A drying apparatus for chip processing

Abstract

This utility model relates to a drying device for chip processing, comprising an oven, a heating system, a hot air duct assembly, a mounting frame, and a chip tray. The oven is divided into a drying zone and an integrated zone. The heating system is located in the integrated zone, and the hot air duct assembly is located in the drying zone. This assembly includes a main air duct, branch pipes, distribution pipes, and an outlet pipe. Two sets of main air ducts are spaced apart at the top of the drying zone, and several branch pipes are connected to the bottom. The bottom of the branch pipes is fixed to the bottom wall of the drying zone. The distribution pipes are connected to the branch pipes at both ends and are perpendicular to the main air ducts. The outlet pipe is located on the distribution pipes. The mounting frame is located within the drying zone, and the tray is placed on it. The tray has several through holes, with the top and bottom of the through holes coaxial with the air outlet. The heating system supplies air to the main air ducts, and the hot air enters the distribution pipes through the branch pipes. The outlet pipe precisely aligns with the through holes on the tray, evenly blowing air from both the top and bottom of the chip. This solves the problem of obstructed airflow at the bottom of the chip in traditional devices, achieving all-around drying and significantly improving drying efficiency.

Description

Technical Field

[0001] This utility model relates to the field of chip drying, and in particular to a drying device for chip processing. Background Technology

[0002] In the semiconductor chip manufacturing process, chip drying, as a key process for removing residual liquid from the wafer surface, is directly related to the chip yield and performance, and is an indispensable and important step in semiconductor manufacturing.

[0003] Currently, Chinese utility model patent CN214842066U discloses an electronic chip drying device, which includes a cabinet, a door, a fan, a controller, and a placement plate. By installing fans on both sides of the cabinet and sliding the placement plate in a groove inside the cabinet, it aims to achieve efficient double-sided drying of electronic chips. While this device improves drying efficiency to some extent, its structural design still has significant flaws.

[0004] In this device, the chip is placed flat on a mounting plate, with one side of the chip always in contact with the top of the mounting plate. Although the mounting plate has several through holes and T-slots, the number of through holes is limited, and the area where the bottom of the chip contacts the mounting plate often does not correspond to the position of the through holes. This results in an inability to form an effective airflow channel at the bottom of the chip, preventing air from reaching the bottom surface of the chip smoothly. Consequently, moisture in this area cannot be removed in time, leading to incomplete drying. Therefore, addressing the core problem of poor airflow at the bottom of the chip in existing devices, developing a device that can achieve all-round, dead-angle-free drying of the chip has become an urgent technical need to be solved in the chip processing field. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a drying device for chip processing.

[0006] The present invention provides a drying device for chip processing, which adopts the following technical solution:

[0007] A drying apparatus for chip processing includes an oven, a heating system, a hot air duct assembly, a mounting frame, and a chip tray. The oven has a drying zone and an integration zone. The heating system is located in the integration zone. The hot air duct assembly is located in the drying zone. The oven has a door located in the drying zone. The hot air duct assembly includes a main duct, branch ducts, distribution ducts, and an outlet duct. Two sets of main ducts are spaced apart at the top of the drying zone. One end of each main duct is fixed to the inner wall of the drying zone. The bottoms of both sets of main ducts are connected to several branch ducts at intervals. The bottoms of the branch ducts are fixed to the bottom wall of the drying zone. Both ends of the distribution ducts are connected to the branch ducts. Several sets of distribution ducts are provided. The distribution ducts are perpendicular to the main ducts. The outlet duct is located on the distribution ducts. The mounting frame is located in the drying zone. The tray is placed on the mounting frame. The tray has several through holes. The upper and lower parts of the through holes are coaxial with the outlet ducts. The heating system supplies hot air to the main ducts.

[0008] Optionally, the fixing frame includes two sets of base plates, two sets of crossbars, and several connecting rods. The base plates are fixed to the bottom wall of the drying zone, and the direction of the base plates corresponds to the position of the main air duct. One end of each connecting rod is fixed to the base plate, and the other end of the connecting rod is fixed to the top wall of the drying zone. Several connecting rods are arranged at intervals between several distribution pipes. The direction of each set of crossbars is consistent with that of the base plate. Each set of crossbars includes several crossbars, and the crossbars are fixed at intervals on the connecting rods. The crossbars are provided with sliding grooves, and the sliding grooves on the two sets of crossbars are arranged opposite to each other. The tray slides with the crossbars through the sliding grooves.

