specifically to a vacuum coating production line. Background Technology

[0002] Multi-chamber vacuum coating production lines are core equipment for achieving large-scale, high-efficiency, and high-quality production in the modern coating industry. These lines typically consist of multiple sequentially connected process chambers and a supporting workpiece carrier conveyor system.

[0003] In current mainstream multi-chamber vacuum coating production line designs, the process chambers are generally arranged in series along a straight line. Each process chamber is equipped with an independently driven conveying device (such as rollers, chains, or conveyors). When the workpiece carrier needs to be transferred between process chambers, the transfer is achieved by connecting the ends of the conveying devices in adjacent process chambers.

[0004] However, this traditional layout and conveying method has significant drawbacks:

[0005] 1. Low space utilization: The linear series arrangement causes the overall length of the production line to increase linearly with the number of process chambers, occupying a huge amount of factory space. Especially when there are many process steps (large number of process chambers), the excessively long linear layout places stringent requirements on the site, and the problem of wasted space is particularly prominent.

[0006] 2. The conveying system is complex, costly, and difficult to control: Each process chamber needs to be equipped with an independent drive mechanism (motor, transmission, control system, etc.), resulting in a complex equipment structure and a large number of parts.

[0007] 3. Multiple independent drive systems significantly increase the manufacturing and maintenance costs of the equipment. Coordinating the actions of multiple independent drive units to achieve precise synchronization and relay transmission involves complex control logic, making debugging and maintenance difficult. Furthermore, the conveying system, located within the process chamber, occupies considerable space, increasing the overall structural dimensions of the process chamber and affecting the installation and layout of other functional devices within it.

[0008] 4. Poor stability and positioning accuracy of the workpiece carrier: When the workpiece carrier is transferred between adjacent chambers, it needs to be handed over multiple times between two independently driven conveying devices. Each handover carries the risk of accumulated positioning errors, making it difficult to guarantee high-precision and high-repeatability positioning of the carrier within the chamber and during the handover process. Synchronization deviations or mechanical backlashes between drive units can easily cause the carrier to shake, jam, or shift its position during transfer. Utility Model Content

[0009] The technical problem to be solved by this utility model is to overcome the shortcomings of the existing technology and provide a vacuum coating production line with simple structure, low manufacturing and maintenance costs, low control difficulty, and stable and reliable workpiece carrier transfer.

[0010] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0011] A vacuum coating production line includes one or more production units. Each production unit includes a transfer chamber and multiple process chambers connected to the transfer chamber. The multiple process chambers are arranged around the transfer chamber. Each process chamber and the transfer chamber are provided with a material inlet and outlet with a first openable and closable door. The transfer chamber is connected to an inlet and outlet device for supplying and receiving workpiece carriers. The transfer chamber is provided with a transfer device for transferring workpiece carriers between the inlet and outlet device and each process chamber.

[0012] As a further improvement to the above technical solution:

[0013] The transfer device includes a rotating base and one or more transfer manipulators fixedly mounted on the rotating base. The rotating base is rotatably mounted in the transfer chamber and can move the transfer manipulators to the feeding / discharging device and any material inlet / outlet by rotation. The transfer device also includes a rotation drive assembly for driving the rotating base to rotate.

[0014] Each material inlet and outlet is evenly spaced around the rotation axis of the rotating seat. Multiple transfer manipulators are evenly spaced around the rotation axis of the rotating seat. The included angle between two adjacent transfer manipulators is an integer multiple of the included angle between two adjacent material inlets and outlets.

[0015] The transfer robot includes a base, a telescopic arm, and a clamp for picking up and placing workpieces. The base is fixedly mounted on a rotating seat. The telescopic arm is mounted on the base in a horizontally reciprocating manner via a translation component. The clamp is mounted on the telescopic arm in a height-adjustable manner via a lifting component.

[0016] The translation component includes two first guide mechanisms disposed on both sides of the telescopic arm and a first drive mechanism for driving the telescopic arm to reciprocate horizontally. The first guide mechanism includes a first guide rail mounted on the telescopic arm and a first slider mounted on the base, with the first guide rail and the first slider providing a guiding fit. The first drive mechanism includes a first rack mounted on the telescopic arm and a first gear mounted on the base and driven to rotate by a first motor, with the first gear meshing with the first rack.

