Spectroscope adjusting device, spectroscope module and laser processing equipment

Abstract

This application belongs to the field of optical path transmission and provides a beam splitter adjustment device, a beam splitter module, and laser processing equipment. The laser processing equipment includes a beam splitter module, which includes a beam splitter adjustment device. The beam splitter adjustment device includes a mounting base, a rotating base, a fixed base, a first adjustment component, and a second adjustment component. The mounting base is used to mount the beam splitter. The mounting base is rotatably mounted on the rotating base, and the rotation axis of the mounting base is a first axis. The rotating base is rotatably mounted on the fixed base, and the rotation axis of the rotating base is a second axis. The first adjustment component is used to drive the mounting base to rotate relative to the rotating base around the first axis. The second adjustment component is used to drive the rotating base to rotate relative to the fixed base around the second axis. This application realizes fine-tuning of the beam splitter's angle around the first and second axes with two different degrees of freedom, greatly reducing the precision requirements of the beam splitter processing and assembly processes, and effectively ensuring that the beam splitter is in a more ideal spatial position.

Description

Technical Field

[0001] This application belongs to the field of optical transmission technology, and more specifically, relates to a beam splitter adjustment device, a beam splitter module, and a laser processing equipment. Background Technology

[0002] After a laser beam passes through a beam splitter, it is divided into transmitted and reflected light. The transmission paths of the transmitted and reflected light are determined by the spatial position of the beam splitter, and the accuracy of the beam splitter's spatial position mainly depends on the manufacturing and assembly precision. However, in actual production, due to factors such as manufacturing errors and cumulative assembly errors, it is difficult to ensure that the beam splitter reaches the ideal spatial position solely through manufacturing and assembly precision. This leads to deviations in the transmission paths of the transmitted and reflected light, affecting the laser processing effect. Utility Model Content

[0003] In order to overcome the problems existing in the prior art, the main objective of this application is to provide a beam splitter adjustment device, a beam splitter module, and a laser processing equipment.

[0004] To achieve the above objectives, this application specifically adopts the following technical solution: According to a first aspect of the embodiments of this application, a beam splitter adjustment device is provided, comprising: Mounting bracket for mounting the beam splitter; A rotating base, wherein the mounting base is rotatably disposed on the rotating base; A fixed base, wherein the rotating base is rotatably mounted on the fixed base; A first adjusting member, adjustablely connected to one of the mounting base and the rotating base, and acting on the other, to drive the mounting base to rotate about a first axis; and The second adjusting member is adjustablely connected to one of the rotating seat and the fixed seat, and acts on the other to drive the rotating seat to rotate relative to the fixed seat about a second axis; wherein the axial direction of the first axis intersects the axial direction of the second axis.

[0005] Optionally, the first adjusting member is threadedly connected to the mounting base, and one end abuts against the rotating base.

[0006] Optionally, one of the mounting base and the rotating base has a plurality of protrusions, and the other has a plurality of first grooves. The plurality of protrusions are spaced apart on the first axis, and the plurality of protrusions are rotatably accommodated in the plurality of first grooves.

[0007] Optionally, the second adjusting member is threadedly connected to the fixed seat, and one end abuts against the rotating seat.

[0008] Optionally, both the rotating seat and the fixed seat are coaxially arranged with the second axis. One of the rotating seat and the fixed seat is provided with a boss, and the other is provided with a second groove. The boss is rotatably accommodated in the second groove, and the rotation axis of the boss is coaxially arranged with the second axis.

[0009] Optionally, the beam splitter adjustment device further includes: a first elastic element and a first positioning rod. The first elastic element acts on the mounting base to provide a preload force between the mounting base and the rotating base. The first positioning rod is movably inserted through the mounting base and connected to the rotating base. A limiting flange is provided on the first positioning rod. The limiting flange is located on the side of the mounting base away from the rotating base. The first elastic element is sleeved on the first positioning rod and abuts against the mounting base and the limiting flange.

[0010] Optionally, the beam splitter adjustment device further includes a second elastic element. Both the rotating seat and the fixed seat are coaxially arranged with the second axis. The two ends of the second elastic element are respectively connected to the circumferential sidewalls of the rotating seat and the fixed seat, for applying a preload force to the rotating seat that is opposite to the force exerted by the second adjustment element; or... The beam splitter adjustment device further includes a second elastic element and a second positioning rod. The fixed base is provided with a limiting groove that is arc-shaped around the second axis. One end of the second positioning rod is movably located in the limiting groove. The second elastic element is accommodated in the limiting groove. One end of the second elastic element acts on the inner wall of one end of the limiting groove, and the other end acts on the part of the second positioning rod located in the limiting groove.

[0011] Optionally, the beam splitter adjustment device further includes: A first fastener is movably connected to the rotating seat and the fixed seat, and is used to lock the rotating seat and the fixed seat after the rotating seat has rotated to the position around the second axis.

[0012] Optionally, the fixed base is provided with a first fixing hole, the rotating base is provided with a first guide groove that is arc-shaped around the second axis, the first fastener passes through the first guide groove, and one end is inserted into the first fixing hole.

[0013] Optionally, the beam splitter adjustment device further includes: A translation component is connected to the fixed base and is used to drive the fixed base to move along a preset straight line direction, which intersects the axial direction of the first axis and the axial direction of the second axis.

[0014] Optionally, the translation component includes: A translational base, wherein the fixed base is disposed on the translational base; Base, the translation seat is slidably disposed on the base; and The third adjusting member is adjustablely connected to one of the translation seat and the base, and acts on the other to drive the translation seat to move relative to the base along the preset straight line direction.

[0015] Optionally, the third adjusting member is threadedly connected to the base, and one end abuts against the translation seat; and / or, The translation assembly further includes a third elastic element, which acts on the translation seat to apply a preload force to the translation seat that is opposite to the force of the third adjusting element.

[0016] According to a second aspect of the embodiments of this application, a beam splitter module is provided, including a beam splitter and a beam splitter adjustment device as described in any one of the above claims, wherein the beam splitter is mounted on the mounting base.

[0017] According to a third aspect of the embodiments of this application, a laser processing apparatus is provided, including the above-described beam splitter module.

