An x-ray 360 degree imaging system

Abstract

The utility model relates to a kind of X-ray 360 degree imaging system, comprising: imager, R1 rotating component, R2 rotating component, Z-axis lifting module and automatic feeding and discharging mechanism, R1 rotating component includes installation bottom plate, R1 rotating support plate, R1 power system, electric slip ring and first origin sensor, the R1 rotating component realizes the 360 degree rotation of the imager in horizontal plane;R2 rotating component includes R2 arc support plate, arc track and R2 power system, the R2 rotating component drives the swing of the imager in vertical direction around the center 80 degree range;R1 rotating component and R2 rotating component work cooperatively, combine Z-axis lifting module, complete full-angle scanning imaging to material, the utility model is scanned to material by multi-axis coordinated motion, realizes comprehensive imaging;Automatic feeding and discharging mechanism and production line butt joint, improve detection efficiency, with compact structure, low in cost, wide application range and the like advantages, applicable to the on-line detection in the field such as semiconductor, electronic component.

Description

Technical Field

[0001] This utility model relates to the field of X-ray detection technology, and in particular to an online 360-degree X-ray imaging system suitable for materials such as semiconductors and electronic components, which can realize full-angle scanning and automated detection. Background Technology

[0002] Existing X-ray imaging systems mostly employ single-angle scanning, which cannot meet the comprehensive inspection needs of complex materials. While some systems possess rotational capabilities, they suffer from problems such as cable entanglement, insufficient load-bearing capacity, and high costs. Furthermore, traditional equipment lacks automated loading and unloading functions, making efficient integration with production lines difficult. This invention solves these problems through multi-axis coordinated rotation and an automated loading and unloading mechanism. Utility Model Content

[0003] Purpose of this utility model: To provide a 360-degree X-ray imaging system by adding a rotation system, enabling the imaging system to meet full-range imaging requirements. Simultaneously, the imaging system is equipped with an automatic loading and unloading mechanism, allowing for integration with upstream and downstream production lines, increasing production line inspection efficiency, and solving the problem mentioned above that most current X-ray imaging systems can only achieve single-angle position changes and cannot meet full-angle scanning requirements.

[0004] Technical solution: An X-ray 360-degree imaging system, comprising: an imager for receiving X-ray signals and generating images; The R1 rotating assembly includes a mounting base plate, an R1 rotating support plate, an R1 power system, an electric slip ring, and a first origin sensor. The R1 rotating assembly enables the imager to rotate 360 ​​degrees in the horizontal plane. The R2 rotating assembly includes an R2 arc-shaped support plate, an arc-shaped track, and an R2 power system. The R2 rotating assembly drives the imager to swing within an 80-degree range around the center in the vertical direction. The Z-axis lifting module is used to adjust the height of the imager to adapt to the magnification of different materials. The automatic loading and unloading mechanism connects with the upstream and downstream production lines to achieve automatic material conveying and positioning. The R1 rotating component works in conjunction with the R2 rotating component, and together with the Z-axis lifting module, completes full-angle scanning imaging of the material.

[0005] In a further embodiment, the slip ring of the R1 rotating assembly is used to ensure continuous power supply and signal transmission of the cable during rotation, thereby preventing the cable from tangling.

[0006] In a further embodiment, the R2 arc-shaped support plate and the arc-shaped track cooperate with the drive wheel through an arc-shaped slide, and the drive force is provided by the R2 power system.

[0007] In a further embodiment, the Z-axis lifting module uses a servo motor to drive a ball screw to achieve lifting accuracy control.

[0008] In a further embodiment, the R1 rotating support plate is fixedly installed on the mounting base plate, the R1 power system is installed on the rotating connecting plate and rotatably connected to the R1 rotating support plate, the rotating connecting plate is provided with a counterweight, the first origin sensor is installed on the mounting base plate, and the rotating connecting plate is provided with a first sensing plate that cooperates with the first origin sensor.

[0009] In a further embodiment, the arc-shaped track and the arc-shaped slide are fixedly installed on the R2 arc-shaped support plate, and the arc-shaped track is provided with a slider.

[0010] In a further embodiment, the ball screw is fixedly mounted on the slider via a mounting plate, the imager is slidably mounted on the ball screw via a sliding plate, the servo motor is mounted on the rotating connecting plate and connected to the ball screw, the mounting plate is provided with a second origin sensor, and the sliding plate is provided with a second sensing plate that cooperates with the second origin sensor.

[0011] In a further embodiment, the R2 power system is mounted on the mounting plate and connected to a drive wheel, the drive wheel cooperating with the arc-shaped slide rail, the mounting plate is provided with an auxiliary wheel cooperating with the arc-shaped slide rail, the R2 arc-shaped support plate is provided with a third origin sensor, and the back of the mounting plate is provided with a third sensing plate cooperating with the third origin sensor.