[0017] The lifting assembly includes two second guide mechanisms and a second drive mechanism for driving the lifting motion of the clamp. The second guide mechanism includes a second guide rail mounted on the clamp and a second slider mounted on the telescopic arm. The second guide rail and the second slider are guided and engaged. The second drive mechanism includes a second rack mounted on the clamp and a second gear mounted on the telescopic arm and driven to rotate by a second motor. The second gear meshes with the second rack.

[0018] The feeding and discharging device includes a feeding and discharging chamber and a first carrier assembly installed in the feeding and discharging chamber. The feeding and discharging chamber has two first inlets and outlets with second openable and closable doors, one of which is connected to a transfer chamber.

[0019] The first carrier assembly includes a first carrier rotatably mounted in the inlet / outlet chamber. The first carrier is provided with a plurality of first placement mechanisms for placing workpiece carriers. The plurality of first placement mechanisms are arranged at intervals around the rotation axis of the first carrier.

[0020] The feeding and discharging device includes a feeding chamber and a discharging chamber. A second carrier assembly is installed in both the feeding chamber and the discharging chamber. Both the feeding chamber and the discharging chamber are provided with two second inlets and outlets with a third openable and closable door. One of the second inlets and outlets of the feeding chamber and the discharging chamber is connected to a transfer chamber.

[0021] The second carrier assembly includes a rotatably mounted second carrier, which is provided with a plurality of second placement mechanisms for placing workpiece carriers, and the plurality of second placement mechanisms are arranged at intervals around the rotation axis of the second carrier.

[0022] The vacuum coating production line has two or more production units. The transfer chamber of each production unit is connected to the transfer chamber of at least one production unit through an intermediate chamber. A third carrier assembly is installed in the intermediate chamber. The intermediate chamber has two third inlets and outlets with fourth openable and closable doors. The two third inlets and outlets are respectively connected to the two transfer chambers connected to the intermediate chamber.

[0023] Two or more production units are connected in sequence, and only the two production units at both ends are equipped with feeding and discharging devices.

[0024] Compared with the prior art, the advantages of this utility model are:

[0025] This invention relates to a vacuum coating production line that arranges multiple process chambers around a transfer chamber. A transfer device is installed in the transfer chamber to transfer workpiece carriers. The overall structure is small, with low site requirements. Only one transfer device is needed to transfer workpiece carriers between the feeding and discharging devices and each process chamber. The structure is simple, the equipment manufacturing and maintenance costs are low, and the control difficulty is low. The workpiece carrier does not need to be handed over multiple times during the transfer between the feeding and discharging devices and each process chamber, which can ensure high precision and high repeatability of the workpiece carrier positioning during the transfer process, improve the accuracy and stability of the workpiece carrier transfer. At the same time, there is no need to set up a conveying system in the process chamber, which can reduce the size of the process chamber and facilitate the installation and layout of other functional devices in the process chamber. Attached Figure Description

[0026] Figure 1 This is a top view of the vacuum coating production line in Example 1.

[0027] Figure 2 for Figure 1 Schematic diagram of the AA section structure.

[0028] Figure 3 This is a top sectional view of the vacuum coating production line in Example 1.

[0029] Figure 4 This is a three-dimensional structural diagram of the transfer robot in Example 1.

[0030] Figure 5 This is a schematic diagram of the main structure of the transfer robot in Example 1.

[0031] Figure 6 This is a top view of the vacuum coating production line in Example 2.

[0032] Figure 7 This is a top sectional view of the vacuum coating production line in Example 2.

[0033] Figure 8 This is a top view of the vacuum coating production line in Example 3.