[0018] The beneficial effects of the beam splitter adjustment device, beam splitter module, and laser processing equipment provided in this application are as follows: Compared with the prior art, the beam splitter adjustment device of this application, by rotatably setting the mounting base for mounting the beam splitter on the rotating base, and by operating the first adjustment member to move relative to one of the mounting base and the rotating base and exert a force on the other, can force the mounting base to rotate relative to the rotating base around a first axis, thereby achieving fine-tuning of the beam splitter's angle around the first axis; by operating the second adjustment member to move relative to one of the rotating base and the fixed base and exert a force on the other... When the force is applied, the rotating seat can be forced to rotate relative to the fixed seat around the second axis, so as to achieve fine adjustment of the angle of the beam splitter around the second axis; and the first axis intersects the second axis, realizing fine adjustment of the angle of the beam splitter around the first axis and the second axis in two different degrees of freedom, which greatly reduces the precision requirements of the beam splitter processing and assembly process, effectively ensures that the beam splitter is in the ideal spatial position, so that the transmitted light and reflected light formed after the laser beam passes through the beam splitter can be transmitted along the preset transmission path, which is conducive to improving the laser processing effect and improving the yield and production efficiency of laser processing of products. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 A three-dimensional structural diagram of a beam splitter module provided in one embodiment of this application. Figure 1 ; Figure 2 This is a schematic diagram of the vertical cross-sectional structure of a beam splitter module provided in one embodiment of this application; Figure 3 A three-dimensional structural diagram of the mounting base provided in one embodiment of this application. Figure 1 ; Figure 4 A three-dimensional structural diagram of the mounting base provided in one embodiment of this application. Figure 2 ; Figure 5 This is a partial top view of a beam splitter adjustment device provided in one embodiment of this application; Figure 6 A partial three-dimensional structural diagram of the beam splitter adjustment device provided in one embodiment of this application. Figure 1 ; Figure 7 This is a partially exploded view of the beam splitter adjustment device provided in one embodiment of this application; Figure 8 A partial three-dimensional structural diagram of the beam splitter adjustment device provided in one embodiment of this application. Figure 2 ; Figure 9 A three-dimensional structural diagram of a beam splitter module provided in one embodiment of this application. Figure 2 .

[0021] Explanation of key figure labels: 10. Mounting base; 11. Movable cavity; 12. Protrusion; 20. Rotating seat; 21. First groove; 22. Top block; 23. Boss; 24. First guide groove; 30. Fixed seat; 31. Mounting block; 32. Second groove; 33. Limiting groove; 40. First adjusting component; 50. Second adjusting component; 60. First elastic component; 70. First positioning rod; 80. Second elastic component; 90. Second positioning rod; 100. First fastener; 110. Translation assembly; 111. Translation seat; 112. Base; 113. Third adjusting component; 114. Fixed block; 115. Third elastic component; 116. Second fastener; 117. Positioning plate; 118. Second guide groove; 200. Beam splitter; a. First axis; b. Second axis; Z. Vertical direction; F. Preset straight line direction. Detailed Implementation

[0022] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0023] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0024] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0026] Please refer to the following: Figures 1 to 9 The beam splitter adjustment device provided in the embodiments of this application will now be described. The beam splitter adjustment device is used to adjust the spatial position of the beam splitter 200, wherein the spatial position of the beam splitter 200 includes the position and angle of the beam splitter 200.

[0027] Combined with appendix Figure 1 and Figure 2The beam splitter adjustment device includes a mounting base 10, a rotating base 20, a fixed base 30, a first adjusting member 40, and a second adjusting member 50. The mounting base 10 is used to mount the beam splitter 200. The mounting base 10 is rotatably mounted on the rotating base 20, and the rotation axis of the mounting base 10 is a first axis a. The rotating base 20 is rotatably mounted on the fixed base 30, and the rotation axis of the rotating base 20 is a second axis b. The first adjusting member 40 is adjustablely connected to one of the mounting base 10 and the rotating base 20, and acts on the other, to drive the mounting base 10 to rotate relative to the rotating base 20 around the first axis a. The second adjusting member 50 is adjustablely connected to one of the rotating base 20 and the fixed base 30, and acts on the other, to drive the rotating base 20 to rotate relative to the fixed base 30 around the second axis b. The axial direction of the first axis a intersects the axial direction of the second axis b.

[0028] It should be noted that, as described in this application, "one component acting on another component" means that one component is connected to another component or that one component abuts against another component. Furthermore, "one component acting on another component" can be either a direct action by one component or an indirect action by one component.

[0029] The first adjusting member 40 is adjustablely connected to one of the mounting base 10 and the rotating base 20 and acts on the other, meaning that: the first adjusting member 40 is adjustablely connected to the mounting base 10 and acts on the rotating base 20; or, the first adjusting member 40 is adjustablely connected to the rotating base 20 and acts on the mounting base 10.

[0030] When the first adjusting member 40 is adjustablely connected to the mounting base 10 and acts on the rotating base 20, applying an external force to the first adjusting member 40 to adjust its connection position relative to the mounting base 10, and generating a force on the rotating base 20, the rotating base 20 applies an equal reaction force to the mounting base 10 through the first adjusting member 40, forcing the mounting base 10 to rotate relative to the rotating base 20 around the first axis a. This, in turn, causes the mounting base 10 to drive the beam splitter 200 to rotate around the first axis a, thereby achieving fine-tuning of the beam splitter 200's angle around the first axis a.

[0031] The second adjusting member 50 is adjustablely connected to one of the fixed base 30 and the rotating base 20 and acts on the other, meaning that: the second adjusting member 50 is adjustablely connected to the fixed base 30 and acts on the rotating base 20; or, the second adjusting member 50 is adjustablely connected to the rotating base 20 and acts on the fixed base 30.

[0032] When the second adjusting member 50 is adjustablely connected to the fixed base 30 and acts on the rotating base 20, an external force is applied to the second adjusting member 50 to make it move relative to the fixed base 30 and exert a force on the rotating base 20, forcing the rotating base 20 to rotate relative to the fixed base 30 around the second axis b. In turn, the rotating base 20 drives the mounting base 10 and the beam splitter 200 to rotate synchronously around the second axis b, so as to achieve fine adjustment of the angle of the beam splitter 200 around the second axis b. When the second adjusting member 50 is adjustablely connected to the rotating seat 20 and acts on the fixed seat 30, when an external force is applied to the second adjusting member 50, causing the second adjusting member 50 to move relative to the rotating seat 20 and exert a force on the fixed seat 30, the fixed seat 30 applies an equal reaction force to the rotating seat 20 through the second adjusting member 50, forcing the rotating seat 20 to rotate relative to the fixed seat 30 around the second axis b. In turn, the rotating seat 20 drives the mounting seat 10 and the beam splitter 200 to rotate synchronously around the second axis b, so as to achieve fine adjustment of the angle of the beam splitter 200 around the second axis b.

[0033] The axial direction of the first axis a refers to the direction in which the first axis a extends. The axial direction of the second axis b refers to the direction in which the second axis b extends. The intersection of the axial directions of the first axis a and the second axis b means that the angle between the axial directions of the first axis a and the second axis b is greater than 0° and less than 180°.