[0012] In a further embodiment, the R1 rotating support plate is provided with a limiting block.

[0013] Beneficial Effects: This utility model discloses a 360-degree X-ray imaging system, comprising an R1 component that rotates 360 degrees horizontally, an R2 component that swings 80 degrees vertically, a Z-axis lifting module, and an automatic loading and unloading mechanism. Through multi-axis coordinated motion, it achieves comprehensive scanning imaging of materials; the automatic loading and unloading mechanism interfaces with the production line, improving inspection efficiency. This system has advantages such as compact structure, low cost, and wide applicability, and is suitable for online inspection in fields such as semiconductors and electronic components. Attached Figure Description

[0014] Figure 1 This is the front view of this utility model.

[0015] Figure 2 This is the isometric projection of this utility model. Figure 1 .

[0016] Figure 3 This is the isometric projection of this utility model. Figure 2.

[0017] Figure 4 This is the left view of this utility model.

[0018] Reference numerals: Imager 1, R1 rotating assembly 2, R2 rotating assembly 3, Z-axis lifting module 4, mounting base plate 20, R1 rotating support plate 21, R1 power system 22, electric slip ring 23, first origin sensor 24, R2 arc-shaped support plate 25, arc-shaped track 30, R2 power system 31, arc-shaped slide rail 32, drive wheel 33, servo motor 40, ball screw 41, rotating connecting plate 26, counterweight block 27, first sensing plate 28, slider 34, mounting plate 42, sliding plate 43, second origin sensor 44, second sensing plate 45, auxiliary wheel 35, third origin sensor 36, third sensing plate 37, limit block 38. Detailed Implementation

[0019] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0020] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0022] An X-ray 360-degree imaging system includes: an imager 1, an R1 rotating assembly 2, an R2 rotating assembly 3, and a Z-axis lifting module 4.

[0023] In one embodiment, such as Figures 1 to 4 As shown, imager 1 is used to receive X-ray signals and generate images; R1 rotating assembly 2 includes a mounting base plate 20, an R1 rotating support plate 21, an R1 power system 22, an electric slip ring 23, and a first origin sensor 24. The R1 rotating assembly 2 enables the imager 1 to rotate 360 ​​degrees in the horizontal plane. The R2 rotating assembly 3 includes an R2 arc-shaped support plate 25, an arc-shaped track 30, and an R2 power system 31. The R2 rotating assembly 3 drives the imager 1 to swing within an 80-degree range around the center in the vertical direction. Z-axis lifting module 4 is used to adjust the height of the imager 1 to adapt to the magnification of different materials; The automatic loading and unloading mechanism connects with the upstream and downstream production lines to achieve automatic material conveying and positioning. The R1 rotating component 2 and the R2 rotating component 3 work together, combined with the Z-axis lifting module 4, to complete the full-angle scanning imaging of the material.

[0024] In one embodiment, such as Figures 1 to 4 As shown, the slip ring 23 of the R1 rotating assembly 2 is used to realize continuous power supply and signal transmission of the cable during rotation, and to avoid cable tangling.

[0025] In one embodiment, such as Figures 1 to 4 As shown, the R2 arc-shaped support plate 25 and the arc-shaped track 30 cooperate with the drive wheel 33 through the arc-shaped slide 32, and are driven by the R2 power system 31.

[0026] In one embodiment, such as Figures 1 to 4 As shown, the Z-axis lifting module 4 uses a servo motor 40 to drive the ball screw 41 to achieve lifting accuracy control.

[0027] In one embodiment, such as Figures 1 to 4 As shown, the R1 rotating support plate 21 is fixedly installed on the mounting base plate 20, the R1 power system 22 is installed on the rotating connecting plate 26 and rotatably connected to the R1 rotating support plate 21, the rotating connecting plate 26 is provided with a counterweight block 27, the first origin sensor 24 is installed on the mounting base plate 20, and the rotating connecting plate is provided with a first sensing plate 28 that cooperates with the first origin sensor 24.

[0028] In one embodiment, such as Figures 1 to 4As shown, the arc-shaped track 30 and the arc-shaped slide 32 are fixedly installed on the R2 arc-shaped support plate 25, and the arc-shaped track 30 is provided with a slider 34.

[0029] In one embodiment, such as Figures 1 to 4 As shown, the ball screw 41 is fixedly mounted on the slider 34 via the mounting plate 42, the imager 1 is slidably mounted on the ball screw via the slide plate 43, the servo motor 40 is mounted on the rotary connecting plate 26 and connected to the ball screw 41, the mounting plate 42 is provided with a second origin sensor 44, and the slide plate 43 is provided with a second sensing plate 45 that cooperates with the second origin sensor 44.

