Workpiece holder for vacuum coating

CN224930635UActive Publication Date: 2026-11-03SUZHOU ZHITIAN NANO TECH CO LTD
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Patent Information

Application Number
CN202522626033.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-12-11
Publication Date
2026-11-03
Estimated Expiration
2035-12-11

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  • Figure CN224930635U_ABST
    Figure CN224930635U_ABST
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Abstract

The utility model discloses a workpiece frame for vacuum coating, including base, the middle part vertical of base is equipped with fixed rod, and the outside bottom end of fixed rod rotatoryly is equipped with the rotary disc, and the outside interval of fixed rod rotatoryly is equipped with a plurality of bearing disc, and the edge between a plurality of bearing discs and the most lower bearing disc and rotary disc, are fixedly connected through the connecting support rod of annular array distribution, and the outside fixed sleeve of fixed rod is equipped with driving gear, and the bottom end rotatoryly installed of bearing disc has a plurality of transmission gear, and the bottom end rotatoryly installed of bearing disc has the equal driven gear with transmission gear number, and the both sides of transmission gear are respectively with driving gear and corresponding driven gear meshing connection, and the bottom end detachable installation of driven gear middle part has the hook, and the top end of bearing disc is installed with a plurality of sets of clamp mechanism, and this workpiece frame can improve workpiece loading capacity, and workpiece realizes revolution and rotation compound motion to guarantee that coating is even, can also adapt to different workpieces, and improve versatility.
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Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a workpiece holder for vacuum coating. Background Technology

[0002] Vacuum coating is a technology that deposits coating materials onto the surface of a workpiece in a vacuum environment to form a functional or decorative thin film. It is widely used in electronics, optics, machinery and other fields. As the core component of vacuum coating equipment, the workpiece holder is used to support and fix the workpiece. Its structural design is directly related to the coating uniformity, workpiece adaptability and operation efficiency. Existing workpiece holders for vacuum coating generally have limited loading capacity and a single form of workpiece movement, which leads to problems such as uneven coating and dead corners on the workpiece surface. In addition, the fixture mechanism has poor adaptability and is difficult to be compatible with workpieces of different shapes and sizes. Some workpiece holders are inconvenient to disassemble and assemble, which further affects the overall efficiency of the coating operation and cannot meet the requirements of high-efficiency and high-quality coating.

[0003] Therefore, those skilled in the art have provided a workpiece holder for vacuum coating to solve the problems mentioned in the background art. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a workpiece holder for vacuum coating.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A workpiece holder for vacuum coating includes a base, a fixed rod vertically provided in the middle of the base, and a rotating disk rotatably sleeved on the outer bottom end of the fixed rod via a bearing; the outer side of the fixed rod is located above the rotating disk, and multiple bearing disks are rotatably sleeved on it at intervals along the vertical direction via bearings; the multiple bearing disks and the edges between the lowermost bearing disk and the rotating disk are fixedly connected by four connecting support rods arranged in a ring array with the fixed rod as the center;

[0007] A drive gear is fixedly sleeved on the outside of each bearing plate corresponding to the outside of the fixed rod. Multiple transmission gears are rotatably mounted on the bottom of the bearing plate in a circular array centered on the fixed rod. A driven gear is rotatably mounted on the bottom of the bearing plate in a number equal to the number of transmission gears and corresponding to each other. The two sides of the transmission gear are respectively meshed with the drive gear and the corresponding driven gear.

[0008] A hook is detachably installed at the middle of the bottom end of the driven gear, and multiple sets of clamping mechanisms are installed at the top of the bearing plate in a circular array centered on the fixed rod.

[0009] Preferably, the clamping mechanism includes multiple supports arranged in a circular array around a fixed rod and fixed to the top surface of the bearing plate. The supports are C-shaped frame structures. The shaft of the driven gear passes through the bearing plate and the bottom end of the supports in sequence and is fixedly connected to a lower clamping seat.

[0010] A guide rod is vertically fixedly installed on the inner side of the bracket, and a horizontally set movable plate is slidably connected to the outer side of the guide rod. An upper clamping seat is rotatably installed at the bottom end of the movable plate, and the upper clamping seat and the lower clamping seat are arranged vertically and vertically respectively.