[0034] Compared with the prior art, the beam splitter adjustment device provided in this application rotatably mounts the mounting base 10 for mounting the beam splitter 200 onto the rotating base 20. A first adjusting member 40 is adjustablely connected to one of the mounting base 10 and the rotating base 20, and acts on the other. By operating the first adjusting member 40, it can move relative to one of the mounting base 10 and the rotating base 20, and exert a force on the other, thus forcing the mounting base 10 to rotate relative to the rotating base 20 around a first axis a. The beam splitter 200 is rotated around the first axis a to achieve fine-tuning of its angle around the first axis a, that is, fine-tuning of its direction along the first axis a. By rotatably mounting the rotating base 20 on the fixed base 30, and adjusting the second adjusting member 50 adjustablely connected to one of the fixed base 30 and the rotating base 20, and acting on the other, the second adjusting member 50 is operated. When the second adjusting member 50 moves relative to one of the rotating base 20 and the fixed base 30 and exerts a force on the other, it forces the rotating base 20 to move relative to the other. The fixed base 30 rotates around the second axis b, and the rotating base 20 drives the mounting base 10 and the beam splitter 200 to rotate synchronously around the second axis b, so as to realize the angular fine adjustment of the beam splitter 200 around the second axis b, that is, to realize the directional fine adjustment of the beam splitter 200 on the first axis a; and the axes of the first axis a and the second axis b intersect, realizing the angular fine adjustment of the beam splitter 200 in two different degrees of freedom, which can meet the needs of multi-angle fine adjustment of the beam splitter 200. It can be understood that, according to actual needs, the first adjusting member 40 and / or the second adjusting member 5 can be operated. 0. Fine-tuning the beam splitter 200 to precisely control the angles of transmitted and reflected light greatly reduces the precision requirements for the processing and assembly of the beam splitter 200. That is, even if there are processing or assembly errors in the beam splitter 200, the angle deviation of the beam splitter can be compensated by subsequent adjustment operations, effectively ensuring that the beam splitter 200 is in a more ideal spatial position. This allows the transmitted and reflected light formed after the laser beam passes through the beam splitter 200 to be transmitted along the preset transmission path, which is beneficial to improving the laser processing effect and increasing the yield and production efficiency of laser processing products.

[0035] In addition, by using the first adjusting member 40 to drive the mounting base 10 to rotate relative to the rotating base 20 around the first axis a, and by using the second adjusting member 50 to drive the rotating base 20 to rotate relative to the fixed base 30 around the second axis b, the independent rotation adjustment of the beam splitter 200 around the intersecting first axis a and second axis b is realized. That is, the angle adjustment of the beam splitter 200 around the first axis a and the angle adjustment of the beam splitter 200 around the second axis b are independent of each other and do not interfere with each other, effectively avoiding the generation of linkage error during the adjustment process, and improving the accuracy and ease of operation of the beam splitter 200 adjustment.

[0036] For example, the incident light is parallel to the horizontal direction, and the incident light refers to the beam emitted from the light source to the beam splitter 200. The axis of the first axis a is parallel to the horizontal direction and parallel to the mirror surface of the beam splitter 200. The axis of the second axis b is parallel to the vertical direction Z and passes through the center of the beam splitter 200. It can be understood that the axis of the first axis a is orthogonal to the axis of the second axis b. Thus, the first adjusting member 40 drives the mounting base 10 and the beam splitter 200 to rotate relative to the rotating base 20 around the first axis a to fine-tune the pitch angle of the beam splitter 200. The second adjusting member 50 drives the rotating base 20, the mounting base 10, and the beam splitter 200 to rotate relative to the fixed base 30 around the second axis b to fine-tune the horizontal azimuth angle of the beam splitter 200.

[0037] Combined with appendix Figures 1 to 3 It is understood that the first adjusting member 40 is threadedly connected to the mounting base 10, and one end of the first adjusting member 40 abuts against the rotating base 20. By rotating the first adjusting member 40, the mounting base 10 is driven to rotate relative to the rotating base 20 around the first axis a. Specifically, by rotating the first adjusting member 40, the length of the first adjusting member 40 extending between the mounting base 10 and the rotating base 20 is changed, thereby changing the distance between this area of ​​the mounting base 10 and the rotating base 20, and thus changing the angle between the mounting base 10 and the rotating base 20.

[0038] For example, when an external force is applied to the first adjusting member 40, causing it to rotate clockwise relative to the mounting base 10 around its own axis, the length of the first adjusting member 40 extending between the mounting base 10 and the rotating base 20 increases. That is, the first adjusting member 40 generates a thrust on the mounting base 10 away from the rotating base 20 through threaded transmission, thereby pushing the mounting base 10 to rotate relative to the rotating base 20 around the first axis a, thus increasing the angle between the mounting base 10 and the rotating base 20. Similarly, when an external force is applied to the first adjusting member 40, causing it to rotate clockwise relative to the mounting base 10 around its own axis, the length of the first adjusting member 40 extending between the mounting base 10 and the rotating base 20 decreases. That is, the first adjusting member 40 generates a thrust on the mounting base 10 closer to the rotating base 20 through threaded transmission, thereby pushing the mounting base 10 to rotate in the opposite direction relative to the rotating base 20 around the first axis a, thus decreasing the angle between the mounting base 10 and the rotating base 20.

[0039] The above technical solution involves a first adjusting member 40 threadedly connected to the mounting base 10, with one end abutting against the rotating base 20. Rotating the first adjusting member 40 pushes the mounting base 10 to rotate relative to the rotating base 20 around the first axis a, thereby achieving fine-tuning of the angle of the beam splitter 200 around the first axis a. The threaded connection makes the adjustment process more precise and controllable. A small linear displacement can be generated by finely rotating the first adjusting member 40. For example, the operator can achieve a small and precise adjustment of the rotation angle of the mounting base 10 by slowly rotating the first adjusting member 40, thereby driving the mounting base 10 and the beam splitter 200 to perform high-precision angle fine-tuning around the first axis a. Furthermore, the threaded structure has good self-locking properties, and can stably maintain the current angle after adjustment, avoiding angle deviation caused by external force or vibration.

[0040] Specifically, the mounting base 10 has a first threaded hole on the side away from the first axis a. The first adjusting member 40 is a threaded rod, and the axial direction of the first adjusting member 40 is perpendicular to the axial direction of the first axis a. The first adjusting member 40 passes through the first threaded hole and is threadedly engaged with it. When an external force is applied to the first adjusting member 40, causing it to rotate relative to the mounting base 10, one end of the first adjusting member 40 drives the mounting base 10 to rotate around the first axis a.

[0041] Optionally, the mounting base 10 is rotatably disposed on the upper surface of the rotating base 20, and the axis of the first adjusting member 40 is perpendicular to the axis of the first axis a, so that the first adjusting member 40 can be operated from above the mounting base 10, which is convenient.

[0042] Optionally, the first adjusting element 40 may be, but is not limited to, a bolt or screw.

[0043] Alternatively, the first adjusting member 40 is threadedly connected to the rotating seat 20, and one end abuts against the mounting base 10. By rotating the first adjusting member 40, the first adjusting member 40 pushes the mounting base 10 to rotate relative to the rotating seat 20 around the first axis a. Alternatively, the first adjusting member 40 is a wedge-shaped block located between the mounting base 10 and the rotating seat 20. The inclined surface of the wedge-shaped block slides in contact with the surface of the mounting base 10 facing the rotating seat 20. The wedge-shaped block and the rotating seat 20 are axially connected along the first axis a. By pushing the wedge-shaped block to slide axially along the first axis a, the wedge-shaped block pushes the mounting base 10 to rotate relative to the rotating seat 20 around the first axis a.

