focusing ring

CN310024084SActive Publication Date: 2026-06-09ADVANCED MICRO FAB EQUIP INC CHINA

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
ADVANCED MICRO FAB EQUIP INC CHINA
Filing Date
2025-08-08
Publication Date
2026-06-09

Smart Images

  • Figure 000006_ABST
    Figure 000006_ABST
Patent Text Reader

Abstract

1. Name of the product in this design: Focusing Ring. 2. Purpose of this design: To be installed around a base within a semiconductor processing cavity to adjust the electric and temperature field distribution around the base. 3. The key design feature of this product is its shape. 4. The picture or photo that best illustrates the key design points: Design 1 3D diagram 1. 5. The rear view, left view, and right view of Design 1-2 are the same as the front view; therefore, the rear view, left view, and right view of Design 1-2 are omitted. 6. Design 1 is designated as the basic design.
Need to check novelty before this filing date? Find Prior Art