[0011] An adjusting screw is threaded through the top of the bracket, and the bottom end of the adjusting screw is rotatably connected to the movable plate.

[0012] Preferably, a positioning post is fixedly connected to the top of the shaft of the driven gear, and the positioning post is located below the inner side of the bracket. The bottom end of the lower clamp is sleeved on the outer side of the positioning post. At least two fastening screws are installed through the outer circumference of the lower clamp and evenly distributed along the circumference of the positioning post. The lower clamp and the positioning post are fixedly connected by the fastening screws.

[0013] The bottom end of the movable plate is rotatably mounted with a movable column, the top end of the upper clamp is sleeved on the outside of the movable column, and at least two fastening screws are installed through the outer circumference of the upper clamp on the movable column. The upper clamp and the movable column are fixedly connected by the fastening screws.

[0014] Preferably, an internally threaded tube is coaxially fixed to the middle of the bottom end of the driven gear, and an externally threaded post is integrally fixed to the top of the hook, with the externally threaded post and the internally threaded tube being threadedly connected.

[0015] Preferably, the base has a mounting groove at the top center, a positioning bearing is installed at the bottom of the inner side of the mounting groove, and a gear ring is fixedly connected to the top of the positioning bearing;

[0016] A drive gear is meshed with the outer side of the gear ring, and the shaft at the bottom of the drive gear extends movably to the bottom of the base for fixed connection with the output shaft of an external geared motor.

[0017] A transmission ring is coaxially fixed to the middle of the bottom end of the rotating disk. The bottom outer side of the transmission ring is evenly provided with tooth grooves. An internal tooth ring is integrally fixed to the top of the gear ring. The bottom end of the transmission ring is inserted into the inner side of the internal tooth ring, and the tooth grooves of the transmission ring are adapted to mesh with the teeth of the internal tooth ring.

[0018] Preferably, a raised ring is integrally provided at the bottom of the inner side of the mounting groove, located inside the positioning bearing; both sides of the bottom of the outer wall of the fixing rod are integrally fixed with limit blocks, and the inner side of the raised ring is provided with limit grooves that are slidably adapted to the limit blocks at the positions of the two limit blocks;

[0019] The bottom end of the fixed rod passes through the inner side of the transmission ring and the gear ring in sequence, and is then inserted into the inner side of the convex ring. The limiting block on the fixed rod slides into the limiting groove of the convex ring simultaneously.

[0020] Compared with the prior art, the beneficial effects of this utility model are:

[0021] This vacuum coating workpiece holder uses a fixed rod in conjunction with a multi-layered support plate and a rotating plate, combined with a ring array of connecting support rods to form a stable multi-layered support structure, significantly increasing the workpiece loading capacity for a single coating operation. Through the meshing transmission of the driving gear, transmission gear, and driven gear, the workpiece rotates synchronously with the rotating plate, achieving a composite motion that effectively avoids uneven coating and dead zones, ensuring consistent coating thickness. The C-shaped bracket with an adjusting screw clamping mechanism can securely hold workpieces of different thicknesses, and the threaded, detachable hooks further adapt to workpieces of various shapes and sizes, significantly improving versatility and comprehensively enhancing coating efficiency and quality, meeting the demands of high-efficiency, high-quality vacuum coating. Attached Figure Description

[0022] To illustrate the technical solutions in the embodiments of the present invention or the prior art more specifically and intuitively, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0023] Figure 1 This is a schematic diagram of the workpiece holder structure for vacuum coating proposed in this utility model;

[0024] Figure 2 This is a schematic diagram of the installation structure of the clamping mechanism proposed in this utility model;

[0025] Figure 3 This is a schematic diagram of the hook installation structure proposed in this utility model;

[0026] Figure 4 This is a schematic diagram of the rotating disk mounting structure proposed in this utility model.