[0030] In one embodiment, such as Figures 1 to 4 As shown, the R2 power system 31 is mounted on the mounting plate 42 and connected to a drive wheel 33. The drive wheel 33 cooperates with the arc-shaped slide rail 32. The mounting plate 42 is provided with an auxiliary wheel 35 that cooperates with the arc-shaped slide rail 32. The R2 arc-shaped support plate 25 is provided with a third origin sensor 36. The back of the mounting plate 42 is provided with a third sensing plate 37 that cooperates with the third origin sensor 36.

[0031] In one embodiment, such as Figures 1 to 4 As shown, the R1 rotating support plate 21 is provided with a limiting block 38.

[0032] In one embodiment, such as Figures 1 to 4 As shown, the R1 support plate can bear the load of the moving components below through a mechanical structure, reducing the load force on the DD motor in the Z direction and increasing its service life. At the same time, the R1 rotating component 2 is equipped with an electric slip ring 23 system, which enables the mechanism to reciprocate and avoids the risk of cable tangling.

[0033] When this utility model is in operation, it consists of the following steps: 360-degree rotation in a plane: The rotating connecting plate 26 is driven to rotate within the rotating support plate 21 by the R1 power system 22, thereby achieving a 360-degree rotation of the whole. Swinging within an 80-degree range: The R2 power system 31 works, driving the drive wheel 33 to move on the arc-shaped slide 32, while the auxiliary wheel 35 follows and rotates, so that the slider 34 drives the Z-axis lifting module 4 and the imager 1 to move on the arc-shaped track 30. Z-axis lifting adjustment: The ball screw is driven to rotate by the servo motor 40, which in turn drives the slide plate 43 to move up and down, thereby realizing the up and down adjustment of the imager 1.

[0034] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. An X-ray 360-degree imaging system, characterized in that, include: An imager is used to receive X-ray signals and generate images; The R1 rotating assembly includes a mounting base plate, an R1 rotating support plate, an R1 power system, an electric slip ring, and a first origin sensor. The R1 rotating assembly enables the imager to rotate 360 ​​degrees in the horizontal plane. The R2 rotating assembly includes an R2 arc-shaped support plate, an arc-shaped track, and an R2 power system. The R2 rotating assembly drives the imager to swing within an 80-degree range around the center in the vertical direction. The Z-axis lifting module is used to adjust the height of the imager to adapt to the magnification of different materials. The automatic loading and unloading mechanism connects with the upstream and downstream production lines to achieve automatic material conveying and positioning. The R1 rotating component works in conjunction with the R2 rotating component, and together with the Z-axis lifting module, completes full-angle scanning imaging of the material.

2. The X-ray 360-degree imaging system according to claim 1, characterized in that, The slip ring of the R1 rotating assembly is used to ensure continuous power supply and signal transmission to the cable during rotation, and to prevent the cable from tangling.

3. The X-ray 360-degree imaging system according to claim 1, characterized in that, The R2 arc-shaped support plate and the arc-shaped track cooperate with the drive wheel through the arc-shaped slide, and the drive force is provided by the R2 power system.

4. The X-ray 360-degree imaging system according to claim 3, characterized in that, The Z-axis lifting module uses a servo motor to drive the ball screw, achieving precise control of the lifting accuracy.

5. The X-ray 360-degree imaging system according to claim 4, characterized in that, The R1 rotating support plate is fixedly installed on the mounting base plate. The R1 power system is installed on the rotating connecting plate and rotatably connected to the R1 rotating support plate. The rotating connecting plate is provided with a counterweight block. The first origin sensor is installed on the mounting base plate. The rotating connecting plate is provided with a first sensing plate that cooperates with the first origin sensor.

6. The X-ray 360-degree imaging system according to claim 5, characterized in that, The arc-shaped track and the arc-shaped slide are fixedly installed on the R2 arc-shaped support plate, and the arc-shaped track is provided with a slider.

7. The X-ray 360-degree imaging system according to claim 6, characterized in that, The ball screw is fixedly mounted on the slider via a mounting plate, the imager is slidably mounted on the ball screw via a sliding plate, the servo motor is mounted on the rotating connecting plate and connected to the ball screw, the mounting plate is provided with a second origin sensor, and the sliding plate is provided with a second sensing plate that cooperates with the second origin sensor.

8. The X-ray 360-degree imaging system according to claim 7, characterized in that, The R2 power system is mounted on the mounting plate and connected to a drive wheel. The drive wheel engages with the arc-shaped slide rail. The mounting plate is provided with an auxiliary wheel that engages with the arc-shaped slide rail. The R2 arc-shaped support plate is provided with a third origin sensor. The back of the mounting plate is provided with a third sensing plate that engages with the third origin sensor.

9. The X-ray 360-degree imaging system according to claim 1, characterized in that, The R1 rotating support plate is equipped with a limiting block.

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