[0034] Legend:

[0035] 1. Process chamber; 2. Transfer chamber; 3. Material inlet / outlet; 31. First openable / closable door; 4. Feeding / discharging device; 41. Feeding / discharging chamber; 42. First inlet / outlet; 421. Second openable / closable door; 43. First support frame; 431. First placement mechanism; 44. Feeding chamber; 45. Discharging chamber; 46. Second inlet / outlet; 461. Third openable / closable door; 47. Second support frame; 471. Second placement mechanism; 5. Transfer device; 51. Rotating seat; 52. Transfer robot; 521. Base; 522. Telescopic arm; 523. Fixture; 524. Translation component; 525. Lifting component; 53. Rotation drive component; 6. Intermediate chamber; 61. Third inlet / outlet; 611. Fourth openable / closable door; 7. Loading / unloading robot; 100. Workpiece carrier. Detailed Implementation

[0036] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0037] Example 1

[0038] like Figures 1 to 3 As shown, the vacuum coating production line of this embodiment includes a production unit, which includes a transfer chamber 2 and multiple process chambers 1 connected to the transfer chamber 2. The process chambers 1 are not equipped with a conveying system for conveying the workpiece carrier 100. The multiple process chambers 1 are arranged around the transfer chamber 2. Each process chamber 1 and the transfer chamber 2 are provided with a material inlet / outlet 3 with a first openable / closable door 31. The transfer chamber 2 is connected to an inlet / outlet device 4 for supplying and receiving the workpiece carrier 100. The transfer chamber 2 is provided with a transfer device 5 for transferring the workpiece carrier 100 between the inlet / outlet device 4 and each process chamber 1. This vacuum coating production line arranges multiple process chambers 1 around a transfer chamber 2. A transfer device 5 is installed in the transfer chamber 2 to transfer the workpiece carrier 100. The overall space occupied is small, the site requirements are low, and only one transfer device 5 is needed to transfer the workpiece carrier 100 between the feeding and discharging device 4 and each process chamber 1. The structure is simple, the equipment manufacturing and maintenance costs are low, and the control difficulty is low. The workpiece carrier 100 does not need to be handed over multiple times during the transfer process between the feeding and discharging device 4 and each process chamber 1, which can ensure high precision and high repeatability of the workpiece carrier 100 positioning during the transfer process, improve the accuracy and stability of the workpiece carrier 100 transfer. At the same time, there is no need to set up a conveying system in the process chamber 1, which can reduce the size of the process chamber 1 and facilitate the installation and layout of other functional devices in the process chamber 1.

[0039] The first openable and closable door 31 in this embodiment can be an isolation door that completely isolates the process chamber 1 and the transfer chamber 2 when closed, such as a gate valve, or it can be a door that does not completely isolate the process chamber 1 and the transfer chamber 2 when closed, but only blocks the material inlet and outlet 3, such as a roller shutter.

[0040] In this embodiment, the transfer device 5 includes a rotating seat 51 and multiple transfer manipulators 52 fixedly mounted on the rotating seat 51. The rotating seat 51 is rotatably mounted in the transfer chamber 2. The rotating seat 51 can move the transfer manipulators 52 to the feeding / discharging device 4 and any material inlet / outlet 3 by rotating. The transfer device 5 also includes a rotation drive assembly 53 for driving the rotating seat 51 to rotate. The rotation drive assembly 53 drives the rotating seat 51 to rotate, which allows the rotating seat 51 to move the transfer manipulators 52 to the feeding / discharging device 4 and any material inlet / outlet 3, thereby picking up and placing the workpiece carrier 100 in the feeding / discharging device 4 and each process chamber 1. This transfer device 5 only needs to be equipped with one rotating seat 51, one set of rotation drive assemblies 53 and multiple transfer manipulators 52 to realize the transfer of the workpiece carrier 100 between the feeding / discharging device 4 and each process chamber 1. It has the advantages of simple and compact structure, low cost and easy control. Multiple transfer robots 52 are installed on the rotating base 51, allowing each robot 52 to transfer the workpiece carrier 100 between two or more nearby workstations. This reduces the number and amplitude of rotations of the rotating base 51, thereby improving production efficiency. In this embodiment, four transfer robots 52 are specifically used to transfer the workpiece carrier 100 between seven process chambers 1 and one feeding / discharging device 4. In other embodiments, only one or a different number of transfer robots 52 may be used, and the number of process chambers 1 may also be set according to requirements and within the limits of installation space.