[0027] In the diagram: 1. Base; 2. Fixed rod; 3. Rotary disk; 4. Bearing disk; 5. Connecting support rod; 6. Driving gear; 7. Transmission gear; 8. Driven gear; 9. Hook; 10. Bracket; 11. Lower clamp; 12. Guide rod; 13. Movable plate; 14. Adjusting screw; 15. Upper clamp; 16. Positioning pin; 17. Movable pin; 18. Internal threaded tube; 19. External threaded pin; 20. Positioning bearing; 21. Gear ring; 22. Drive gear; 23. Transmission ring; 24. Internal gear ring; 25. Convex ring; 26. Limiting block. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0029] Reference Figure 1-4 A workpiece holder for vacuum coating includes a base 1, a fixed rod 2 vertically disposed in the middle of the base 1, and a rotating disk 3 rotatably sleeved on the outer bottom end of the fixed rod 2 via a bearing; the outer side of the fixed rod 2 is located above the rotating disk 3, and multiple bearing disks 4 are rotatably sleeved on the outside of the fixed rod 2 via bearings at intervals along the vertical direction; the multiple bearing disks 4 and the edges between the lowermost bearing disk 4 and the rotating disk 3 are fixedly connected by four connecting support rods 5 arranged in a ring array with the fixed rod 2 as the center;

[0030] A drive gear 6 is fixedly sleeved on the outside of the fixed rod 2 corresponding to the bottom of each bearing plate 4. Multiple transmission gears 7 are rotatably mounted on the bottom of the bearing plate 4 in a circular array centered on the fixed rod 2. A driven gear 8 is rotatably mounted on the bottom of the bearing plate 4 in a number equal to the number of transmission gears 7 and corresponding to each other. The two sides of the transmission gear 7 are respectively meshed with the drive gear 6 and the corresponding driven gear 8.

[0031] A hook 9 is detachably installed at the bottom center of the driven gear 8, and multiple clamping mechanisms are installed at the top of the bearing plate 4 in a circular array centered on the fixed rod 2.

[0032] By adopting the above technical solution, the fixed rod 2 fixed in the middle of the base 1 serves as the core support, which is combined with the rotating disk 3 and multiple bearing disks 4 on the outer side. The bearing disks 4 and the rotating disk 3 are stably connected by four ring-shaped connecting support rods 5, forming a multi-layer workpiece bearing structure, which greatly increases the workpiece loading capacity of a single coating. The driving gear 6 on the fixed rod 2, the transmission gear 7 and the driven gear 8 at the bottom of the bearing disk 4 form a meshing transmission mechanism. When the rotating disk 3 drives the bearing disk 4 to revolve around the fixed rod 2, the fixed driving gear 6 drives the driven gear 8 to rotate synchronously through the transmission gear 7. This allows the workpieces suspended by the hook 9 and the workpieces held by the clamping mechanism to achieve a compound motion of revolution and rotation, effectively avoiding problems such as uneven coating and dead corners on the workpiece surface during the coating process, and ensuring a consistent coating thickness. At the same time, the detachable design of the hook 9 and the cooperation of the clamping mechanism can adapt to workpieces of different shapes and sizes, which significantly improves the versatility of the workpiece rack.

[0033] The clamping mechanism includes multiple brackets 10 arranged in a circular array around the fixed rod 2 and fixed to the top surface of the bearing plate 4. The brackets 10 have a C-shaped frame structure. The shaft of the driven gear 8 moves through the bearing plate 4 and the bottom of the bracket 10 in sequence and is fixedly connected to the lower clamping seat 11.

[0034] A guide rod 12 is vertically fixedly installed on the inner side of the bracket 10. A horizontally set movable plate 13 is slidably connected to the outer side of the guide rod 12. An upper clamp 15 is rotatably installed at the bottom end of the movable plate 13, and the upper clamp 15 and the lower clamp 11 are arranged vertically and vertically respectively.

[0035] An adjusting screw 14 is threaded through the top of the bracket 10, and the bottom end of the adjusting screw 14 is rotatably connected to the movable plate 13.

[0036] Using the above technical solution, the C-shaped frame structure bracket 10 provides stable support. The shaft of the driven gear 8 passes through the bearing plate 4 and connects to the lower clamp 11 of the bracket 10, forming a corresponding clamping structure with the upper clamp 15 at the bottom of the movable plate 13. The guide rod 12 on the inner side of the bracket 10 provides precise guidance for the movable plate 13, ensuring that the movable plate 13 can only move up and down in the vertical direction. With the adjustment screw 14 at the top of the bracket 10, the movable plate 13 can be easily driven to move the upper clamp 15 closer to or away from the lower clamp 11 by rotating the adjustment screw 14. The operation is convenient and the adjustment accuracy is high. It can firmly clamp workpieces of different thicknesses and prevent the workpieces from loosening or shifting during revolution and rotation. It ensures the integrity and uniformity of the coating on the workpiece surface. At the same time, the open structure of the C-shaped bracket 10 will not block the workpiece surface, ensuring that the coating particles can fully cover the workpiece.

