Adsorption platform (for LDI lithography machines)

CN309937286SActive Publication Date: 2026-04-21DONGGUAN HECHUAN MASCH EQUIP TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
DONGGUAN HECHUAN MASCH EQUIP TECH CO LTD
Filing Date
2025-10-17
Publication Date
2026-04-21

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Abstract

1. Name of the product in this design: Adsorption Platform (for LDI lithography machine). 2. Application of this design: This design is used as an adsorption platform for an LDI lithography machine. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: 3D view 1.
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