[0041] In this embodiment, the material inlets and outlets 3 are evenly spaced around the rotation axis of the rotating seat 51. Multiple transfer manipulators 52, spaced around the rotation axis of the rotating seat 51, are mounted on the rotating seat 51. The angle between two adjacent transfer manipulators 52 is an integer multiple of the angle between two adjacent material inlets and outlets 3. This ensures that when the rotating seat 51 rotates so that any one transfer manipulator 52 aligns with a material inlet or outlet 3, all other transfer manipulators 52 also align with their respective material inlets and outlets 3. Thus, with one rotation of the rotating seat 51, two or more transfer manipulators 52 can simultaneously load and unload the workpiece carrier 100 between different process chambers 1, greatly improving production efficiency. Preferably, the angle between two adjacent transfer manipulators 52 is the same as the angle between two adjacent material inlets and outlets 3, so that with one rotation of the rotating seat 51, multiple transfer manipulators 52 can transfer the workpiece carrier 100 from one set of sequentially adjacent process chambers 1 to another set of sequentially adjacent process chambers 1.

[0042] In this embodiment, as Figure 4 and Figure 5As shown, the transfer robot 52 includes a base 521, a telescopic arm 522, and a clamp 523 for picking up and placing the workpiece carrier 100. The base 521 is fixedly mounted on a rotating seat 51. The telescopic arm 522 is mounted on the base 521 via a translation component 524, enabling horizontal reciprocating motion. The clamp 523 is mounted on the telescopic arm 522 via a lifting component 525, allowing adjustable height. The translation component 524 drives the telescopic arm 522 to reciprocate horizontally, carrying the workpiece carrier 100 into and out of the process chamber 1. The lifting component 525 drives the clamp 523 to move to different heights, lowering and raising the workpiece carrier 100. This enables the picking up and placing of the workpiece carrier 100 and driving it into the process chamber 1, eliminating the need for other conveying systems within the process chamber 1. This transfer robot 52 has the advantages of simple structure, easy control, and stable and reliable operation. The aforementioned fixture 523 adopts a conventional mechanism for picking up and placing workpieces on the carrier 100.

[0043] In this embodiment, the translation component 524 includes two first guide mechanisms disposed on both sides of the telescopic arm 522 and a first drive mechanism for driving the telescopic arm 522 to reciprocate horizontally. The first guide mechanism includes a first guide rail mounted on the telescopic arm 522 and a first slider mounted on the base 521, with the first guide rail and the first slider providing a guiding fit. The first drive mechanism includes a first rack mounted on the telescopic arm 522 and a first gear mounted on the base 521 and driven to rotate by a first motor, with the first gear meshing with the first rack. The first motor drives the first gear to rotate, which in turn forces the telescopic arm 522 to reciprocate horizontally via the first rack. This translation component 524 has a simple structure, is easy to control, and operates stably and reliably.

[0044] In this embodiment, the lifting assembly 525 includes two second guide mechanisms and a second drive mechanism for driving the lifting movement of the clamp 523. The second guide mechanism includes a second guide rail mounted on the clamp 523 and a second slider mounted on the telescopic arm 522, with the second guide rail and second slider providing guide engagement. The second drive mechanism includes a second rack mounted on the clamp 523 and a second gear mounted on the telescopic arm 522 and driven to rotate by a second motor, with the second gear meshing with the second rack. The second motor drives the second gear to rotate, which in turn forces the clamp 523 to move up and down via the second rack. This lifting assembly 525 has a simple structure, is easy to control, and operates stably and reliably.

[0045] In this embodiment, the feeding / discharging device 4 includes a feeding / discharging chamber 41 and a first carrier assembly installed within the feeding / discharging chamber 41. The feeding / discharging chamber 41 has two first inlets / outlets 42 with second openable / closeable doors 421, one of which communicates with the transfer chamber 2. By opening the second openable / closeable door 421 of the first inlet / outlet 42 communicating with the transfer chamber 2, the transfer robot 52 can enter the feeding / discharging chamber 41 to remove the workpiece carrier 100 from the first carrier assembly or place the workpiece carrier 100 onto the first carrier assembly. The feeding / discharging chamber 41 acts as a vacuum transition chamber, ensuring that the vacuum level and atmosphere concentration within the transfer chamber 2 are not disrupted during the supply and removal of the workpiece carrier 100 into and from the transfer chamber 2, allowing for continuous vacuum coating production.

