counterbalance valve

Abstract

The application discloses a kind of balance valves, including valve body, deformable diaphragm, first opening, second opening and greater than.Wherein, valve body has cavity inside;Deformable diaphragm is arranged in cavity, and it is divided into first sub-cavity and second sub-cavity;First opening is arranged in valve body, for communicating first sub-cavity with external environment;Second opening is arranged in valve body, for communicating second sub-cavity with external environment;Interface is arranged in valve body, for communicating second sub-cavity with external load device.The deformable diaphragm in the balance valve of the application can be deformed based on the pressure difference between external environment and the inside of external load device, so as to maintain the dynamic balance of pressure inside and outside load device.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically to a balance valve. Background Technology

[0002] In related technologies, contact-type balancing valves are used to control the pressure balance of the load device.

[0003] However, changes in ambient temperature or temperature inside the load device (such as heat dissipation from a high-temperature workpiece) can cause the gas to expand and contract, resulting in a pressure difference between the inside of the load device and the external environment.

[0004] Since the contact-type balancing valve only has two states, "fully open" and "fully closed", it cannot eliminate the pressure difference between the inside and outside of the device caused by temperature changes, and it is difficult to maintain the dynamic balance of the pressure inside and outside the device. Utility Model Content

[0005] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To address the existing problems, this utility model provides a balancing valve, comprising:

[0007] The valve body has an internal cavity;

[0008] A deformable diaphragm is disposed within the cavity and divides the cavity into a first sub-cavity and a second sub-cavity;

[0009] The first opening is located in the valve body and is used to connect the first sub-cavity with the external environment;

[0010] The second opening is located in the valve body and is used to connect the second sub-cavity with the external environment;

[0011] An interface, located in the valve body, is used to connect the second sub-cavity to an external load device.

[0012] In some embodiments of this application,

[0013] When the pressure of the external environment is equal to the pressure inside the external load device, the deformable diaphragm is in a preset initial position.

[0014] When the pressure of the external environment is greater than the pressure inside the external load device, the deformable diaphragm can deform from the preset initial position toward the interface side of the second sub-cavity;

[0015] When the pressure of the external environment is less than the pressure inside the external load device, the deformable diaphragm can deform from the preset initial position toward the side of the first sub-cavity away from the interface.

[0016] In some embodiments of this application, the deformable diaphragm includes a protrusion facing the interface, the protrusion being spatially opposite to the interface.

[0017] In some embodiments of this application, when the deformable diaphragm is in the preset initial position, the protrusion is close to the interface and spaced apart from the interface.

[0018] In some embodiments of this application, when the pressure of the external environment is greater than the pressure inside the external load device, and the pressure difference between the two is greater than a preset pressure difference value, the protrusion enters the interface, and the protrusion and the surrounding portion of the deformable diaphragm seal the interface.

[0019] In some embodiments of this application, the deformable diaphragm includes a plurality of sequentially bent and connected membrane segments along its edge to the center, and the deformable diaphragm gradually bulges from its edge to the center toward the interface side of the second sub-cavity.

[0020] In some embodiments of this application, a filter element is also included, which is disposed within the interface.

[0021] In some embodiments of this application, the valve body includes a circumferential sidewall, a first endwall, and a second endwall. The first endwall and the second endwall are respectively disposed at the two axial ends of the circumferential sidewall, and the circumferential sidewall, the first endwall, and the second endwall together enclose the cavity.

[0022] In some embodiments of this application, the circumferential sidewall includes a first segmented circumferential sidewall corresponding to the first sub-cavity and a second segmented circumferential sidewall corresponding to the second sub-cavity;

[0023] The first segmented circumferential sidewall, the first endwall, and the deformable diaphragm together enclose and form the first sub-cavity;

[0024] The second segment circumferential sidewall, the second endwall, and the deformable diaphragm together enclose and form the second sub-cavity.

[0025] In some embodiments of this application, the first opening is provided on the circumferential sidewall of the first segment, the second opening is provided on the circumferential sidewall of the second segment, and the interface is provided on the second end wall.