[0037] The driven gear 8 has a positioning post 16 fixedly connected to the top of the shaft, and the positioning post 16 is located below the inner side of the bracket 10. The bottom end of the lower clamp 11 is sleeved on the outer side of the positioning post 16. At least two fastening screws are installed through the outer circumference of the lower clamp 11 and evenly distributed along the circumference of the positioning post 16. The lower clamp 11 and the positioning post 16 are fixedly connected by the fastening screws.

[0038] The bottom end of the movable plate 13 is rotatably mounted with a movable column 17. The top end of the upper clamp 15 is sleeved on the outside of the movable column 17, and at least two fastening screws are evenly distributed around the movable column 17 through the outer circumference of the upper clamp 15. The upper clamp 15 and the movable column 17 are fixedly connected by the fastening screws.

[0039] By adopting the above technical solution, a positioning post 16 is set at the top of the driven gear 8 shaft to provide precise coaxial positioning for the lower clamp 11. With the fastening screws on the outer periphery of the lower clamp 11, the lower clamp 11 and the positioning post 16 are firmly fixed. The movable post 17 at the bottom of the movable plate 13 provides a positioning and installation base for the upper clamp 15. The upper clamp 15 is also fixed by fastening screws. This structural design allows the upper clamp 15 and the lower clamp 11 to be disassembled and replaced according to the shape and size of the workpiece, which greatly improves the versatility of the fixture mechanism. At the same time, the positioning post 16 is coaxial with the driven gear 8 shaft, and the movable post 17 is adapted to the upper clamp 15, which can ensure the coaxiality of the upper clamp 15, the lower clamp 11 and the driven gear 8. This ensures that the workpiece is stable when it rotates with the driven gear 8, avoids uneven coating due to clamp offset, and further improves the coating quality.

[0040] An internally threaded tube 18 is coaxially fixed to the middle of the bottom end of the driven gear 8, and an externally threaded post 19 is integrally fixed to the top of the hook 9. The externally threaded post 19 and the internally threaded tube 18 are connected by thread engagement.

[0041] By adopting the above technical solution, an internally threaded tube 18 is set at the bottom of the driven gear 8, which forms a threaded connection with the externally threaded post 19 at the top of the hook 9, so that the hook 9 can be detachably installed. At the same time, the corresponding hook 9 can be flexibly removed or replaced according to the coating requirements, and the workpiece can be coated at the same time with the fixture mechanism, which significantly expands the application range of the workpiece holder.

[0042] A mounting groove is provided at the top center of the base 1, and a positioning bearing 20 is installed at the bottom of the inner side of the mounting groove. A gear ring 21 is fixedly connected to the top of the positioning bearing 20.

[0043] A drive gear 22 is meshed with the outer side of the gear ring 21. The shaft at the bottom of the drive gear 22 extends movably to the bottom of the base 1 and is used to fix it to the output shaft of the external geared motor.

[0044] A transmission ring 23 is coaxially fixed to the middle of the bottom of the rotating disk 3. The bottom outer side of the transmission ring 23 is evenly provided with tooth grooves. An internal tooth ring 24 is integrally fixed to the top of the gear ring 21. The bottom of the transmission ring 23 is inserted into the inner side of the internal tooth ring 24, and the tooth grooves of the transmission ring 23 are adapted to mesh with the teeth of the internal tooth ring 24.

[0045] Using the above technical solution, the positioning bearing 20 is installed in the mounting slot at the top of the base 1, providing stable support and a smooth rotation foundation for the gear ring 21. The external geared motor drives the gear ring 21 through the meshing of the drive gear 22, ensuring precise and stable power transmission with a constant transmission ratio. The internal gear ring 24 at the top of the gear ring 21 meshes with the transmission ring 23 at the bottom of the rotating disk 3, allowing the rotation of the gear ring 21 to be smoothly transmitted to the rotating disk 3, thereby driving multiple bearing disks 4 to rotate synchronously. The positioning bearing 20 effectively reduces the frictional resistance of the gear ring 21 during rotation, reduces power loss, and avoids jamming or offset during rotation, ensuring that the rotation speed of the bearing disks 4 is uniform and that the irradiation dose of the coating particles received by all workpieces is consistent, greatly improving the coating consistency of batch workpieces.

