ground ring
CN310024083SActive Publication Date: 2026-06-09ADVANCED MICRO FAB EQUIP INC CHINA
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- ADVANCED MICRO FAB EQUIP INC CHINA
- Filing Date
- 2025-08-07
- Publication Date
- 2026-06-09
Smart Images
Figure 000006_ABST
Abstract
1. The name of the design product: grounding ring. 2. The use of the design product: in the semiconductor processing chamber, the gas shower head is arranged around, and the grounding path is provided for the semiconductor processing chamber. 3. The design points of the design product: in shape. 4. The picture or photo that can best show the design points: perspective view 1. 5. The rear view, left view and right view are the same as the front view, and the rear view, left view and right view are omitted.
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