A transfer device and apparatus

Abstract

The utility model relates to a kind of transfer device and equipment for transferring first material and second material, the transfer device includes installation foundation;Lifting unit, assembly in the installation foundation;Clamping unit, it includes lifting platform, clamping assembly and first driving part;The lifting platform is connected the output end of the lifting unit;The clamping assembly is installed in lifting platform, and the clamping space with adjustable size is formed between the clamping assembly;The first driving part is set in the lifting platform and is connected with clamping assembly, to drive clamping assembly movement adjustment the size of clamping space;Suction unit, it includes second driving part and suction assembly.The utility model can efficiently, reliably complete the gripping and transfer task of two kinds of material with difference, and can be flexibly adapted to different materials, ensure the accuracy of clamping positioning, clamping structure is matched with different materials, ensure that clamping force is moderate, avoid slipping or damaging material in transfer process.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a transfer device and equipment. Background Technology

[0002] In modern intelligent manufacturing, semiconductor production, and warehousing and logistics industries, automated handling and precise transfer are core elements for improving production efficiency, ensuring product quality, and reducing labor costs. Especially on production lines handling materials with regular or irregular shapes, achieving rapid, stable, and damage-free material gripping and transfer is a critical technical challenge that urgently needs to be addressed. In actual production processes, there are often scenarios where two or more different materials need to be handled simultaneously. Specifically, in the chip manufacturing field, it is necessary to grip and transfer standardized containers (such as pallets) and the materials placed within them (fish bones or other products). Pallets typically have regular geometric shapes, robust structures, and significant weight, requiring grippers with high load-bearing capacity and good stability for transfer. The materials within the pallets (such as fish bones) may be irregular in shape, fragile, easily damaged, and lightweight, placing higher demands on the grippers during gripping. Existing solutions involve designing a single gripper to accommodate one primary material or using manual assistance to handle another material.

[0003] However, the shortcomings of existing technologies are as follows: First, single-function fixtures can only grasp pallets. Therefore, when it is necessary to process materials (such as fish bones) on the pallets, the fixture is not suitable and manual picking or another set of independent special equipment must be relied upon. These two sets of equipment need to cooperate and avoid each other in actual application, resulting in complex workstations, large floor space, high costs, and long cycle times. In addition, there is a method of using general-purpose fixtures to handle pallets and the materials on them. However, such general-purpose fixtures have insufficient control over gripping force and gripping accuracy. When gripping pallets, the force may be insufficient or unstable, while when gripping fish bones, the force may be too great or the contact area may be too small, causing damage to the materials. On the other hand, sorting and transfer by manual operation is inefficient, labor-intensive, and difficult to ensure operational consistency. Utility Model Content

[0004] Therefore, the technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a transfer device and equipment that can provide an integrated material clamping, adsorption and transfer structure, thereby efficiently and reliably completing the task of gripping and transferring two different materials, and can flexibly adapt to different materials to ensure the accuracy of clamping and positioning. The clamping structure is matched with different materials to ensure that the clamping force is moderate and to avoid slippage or damage to the materials during the transfer process.

[0005] To solve the above-mentioned technical problems, this utility model provides a transfer device, comprising, Installation foundation; The lifting unit is assembled on the mounting base; A clamping unit includes a lifting platform, clamping components, and a first driving member; the lifting platform is connected to the output end of the lifting unit; the clamping components are mounted on the lifting platform, and an adjustable clamping space is formed between the clamping components; the first driving member is disposed on the lifting platform and connected to the clamping components to drive the clamping components to move and adjust the size of the clamping space. An adsorption unit includes a second driving element and an adsorption assembly; the second driving element is mounted on the lifting platform; the adsorption assembly is disposed at the output end of the second driving element so as to rotate horizontally under the drive of the second driving element.

[0006] In one embodiment of the present invention, the clamping assembly includes a first clamp and a second clamp mounted opposite to each other on the lifting platform, with a clamping space formed between the first clamp and the second clamp; at least one of the first clamp and the second clamp is connected to the movable part of the first drive member.

[0007] In one embodiment of the present invention, the first gripper and the second gripper are arranged opposite to each other along a first direction and are slidably connected to the lifting platform along the first direction; the first driving member has two movable parts and is respectively connected to the first gripper and the second gripper to drive the first gripper and the second gripper to move synchronously relative to each other along the first direction.

[0008] In one embodiment of the present invention, the clamping assembly further includes two sets of sliding mechanisms disposed on both sides of the first driving member along a second direction; the first driving member and the sliding mechanisms are disposed at the bottom of the lifting platform; the sliding mechanism includes a slide rail extending along a first direction and two sliders slidably connected to the slide rail along the first direction; the slide rail is fixedly installed at the bottom of the lifting platform; the two sliders of the two sets of sliding mechanisms on the same side along the first direction are respectively fixedly connected to the first gripper or the second gripper on the corresponding side.