[0046] A raised ring 25 is integrally provided at the bottom of the inner side of the mounting groove, located inside the positioning bearing 20; both sides of the bottom of the outer wall of the fixing rod 2 are integrally fixed with limit blocks 26, and the inner side of the raised ring 25 is provided with limit grooves that are adapted to slide with the limit blocks 26, corresponding to the positions of the two limit blocks 26.

[0047] After the bottom end of the fixed rod 2 passes through the inner side of the transmission ring 23 and the gear ring 21 in sequence, it is inserted into the inner side of the convex ring 25, and the limiting block 26 on the fixed rod 2 slides into the limiting groove of the convex ring 25 simultaneously.

[0048] By adopting the above technical solution, a convex ring 25 is set inside the positioning bearing 20 at the bottom of the mounting groove. The bottom end of the fixing rod 2 is inserted into the inner side of the convex ring 25. The limiting block 26 on the outer wall of the fixing rod 2 slides and engages with the limiting groove on the inner side of the convex ring 25, which can effectively limit the rotation of the fixing rod 2 around its own axis, ensure that the driving gear 6 on the outer side of the fixing rod 2 remains fixed, provide a stable meshing foundation for the rotation of the driven gear 8, and ensure that the rotation speed of the driven gear 8 is uniform. At the same time, the convex ring 25 forms an effective support for the bottom of the fixing rod 2. With the positioning effect of the limiting block 26 and the limiting groove, the axial displacement or shaking of the fixing rod 2 during the operation of the workpiece frame is prevented, which improves the stability and rigidity of the overall structure, ensures the stable operation of the multi-layer bearing plate 4 and the workpiece, and further guarantees the coating quality.

[0049] Meanwhile, a detachable fastening structure such as screws can be used between the bottom end of the fixing rod 2 and the convex ring 25. This structure not only restricts the rotation of the fixing rod 2 through the cooperation of the limiting block 26 of the fixing rod 2 and the limiting groove of the convex ring 25, ensuring stable transmission of the drive gear 6, but also allows for quick assembly and disassembly. Alternatively, a limiting structure can be provided at the top of the fixing rod 2 within the coating device to prevent axial sway and ensure stable operation of the bearing plate 4 and the workpiece. This design facilitates the extraction of the workpiece rack and the loading and unloading of workpieces. Such structures are easily extended, but this solution will not elaborate on them; the focus will be on the design of other functional aspects of the rack.

[0050] Working principle:

[0051] An external geared motor drives the drive gear 22 to rotate, causing the gear ring 21 meshing with it to rotate around the positioning bearing 20. The gear ring 21 meshes with the transmission ring 23 of the rotating disk 3 through the internal gear ring 24, causing the rotating disk 3 to drive each bearing disk 4 connected to the support rod 5 to revolve around the fixed rod 2. At the same time, the drive gear 6 on the fixed rod 2 remains stationary. When the bearing disk 4 revolves, the transmission gear 7 at its bottom end rolls around the drive gear 6 and meshes with it to drive the driven gear 8 to rotate. This allows the hook 9 on the driven gear 8 and the clamping mechanism to synchronously achieve the combined motion of revolution and rotation, ensuring uniform coating of the workpiece.

[0052] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A workpiece holder for vacuum coating, comprising a base (1), characterized in that, A fixed rod (2) is vertically provided in the middle of the base (1). A rotating disk (3) is rotatably sleeved on the bottom outer side of the fixed rod (2) through a bearing. The outer side of the fixed rod (2) is located above the rotating disk (3). Multiple bearing disks (4) are rotatably sleeved on the outside of the fixed rod (2) through a bearing at intervals along the vertical direction. The multiple bearing disks (4) and the edges between the bottom bearing disk (4) and the rotating disk (3) are fixedly connected by four connecting support rods (5) arranged in a ring array with the fixed rod (2) as the center. A drive gear (6) is fixedly sleeved on the outside of the fixed rod (2) corresponding to the bottom of each bearing plate (4). Multiple transmission gears (7) are rotatably installed on the bottom of the bearing plate (4) in a circular array centered on the fixed rod (2). A driven gear (8) is rotatably installed on the bottom of the bearing plate (4) in a number equal to the number of transmission gears (7) and corresponding to each other. The two sides of the transmission gear (7) are respectively meshed with the drive gear (6) and the corresponding driven gear (8). The driven gear (8) is detachably mounted with a hook (9) at the bottom center, and the top of the bearing plate (4) is equipped with multiple sets of clamping mechanisms arranged in a ring array with the fixed rod (2) as the center.