[0044] Combined with appendix Figure 2 It is understood that the beam splitter adjustment device also includes a first elastic element 60, which acts on the mounting base 10 and provides a preload between the mounting base 10 and the rotating base 20.

[0045] For example, the first adjusting member 40 is threadedly connected to the mounting base 10, and one end of the first adjusting member 40 abuts against the rotating base 20. When the first adjusting member 40 is rotated in the forward direction, the first adjusting member 40 generates a thrust on the mounting base 10 away from the rotating base 20 through threaded transmission, forcing the mounting base 10 to rotate in the forward direction relative to the rotating base 20 around the first axis a. When the first adjusting member 40 is rotated in the reverse direction, the first adjusting member 40 generates a thrust on the mounting base 10 closer to the rotating base 20 through threaded transmission, forcing the mounting base 10 to rotate in the reverse direction relative to the rotating base 20 around the first axis a, thereby realizing bidirectional rotation adjustment of the beam splitter 200 around the first axis a. Of course, it is also possible that after rotating the first adjusting member 40 in the forward direction to force the mounting base 10 to overcome the preload of the first elastic member 60 and adjust the angle, when the first adjusting member 40 is rotated in the reverse direction, the thrust of the first adjusting member 40 on the mounting base 10 decreases, and the preload of the first elastic member 60 drives the mounting base 10 to reset towards the rotating base 20.

[0046] The above technical solution provides a pre-tightening force between the mounting base 10 and the rotating base 20 through the first elastic element 60. Firstly, it ensures that the mounting base 10 can rotate relative to the rotating base 20 around the first axis a when the first adjusting element 40 is adjusted in either the forward or reverse direction, thus ensuring that the beam splitter 200 can be rotated bidirectionally around the first axis a to meet the needs of fine adjustment at different angles. Secondly, it can effectively eliminate the assembly gap between the mounting base 10 and the rotating base 20 and the loosening gap that may occur during the rotation adjustment process, ensuring that the mounting base 10 always maintains reliable contact with the rotating base 20 under the synergistic effect of the first adjusting element 40 and the elastic element.

[0047] Combined with appendix Figure 1 and Figure 2 It is understood that the beam splitter adjustment device also includes a first positioning rod 70, which is movably inserted through the mounting base 10 and connected to the rotating base 20. A limiting flange is provided on the first positioning rod 70, which is located on the side of the mounting base 10 away from the rotating base 20. A first elastic member 60 is sleeved on the first positioning rod 70 and abuts against the mounting base 10 and the limiting flange.

[0048] The above technical solution, by sleeved on the first elastic element 60 and abutting between the mounting base 10 and the limiting flange, ensures that the elastic force of the first elastic element 60 acts stably on the mounting base 10 along the axial direction of the first positioning rod 70, so that the mounting base 10 and the rotating base 20 are always subjected to a stable preload. At the same time, it can provide guidance and limitation for the rotational movement of the mounting base 10 relative to the rotating base 20.

[0049] Optionally, the first elastic element 60 may be, but is not limited to, a spring or a sheet. For example, the axial direction of the first axis a is parallel to the horizontal direction, and the axial direction of the second axis b is parallel to the vertical direction Z. The first elastic element 60 is a helical compression spring. When the angle between the mounting base 10 and the rotating base 20 increases, i.e., when the pitch angle of the beam splitter 200 increases, the first elastic element 60 is compressed; when the angle between the mounting base 10 and the rotating base 20 decreases, i.e., when the pitch angle of the beam splitter 200 decreases, the first elastic element 60 extends.

[0050] Optionally, the mounting base 10 is provided with a movable cavity 11, in which the first elastic member 60 is accommodated and the first positioning rod 70 is movably inserted through the movable cavity 11.

[0051] Combined with appendix Figure 4 and Figure 5 It is understood that one of the mounting base 10 and the rotating base 20 is provided with multiple protrusions 12, and the other is provided with multiple first grooves 21. The multiple protrusions 12 are distributed at intervals on the first axis a, and the multiple protrusions 12 are rotatably accommodated in the multiple first grooves 21, so as to realize the rotational engagement of the mounting base 10 and the rotating base 20 around the first axis a.

[0052] Specifically, the mounting base 10 has multiple protrusions 12 on the side facing the rotating base 20, and these protrusions 12 are spaced apart along the first axis a. The rotating base 20 has multiple first grooves 21 on the side facing the mounting base 10, with each protrusion 12 corresponding to one of the first grooves 21. Each protrusion 12 is rotatably accommodated within a first groove 21, thereby achieving a rotational engagement between the mounting base 10 and the rotating base 20 around the first axis a. Alternatively, the mounting base 10 has multiple protrusions 12 on the side facing the rotating base 20, and these protrusions 12 are spaced apart along the first axis a. The rotating base 20 has multiple first grooves 21 on the side facing the mounting base 10, with each protrusion 12 corresponding to one of the first grooves 21. Each protrusion 12 is rotatably accommodated within a first groove 21, thereby achieving a rotational engagement between the mounting base 10 and the rotating base 20 around the first axis a.

[0053] The above technical solution, by rotatably accommodating multiple protrusions 12 spaced on the first axis a within multiple first grooves 21, can constrain the rotation path of the mounting base 10, ensuring that the mounting base 10 always rotates around the first axis a, avoiding axial offset or skew during the rotation of the mounting base 10, and providing a stable reference for the fine-tuning of the angle of the beam splitter 200 around the first axis a.

[0054] Optionally, the protrusion 12 can be, but is not limited to, arc-shaped and columnar. For example, the protrusion 12 is hemispherical. The first groove 21 can be, but is not limited to, arc-shaped and rectangular grooves. For example, some of the first grooves 21 are conical first grooves 21, that is, the cross-section of the first groove 21 is V-shaped, and some of the first grooves 21 are strip-shaped, and the length direction of the first groove 21 is consistent with the first axis a, and the cross-section of the first groove 21 is also V-shaped. The strip-shaped first groove 21 is used to compensate for the error between the mounting base 10 and the rotating base 20, so that each protrusion 12 can fall into the corresponding first groove 21.

[0055] For example, the first adjusting member 40 is threadedly connected to the mounting base 10, and one end abuts against the rotating base 20. The mounting base 10 has two protrusions 12 on the side facing the rotating base 20, and the two protrusions 12 are spaced apart along the first axis a. The rotating base 20 has two first grooves 21 on the side facing the mounting base 10, and the two protrusions 12 are rotatably accommodated in the two first grooves 21 respectively. The first adjusting member 40 cooperates with the two protrusions 12 to support the mounting base 10, which helps to improve the stability of the mounting base 10 rotatably mounted on the rotating base 20.

[0056] Combined with appendix Figure 1 and Figure 5 It is understood that the second adjusting member 50 is threadedly connected to the fixed seat 30, and one end of the second adjusting member 50 abuts against the rotating seat 20. By rotating the second adjusting member 50, the rotating seat 20 is driven to rotate relative to the fixed seat 30 around the second axis b.