[0026] The balancing valve of this application divides the cavity inside the valve body into an independent first sub-cavity and a second sub-cavity through a deformable diaphragm. The first opening, the second opening, and the interface are used to establish communication between the sub-cavities and the external environment and the load device, respectively. This allows the deformable diaphragm to dynamically deform based on the pressure difference between the external environment and the internal pressure of the external load device, thereby maintaining the dynamic balance of pressure inside and outside the load device. Attached Figure Description

[0027] The following drawings, which are incorporated herein by reference as part of this invention, are provided for understanding the invention. The drawings illustrate embodiments of the invention and their descriptions, serving to explain the principles of the invention.

[0028] In the attached image:

[0029] Figure 1 A schematic diagram of the structure of a balance valve according to a specific embodiment of the present invention is shown.

[0030] Figure 2 Show Figure 1 An enlarged schematic diagram of region A in the middle.

[0031] Figure 3 A schematic diagram of the balancing valve in its initial state is shown.

[0032] Figure 4 A schematic diagram of the state of the balancing valve is shown when a vacuum is applied to the load device.

[0033] Figure 5 A schematic diagram of the state of the balancing valve is shown when gas is introduced into the load device.

[0034] Figure 6 The diagram shows the pressure curve inside the load locking chamber when a contact-type balancing valve is connected to the load locking chamber and gas is introduced into the chamber.

[0035] Figure 7 The diagram shows the pressure curve inside the load locking chamber when gas is introduced into the load locking chamber during the process of connecting the load locking chamber to the balance valve of this application. Detailed Implementation

[0036] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described in order to avoid confusion with the present invention.

[0037] It should be understood that this invention can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this invention to those skilled in the art. In the drawings, for clarity, the dimensions of layers and regions, as well as their relative dimensions, may be exaggerated. The same reference numerals denote the same elements throughout.

[0038] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this utility model, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion.

[0039] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “under” the other element or feature will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0040] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “compose” and / or “comprising,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0041] In related technologies, contact-type balancing valves are used to control the pressure balance of the load device.

[0042] However, changes in ambient temperature or temperature inside the load device (such as heat dissipation from a high-temperature workpiece) can cause the gas to expand and contract, resulting in a pressure difference between the inside of the load device and the external environment.

[0043] Since the contact-type balancing valve only has two states, "fully open" and "fully closed", it cannot eliminate the pressure difference between the inside and outside of the device caused by temperature changes, and it is difficult to maintain the dynamic balance of the pressure inside and outside the device.

[0044] For example, when the internal pressure of the load device decreases to the external ambient pressure due to temperature, the contact-type balancing valve cannot replenish the pressure by fine-tuning the airflow; when the internal pressure of the load device increases to exceed the external ambient pressure due to temperature, the contact-type balancing valve also cannot achieve balance by fine-tuning the pressure relief, ultimately making it difficult to maintain a stable dynamic balance between the internal and external pressures of the load device.

[0045] To solve at least one of the above-mentioned technical problems, this application provides a balancing valve, comprising:

[0046] The valve body has an internal cavity;

[0047] A deformable diaphragm is disposed within the cavity and divides the cavity into a first sub-cavity and a second sub-cavity;

[0048] The first opening is located in the valve body and is used to connect the first sub-cavity with the external environment;

[0049] The second opening is located in the valve body and is used to connect the second sub-cavity with the external environment;

[0050] An interface, located in the valve body, is used to connect the second sub-cavity to an external load device.

[0051] According to the balance valve of this application, the cavity inside the valve body is divided into an independent first sub-cavity and a second sub-cavity by a deformable diaphragm. The first opening, the second opening and the interface are used to establish communication between the sub-cavities and the external environment and the load device, respectively. The deformable diaphragm can dynamically deform based on the pressure difference between the external environment and the internal pressure of the external load device, thereby maintaining the dynamic balance of pressure inside and outside the load device.

