Top plate assembly
CN309443497SActive Publication Date: 2025-08-15ADVANCED ULTRAVIOLET OPTOELECTRONICS CO LTD
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Patent Information
- Application Number
- CN202430793056.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-13
- Publication Date
- 2025-08-15
- Estimated Expiration
- 2039-12-13
Smart Images
Figure 000007_ABST
Abstract
1. The name of this design product: top plate assembly. 2. Purpose of the product of this design: In chemical vapor deposition equipment, it is a component used to homogenize the reaction gas. Through this component, the reaction gas is evenly sprayed onto the surface of the substrate, thereby enhancing the uniformity and stability of the flow field in the reaction chamber. 3. The key point of the design of this product lies in its shape. 4. The picture or photo that best illustrates the design points: Stereoscopic drawing 1.
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