[0057] The above technical solution involves a second adjusting member 50 threadedly connected to the fixed base 30, with one end abutting against the rotating base 20. Rotating the second adjusting member 50 pushes the rotating base 20 to rotate relative to the fixed base 30 around the second axis b, thereby achieving fine-tuning of the angle of the beam splitter 200 around the second axis b. The threaded connection makes the adjustment process more precise and controllable. A small linear displacement can be generated by finely rotating the second adjusting member 50. For example, the operator can achieve a small and precise adjustment of the rotation angle of the rotating base 20 by slowly rotating the second adjusting member 50, thereby driving the rotating base 20 and the beam splitter 200 to perform high-precision angle fine-tuning around the second axis b. Furthermore, the threaded structure has good self-locking properties, and can stably maintain the current position after adjustment, avoiding angle deviation caused by external force or vibration.

[0058] Optionally, the second adjusting element 50 may be, but is not limited to, a bolt or screw.

[0059] Combined with appendix Figure 1 and Figure 2Optionally, the mounting base 10, the rotating base 20, and the fixed base 30 are all coaxially arranged with the second axis b, the axis of the second axis b being parallel to the vertical direction Z. The mounting base 10 is rotatably mounted on the upper surface of the rotating base 20 along the second axis b, and the rotating base 20 is rotatably mounted on the upper surface of the fixed base 30 along the second axis b. It can be understood that the mounting base 10, the rotating base 20, and the fixed base 30 are arranged sequentially along the second axis b.

[0060] Combined with appendix Figure 5 and Figure 6 A mounting block 31 is provided on the circumferential side wall of the fixed seat 30, and a top block 22 is provided on the circumferential side wall of the rotating seat 20. The second adjusting member 50 is threadedly connected to the mounting block 31, and one end abuts against the top block 22.

[0061] Specifically, the mounting block 31 is provided with a second threaded hole, the second adjusting member 50 is a threaded rod, and the axial direction of the second adjusting member 50 is perpendicular to the axial direction of the second axis b. The second adjusting member 50 passes through the second threaded hole and is threadedly engaged with the second threaded hole.

[0062] By rotating the second adjusting member 50, the length of the second adjusting member 50 extending between the mounting block 31 and the top block 22 is changed, thereby changing the distance between the top block 22 and the mounting block 31, and consequently changing the angle of the rotating seat 20 relative to the fixed seat 30 about the second axis a. Exemplarily, when an external force is applied to the second adjusting member 50, causing it to rotate relative to the mounting block 31 about its own axis, the length of the second adjusting member 50 extending between the mounting block 31 and the top block 22 increases, thereby increasing the abutting force of the second adjusting member 50 on the top block 22 and pushing the top block 22 away from the mounting block 31. The top block 22 then causes the rotating seat 20 to rotate relative to the fixed seat 30 about the second axis b.

[0063] The above technical solution provides a mounting block 31 on the side wall of the fixed seat 30, a top block 22 on the side wall of the rotating seat 20, and a second adjusting member 50 that is threadedly connected to the mounting block 31 and has one end abutting against the top block 22, which facilitates operation of the second adjusting member 50 and makes adjustment convenient.

[0064] Alternatively, the rotating seat 20 is rotatably mounted on the rotating seat 30 along the second axis b. A top block 22 is provided on the side wall of the fixed seat 30, and a mounting block 31 is provided on the side wall of the rotating seat 20. The second adjusting member 50 is threadedly connected to the mounting block 31, and one end abuts against the top block 22. The second adjusting member 50 generates a thrust on the mounting block 31 away from the top block 22 through threaded transmission, thereby pushing the rotating seat 20 to rotate relative to the fixed seat 30 around the second axis b.

[0065] Combined with appendix Figure 2It is understood that the rotating seat 20 is provided with a boss 23, which is located on the side of the rotating seat 20 facing the fixed seat 30. The fixed seat 30 is provided with a second groove 32, which penetrates the surface of the fixed seat 30 facing the rotating seat 20. The boss 23 is rotatably accommodated in the second groove 32, and the rotation axis of the boss 23 is coaxial with the second axis b.

[0066] The above technical solution achieves coaxial rotational engagement between the rotating seat 20 and the fixed seat 30 through the cooperation of the boss 23 and the second groove 32. At the same time, it strictly constrains the rotation path of the rotating seat 20 around the second axis b, restricts the degree of freedom of the rotating seat 20 in the non-rotation direction, effectively avoids axial wobbling or deviation caused by radial offset during rotation, and helps to improve the rotation angle accuracy of the beam splitter 200 around the second axis b.

[0067] Alternatively, the rotating seat 20 is provided with a second groove 32, which extends through the surface of the rotating seat 20 facing the fixed seat 30. The fixed seat 30 is provided with a boss 23, which is located on the side of the fixed seat 30 facing the rotating seat 20. The boss 23 is rotatably accommodated in the second groove 32, and the rotation axis of the boss 23 is coaxial with the second axis b.

[0068] Combined with appendix Figure 1 It is understood that the beam splitter adjustment device also includes a second elastic element 80, which acts on the rotating seat 20 to apply a preload force to the rotating seat 20 that is opposite to the force of the second adjustment element 50.

[0069] Specifically, the second adjusting member 50 is used to drive the rotating seat 20 to rotate around the second axis b in the first rotation direction, and the second elastic member 80 acts on the rotating seat 20 to make the rotating seat 20 always have the tendency to rotate around the second axis b in the second rotation direction, which is opposite to the first rotation direction.

[0070] For example, when the second adjusting member 50 pushes the rotating seat 20 to rotate around the second axis a in the first rotation direction, the second elastic member 80 is stretched or compressed to accumulate elastic potential energy. When the second adjusting member 50 retracts in the reverse direction, the elastic force of the second elastic member 80 drives the rotating seat 20 to rotate around the second axis b in the second rotation direction, thereby realizing bidirectional rotation adjustment of the beam splitter 200 around the second axis b to meet the needs of fine adjustment at different angles. Moreover, through the synergistic effect of the second elastic member 80 and the second adjusting member 50, after the rotating seat 20 is adjusted, the elastic force of the second elastic member 80 helps to maintain the current angle of the rotating seat 20, preventing it from rotating unexpectedly around the second axis b due to external forces or vibrations, thus enhancing the stability of the beam splitter adjustment device.

[0071] Optionally, the second elastic element 80 may be, but is not limited to, a spring and a sheet.

[0072] Combined with appendix Figure 5 and Figure 6 It is understandable that the two ends of the second elastic element 80 are respectively connected to the circumferential sidewall of the rotating seat 20 and the circumferential sidewall of the fixed seat 30.

[0073] For example, when the second adjusting member 50 pushes the rotating seat 20 to rotate relative to the fixed seat 30 about the second axis b in the first rotation direction, the second elastic member 80 extends. When the second adjusting member 50 retracts in the reverse direction, the second elastic member 80 shortens and pulls the rotating seat 20 to rotate relative to the fixed seat 30 about the second axis b in the second rotation direction.

