RF generator (AST5513)
CN309240161SActive Publication Date: 2025-04-15SHANGHAI IAN AI SEMICON TECH CO LTD
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Patent Information
- Application Number
- CN202430508999.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-12
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2039-08-12
Smart Images
Figure 000001_ABST
Abstract
1. The name of the product of this design: radio frequency generator (AST5513). 2. Purpose of the product of this design: a core component used in semiconductor wafer manufacturing equipment, an instrument responsible for converting electrical energy into radio frequency energy. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: Stereoscopic diagram 1.
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