[0052] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solutions proposed in this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0053] The following is for reference. Figures 1-5 This application describes a balancing valve according to one embodiment. The balancing valve includes a valve body, a deformable diaphragm 120, a first opening 141, a second opening 142, and an interface 150. The valve body has an internal cavity; the deformable diaphragm 120 is disposed within the cavity and divides the cavity into a first sub-cavity 131 and a second sub-cavity 132; the first opening 141 is disposed in the valve body for connecting the first sub-cavity 131 to the external environment; the second opening 142 is disposed in the valve body for connecting the second sub-cavity 132 to the external environment; and the interface 150 is disposed in the valve body for connecting the second sub-cavity 132 to an external load device.

[0054] In practical applications, the balancing valve is connected to an external load device via interface 150. The deformable diaphragm 120 is configured to deform based on the pressure difference between the external environment and the interior of the external load device, thereby achieving pressure balance control of the load device. Specifically, when a pressure difference arises between the interior of the load device and the external environment due to changes in ambient temperature or internal temperature (such as heat dissipation from a high-temperature workpiece), a corresponding pressure difference will be formed between the first sub-cavity 131 and the second sub-cavity 132 because the interior of the load device is connected to the second sub-cavity 132 and the first sub-cavity 131 is connected to the external environment. The deformable diaphragm 120 deforms based on this pressure difference, thereby maintaining the dynamic balance of pressure inside and outside the load device.

[0055] For example, when the internal pressure of the load device exceeds the external ambient pressure due to temperature increase, the pressure in the second sub-cavity 132 increases synchronously. The pressure difference causes the deformable diaphragm 120 to deform towards the side of the first sub-cavity 131 away from the interface 150. Some of the gas inside the load device enters the second sub-cavity 132 through the interface 150 and is released to the external environment through the second opening 142 to balance the internal pressure of the load device. When the internal pressure of the load device decreases to be lower than the external ambient pressure due to temperature decrease, the pressure in the second sub-cavity 132 decreases synchronously. The pressure difference causes the deformable diaphragm 120 to deform towards the side of the second sub-cavity 132 closer to the interface 150. Gas from the external environment enters the second sub-cavity 132 through the second opening 142 and is replenished to the inside of the load device through the interface 150, gradually balancing the pressure. Through the above dynamic response, the pressure imbalance caused by temperature changes can be eliminated, and the dynamic balance of pressure inside and outside the load device can be stably maintained.

[0056] It should also be noted that when the temperature changes slowly and dynamically, causing pressure fluctuations, the deformable diaphragm 120 can remain stationary macroscopically, and it maintains a preset gap with the interface 150. At this time, there is no need for the deformable diaphragm 120 to deform, and the first opening 141 and / or the second opening 142 can achieve pressure regulation through natural gas flow to adapt to such slow pressure change scenarios.

[0057] In some embodiments, such as Figure 1 As shown, the valve body includes a circumferential sidewall 111, a first endwall 112, and a second endwall 113. The first endwall 112 and the second endwall 113 are respectively located at the axial ends of the circumferential sidewall 111, and together they enclose a cavity. The circumferential sidewall 111 is a ring-shaped wall surrounding the cavity axis, and its cross-sectional shape can be circular, square, polygonal, etc., depending on actual needs, serving to form the side boundary of the cavity. The first endwall 112 and the second endwall 113 respectively cover the axial ends of the circumferential sidewall 111 and are perpendicular to it, jointly defining the end boundaries of the cavity. Through the above-described enclosed structure, a complete valve body structure can be formed.

[0058] In some embodiments, such as Figure 1As shown, the circumferential sidewall 111 is divided into two continuous segments along its axial direction: a first segment circumferential sidewall 1111 corresponding to the first sub-cavity 131 and a second segment circumferential sidewall 1112 corresponding to the second sub-cavity 132. The two segments together form the complete circumferential sidewall 111 and define the lateral boundaries of the two sub-cavities. Specifically, one end of the first segment circumferential sidewall 1111 is connected to the first endwall 112, and the other end is sealed to the edge of the deformable diaphragm 120, together forming the independent first sub-cavity 131. Similarly, one end of the second segment circumferential sidewall 1112 is connected to the second endwall 113, and the other end is also sealed to the edge of the deformable diaphragm 120, together forming the independent second sub-cavity 132. Through the separation of the deformable diaphragm 120, the first sub-cavity 131 and the second sub-cavity 132 form a clear spatial boundary and are physically isolated, which can maintain an independent pressure environment, providing a structural basis for dynamic adjustment based on pressure difference.