[0009] Optionally, the tray has a through hole with a fixing rod, a fixing ring and a support column 1. One end of the fixing rod is fixed to the inner wall of the through hole, the other end of the fixing rod is connected to the fixing ring, and several support columns 1 are fixed to the fixing ring.

[0010] Optionally, the tray surface is further provided with a second support column, which is located near the through hole, and a plurality of the second support columns are arranged in a ring array along the axis of the through hole.

[0011] Optionally, the tray is provided with insert rods on both sides, and the insert rods slide in conjunction with the slide groove.

[0012] Optionally, the heating system includes a control unit, a heating element, a fan, and a preset pipe. One end of the preset pipe is fixed to the back of the drying zone, and the preset pipe is connected to the main air duct. The preset pipe is used to heat the heating element to form hot air and deliver it to the main air duct. A temperature sensor and a flow sensor are installed inside the preset pipe.

[0013] In summary, this utility model has at least one of the following beneficial technical effects:

[0014] 1. The through holes on the tray are coaxially arranged with the air outlet pipes, and the main air duct at the top is connected to the distribution pipes via branch pipes. The air outlet pipes are distributed on the distribution pipes, which can simultaneously deliver air to the upper and lower parts of the tray. When the hot air supplied by the heating system enters the distribution pipes through the main air ducts and branch pipes, the air outlet pipes can be precisely aligned with the through holes on the tray, so that the hot air can be evenly blown and dried from the upper and lower sides of the chip. This completely solves the problem of airflow obstruction caused by the contact between the bottom of the chip and the placement board in traditional devices, realizes all-round drying of the chip, and greatly improves the drying efficiency.

[0015] 2. Support post one is fixed on the fixing ring inside the through hole. Several support posts one can form multi-point support from the bottom of the chip. Support posts two on the surface of the tray are arranged in a ring along the axis of the through hole, which can provide a surrounding limit from the top edge of the chip. The combination of multi-point support at the bottom and limit at the top edge can stably fix the chip directly above the through hole, ensuring that the chip, through hole and air outlet always maintain a coaxial correspondence, avoiding chip displacement caused by tray pulling, and thus ensuring that hot air can accurately act on the upper and lower surfaces of the chip. In addition, the contact between support post one and chip is only point contact, which greatly reduces the contact area between the bottom and surface of the chip and the tray. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a drying device used in chip processing.

[0017] Figure 2 This is a schematic diagram of a drying device (excluding the door) used for chip processing.

[0018] Figure 3 yes Figure 2 Enlarged view of part A in the middle.

[0019] Figure 4 This is a schematic diagram showing the location of the hot air duct assembly and mounting bracket.

[0020] Figure 5 This is a schematic diagram of the mounting bracket.

[0021] Figure 6 This is a diagram of a tray.

[0022] Figure 7 yes Figure 6 Enlarged view of section B in the middle.

[0023] Explanation of reference numerals in the attached drawings: 1. Oven; 11. Door; 12. Drying area; 2. Hot air duct assembly; 21. Main air duct; 22. Branch duct; 23. Distribution duct; 24. Air outlet duct; 3. Fixing frame; 31. Base plate; 32. Crossbar; 33. Connecting rod; 34. Slide groove; 4. Tray; 41. Through hole; 42. Fixing rod; 43. Fixing ring; 44. Support column one; 45. Support column two; 46. Insert rod. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0026] Furthermore, "several" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0027] This utility model discloses a drying apparatus for chip processing. (Refer to...) Figure 1-7A drying apparatus for chip processing includes an oven 1, a heating system, a hot air duct assembly 2, a mounting frame 3, and a chip tray 4. The oven 1 contains a drying zone 12 and an integration zone. A door 11 is provided on the oven 1 and is located in the drying zone 12. The heating system is located in the integration zone. The hot air duct assembly 2 is located in the drying zone 12 and includes a main air duct 21, branch pipes 22, distribution pipes 23, and an outlet pipe 24. Two sets of main air ducts 21 are spaced apart at the top of the drying zone 12, with one end of each main air duct fixed to the interior of the drying zone 12. The bottom of each of the two main air ducts 21 is connected to several branch pipes 22 at intervals. The bottom of the branch pipes 22 is fixed to the bottom wall of the drying zone 12. Both ends of the distribution pipes 23 are connected to the branch pipes 22. Several sets of distribution pipes 23 are provided. The distribution pipes 23 are perpendicular to the main air ducts 21. The air outlet pipe 24 is provided on the distribution pipes 23. The fixing frame 3 is provided in the drying zone 12. The tray 4 is placed on the fixing frame 3. Several through holes 41 are provided on the tray 4. The chip is placed in the through hole 41. The upper and lower parts of the through hole 41 are coaxial with the air outlet pipe. The heating system supplies hot air to the two main air ducts 21 at the same time.

