intake cylinder (one)

CN310024860SActive Publication Date: 2026-06-09GU RUI SEMICONDUCTOR EQUIPMENT (GUANGZHOU) CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
GU RUI SEMICONDUCTOR EQUIPMENT (GUANGZHOU) CO LTD
Filing Date
2025-11-07
Publication Date
2026-06-09

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Abstract

1. Name of the product in this design: Air Inlet (I). 2. Application of this design: It is used as a core component of the thermal field in silicon carbide epitaxial equipment, serving as heat insulation and air intake guidance. 3. The key design feature of this product is its shape. 4. The picture or photo that best illustrates the key design points: Design 1 3D diagram 1. 5. Design 1 is designated as the basic design.
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