[0059] In some embodiments, such as Figure 1 As shown, the first opening 141 is provided on the first segment circumferential sidewall 1111 to connect the first sub-cavity 131 with the external environment; the second opening 142 is provided on the second segment circumferential sidewall 1112 to connect the second sub-cavity 132 with the external environment; the interface 150 is provided on the second endwall 113 for connecting an external load device and realizing the communication between the inside of the load device and the second sub-cavity 132.

[0060] In some embodiments, such as Figure 1 As shown, the deformable diaphragm 120 includes a plurality of membrane segments that are bent and connected in sequence from its edge to its center, and the deformable diaphragm 120 gradually protrudes from its edge to its center toward the side of the second sub-cavity 132 closer to the interface 150.

[0061] Multiple bent and connected membrane segments provide a preset deformation path for the deformable diaphragm 120. The bends can serve as stress relief nodes, significantly improving the deformation flexibility and directional response of the deformable diaphragm 120 under pressure difference. The gradually convex shape from the edge to the center can guide the deformable diaphragm 120 to produce a small deformation when deforming towards the second sub-cavity 132, which can block the interface 150 and accelerate the response speed of the balance valve to sudden pressure changes.

[0062] In some embodiments, such as Figure 1 As shown, the deformable diaphragm 120 includes a protrusion 121 facing the interface 150, and the protrusion 121 corresponds to the interface 150 in spatial position. This positional correspondence ensures the accuracy of the subsequent entry of the protrusion 121 into the interface 150, avoids sealing failure due to misalignment, and improves the reliability of the pressure regulation of the balance valve.

[0063] For example, the central segment of the deformable diaphragm 120 is a protrusion 121.

[0064] In some embodiments, when the pressure of the external environment is equal to the pressure inside the external load device, the deformable diaphragm 120 is in a preset initial position (at which time the balance valve can be referred to as being in the initial state); when the pressure of the external environment is greater than the pressure inside the external load device, the deformable diaphragm 120 can deform from the preset initial position toward the side of the second sub-cavity 132 closer to the interface 150; when the pressure of the external environment is less than the pressure inside the external load device, the deformable diaphragm 120 can deform from the preset initial position toward the side of the first sub-cavity 131 away from the interface 150.

[0065] For example, such as Figure 1 and Figure 3 As shown, when the deformable diaphragm 120 is in the preset initial position, the protrusion 121 is positioned close to the interface 150, meaning that the two maintain a preset distance but do not contact or form a blockage. This initial layout provides a short-range response basis for subsequent deformation driven by pressure difference, which can shorten the stroke of the protrusion 121 entering the interface 150 and achieving blockage, thereby accelerating the response speed of the balance valve to sudden pressure changes.

[0066] When the pressure of the external environment is greater than the pressure inside the external load device, the deformation of the deformable diaphragm 120 toward the side of the second sub-cavity 132 closer to the interface 150 specifically includes the following two situations:

[0067] Firstly, under the normal operating condition where the balancing valve controls the pressure balance of the load device, the pressure difference drives the deformable diaphragm 120 to deform towards the side of the second sub-cavity 132 closer to the interface 150. External ambient gas enters the second sub-cavity 132 through the second opening 142 and is replenished to the inside of the load device through the interface 150, gradually balancing the pressure of the two.

[0068] Secondly, during the vacuuming operation of the load device, when the pressure of the external environment is greater than the pressure inside the external load device and the pressure difference between the two exceeds the preset pressure difference value, the deformation of the deformable diaphragm 120 causes the protrusion 121 to enter the interface 150, and the protrusion 121 and the surrounding part of the deformable diaphragm 120 together form a seal on the interface 150, thereby blocking the path of external ambient gas to enter the load device through the interface 150, ensuring the smooth progress of the vacuuming process.