[0046] In this embodiment, preferably, outside the first inlet / outlet 42 of the material inlet / outlet chamber 41 which is not connected to the transfer chamber 2, there is also a loading / unloading robot 7 for loading the workpiece carrier 100 onto the first carrier support assembly and removing the workpiece carrier 100 from the first carrier support assembly, so as to realize the automated operation of the workpiece carrier 100 entering and leaving the transfer chamber 2.

[0047] In this embodiment, the first carrier assembly includes a first carrier frame 43 rotatably mounted within the inlet / outlet chamber 41. The first carrier frame 43 is provided with multiple first placement mechanisms 431 for placing workpiece carriers 100. The multiple first placement mechanisms 431 are arranged at intervals around the rotation axis of the first carrier frame 43. The first carrier frame 43 can be rotated to move each first placement mechanism 431 to the position of each first inlet / outlet 42. With multiple first placement mechanisms 431 provided on the first carrier frame 43, multiple workpiece carriers 100 can be placed or removed at once in the inlet / outlet chamber 41 with only one vacuum breaking, which can reduce the number of vacuum breaking operations, improve production efficiency, and reduce production costs.

[0048] The multiple process chambers 1 in this embodiment can be configured as needed to complete any step in the coating process, such as cleaning, preheating, coating, etc. For specific configuration, refer to existing coating machines.

[0049] Example 2

[0050] The vacuum coating production line in this embodiment is basically the same as that in Embodiment 1, with the main difference being that, Figure 6 and Figure 7As shown, in this embodiment, the feeding / discharging device 4 includes a feeding chamber 44 and a discharging chamber 45. A second carrier assembly is installed in both the feeding chamber 44 and the discharging chamber 45. Both the feeding chamber 44 and the discharging chamber 45 have two second inlets / outlets 46 with third openable / closable doors 461. One of the second inlets / outlets 46 of the feeding chamber 44 and the discharging chamber 45 communicates with the transfer chamber 2. By opening the second inlets / outlets 46 of the feeding chamber 44 and the discharging chamber 45 that communicate with the transfer chamber 2, the transfer robot 52 can enter the feeding chamber 44 and the discharging chamber 45 to remove the workpiece carrier 100 from the first carrier assembly or place the workpiece carrier 100 onto the first carrier assembly. The feeding chamber 44 is used to supply the workpiece carrier 100 containing the workpiece to be coated into the transfer chamber 2, and the discharging chamber 45 is used to remove the workpiece carrier 100 containing the coated workpiece and return it to the transfer chamber 2. This separates the entry and exit of the workpiece carrier 100 into and out of the transfer chamber 2, further improving production efficiency. The aforementioned feeding chamber 44 and discharging chamber 45 serve as vacuum transition chambers, ensuring that the vacuum level and atmosphere concentration within the transfer chamber 2 are not disrupted during the process of supplying the workpiece carrier 100 into the transfer chamber 2 and removing the workpiece carrier 100 from the transfer chamber 2, thus enabling continuous vacuum coating production.

[0051] In this embodiment, the second carrier assembly includes a rotatably mounted second carrier 47. The second carrier 47 is provided with a plurality of second placement mechanisms 471 for placing workpiece carriers 100. The plurality of second placement mechanisms 471 are arranged at intervals around the rotation axis of the second carrier 47. The second carrier 47 can be rotated to move each second placement mechanism 471 to the position of each second inlet / outlet 46. With the second carrier 47 provided with a plurality of second placement mechanisms 471, multiple workpiece carriers 100 can be placed or removed at once by breaking the vacuum in the feeding chamber 44 and the discharging chamber 45, which can reduce the number of vacuum breaking operations, improve production efficiency, and reduce production costs.