[0074] When both the rotating seat 20 and the fixed seat 30 are coaxially arranged with the second axis b, by connecting the two ends of the second elastic member 80 to the circumferential sidewalls of the rotating seat 20 and the fixed seat 30 respectively, the direction of the elastic force can be more accurately distributed along the rotational tangent of the rotating seat 20, forming an efficient reverse synergy with the force of the second adjusting member 50, ensuring that the preload applied by the second elastic member 80 is stably applied to the rotational adjustment path of the rotating seat 20, and avoiding adjustment lag or force imbalance caused by the deviation of the elastic force direction.

[0075] Combined with appendix Figure 5 and Figure 6 It is understood that there are multiple second elastic elements 80, which are distributed at intervals around the second axis b. The multiple spaced second elastic elements 80 can form a relatively uniform reverse preload along the circumference of the rotating seat 20, effectively reducing adjustment jamming or rotation path deviation caused by uneven force, and improving the stability and path accuracy of the beam splitter 200 rotating around the second axis b.

[0076] Combined with appendix Figure 5 and Figure 6 Optionally, the number of second elastic elements 80 is two, and the two second elastic elements 80 are arranged opposite each other around the second axis b, with the second adjusting element 50 located between the two second elastic elements 80 around the second axis b. Of course, the number of second elastic elements 80 can also be other, such as one, three or more.

[0077] Combined with appendix Figure 7 and Figure 8It is understood that the fixed base 30 is provided with a limiting groove 33, which is arc-shaped around the second axis b, and the center of the limiting groove 33 is coaxial with the second axis b. The second elastic element 80 is accommodated in the limiting groove 33. The beam splitter adjustment device also includes a second positioning rod 90, which is connected to the rotating base 20, and one end of the second positioning rod 90 is movably located within the limiting groove 33. One end of the second elastic element 80 acts on the inner wall of one end of the limiting groove 33, and the other end acts on the part of the second positioning rod 90 located within the limiting groove 33. It is understood that the second elastic element 80 acts on the rotating base 20 through the second positioning rod 90.

[0078] For example, the second elastic element 80 is a compression spring. One end of the second elastic element 80 abuts against the inner wall of one end of the limiting groove 33, and the other end abuts against the second positioning rod 90 located within the limiting groove 33. When the second adjusting member 50 pushes the rotating seat 20 to rotate relative to the fixed seat 30 around the second axis b in the first rotation direction, one end of the second positioning rod 90 moves within the limiting groove 33 and compresses the second elastic element 80. When the second adjusting member 50 retracts in the reverse direction, the second elastic element 80 extends and pushes one end of the second positioning rod 90 to move in the reverse direction within the limiting groove 33, thereby causing the rotating seat 20 to rotate relative to the fixed seat 30 around the second axis b in the second rotation direction. Alternatively, the second elastic element 80 can be a tension spring. One end of the second elastic element 80 is connected to the inner wall of one end of the limiting groove 33, and the other end is connected to the end of the second positioning rod 90 located in the limiting groove 33. When the rotating seat 20 rotates in the first rotation direction, the second elastic element 80 is stretched, and when the rotating seat 20 rotates in the second rotation direction, the second elastic element 80 is compressed.

[0079] The above-described technology, by accommodating the second elastic element 80 within the limiting groove 33, effectively limits the second elastic element 80, preventing lateral displacement, twisting, or bending during the expansion and contraction process. Simultaneously, the second positioning rod 90, acting as a force transmission medium between the second elastic element 80 and the rotating seat 20, precisely transmits the elastic force of the second elastic element 80 to the rotating seat 20, thereby reliably achieving bidirectional rotational adjustment of the rotating seat 20 and ensuring its stability after adjustment.

[0080] Optionally, the limiting groove 33 is provided on the side of the fixed seat 30 facing the rotating seat 20, so that when the second elastic member 80 is accommodated in the limiting groove 33, the second elastic member 80 is hidden between the rotating seat 20 and the fixed seat 30.

[0081] It should be noted that the number of limiting grooves 33 and the number of second positioning rods 90 are equal to the number of second elastic elements 80. The number of second elastic elements 80 can be one or more. Optionally, there are two second elastic elements 80, thus the number of limiting grooves 33 and the number of second positioning rods 90 are also two. The two limiting grooves 33 are symmetrically arranged around the second axis b, and the two second elastic elements 80 are respectively accommodated within the two limiting grooves 33. One end of each of the two second positioning rods 90 is movably located within the limiting groove 33.

[0082] Optionally, the rotating seat 20 is provided with a connecting hole, which is a threaded hole. The second positioning rod 90 is a threaded rod, such as a bolt or screw. The axial direction of the second positioning rod 90 is consistent with the axial direction of the second axis b, and the second positioning rod 90 passes through the connecting hole and is threadedly connected to the connecting hole.

[0083] Combined with appendix Figure 2 It is understood that the beam splitter adjustment device also includes a first fastener 100, which is movably connected to the rotating seat 20 and the fixed seat 30. The first fastener 100 is used to lock the rotating seat 20 and the fixed seat 30 after the rotating seat 20 rotates to the position around the second axis b.

[0084] When it is necessary to adjust the angle of the beam splitter 200 around the second axis b, the first fastener 100 unlocks the rotating seat 20 and the fixed seat 30, so that the rotating seat 20 can rotate relative to the rotating seat 20 around the second axis b. After the second adjusting member 50 completes the fine adjustment of the angle of the beam splitter 200 around the second axis b, the first fastener 100 locks the rotating seat 20 and the fixed seat 30 to lock the beam splitter 200 at the preset angle, so as to avoid the angle from being accidentally changed due to accidental contact with the second adjusting member 50 or external force interference during subsequent operations, thereby improving the reliability of the beam splitter adjustment device.

[0085] Combined with appendix Figure 5 and Figure 7 It is understood that the fixed seat 30 is provided with a first fixed hole, the rotating seat 20 is provided with a first guide groove 24, the first guide groove 24 is arc-shaped around the second axis b, and the center of the first guide groove 24 is coaxial with the second axis b. The first fastener 100 passes through the first guide groove 24, and one end is inserted into the first fixed hole and is fastened to the fixed seat 30.

[0086] The arc-shaped structure of the first guide groove 24 matches the rotation path of the rotating seat 20. When the rotating seat 20 rotates and adjusts around the second axis b, the first fastener 100 can move synchronously along the arc-shaped path of the first guide groove 24, always maintaining alignment with the first fixing hole, thus avoiding locking difficulties caused by positional offset. At the same time, the arc-shaped first guide groove 24 provides guidance and limiting for the rotation adjustment of the rotating seat 20 around the second axis b.

[0087] Optionally, the first fixing hole is a threaded hole, and one end of the first fastener 100 is inserted into the first fixing hole and threadedly engaged with the first fixing hole to achieve a tight fit between the first fastener 100 and the fixing seat 30.

[0088] Optionally, the first fastener 100 may be, but is not limited to, a bolt or screw.