[0069] When the pressure of the external environment is less than the pressure inside the external load device, the deformation of the deformable diaphragm 120 toward the side of the first sub-cavity 131 away from the interface 150 specifically includes the following two situations:

[0070] Firstly, under normal operating conditions where the balancing valve controls the pressure balance of the load device, the pressure difference drives the deformable diaphragm 120 to deform towards the side of the first sub-cavity 131 away from the interface 150. Some of the gas inside the load device enters the second sub-cavity 132 through the interface 150 and is released to the external environment through the second opening 142 to balance the internal pressure of the load device.

[0071] Secondly, during the process of introducing gas into the load device, when the pressure of the external environment is less than the pressure inside the external load device, the pressure difference causes the deformable diaphragm 120 to deform toward the side of the first sub-cavity 131 away from the interface 150. Part of the gas inside the load device enters the second sub-cavity 132 through the interface 150 and is released to the external environment through the second opening 142.

[0072] For example, the external environmental pressure can be denoted as Poutside, and the internal pressure of the load device can be denoted as Pinside.

[0073] like Figure 3 As shown, when P_outer equals 1 atmosphere (i.e., 1 atm) and P_inner is also 1 atm, the pressure of the external environment is equal to the pressure inside the external load device, and the deformable diaphragm 120 is in the preset initial position.

[0074] like Figure 4 As shown, during the vacuuming operation of the load device, the external pressure P is maintained at 1 atmosphere (i.e., 1 atm), while the internal pressure P drops to below 1 atm. At this time, the pressure of the external environment is greater than the pressure inside the external load device. The pressure difference drives the deformable diaphragm 120 to deform from the preset initial position toward the side of the second sub-cavity 132 closer to the interface 150. When the pressure difference exceeds the preset pressure difference value, the deformation of the deformable diaphragm 120 causes the protrusion 121 to enter the interface 150, and the protrusion 121 and its surrounding area together form a seal on the interface 150, blocking the path of external ambient gas into the load device through the interface 150, ensuring that the vacuuming process is implemented efficiently.

[0075] like Figure 5 As shown, during the process of introducing gas into the load device, the external pressure of P is still 1 atmosphere (i.e., 1 atm), while the internal pressure of P rises to above 1 atm. At this time, the pressure of the external environment is less than the pressure inside the external load device. The pressure difference drives the deformable diaphragm 120 to deform from the preset initial position toward the side of the first sub-cavity 131 away from the interface 150.

[0076] It should be further explained that when gas is introduced into the load device, its internal pressure can be maintained at the same level as the external environment (both at 1 atm) under the control of the balancing valve. If the internal pressure of the load device subsequently decreases due to temperature changes (for example, due to the cooling of the high-temperature workpiece loaded inside), the pressure of the second sub-cavity 132 will decrease synchronously. The pressure difference causes the deformable diaphragm 120 to deform towards the side of the second sub-cavity 132 closer to the interface 150. The gas from the external environment enters the second sub-cavity 132 through the second opening 142 and is replenished into the load device through the interface 150 to gradually balance the pressure. Conversely, if the internal pressure of the load device exceeds the external environment pressure due to a rise in temperature, the pressure of the second sub-cavity 132 will increase synchronously. The pressure difference causes the deformable diaphragm 120 to deform towards the side of the first sub-cavity 131 away from the interface 150. Some of the gas inside the load device enters the second sub-cavity 132 through the interface 150 and is released to the external environment through the second opening 142 to balance its internal pressure.

[0077] In some embodiments, the size of the first opening 141 is larger than the size of the second opening 142. Specifically, the larger size of the first opening 141 can reduce the flow resistance of gas entering and exiting the first sub-cavity 131, providing a smooth path for gas flow; the smaller size of the second opening 142 can moderately regulate the rate of gas entering and exiting the second sub-cavity 132 through the flow channel restriction effect.