[0028] With this design, the through hole 41 on the tray 4 is coaxially set with the air outlet duct 24, and the top main air duct 21 is connected to the distribution duct 23 via the branch duct 22. The air outlet duct 24 is distributed on the distribution duct 23, which can simultaneously send air to the upper and lower parts of the tray 4. When the hot air supplied by the heating system enters the distribution duct 23 through the main air duct 21 and the branch duct 22, the air outlet duct 24 can be precisely aligned with the through hole 41 of the tray 4, so that the hot air can be evenly blown and dried from the upper and lower sides of the chip. This completely solves the problem of airflow obstruction caused by the contact between the bottom of the chip and the placement board in traditional devices, realizes all-round drying of the chip, and greatly improves the drying efficiency.

[0029] The mounting frame 3 includes two sets of base plates 31, two sets of crossbars 32, and several connecting rods 33. The base plates 31 are fixed to the bottom wall of the drying zone 12, providing stable bottom support for the entire mounting frame 3. The orientation of the base plates 31 corresponds to the position of the main air duct 21. One end of the connecting rod 33 is fixed to the base plate 31, and the other end of the connecting rod 33 is fixed to the top wall of the drying zone 12. Several connecting rods 33 are arranged at intervals between several distribution pipes 23, which avoids the air delivery path of the hot air duct assembly 2 and also... The evenly distributed connecting rods 33 form a frame structure. The direction of each set of crossbars 32 is consistent with that of the base plate 31. Each set of crossbars 32 includes several crossbars 32. The crossbars 32 are fixed at intervals on the connecting rods 33. The crossbars 32 are provided with sliding grooves 34. The sliding grooves 34 on the two sets of crossbars 32 are arranged opposite to each other. The two sets of opposite sliding grooves 34 form the sliding track of the tray 4. The rigid connection between the base plate 31, the connecting rods 33 and the top wall forms a three-dimensional frame that can stably support the weight of the tray 4 and the chip.

[0030] The tray 4 has insert rods 46 on both sides, which slide in conjunction with the sliding groove. A fixing rod 42, a fixing ring 43, and support columns 44 are installed inside the through hole 41 of the tray 4. One end of the fixing rod 42 is fixed to the inner wall of the through hole 41, and the other end is connected to the fixing ring 43. Several support columns 44 are fixed to the fixing ring 43. Support columns 45 are also provided on the surface of the tray 4, positioned near the through hole 41. Several support columns 45 are arranged in a circular array along the axis of the through hole 41. The top of each support column 45 is higher than the first support column 44. Through this design, the first support column 44 is fixed to the through hole 41. On the inner fixing ring 43, several support pillars 44 can form multi-point support from the bottom of the chip, while the support pillars 45 on the surface of the tray 4 are arranged in a ring along the axis of the through hole 41, which can provide a surrounding limit from the top edge of the chip. The combination of multi-point support at the bottom and limit at the top edge can stably fix the chip directly above the through hole 41, ensuring that the chip, through hole 41 and air outlet 24 always maintain a coaxial correspondence, avoiding chip displacement caused by pulling the tray 4, and thus ensuring that hot air can accurately act on the upper and lower surfaces of the chip. In addition, the contact between the support pillars 44 and the chip is only point contact, which greatly reduces the contact area between the bottom and surface of the chip and the tray 4.