[0089] For example, when it is necessary to adjust the angle of the beam splitter 200 around the second axis b, the first fastener 100 is loosened so that the rotating seat 20 can rotate relative to the fixed seat 30 around the second axis b. After the rotating seat 20 is rotated into place, the first fastener 100 is tightened to lock the rotating seat 20 onto the fixed seat 30.

[0090] Combined with appendix Figure 5 and Figure 7 It is understood that there are multiple first fasteners 100, which are distributed at intervals around the second axis b. The multiple first fasteners 100 cooperate to lock the rotating seat 20 and the fixed seat 30, which helps to improve the stability of the locking between the rotating seat 20 and the fixed seat 30.

[0091] Optionally, the number of first fasteners 100 is three. Of course, the number of first fasteners 100 can also be one, two, or four, etc.

[0092] Combined with appendix Figure 1 It is understood that the beam splitter adjustment device also includes a translation component 110, which is connected to the fixed base 30 and is used to drive the fixed base 30 to move along a preset straight direction F. The preset straight direction F intersects the axial direction of the first axis a and the axial direction of the second axis b.

[0093] Specifically, when the translation component 110 drives the fixed base 30 to move along the preset straight direction F, the fixed base 30 drives the rotating base 20, the mounting base 10 and the beam splitter 200 to move along the preset straight direction F, so as to achieve fine adjustment of the position of the beam splitter 200 in the preset straight direction F.

[0094] The above technical solution, through the translation component 110, moves the fixed base 30 along a preset straight line direction F, thereby moving the rotating base 20, the mounting base 10, and the beam splitter 200 along the preset straight line direction F. This achieves fine-tuning of the beam splitter 200's position along the preset straight line direction F. Furthermore, the preset straight line direction F intersects with the axial direction of the first axis a and the axial direction of the second axis b, enabling the beam splitter adjustment device to achieve multi-degree-of-freedom comprehensive adjustment of the beam splitter 200 in three-dimensional space. This broadens the adjustment range of the beam splitter 200's spatial position and enhances the device's versatility and adaptability. In addition, the fine-tuning of the beam splitter 200's position along the preset straight line direction F, the fine-tuning of the beam splitter 200's angle around the first axis a, and the fine-tuning of the beam splitter 200's angle around the second axis b are independent and do not interfere with each other. Operators can perform precise adjustments to the position and angle according to their needs, further improving the accuracy of adjustment and ease of operation.

[0095] Optionally, the preset straight line direction F is parallel to the horizontal direction and consistent with the incident light. It should be noted that the angle between the preset straight line direction F and the axis of the first axis a is greater than 0° and less than 90°, so that the incident light can be directed towards the beam splitter 200 and form transmitted light and reflected light on the mirror surface of the beam splitter 200.

[0096] Combined with appendix Figure 1 It is understood that the translation component 110 includes a translation seat 111, a base 112, and a third adjusting member 113. The fixed seat 30 is disposed on the translation seat 111; the translation seat 111 is slidably disposed on the base 112; the third adjusting member 113 is adjustablely connected to one of the translation seat 111 and the base 112, and acts on the other, for driving the translation seat 111 to move relative to the base 112 along a preset straight direction F.

[0097] It should be noted that the third adjusting member 113 is adjustablely connected to one of the translation seat 111 and the base 112 and acts on the other, meaning that: the third adjusting member 113 is adjustablely connected to the base 112 and acts on the translation seat 111; or, the third adjusting member 113 is adjustablely connected to the translation seat 111 and acts on the base 112.

[0098] The above technical solution effectively ensures the stability of the translation seat 111 when it moves along the preset straight direction F by sliding the translation seat 111 on the base 112, thus preventing the translation seat 111 from shifting or tilting during movement. By operating the third adjusting member 113, the translation seat 111 is moved on the base 112 along the preset straight direction F. The translation seat 111 drives the fixed seat 30, the rotating seat 20, the mounting seat 10, and the beam splitter 200 to move along the preset straight direction F, thereby adjusting the position of the beam splitter 200 in the preset straight direction F. The operation is simple and convenient.

[0099] Combined with appendix Figure 1 It is understandable that the third adjusting member 113 is threadedly connected to the base 112, and one end abuts against the translation seat 111. By rotating the third adjusting member 113, the translation seat 111 moves relative to the base 112 along a preset straight direction F.

[0100] The above technical solution involves a third adjusting member 113 threadedly connected to the base 112, with one end abutting against the translation seat 111. By rotating the third adjusting member 113, the translation seat 111 is pushed to move along a preset straight line direction F on the base 112, thereby achieving fine-tuning of the position of the beam splitter 200 in the preset straight line direction F. The threaded connection makes the adjustment process more precise and controllable, and the threaded structure has good self-locking properties. After adjustment, the beam splitter 200 can be stably maintained in the preset position, avoiding angular deviation caused by external force or vibration.

[0101] Optionally, a fixing block 114 is provided on one end of the base 112 along a preset straight direction F. The fixing block 114 is provided with a third threaded hole. The third adjusting member 113 is a threaded rod, and the axial direction of the third adjusting member 113 is consistent with the preset straight direction F. The third adjusting member 113 passes through the third threaded hole and is threadedly engaged with the third threaded hole.

[0102] Combined with appendix Figure 1 It is understood that the translation assembly 110 also includes a third elastic element 115, which acts on the translation seat 111 to apply a preload force to the translation seat 111 that is opposite to the force of the third adjusting element 113.

[0103] Specifically, the third elastic element 115 acts on the translation seat 111, causing the translation seat 111 to always have a tendency to move in a direction opposite to the preset straight line direction F.

[0104] For example, when the third adjusting member pushes the translation seat 111 forward to move along a preset straight direction F on the base 112, the third elastic member 115 is stretched or compressed to accumulate elastic potential energy. When the third adjusting member 113 retracts in the reverse direction, the elastic force of the third elastic member 115 drives the translation seat 111 to move on the base 112 in a direction opposite to the preset straight direction F. This allows the beam splitter 200 to be adjusted in two directions: along the preset straight direction F and in a direction opposite to the preset straight direction F, to meet the fine-tuning requirements at different positions in the preset direction. Furthermore, through the synergistic effect of the third elastic member 115 and the third adjusting member 113, after the translation seat 111 is adjusted, the elastic force of the third elastic member 115 helps to maintain the current position of the translation seat 111, preventing it from moving along the preset straight direction F due to external forces or vibrations, thus enhancing the stability of the beam splitter adjustment device.

[0105] Optionally, the third elastic element 115 is disposed between the translation seat 111 and the base 112.

[0106] Combined with appendix Figure 9 It is understood that the translation component 110 also includes a second fastener 116, which is movably connected to the translation seat 111 and the base 112. The second fastener 116 is used to lock the translation seat 111 and the base 112 after the translation seat 111 moves into place along a preset straight direction F.