[0078] For example, during the vacuuming operation of the load device, the pressure of the external environment is greater than the pressure inside the external load device. The larger size of the first opening 141 can accelerate the entry of the external environment gas into the first sub-cavity 131, causing the pressure difference between the two to accumulate rapidly. This drives the deformable diaphragm 120 to deform rapidly toward the side of the second sub-cavity 132 closer to the interface 150, until the protrusion 121 enters the interface 150 and completes the sealing, so as to quickly achieve sealing and blocking.

[0079] For example, during the process of introducing gas into the load device, the pressure of the external environment is less than the pressure inside the external load device. The smaller size of the second opening 142 can moderately limit the rate at which gas is discharged from the second sub-cavity 132 to the external environment, avoiding a sudden drop in pressure in the second sub-cavity 132 due to excessively fast exhaust, ensuring the stability of the deformation process of the deformable diaphragm 120, and ensuring the orderly regulation of the internal pressure of the load device when gas is introduced.

[0080] In some embodiments, such as Figure 1As shown, the balancing valve also includes a filter element 160, which is disposed within the interface 150. The filter element 160 is a structural component with air permeability and contamination-resistant properties, and can be made of materials such as metal mesh, porous ceramic, or polymer filter membrane. Its outer periphery is adapted to the inner wall of the interface 150 to achieve a fixed fit with the interface 150. The position of the filter element 160 corresponds to the gas flow path of the interface 150, enabling it to filter the gas entering and exiting the second sub-cavity 132 through the interface 150.

[0081] The filter element 160 effectively blocks solid impurities and particulate matter from the external environment or load device from entering the second sub-cavity 132 or the load device, preventing impurities from affecting the deformation sensitivity and sealing reliability of the deformable diaphragm 120. At the same time, its air permeability will not significantly hinder gas flow, ensuring that the pressure signal is transmitted normally and the adjustment function of the balance valve is not affected, thereby extending the service life of the balance valve and improving its working stability.

[0082] In some embodiments, the external load device connected to the balancing valve may include various devices requiring pressure balancing control or environmental isolation, particularly suitable for semiconductor manufacturing equipment where stringent requirements for pressure stability and cleanliness exist. Specifically, it may include load-lock chambers, process chambers, transfer chambers, vacuum storage chambers, etc., in semiconductor devices; furthermore, it may also encompass semiconductor-related devices with pressure control requirements, such as the vacuum chamber of an ion implanter and the process chamber of a thin film deposition equipment.

[0083] It should be noted that the above examples are only some specific forms of external load devices and are not intended to limit their scope. Any device that needs to achieve pressure balance between the internal and external environments through a balancing valve, or that needs to maintain the stability of the internal environment during specific operations, may be suitable for the balancing valve of this embodiment. The specific type can be flexibly selected according to the actual application scenario.

[0084] Taking a load device including a load locking chamber as an example, when the load locking chamber is connected to a contact-type balancing valve, during the process of introducing gas into the load locking chamber, because the contact-type balancing valve only has two states, "fully open" and "fully closed," the internal gas pressure of the load locking chamber is easily higher or lower than the external ambient gas pressure. The pressure curve inside the load locking chamber is as follows: Figure 6 As shown.

[0085] For example, the load-locking cavity includes upper and lower layers. The wafer transfer logic is bottom in and top out. When the high-temperature wafer enters the upper space, gas is introduced into the load-locking cavity. As the wafer descends, the pressure inside the load-locking cavity decreases, causing the gas pressure inside the load-locking cavity to be lower than the external ambient pressure.

[0086] Still assuming the load device includes a load locking chamber, and the load locking chamber is connected to the balance valve of this application, during the process of introducing gas into the load locking chamber, if there is a pressure difference between the inside of the load device and the external environment, a corresponding pressure difference will be formed between the first sub-cavity 131 and the second sub-cavity 132. The deformable diaphragm 120 deforms based on this pressure difference, thereby maintaining the dynamic balance of pressure inside and outside the load device. The pressure curve inside the load locking chamber is as follows: Figure 7 As shown.