[0052] In this embodiment, preferably, a loading / unloading robot 7 is provided outside the second inlet / outlet 46 of the feeding chamber 44, which is not connected to the transfer chamber 2, for loading the workpiece carrier 100 onto the second support frame 47 inside the feeding chamber 44, so as to realize the automated operation of the workpiece carrier 100 entering the feeding chamber 44. Similarly, a loading / unloading robot 7 is provided outside the second inlet / outlet 46 of the discharge chamber 45, which is not connected to the transfer chamber 2, for removing the workpiece carrier 100 from the second support frame 47 inside the discharge chamber 45, so as to realize the automated operation of removing the workpiece carrier 100 from the discharge chamber 45.

[0053] Example 3

[0054] The vacuum coating production line in this embodiment is basically the same as that in Embodiment 1, with the main difference being that, Figure 8As shown, in this embodiment, the vacuum coating production line has two production units as described in Embodiment 1. The transfer chambers 2 of the two production units are connected by an intermediate chamber 6. A third carrier assembly is installed in the intermediate chamber 6, which is the same as the first carrier assembly in Embodiment 1. The intermediate chamber 6 has two third inlets / outlets 61 with fourth openable / closeable doors 611. The two third inlets / outlets 61 are respectively connected to the two transfer chambers 2 connected to the intermediate chamber 6. By opening the fourth openable / closeable doors 611 of each third inlet / outlet 61, the transfer device 5 in the corresponding transfer chamber 2 can transfer the workpiece carrier 100 between the transfer chamber 2 and the intermediate chamber 6. The intermediate chamber 6 ensures that the two transfer chambers 2 do not communicate with each other when transferring the workpiece carrier 100 between the transfer chambers 2 of the two production units. The vacuum coating production line of this embodiment has two production units. When the number of process chambers 1 connected to a single transfer chamber 2 is limited, the number of process chambers 1 is increased, which can meet the need for a larger number of process chambers 1.

[0055] In this embodiment, the feeding / discharging device 4 adopts the feeding / discharging device 4 of Embodiment 2. The transfer chamber 2 of one production unit is connected to the feeding chamber 44, and the transfer chamber 2 of another production unit is connected to the discharging chamber 45. In other embodiments, the feeding / discharging device 4 can also adopt the feeding / discharging device 4 of Embodiment 1, where the feeding / discharging chamber 41 is connected to the transfer chamber 2 of one of the production units.

[0056] This embodiment specifically sets up two production units. In other embodiments, more production units can be set up as needed. When there are three or more production units, the transfer chambers 2 of the three or more production units can be connected in series through the intermediate chamber 6, or each production unit's transfer chamber 2 can be connected to the transfer chambers 2 of two or more production units. When the transfer chambers 2 of the three or more production units are connected in series, it is preferable that only the two production units at both ends are equipped with the feeding and discharging devices 4, or each production unit can be equipped with the feeding and discharging devices 4.

[0057] The above description is merely a preferred embodiment of this utility model, and the protection scope of this utility model is not limited to the above embodiments. For those skilled in the art, improvements and modifications obtained without departing from the technical concept of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A vacuum coating production line, characterized in that: The production unit includes one or more production units, each production unit including a transfer chamber (2) and multiple process chambers (1) connected to the transfer chamber (2). The multiple process chambers (1) are arranged around the transfer chamber (2). Each process chamber (1) and the transfer chamber (2) are provided with a material inlet and outlet (3) with a first openable and closable door (31). The transfer chamber (2) is connected to a feeding and discharging device (4) for supplying and receiving workpiece carriers (100). The transfer chamber (2) is provided with a transfer device (5) for transferring workpiece carriers (100) between the feeding and discharging device (4) and each process chamber (1).

2. The vacuum coating production line according to claim 1, characterized in that: The transfer device (5) includes a rotating seat (51) and one or more transfer manipulators (52) fixedly installed on the rotating seat (51). The rotating seat (51) is rotatably installed in the transfer chamber (2) and can move the transfer manipulators (52) to the feeding and discharging device (4) and any material inlet and outlet (3) by rotation. The transfer device (5) also includes a rotation drive assembly (53) for driving the rotating seat (51) to rotate.