[0107] When it is necessary to adjust the position of the beam splitter 200 along the preset straight direction F, the second fastener 116 unlocks the translation seat 111 and the base 112, so that the translation seat 111 can move relative to the base 112 along the preset straight direction F. After the position of the beam splitter 200 in the preset straight direction F is finely adjusted by the third adjusting member 113, the second fastener 116 locks the translation seat 111 and the base 112 to lock the beam splitter 200 in the preset position, so as to avoid the unexpected change of position due to accidental contact with the third adjusting member 113 or external force interference during subsequent operations, thereby improving the reliability of the beam splitter adjustment device.

[0108] Combined with appendix Figure 9 It is understood that the translation seat 111 is provided with a second fixing hole, and the side of the base 112 is provided with a positioning plate 117. The positioning plate 117 is provided with a second guide groove 118. The second guide groove 118 is strip-shaped, and the length direction of the second guide groove 118 is consistent with the preset straight line direction F. The second fastener 116 passes through the second guide groove 118, and one end is inserted into the second fixing hole and is fastened to the base 112.

[0109] The length direction of the second guide groove 118 is consistent with the preset straight line direction F. When the translation seat 111 moves in the preset straight line direction F, the second fastener 116 moves synchronously along the second guide groove 118, always maintaining alignment with the second fixing hole, thus avoiding locking difficulties caused by positional offset. At the same time, the strip-shaped second guide groove 118 provides guidance and limiting for the movement adjustment of the translation seat 111 in the preset straight line direction F.

[0110] Optionally, the second fixing hole is a threaded hole, and one end of the second fastener 116 is inserted into the second fixing hole and threadedly engaged with the second fixing hole to achieve a tight fit between the second fastener 116 and the base 112.

[0111] Optionally, the second fastener 116 may be, but is not limited to, a bolt or screw.

[0112] For example, when it is necessary to adjust the position of the beam splitter 200 along the preset straight direction F, the second fastener 116 is loosened so that the translation seat 111 can move relative to the base 112 along the preset straight direction F. After the translation seat 111 moves into place, the second fastener 116 is tightened to lock the translation seat 111 onto the base 112.

[0113] Please see Figure 1 and Figure 2 This application also provides a beam splitter module, including a beam splitter 200 and a beam splitter adjustment device according to any of the above embodiments, wherein the beam splitter 200 is mounted on the mounting base 10 of the beam splitter adjustment device.

[0114] The beam splitter module provided in this application adopts a beam splitter adjustment device, thereby possessing all the beneficial effects of a beam splitter adjustment device.

[0115] This application also provides a laser processing device, including the above-mentioned beam splitter module.

[0116] The laser processing equipment provided in this application uses a beam splitter module, thus possessing all the beneficial effects of a beam splitter module.

[0117] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A spectroscope adjusting device, characterized by, include: Mounting bracket for mounting the beam splitter; A rotating base, wherein the mounting base is rotatably disposed on the rotating base; A fixed base, wherein the rotating base is rotatably mounted on the fixed base; A first adjusting member is adjustablely connected to one of the mounting base and the rotating base, and acts on the other to drive the mounting base to rotate around a first axis. as well as The second adjusting member is adjustablely connected to one of the rotating seat and the fixed seat, and acts on the other to drive the rotating seat to rotate relative to the fixed seat about a second axis; wherein the axial direction of the first axis intersects the axial direction of the second axis.

2. The spectroscope adjusting device according to claim 1, wherein: The first adjusting member is threadedly connected to the mounting base, and one end abuts against the rotating base.

3. The spectroscope adjusting device according to claim 1, wherein: One of the mounting base and the rotating base has multiple protrusions, and the other has multiple first grooves. The multiple protrusions are spaced apart on the first axis, and the multiple protrusions are rotatably accommodated in the multiple first grooves.

4. The spectroscope adjusting device according to claim 1, wherein: The second adjusting member is threadedly connected to the fixed seat, and one end abuts against the rotating seat.

5. The beam splitter adjustment device as described in claim 4, characterized in that: Both the rotating seat and the fixed seat are coaxially arranged with the second axis. One of the rotating seat and the fixed seat is provided with a boss, and the other is provided with a second groove. The boss is rotatably accommodated in the second groove, and the rotation axis of the boss is coaxially arranged with the second axis.

6. The spectroscope adjusting device as claimed in claim 1, wherein: The beam splitter adjustment device further includes: a first elastic element and a first positioning rod. The first elastic element acts on the mounting base to provide a preload force between the mounting base and the rotating base. The first positioning rod is movably inserted through the mounting base and connected to the rotating base. A limiting flange is provided on the first positioning rod. The limiting flange is located on the side of the mounting base away from the rotating base. The first elastic element is sleeved on the first positioning rod and abuts against the mounting base and the limiting flange.

7. The beam splitter adjustment device as described in claim 1, characterized in that: The beam splitter adjustment device further includes a second elastic element. The rotating seat and the fixed seat are both coaxially arranged with the second axis. The two ends of the second elastic element are respectively connected to the circumferential sidewall of the rotating seat and the circumferential sidewall of the fixed seat, and are used to apply a preload force to the rotating seat that is opposite to the force of the second adjustment element. Alternatively, the beam splitter adjustment device further includes a second elastic element and a second positioning rod. The fixed seat is provided with a limiting groove that is arc-shaped around the second axis. One end of the second positioning rod is movably located in the limiting groove. The second elastic element is accommodated in the limiting groove. One end of the second elastic element acts on the inner wall of one end of the limiting groove, and the other end acts on the part of the second positioning rod located in the limiting groove.

8. The spectroscope adjusting device as claimed in claim 1, wherein: The beam splitter adjustment device further includes: A first fastener is movably connected to the rotating seat and the fixed seat, and is used to lock the rotating seat and the fixed seat after the rotating seat has rotated to the position around the second axis.

9. The spectroscope adjusting device according to claim 8, wherein: The fixed base is provided with a first fixing hole, and the rotating base is provided with a first guide groove that is arc-shaped around the second axis. The first fastener passes through the first guide groove and one end is inserted into the first fixing hole.

10. An optical spectrometer adjustment device as claimed in any one of claims 1-9, characterized in that: The beam splitter adjustment device further includes: A translation component is connected to the fixed base and is used to drive the fixed base to move along a preset straight line direction, which intersects the axial direction of the first axis and the axial direction of the second axis.

11. The beam splitter adjustment device as described in claim 10, characterized in that: The translation component includes: A translational base, wherein the fixed base is disposed on the translational base; Base, the translation seat is slidably disposed on the base; and The third adjusting member is adjustablely connected to one of the translation seat and the base, and acts on the other to drive the translation seat to move relative to the base along the preset straight line direction.

12. The spectroscope adjusting device according to claim 11, wherein: The third adjusting member is threadedly connected to the base, and one end abuts against the translation seat; and / or, The translation assembly further includes a third elastic element, which acts on the translation seat to apply a preload force to the translation seat that is opposite to the force of the third adjusting element.

13. A beam splitter module, characterized in that, It includes a beam splitter and a beam splitter adjustment device as described in any one of claims 1-12, wherein the beam splitter is mounted on the mounting base.

14. A laser processing device, characterized in that, Includes the beam splitter module as described in claim 13.

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