[0009] In one embodiment of the present invention, the adsorption assembly includes a connecting seat installed on the movable part of the second driving member, positioning members disposed at both ends of the connecting seat, and a vacuum suction cup installed on the connecting seat; the connecting seat is horizontally installed on the output end of the second driving member.

[0010] In one embodiment of the present invention, the adsorption unit further includes a fixed seat disposed on one side of the lifting platform along the second direction, and the second driving member is mounted on the edge of the lifting platform through the fixed seat.

[0011] In one embodiment of the present invention, the first driving member includes a pneumatic finger, and the second driving member includes a rotary motor.

[0012] This utility model also provides a transfer device, including a mobile device and the transfer device as described above, wherein the transfer device is connected to the mobile device to move to a designated position under the drive of the mobile device.

[0013] In one embodiment of the present invention, a machine base is further included, the machine base including multiple workstations; the moving device is configured to drive the transfer device to move between the multiple workstations.

[0014] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art: The transfer device described in this utility model includes an installation base, a lifting unit, a clamping unit, and an adsorption unit. The clamping unit can clamp the first material, and the adsorption unit can adsorb the second material. The clamping unit and the adsorption unit are raised and lowered by the lifting unit, cooperating with the moving device to move to the designated position, thereby realizing independent and efficient gripping and transfer of the two target objects. Different units are automatically switched and used according to instructions, which greatly reduces the process time, the frequency of transfer and the number of round trips during the transfer of the two materials, and also reduces the investment cost of the equipment, improving the automation, flexibility and economic benefits of the entire production line or logistics system. In addition, since the clamping unit and the adsorption unit deal with different material properties, the clamping unit has high rigidity and large load capacity, and can reliably grip and move the heavier first material; the adsorption unit can gently and accurately absorb the second material, and effectively avoid damage to the second material during the transfer process. Attached Figure Description

[0015] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0016] Figure 1 This is a first-view schematic diagram of the overall structure of a preferred embodiment of the present invention.

[0017] Figure 2 This is a second-view schematic diagram of the overall structure of a preferred embodiment of the present invention.

[0018] Figure 3 This is a schematic diagram of the clamping unit according to a preferred embodiment of the present invention.

[0019] Figure 4 This is a schematic diagram of the adsorption unit of a preferred embodiment of the present invention.

[0020] Figure 5 This is a schematic diagram of the structure of the transfer device according to a preferred embodiment of the present invention.

[0021] Explanation of reference numerals in the accompanying drawings: 1. First support tray; 2. Second support tray; 3. Mounting base; 4. Lifting unit; 40. Lifting module; 41. Lifting connecting seat; 5. Clamping unit; 50. Lifting platform; 51. Clamping assembly; 511. First gripper; 512. Second gripper; 513. Slide rail; 514. Slide rail; 515. Slider; 52. First driving component; 6. Adsorption unit; 60. Adsorption assembly; 601. Connecting seat; 602. Vacuum suction cup; 603. Vacuum introduction assembly; 61. Second driving component; 62. Positioning component; 63. Fixed seat; 7. Moving device; 8. Machine base. Detailed Implementation

[0022] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention. Example 1

[0023] Reference Figures 1 to 4 As shown, this utility model discloses a transfer device for transferring a first material and a second material. The first material is provided with at least one receiving groove for storing the second material.

[0024] In this embodiment, the first material is a first carrier tray 1, and the second material is a second carrier tray 2. The second carrier tray 2 is used to carry the chip; the first carrier tray 1 has multiple receiving slots, and the second carrier tray 2 can be stably received and placed within these slots. Therefore, each first carrier tray 1 can accommodate multiple second carrier trays 2.

[0025] Therefore, it can be seen that the transfer device of this utility model is used to transfer the first carrier pallet 1 and the second carrier pallet 2. Of course, it can also transfer the first carrier pallet 1 and the second carrier pallet 2 at the same time according to different transfer needs.

[0026] The transfer device includes a mounting base 3, a lifting unit 4, a clamping unit 5, and an adsorption unit 6.

[0027] Among them, mounting base 3 is used to connect to the mobile device; Specifically, mobile devices include, but are not limited to, mobile modules and AGVs.

[0028] The lifting unit 4 is assembled on the installation base 3.

[0029] The clamping unit 5 and / or the adsorption unit 6 are installed on the lifting unit 4.

[0030] The clamping unit 5 includes a lifting platform 50, a clamping assembly 51, and a first driving member 52. The lifting platform 50 is connected to the output end of the lifting unit 4 to achieve lifting movement under the drive of the lifting unit 4. The first driving member 52 is disposed at the bottom of the lifting platform 50, and the clamping assembly 51 is connected to the output end of the first driving member 52, forming an adjustable clamping space between the clamping assemblies 51. With this configuration, the clamping assembly 51 can adjust the size of the clamping space under the action of the first driving member 52, thereby clamping or releasing the first support tray 1.

