Particle information display area of the graphical user interface for displaying data in a wafer surface inspection device

Abstract

1. Name of the product of this design: Particle information display area of a graphical user interface for displaying data in a wafer surface inspection device. 2. Application of this design product: used in wafer surface inspection device. 3. The key design point of this design product lies in the graphical user interface. 4. The picture or photo that best illustrates the key points of the design: main view. 5. The wafer surface inspection device is of conventional design and other drawings are omitted. 6. Purpose of the graphical user interface: The graphical user interface as a whole is used to display data from an apparatus for inspecting and analyzing microparticles (fine particles) attached to the surface of a wafer. The portion for which protection is sought is used to display information such as the location of the microparticles detected through inspection and the cause of their generation. 7. Human-computer interaction method of the graphical user interface: In the graphical user interface, a diagram showing the positions of particles attached to the surface of the chip is arranged on the left side, and information related to the causes of the generation of the particles is arranged on the right side. When any particle is selected from the particles on the diagram, information related to the causes of the selected particle is displayed on the right side. 8. Other circumstances that require explanation: Protection is requested for part of the design of this design product. The part that is not requested for protection is indicated by dotted lines in the design picture.

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