[0031] The heating system includes a control unit, a heating element, a fan, and a preset pipe. One end of the preset pipe is fixed to the back of the drying zone 12 and is connected to the main air duct 21. The preset pipe is used to heat the heating element to form hot air, which is then delivered to the main air duct 21. A temperature sensor and a flow sensor are installed inside the preset pipe. When the heating element works, it generates heat. The fan introduces cold air and mixes it with the heat to form hot air. The hot air is delivered to the main air duct 21 through the preset pipe. The temperature sensor inside the preset pipe can monitor the hot air temperature in real time to prevent chip damage due to excessive temperature. The flow sensor can accurately capture the hot air delivery rate to prevent incomplete drying due to insufficient flow or chip being blown off due to excessive airflow.

[0032] This type of design, which uses a heating system to deliver hot air to the duct, is a relatively mature existing technology in the field of chip drying equipment. Therefore, this conventional design, which is already well-known in the industry, will not be elaborated on further.

[0033] The above are all preferred embodiments of this utility model, and are not intended to limit the scope of protection of this utility model. Therefore, all equivalent changes made to the structure, shape and principle of this utility model should be covered within the scope of protection of this utility model.

Claims

1. A drying apparatus for chip processing, characterized in that: The system includes an oven (1), a heating system, a hot air duct assembly (2), a mounting bracket (3), and a chip tray (4). The oven (1) has a drying zone (12) and an integration zone. The heating system is located in the integration zone. The hot air duct assembly (2) is located in the drying zone (12). The oven (1) has a door (11) located in the drying zone (12). The hot air duct assembly (2) includes a main air duct (21), a branch pipe (22), a distribution pipe (23), and an outlet pipe (24). Two sets of the main air ducts (21) are spaced apart at the top of the drying zone (12). One end of the main air duct (21) is fixed to the inner wall of the drying zone (12). The bottom of the main air duct (21) is connected to several branch pipes (22) at intervals. The bottom of the branch pipes (22) is fixed to the bottom wall of the drying zone (12). Both ends of the distribution pipe (23) are connected to the branch pipes (22). Several sets of distribution pipes (23) are provided. The distribution pipes (23) are perpendicular to the main air duct (21). The air outlet pipe (24) is provided on the distribution pipe (23). The fixing frame (3) is provided in the drying zone (12). The tray (4) is placed on the fixing frame (3). Several through holes (41) are provided on the tray (4). The upper and lower parts of the through holes (41) are coaxial with the air outlet pipe (24). The heating system supplies hot air to the main air duct (21).

2. The drying apparatus for chip processing of claim 1, wherein: The fixing frame (3) includes two sets of base plates (31), two sets of crossbars (32), and several connecting rods (33). The base plates (31) are fixed to the bottom wall of the drying zone (12), and the direction of the base plates (31) corresponds to the position of the main air duct (21). One end of each connecting rod (33) is fixed to the base plate (31), and the other end of each connecting rod (33) is fixed to the top wall of the drying zone (12). Several connecting rods (33) are arranged in several distributed... At the intervals of the tubes (23), the direction of each set of crossbars (32) is consistent with that of the base plate (31). Each set of crossbars (32) includes several crossbars (32). Several crossbars (32) are fixed at intervals on the connecting rod (33). The crossbars (32) are provided with sliding grooves (34). The sliding grooves (34) on the two sets of crossbars (32) are arranged opposite to each other. The tray (4) slides with the crossbars (32) through the sliding grooves (34).

3. The drying apparatus for chip processing of claim 2, wherein: The tray (4) has a through hole (41) with a fixing rod (42), a fixing ring (43) and a support column (44). One end of the fixing rod (42) is fixed to the inner wall of the through hole (41), and the other end of the fixing rod (42) is connected to the fixing ring (43). Several support columns (44) are fixed on the fixing ring (43).

4. The drying apparatus for chip processing of claim 3, wherein: The surface of the tray (4) is also provided with a second support column (45), which is located near the through hole (41). Several second support columns (45) are arranged in a ring along the axis of the through hole (41), and the top of the second support column (45) is higher than the first support column (44).

5. The drying apparatus for chip processing of claim 3, wherein: The tray (4) is provided with insert rods (46) on both sides, and the insert rods (46) are slidably engaged with the slide groove (34).

6. The drying apparatus for chip processing of claim 1, wherein: The heating system includes a control unit, a heating element, a fan, and a preset pipe. One end of the preset pipe is fixed to the back of the drying zone (12), and the preset pipe is connected to the main air duct (21). The preset pipe is used to heat the heating element to form hot air and deliver it to the main air duct (21). A temperature sensor and a flow sensor are installed inside the preset pipe.

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