[0031] In a preferred embodiment, the clamping assembly 51 includes a first jaw 511 and a second jaw 512 disposed opposite to each other, and a clamping space can be formed between the first jaw 511 and the second jaw 512. At least one of the first jaw 511 and the second jaw 512 is connected to the movable part of the first drive member 52.

[0032] Furthermore, the first gripper 511 and the second gripper 512 are arranged opposite to each other along the first direction, and the first gripper 511 and the second gripper 512 are slidably arranged on the lifting platform 50 along the first direction.

[0033] Furthermore, the first driving member 52 has two movable parts, with the first gripper 511 and the second gripper 512 respectively connected to the two movable parts of the first driving member 52. Thus, the first gripper 511 and the second gripper 512 can move synchronously relative to each other under the drive of the first driving member 52. That is, the first gripper 511 and the second gripper 512 move closer to or further away from each other to clamp or release the first support tray 1.

[0034] To limit the movement of the first gripper 511 and the second gripper 512 and ensure the stability and consistency of their movement path when gripping the first carrying pallet 1, the clamping assembly 51 also includes two sets of sliding mechanisms disposed on both sides of the first drive member 52 along the second direction. The first drive member 52 and the two sets of sliding mechanisms are located at the bottom of the lifting platform 50.

[0035] The second direction is perpendicular to the first direction.

[0036] Specifically, each sliding mechanism includes a guide rail support block 513, a slide rail 514, and a slider 515 slidably disposed on the slide rail 514; wherein, the guide rail support block 513 is disposed on the lower surface of the lifting platform 50, the slide rail 514 is assembled on the guide rail support block 513, and the number of sliders 515 is set to two; the two sliders 515 on the same side along the first direction of the two sliding mechanisms are respectively fixedly connected to the first gripper 511 or the second gripper 512 on the corresponding side, thereby ensuring that the movement path of the first gripper 511 and the second gripper 512 is consistent with the extension direction of the slide rail 514.

[0037] It should be noted that the extension direction of the slide rail 514 is in the same direction as the output direction of the first drive member 52.

[0038] Furthermore, the adsorption unit 6 includes an adsorption component 60 and a second driving component 61. The second driving component 61 is installed on the lifting platform 50, and the adsorption component 60 is located at the output end of the second driving component 61. The adsorption component 60 can adsorb the second carrier tray 2 and drive the second carrier tray 2 to rotate horizontally under the drive of the second driving component 61. With this configuration, after the adsorption unit 6 adsorbs and transports the second carrier tray 2 to the designated position, the horizontal placement angle of the second carrier tray 2 can be adjusted by rotation to meet subsequent production needs.

[0039] In a preferred embodiment, the adsorption component 60 includes a connecting seat 601, a vacuum suction cup 602, and a vacuum introduction component 603. The connecting seat 601 is horizontally mounted on the output end of the second driving component, and the vacuum suction cup is disposed on the connecting seat 601. One end of the vacuum introduction component 603 is connected to the vacuum suction cup 602, and the other end of the vacuum introduction component 603 is connected to a vacuum generating device.

[0040] The vacuum suction cup 602 is used to perform the suction action and directly contacts the upper surface of the second carrier tray 2; the vacuum introduction component 603 manages the airflow between the vacuum generating device and the vacuum suction cup 602 to ensure the stable establishment and release of vacuum, while providing status feedback and system protection.

[0041] In detail, the second carrier tray 2 is also provided with positioning holes, and the adsorption assembly 60 also includes a positioning element 62 that cooperates with the positioning holes. The positioning element 62 is set on the connecting seat 601.

[0042] Specifically, there are two positioning holes, which are located near the two ends of the second bearing tray 2 along the length direction. The positioning member 62 includes a positioning pin located at the end of the connecting seat 601, and each positioning pin cooperates with a positioning hole.

[0043] Furthermore, the adsorption unit 6 also includes a fixing seat 63. The adsorption component 60 is installed on one side edge of the lifting platform 50 through the fixing seat 63, so that the adsorption unit 6 and the clamping unit 5 avoid each other. This makes the structure of the transfer device more compact, and also allows the adsorption unit 6 and the clamping unit 5 to work independently without interfering with each other. In this way, in a more complex transfer process, the number and frequency of back-and-forth transfers can be effectively reduced, waiting time can be reduced, and the transfer efficiency of the two materials can be improved.