3. The vacuum coating production line according to claim 2, characterized in that: Each material inlet / outlet (3) is evenly spaced around the rotation axis of the rotating seat (51). Multiple transfer manipulators (52) are installed on the rotating seat (51) and are spaced around the rotation axis of the rotating seat (51). The included angle between two adjacent transfer manipulators (52) is an integer multiple of the included angle between two adjacent material inlets / outlets (3).

4. The vacuum coating production line according to claim 2, characterized in that: The transfer robot (52) includes a base (521), a telescopic arm (522), and a clamp (523) for picking up and placing workpieces (100). The base (521) is fixedly mounted on a rotating seat (51). The telescopic arm (522) is mounted on the base (521) in a horizontal reciprocating manner via a translation component (524). The clamp (523) is mounted on the telescopic arm (522) in a height-adjustable manner via a lifting component (525).

5. The vacuum coating production line according to claim 4, characterized in that: The translation component (524) includes two first guide mechanisms disposed on both sides of the telescopic arm (522) and a first drive mechanism for driving the telescopic arm (522) to reciprocate horizontally. The first guide mechanism includes a first guide rail mounted on the telescopic arm (522) and a first slider mounted on the base (521). The first guide rail and the first slider are guided and engaged. The first drive mechanism includes a first rack mounted on the telescopic arm (522) and a first gear mounted on the base (521) and driven to rotate by a first motor. The first gear meshes with the first rack.

6. The vacuum coating production line according to claim 4, characterized in that: The lifting assembly (525) includes two second guide mechanisms and a second drive mechanism for driving the lifting motion of the clamp (523). The second guide mechanism includes a second guide rail mounted on the clamp (523) and a second slider mounted on the telescopic arm (522). The second guide rail and the second slider are guided and engaged. The second drive mechanism includes a second rack mounted on the clamp (523) and a second gear mounted on the telescopic arm (522) and driven to rotate by a second motor. The second gear meshes with the second rack.

7. The vacuum coating production line according to claim 1, characterized in that: The feeding and discharging device (4) includes a feeding and discharging chamber (41) and a first carrier assembly installed in the feeding and discharging chamber (41). The feeding and discharging chamber (41) is provided with two first inlets and outlets (42) with second openable and closable doors (421), one of which is connected to the transfer chamber (2).

8. The vacuum coating production line according to claim 7, characterized in that: The first carrier assembly includes a first carrier (43) rotatably mounted in the inlet / outlet chamber (41). The first carrier (43) is provided with a plurality of first placement mechanisms (431) for placing workpiece carriers (100). The plurality of first placement mechanisms (431) are arranged at intervals around the rotation axis of the first carrier (43).

9. The vacuum coating production line according to claim 1, characterized in that: The feeding and discharging device (4) includes a feeding chamber (44) and a discharging chamber (45). A second carrier frame is installed in both the feeding chamber (44) and the discharging chamber (45). Both the feeding chamber (44) and the discharging chamber (45) are provided with two second inlets and outlets (46) with a third openable and closable door (461). One of the second inlets and outlets (46) of the feeding chamber (44) and the discharging chamber (45) is connected to the transfer chamber (2).

10. The vacuum coating production line according to claim 9, characterized in that: The second carrier assembly includes a rotatably mounted second carrier (47), which is provided with a plurality of second placement mechanisms (471) for placing workpiece carriers (100), and the plurality of second placement mechanisms (471) are arranged at intervals around the rotation axis of the second carrier (47).

11. The vacuum coating production line according to claim 1, characterized in that: The vacuum coating production line has two or more production units. The transfer chamber (2) of each production unit is connected to the transfer chamber (2) of at least one production unit through an intermediate chamber (6). The intermediate chamber (6) is equipped with a third carrier assembly. The intermediate chamber (6) has two third inlets and outlets (61) with a fourth openable and closable door (611). The two third inlets and outlets (61) are respectively connected to the two transfer chambers (2) connected to the intermediate chamber (6).

12. The vacuum coating production line according to claim 11, characterized in that: Two or more production units are connected in sequence, and only the two production units at both ends are equipped with feeding and discharging devices (4).

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