2. The workpiece holder for vacuum coating according to claim 1, characterized in that, The clamping mechanism includes multiple brackets (10) arranged in a circular array around the fixed rod (2) and fixed to the top surface of the bearing plate (4). The brackets (10) are C-shaped frame structures. The shaft of the driven gear (8) passes through the bearing plate (4) and the bottom end of the bracket (10) in sequence and is fixedly connected to the lower clamp (11). A guide rod (12) is vertically fixedly installed on the inner side of the bracket (10). A horizontally set movable plate (13) is slidably connected to the outer side of the guide rod (12). An upper clamp (15) is rotatably installed at the bottom end of the movable plate (13), and the upper clamp (15) and the lower clamp (11) are arranged vertically and vertically respectively. The top of the bracket (10) is threaded with an adjusting screw (14), and the bottom of the adjusting screw (14) is rotatably connected to the movable plate (13).

3. The workpiece holder for vacuum coating according to claim 2, characterized in that, The driven gear (8) has a positioning post (16) fixedly connected to the top of its shaft, and the positioning post (16) is located below the inner side of the bracket (10). The bottom end of the lower clamp (11) is sleeved on the outside of the positioning post (16). At least two fastening screws are installed through the outer circumference of the lower clamp (11) and evenly distributed along the circumference of the positioning post (16). The lower clamp (11) and the positioning post (16) are fixedly connected by the fastening screws. The bottom end of the movable plate (13) is rotatably mounted with a movable column (17), the top end of the upper clamp (15) is sleeved on the outside of the movable column (17), and at least two fastening screws are evenly distributed along the circumference of the movable column (17) through the outer circumference of the upper clamp (15), and the upper clamp (15) and the movable column (17) are fixedly connected by the fastening screws.

4. The workpiece holder for vacuum coating according to claim 1, characterized in that, The driven gear (8) is coaxially fixed to the middle of its bottom end with an internal threaded tube (18), and the hook (9) is integrally fixed to the top end with an external threaded post (19). The external threaded post (19) is threadedly connected to the internal threaded tube (18).

5. A workpiece holder for vacuum coating according to claim 1, characterized in that, The base (1) has an installation groove at the top center, and a positioning bearing (20) is installed at the bottom of the inner side of the installation groove. A gear ring (21) is fixedly connected to the top of the positioning bearing (20). The gear ring (21) is meshed with a drive gear (22) on the outside. The shaft at the bottom of the drive gear (22) extends through to the bottom of the base (1) and is used to fix the output shaft of the external geared motor. A transmission ring (23) is coaxially fixed to the middle of the bottom end of the rotating disk (3). The transmission ring (23) has evenly spaced tooth grooves on its outer bottom end. An internal tooth ring (24) is integrally fixed to the top of the gear ring (21). The bottom end of the transmission ring (23) is inserted into the inner side of the internal tooth ring (24), and the tooth grooves of the transmission ring (23) are adapted to mesh with the teeth of the internal tooth ring (24).

6. A workpiece holder for vacuum coating according to claim 5, characterized in that, The bottom of the mounting groove is integrally provided with a convex ring (25) located inside the positioning bearing (20); both sides of the bottom of the outer wall of the fixing rod (2) are integrally fixed with limit blocks (26), and the inner side of the convex ring (25) is provided with a limit groove that is slidably adapted to the limit blocks (26) corresponding to the positions of the two limit blocks (26); After the bottom end of the fixed rod (2) passes through the inner side of the transmission ring (23) and the gear ring (21) in sequence, it is inserted into the inner side of the convex ring (25), and the limiting block (26) on the fixed rod (2) slides into the limiting groove of the convex ring (25) simultaneously.