[0087] For example, when the high-temperature wafer enters the upper space of the load locking cavity, and gas is introduced into the load locking cavity, even if the pressure inside the load locking cavity decreases due to the wafer's descent, the pressure in the second sub-cavity 132 will decrease synchronously. The pressure difference causes the deformable diaphragm 120 to deform towards the side of the second sub-cavity 132 closer to the interface 150. External ambient gas enters the second sub-cavity 132 through the second opening 142 and is replenished to the inside of the load device through the interface 150 to gradually balance the pressure.

[0088] In summary, the balance valve according to the embodiments of this application divides the cavity inside the valve body into an independent first sub-cavity and a second sub-cavity by means of a deformable diaphragm. The first opening, the second opening and the interface are used to establish communication between the sub-cavities and the external environment and the load device, respectively. This allows the deformable diaphragm to dynamically deform based on the pressure difference between the external environment and the internal pressure of the external load device, thereby maintaining the dynamic balance of pressure inside and outside the load device.

[0089] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0090] Similarly, it should be understood that, in order to simplify this application and aid in understanding one or more aspects of the application, various features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the point of application is that the corresponding technical problem can be solved with fewer features than all of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0091] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0092] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

Claims

1. A balancing valve, characterized in that, include: The valve body has an internal cavity; A deformable diaphragm is disposed within the cavity and divides the cavity into a first sub-cavity and a second sub-cavity; The first opening is located in the valve body and is used to connect the first sub-cavity with the external environment; The second opening is located in the valve body and is used to connect the second sub-cavity with the external environment; An interface, located in the valve body, is used to connect the second sub-cavity to an external load device.

2. The balancing valve as described in claim 1, characterized in that, When the pressure of the external environment is equal to the pressure inside the external load device, the deformable diaphragm is in a preset initial position. When the pressure of the external environment is greater than the pressure inside the external load device, the deformable diaphragm can deform from the preset initial position toward the interface side of the second sub-cavity; When the pressure of the external environment is less than the pressure inside the external load device, the deformable diaphragm can deform from the preset initial position toward the side of the first sub-cavity away from the interface.

3. The balancing valve as described in claim 2, characterized in that, The deformable diaphragm includes a protrusion facing the interface, the protrusion being spatially opposite to the interface.

4. The balancing valve as described in claim 3, characterized in that, When the deformable diaphragm is in the preset initial position, the protrusion is close to the interface and spaced apart from the interface.

5. The balancing valve as described in claim 3, characterized in that, When the pressure of the external environment is greater than the pressure inside the external load device, and the pressure difference between the two is greater than a preset pressure difference value, the protrusion enters the interface, and the protrusion and the surrounding portion of the deformable diaphragm seal the interface.

6. The balancing valve as described in claim 1, characterized in that, The deformable diaphragm comprises a plurality of sequentially bent and connected membrane segments from its edge to its center, and the deformable diaphragm gradually bulges from its edge to its center toward the interface side of the second sub-cavity.

7. The balancing valve as described in claim 1, characterized in that, It also includes a filter element disposed within the interface.

8. The balancing valve according to any one of claims 1 to 7, characterized in that, The valve body includes a circumferential sidewall, a first endwall, and a second endwall. The first endwall and the second endwall are respectively located at the two axial ends of the circumferential sidewall, and the circumferential sidewall, the first endwall, and the second endwall together enclose the cavity.

9. The balancing valve as described in claim 8, characterized in that, The circumferential sidewall includes a first segmented circumferential sidewall corresponding to the first sub-cavity and a second segmented circumferential sidewall corresponding to the second sub-cavity; The first segmented circumferential sidewall, the first endwall, and the deformable diaphragm together enclose and form the first sub-cavity; The second segment circumferential sidewall, the second endwall, and the deformable diaphragm together enclose and form the second sub-cavity.

10. The balancing valve as described in claim 9, characterized in that, The first opening is located on the circumferential sidewall of the first segment, the second opening is located on the circumferential sidewall of the second segment, and the interface is located on the second end wall.

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