Semiconductor processing front-end-of-line

Abstract

1. Name of the designed product: semiconductor processing foreline. 2. Use of the designed product: the designed product is used as a semiconductor processing foreline and left branch, right branch, middle part of the foreline, for semiconductor processing equipment, and is configured to flow fluid therein from a processing chamber to an exhaust system. 3. Design points of the designed product: in the shape, pattern and combination thereof. 4. Picture or photo best indicating the design points: perspective view 1. 5. Other circumstances or explanations: the part shown by the dashed line does not constitute part of the designed product.

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