[0044] In a preferred embodiment, the lifting unit 4 includes a lifting module 40 and a lifting connecting seat 41. The lifting module 40 is mounted on the mounting base 3, the lifting connecting seat 41 is connected to the movable end of the lifting module 40, and the lifting platform 50 is fixedly connected to the lifting connecting seat 41, thereby driving the lifting platform 50 to rise and fall through the lifting module 40.

[0045] In detail, the vacuum introduction component 603 is installed on the lifting connecting seat 41.

[0046] In one preferred embodiment, the first driving element 52 includes, but is not limited to, a pneumatic finger, and the second driving element 61 includes, but is not limited to, a rotary motor.

[0047] In summary, the transfer device protected by this utility model includes an installation base, a lifting unit, a clamping unit, and an adsorption unit. The clamping unit can clamp the first material, and the adsorption unit can adsorb the second material. The clamping unit and the adsorption unit are lifted and lowered by the lifting unit, cooperating with the moving device to move to the designated position, thereby realizing independent and efficient gripping and transfer of the two target objects. Different units are automatically switched and used according to instructions, which greatly reduces the process time, the frequency of transfer and the number of round trips during the transfer of the two materials, and also reduces the investment cost of the equipment, improving the automation, flexibility and economic benefits of the entire production line or logistics system. In addition, since the clamping unit and the adsorption unit are for different material properties, the clamping unit has high rigidity and large load capacity, and can reliably grip and move the heavier first material; the adsorption unit can gently and accurately absorb the second material, and effectively avoid damage to the second material during the transfer process. Example 2

[0048] This utility model also discloses a transfer device, including a mobile device and a transfer device as described in Embodiment 1. The transfer device is connected to the mobile device 7 so as to move to a designated position under the drive of the mobile device.

[0049] In a preferred embodiment, the transfer equipment also includes a machine base 8, which includes multiple workstations, and a moving device 7 is configured to drive the transfer equipment to move between the multiple workstations.

[0050] Preferably, the machine includes a first station, a second station, and a third station; the moving device is configured to drive the transfer device to move between the first station, the second station, and the third station to transfer the target transport item between the first station, the second station, and the third station.

[0051] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0052] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0053] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A transfer device, characterized by: include, Installation foundation; The lifting unit is assembled on the mounting base; The clamping unit includes a lifting platform, a clamping assembly, and a first drive component; The lifting platform is connected to the output end of the lifting unit; the clamping assembly is installed on the lifting platform, and an adjustable clamping space is formed between the clamping assemblies; the first driving member is disposed on the lifting platform and connected to the clamping assembly to drive the clamping assembly to move and adjust the size of the clamping space; An adsorption unit includes a second driving element and an adsorption assembly; the second driving element is mounted on the lifting platform. The adsorption component is disposed at the output end of the second driving member, so as to rotate horizontally under the drive of the second driving member.

2. The transfer device of claim 1, wherein: The clamping assembly includes a first clamp and a second clamp mounted opposite to each other on the lifting platform, with a clamping space formed between the first clamp and the second clamp; at least one of the first clamp and the second clamp is connected to the movable part of the first drive member.

3. The transfer device of claim 2, wherein, The first gripper and the second gripper are arranged opposite to each other along a first direction and are slidably connected to the lifting platform along the first direction; The first driving member has two movable parts, which are respectively connected to the first gripper and the second gripper, so as to drive the first gripper and the second gripper to move synchronously relative to each other in a first direction.

4. The transfer device according to claim 2, characterized in that: The clamping assembly further includes two sets of sliding mechanisms disposed on both sides of the first drive member along the second direction; the first drive member and the sliding mechanisms are disposed at the bottom of the lifting platform; the sliding mechanism includes a slide rail extending along the first direction and two sliders slidably connected to the slide rail along the first direction; the slide rail is fixedly installed at the bottom of the lifting platform; the two sliders of the two sets of sliding mechanisms on the same side along the first direction are respectively fixedly connected to the first gripper or the second gripper on the corresponding side.

5. The transfer device according to claim 1, characterized in that: The adsorption assembly includes a connector mounted on the movable part of the second drive component, positioning components at both ends of the connector, and a vacuum suction cup mounted on the connector; the connector is horizontally mounted on the output end of the second drive component.

6. The transfer device according to claim 1, characterized in that: The adsorption unit also includes a fixed seat disposed on one side of the lifting platform along the second direction, and the second driving member is mounted on the edge of the lifting platform through the fixed seat.

7. A transfer device according to any one of claims 1-6, characterized in that: The first driving component includes a pneumatic finger, and the second driving component includes a rotary motor.

8. A transfer apparatus characterized by: It includes a mobile device and a transfer device as described in any one of claims 1-7, wherein the transfer device is connected to the mobile device to move to a designated position under the drive of the mobile device.

9. The transfer apparatus of claim 8, wherein, It also includes a machine tool, which includes multiple workstations; the moving device is configured to drive the transfer device to move between the multiple workstations.

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